Reflectors In Series Patents (Class 359/730)
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Patent number: 8289619Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface.Type: GrantFiled: June 6, 2011Date of Patent: October 16, 2012Assignee: Carl Zeiss SMT GmbHInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf M. Von Buenau, Hans-Juergen Mann, Alexander Epple
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Publication number: 20120224386Abstract: The instant invention teaches a compact collection lens with finite conjugates for use in coupling the collected energy from a broadband source into a multi-mode fiber. The lens is reflective in nature and provides finite conjugate imaging in one piece. The entrance and exit surfaces are made concentric with the object and image so that on-axis imaging is completely free of chromatic aberrations. The primary is nominally elliptical and is the only surface with optical power in the lens. The secondary is planar and serves to fold the progressing rays back in the original direction. In summary, the invention comprises a monolithic lens composed of four optical surfaces (two reflective and two transmissive) such that the primary and secondary mirrors are annular and the entrance and exit surfaces are predominantly spherical with their centers located at the front and back focal points.Type: ApplicationFiled: March 4, 2011Publication date: September 6, 2012Inventor: Frank DeWitt
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Patent number: 8208199Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y?, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y?·NA2) and wherein the condition COMP1<10 holds.Type: GrantFiled: March 23, 2009Date of Patent: June 26, 2012Assignee: Carl Zeiss SMT GmbHInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple, Susanne Beder, Wolfgang Singer
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Patent number: 8208198Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y?, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y?·NA2) and wherein the condition COMP1<10 holds.Type: GrantFiled: January 16, 2007Date of Patent: June 26, 2012Assignee: Carl Zeiss SMT GmbHInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple, Susanne Beder, Wolfgang Singer
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Patent number: 8199400Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y?, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y?·NA2) and wherein the condition COMP1<10 holds.Type: GrantFiled: September 16, 2009Date of Patent: June 12, 2012Assignee: Carl Zeiss SMT GmbHInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple, Susanne Beder, Wolfgang Singer
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Patent number: 8139294Abstract: Reflectors having concave reflecting surfaces (e.g., parabolic reflectors) and electronically controlled beam steering elements are used for rapid, low-diversion, wide-angle and precision steering of optical beams, including laser beams.Type: GrantFiled: June 29, 2010Date of Patent: March 20, 2012Assignee: D & S Consulting, Inc.Inventors: Yei Wo, Steven A. De Chiaro
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Patent number: 8134780Abstract: A prism includes a light incident portion that has first and second convex portions, the first and second convex portions each are a convex portion that refracts rays of light incident to a prism body and reduces a spread angle after incidence to the prism body via the convex portion to be smaller than that before the incidence, the spread angle is an angle between a given two of the rays, a first reflecting surface, provided on the prism body, that can reflect a first ray of light that has entered the prism body via the first convex portion, a first emitting portion, provided on the prism body, that emits, to the outside, the first ray reflected by the first reflecting surface, and a second emitting portion that emits, to the outside, a second ray of light that has entered the prism body via the second convex portion.Type: GrantFiled: March 23, 2010Date of Patent: March 13, 2012Assignee: Brother Kogyo Kabushiki KaishaInventors: Hiroyuki Ominato, Takeshi Kitakata, Shunsuke Ichizawa
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Publication number: 20120050891Abstract: An objective is described consisting of a monolithic body of a material at least partly transparent for a part of an electromagnetic spectrum, and whose surfaces include a first optical refractive functional area serving as entrance area through which electromagnetic radiation can enter the objective, a second optical reflective functional area serving as a first mirror, a third optical reflective functional area serving as a second mirror, a fourth optical reflective functional area serving as a third mirror, a fifth optical reflective functional area serving as a fourth mirror, and a sixth optical refractive functional area serving as an exit area through which electromagnetic radiation can exit the objective, wherein the first to sixth optical functional areas are implemented such that a center shading-free, folded optical path extends from the entrance area through the monolithic body via first to fourth mirrors to the exit area, wherein no intermediate image level is located in the same between the entraType: ApplicationFiled: August 30, 2011Publication date: March 1, 2012Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Kristof SEIDL, Jens KNOBBE
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Patent number: 8113667Abstract: A projection optical system satisfies a conditional formula: 0.01<{(tan ?f1?tan ?f2)?(tan ?n1?tan ?n2)}·(?2/?1)<0.Type: GrantFiled: February 25, 2008Date of Patent: February 14, 2012Assignee: Konica Minolta Opto, Inc.Inventors: Keiko Yamada, Kohtaro Hayashi, Soh Ohzawa, Masayuki Imaoka
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Patent number: 8107147Abstract: A scanning beam projection system includes a two-mirror scanning system. One mirror scans in one direction, and a second mirror scans in a second direction. A fast scan mirror receives a modulated light beam from a fold mirror and directs the modulated light beam to a slow can mirror. The fold mirror may be formed on an output optic or may be formed on a common substrate with the slow scan mirror.Type: GrantFiled: March 27, 2009Date of Patent: January 31, 2012Assignee: Microvision, Inc.Inventors: Joshua M. Hudman, Wyatt O. Davis, Dean R. Brown
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Patent number: 8087789Abstract: A projection optical system includes a first refracting optical system having a plurality of lenses, a first reflecting optical system, and a second reflecting optical system. The first reflecting optical system is disposed on a side of a projection port with respect to an optical axis of the first refracting optical system, and has a positive optical power to reflect light incident through the first refracting optical system in a direction opposite to the side of the projection port. The second reflecting optical system is operable to reflect the light reflected on the first reflecting optical system toward the projection port.Type: GrantFiled: December 9, 2008Date of Patent: January 3, 2012Assignees: Sanyo Electric Co., Ltd., Ricoh Optical Industries Co., Ltd.Inventors: Ryuhei Amano, Takashi Ikeda, Shinichi Okuno, Osamu Nagase, Yoshitsugu Kohno
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Publication number: 20110304926Abstract: A projection objective has an object surface and an image surface. The projection objective includes a plurality of optical elements arranged along an optical axis and configured so that during operation the projection objective images a pattern arranged in the object surface onto the image surface. The optical elements include a concave mirror a first deflecting mirror and a second deflecting mirror. The first deflecting mirror is tilted relative to the optical axis by a first tilt angle, t1, about a first tilt axis so that during operation the first deflecting mirror deflects light at a wavelength ? from the object surface towards the concave mirror or deflects light at ? from the concave mirror towards the image surface. The second deflecting mirror is tilted relative to the optical axis by a second tilt angle, t2, about a second tilt axis.Type: ApplicationFiled: August 25, 2011Publication date: December 15, 2011Applicant: CARL ZEISS SMT GMBHInventors: Ralf Mueller, Aksel Goehnermeier, Wolfgang Singer
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Patent number: 8042948Abstract: The subject matter disclosed herein relates to systems and methods for providing image projection and entertainment.Type: GrantFiled: September 18, 2008Date of Patent: October 25, 2011Assignee: Disney Enterprises, Inc.Inventors: Gary Powell, Sam Ingraldi
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Publication number: 20110242528Abstract: An optical system may include an objective having at least four mirrors including an outermost mirror with aspect ratio <20:1 and focusing optics including a refractive optical element. The objective provides imaging at numerical aperture >0.7, central obscuration <35% in pupil. An objective may have two or more mirrors, one with a refractive module that seals off an outermost mirror's central opening. A broad band imaging system may include one objective and two or more imaging paths that provide imaging at numerical aperture >0.7 and field of view >0.8 mm. An optical imaging system may comprise an objective and two or more imaging paths. The imaging paths may provide two or more simultaneous broadband images of a sample in two or more modes. The modes may have different illumination and/or collection pupil apertures or different pixel sizes at the sample.Type: ApplicationFiled: March 30, 2010Publication date: October 6, 2011Applicant: KLA-Tencor CorporationInventors: Shiow-Hwei Hwang, Gregory L. Kirk, Hwan J. Jeong, David Shafer, Russell Hudyma
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Patent number: 8004775Abstract: Reflectors having concave reflecting surfaces (e.g., parabolic reflectors) and electronically controlled beam steering elements are used for rapid, low-diversion, wide angle, and precision steering of optical beams, including laser beams.Type: GrantFiled: June 29, 2010Date of Patent: August 23, 2011Assignee: D&S Consultants, Inc.Inventors: Yei Wo, Steven A. De Chiaro
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Publication number: 20110176228Abstract: Reflectors having concave reflecting surfaces (e.g., parabolic reflectors) and electronically controlled beam steering elements are used for rapid, low-diversion, wide angle, and precision steering of optical beams, including laser beams.Type: ApplicationFiled: June 29, 2010Publication date: July 21, 2011Applicant: D & S CONSULTANTS, INC.Inventors: Yei Wo, Stephen DeChiaro
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Publication number: 20110139242Abstract: Light condensing lens, module, and photoelectric transducing apparatus are disclosed. The lens has a light receiving surface, a bottom surface, and two side surfaces. The side surfaces are obliquely connected with the light receiving surface and the bottom surface. By designing the radian of the light receiving surface, the light streams can be condensed to a predetermined region no matter where the light source is. Additionally, an auxiliary light module is provided for reflecting the light streams to the predetermined region, in order to increase the photoelectric transducing efficiency.Type: ApplicationFiled: May 14, 2010Publication date: June 16, 2011Inventor: Yun-Ning Shih
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Patent number: 7961407Abstract: Reflectors having concave reflecting surfaces (e.g., parabolic reflectors) and electronically controlled beam steering elements are used for rapid, low-diversion, wide-angle, and precision steering of optical beams, including laser beams.Type: GrantFiled: June 9, 2008Date of Patent: June 14, 2011Assignee: D & S Consultants, Inc.Inventors: Yei Wo, Stephen A. DeChiaro
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Patent number: 7922341Abstract: In a projection optical system for use in an image projection apparatus illuminating an image display panel forming an image in accordance with a modulating signal with illumination light from a light source, the projection optical system includes first and second optical systems arranged along an optical path defining an upstream-downstream direction in the order described from upstream to downstream on the downstream side of the image display panel. The first optical system includes at least one dioptric system and has positive power. The second optical system includes at least one reflecting surface having power and has positive power. The image formed by the image display panel is formed as an intermediate image in the optical path, and the intermediate image is magnified and projected.Type: GrantFiled: October 20, 2009Date of Patent: April 12, 2011Assignee: Ricoh Company, Ltd.Inventors: Atsushi Takaura, Kazuhiro Fujita, Nobuo Sakuma
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Publication number: 20110074917Abstract: A panoramic imaging system includes a panoramic imaging lens, a relay lens, an imaging device, and a display device. The panoramic imaging lens includes an annular incident surface and a bottom surface adjacent to the annular incident surface. The bottom surface includes an annular reflective portion substantially opposite to the annular incident surface. An image light incident through the annular incident surface can be total reflected by the annular reflective portion.Type: ApplicationFiled: March 25, 2010Publication date: March 31, 2011Applicant: HON HAI PRECISION INDUSTRY CO., LTD.Inventors: HSIN-TSUNG YEH, MEI-CHUN LIN, KUAN-TING CHEN, KUANG-WEI LIN, WEI-HSIU CHANG, CHUN-HSIANG HUANG
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Publication number: 20110007407Abstract: Reflectors having concave reflecting surfaces (e.g., parabolic reflectors) and electronically controlled beam steering elements are used for rapid, low-diversion, wide-angle and precision steering of optical beams, including laser beams.Type: ApplicationFiled: June 29, 2010Publication date: January 13, 2011Applicant: D & S CONSULTANTS, INC.Inventors: Yei Wo, Steve DeChiaro
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Patent number: 7869122Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface.Type: GrantFiled: April 9, 2008Date of Patent: January 11, 2011Assignee: Carl Zeiss SMT AGInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple
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Patent number: 7859748Abstract: A photolithographic reduction projection catadioptric objective includes a first optical group having an even number of at least four mirrors and having a positive overall magnifying power, and a second substantially refractive optical group more image forward than the first optical group having a number of lenses. The second optical group has a negative overall magnifying power for providing image reduction. The first optical group provides compensative aberrative correction for the second optical group. The objective forms an image with a numerical aperture of at least substantially 0.65, and preferably greater than 0.70 or still more preferably greater than 0.75.Type: GrantFiled: March 14, 2007Date of Patent: December 28, 2010Assignee: Carl Zeiss SMT GmbHInventors: David R. Shafer, Russell Hudyma, Wilhelm Ulrich
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Publication number: 20100265572Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y?, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y?·NA2) and wherein the condition COMP1<10 holds.Type: ApplicationFiled: June 16, 2010Publication date: October 21, 2010Applicant: CARL ZEISS SMT AGInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple, Susanne Beder, Wolfgang Singer
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Publication number: 20100253999Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface.Type: ApplicationFiled: June 17, 2010Publication date: October 7, 2010Applicant: CARL ZEISS SMT AGInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple
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Publication number: 20100245784Abstract: A projection type image display apparatus includes: a light source; an illumination optical system that uniformly illuminates beams, which are emitted from the light source, on a surface of an image modulation element as a primary image plane; and a projection optical system that projects image information of the primary image plane modulated by the image modulation element on a screen as a secondary image plane in an enlarged manner. The projection optical system includes a first optical system having a positive refractive power and including a plurality of transmissive surfaces, and a second optical system having a positive refractive power and including a concave reflective surface. The first optical system has a first reflective surface disposed between any surfaces of the plurality of transmissive surfaces, and a second reflective surface disposed between the first optical system and second optical system.Type: ApplicationFiled: March 18, 2010Publication date: September 30, 2010Applicant: Sony CorporationInventor: Jun Nishikawa
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Publication number: 20100238568Abstract: The invention relates to an optical system which is adapted to form an image having a full 360° (panoramic)-direction angle of view on an image plane or project an image located on an image plane in a full 360° (panoramic)-direction angle of view, and which is of small-format size and has reduced light flare and high resolving power. The optical system comprises a front unit (10) having at least two reflecting surfaces (11, 12), each rotationally symmetric about a center axis (1), and a rear unit (20) that is rotationally symmetric about the center axis and has positive power. The first reflecting surface (11) is located opposite to an entrance pupil (6Y), and the second reflecting surface (12) is located on the same side as the first reflecting surface (11). The entrance pupil (6Y) in a section including the center axis is located between the outer periphery of the first reflecting surface (11) and the outer periphery of the second reflecting surface (12).Type: ApplicationFiled: May 15, 2007Publication date: September 23, 2010Applicant: OLYMPUS CORPORATIONInventors: Takayoshi Togino, Shin Nakamura
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Publication number: 20100103535Abstract: A device, system and method integrating forward and panoramic fields is disclosed, comprising: a primary reflector, comprising a convex surface in relation to the forward field, reflective on at least part of the convex surface; a secondary reflector, forward of the primary reflector relative to the forward field, reflective on at least part a surface thereof facing rearward toward the primary reflector; a primary reflector hole in the primary reflector, substantially centered about an optical axis of the apparatus; and a secondary reflector hole in the secondary reflector, substantially centered about the optical axis.Type: ApplicationFiled: January 4, 2010Publication date: April 29, 2010Applicant: INTERSCIENCE, INC.Inventors: Michelle D. Simkulet, Jiayin Ma, Jason E. Smith
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Publication number: 20100089436Abstract: Described is a light chamber for amplifying solar radiation for purposes of generating electricity using photovoltaic panels. The light chamber includes a housing; a photovoltaic panel disposed within the housing; a dome lens affixed to the upper end of the housing; a fresnel lens disposed between the dome lens and the photovoltaic panel; a reflector disposed around the inner surface of the housing; and another reflector disposed at or near the lower end of the housing.Type: ApplicationFiled: October 6, 2009Publication date: April 15, 2010Inventor: George M. Watters
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Patent number: 7679821Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface.Type: GrantFiled: August 1, 2008Date of Patent: March 16, 2010Assignee: Carl Zeiss SMT AGInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple
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Patent number: 7672047Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface.Type: GrantFiled: April 9, 2008Date of Patent: March 2, 2010Assignee: Carl Zeiss SMT AGInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple
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Publication number: 20090273850Abstract: Reflectors having concave reflecting surfaces (e.g., parabolic reflectors) and electronically controlled beam steering elements are used for rapid, low-diversion, wide-angle, and precision steering of optical beams, including laser beams.Type: ApplicationFiled: June 9, 2008Publication date: November 5, 2009Applicant: D&S CONSULTANTS, INC.Inventors: Yei Wo, Steve DeChiaro
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Publication number: 20090231555Abstract: In a projection optical system comprising: two lens groups, and a curved plane mirror, wherein the projection optical system including two story structure, and having bend means for bending at least two times the light incident from an electro-optic modulator.Type: ApplicationFiled: November 18, 2008Publication date: September 17, 2009Applicant: SEIKO EPSON CORPORATIONInventors: Satoru NAGAREKAWA, Eiji MORIKUNI, Nobutaka MINEFUJI, Masayuki OKOSHI
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Publication number: 20090153809Abstract: A projection optical system includes a first refracting optical system having a plurality of lenses, a first reflecting optical system, and a second reflecting optical system. The first reflecting optical system is disposed on a side of a projection port with respect to an optical axis of the first refracting optical system, and has a positive optical power to reflect light incident through the first refracting optical system in a direction opposite to the side of the projection port. The second reflecting optical system is operable to reflect the light reflected on the first reflecting optical system toward the projection port.Type: ApplicationFiled: December 9, 2008Publication date: June 18, 2009Applicants: SANYO ELECTRIC CO., LTD., RICOH OPTICAL INDUSTRIES CO., LTD.Inventors: Ryuhei AMANO, Takashi Ikeda, Shinichi Okuno, Osamu Nagase, Yoshitsugu Kohno
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Patent number: 7532414Abstract: A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.Type: GrantFiled: August 2, 2007Date of Patent: May 12, 2009Assignee: Nova Measuring Instruments, Ltd.Inventors: David Scheiner, Michael Winik, Yakov Lyubchik
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Patent number: 7525740Abstract: The display optical system includes first to third surfaces each having at least a reflection function, and a fourth surface having a reflection function and disposed outside an inside area surrounded by the first to third surfaces. The light from an original image passes through the inside area and is reflected by the fourth surface to return into the inside area. The light that has returned into the inside area is reflected by the first surface and is reflected by the second surface toward the first surface to impinge again thereon. The light impinging again on the first surface is re-reflected thereby such that a central-viewing-angle principal ray of the light proceeds in a direction opposite to a direction in which that principal ray has previously reflected by the first surface. The light re-reflected by the first surface is reflected by the third surface toward an exit pupil.Type: GrantFiled: July 2, 2008Date of Patent: April 28, 2009Assignee: Canon Kabushiki KaishaInventor: Kazutaka Inoguchi
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Publication number: 20090091728Abstract: A catadioptric projection objective has a plurality of optical elements arranged along an optical axis to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA?1.35 with electromagnetic radiation defining an operating wavelength ?. The optical elements form a first objective part configured to image the pattern from the object surface into a first intermediate image, a second objective part configured to image the first intermediate image into a second intermediate image, the second objective part including a concave mirror having a reflective mirror surface positioned at or close to a pupil surface; and a third objective part configured to image the second intermediate image into the image surface.Type: ApplicationFiled: September 28, 2007Publication date: April 9, 2009Applicant: CARL ZEISS SMT AGInventor: Alexander EPPLE
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Publication number: 20090086338Abstract: A catadioptric projection objective with telecentric image space has a first objective part configured to image the pattern from the object surface into a first intermediate image, and having a first pupil surface, a second objective part configured to image the first intermediate image into a second intermediate image, and having a second pupil surface optically conjugate to the first pupil surface, the second objective part including a concave mirror having a reflective mirror surface positioned at or close to the second pupil surface, and a third objective part configured to image the second intermediate image into the image surface, and having a third pupil surface optically conjugate to the first and second pupil surface.Type: ApplicationFiled: September 28, 2007Publication date: April 2, 2009Applicant: Carl Zeiss SMT AGInventor: Alexander EPPLE
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Patent number: 7509046Abstract: The invention concerns an optical system adapted to split an optical path from a taking optical system into a finder optical system, which has a camera-shake correction function best suited for the finder optical system, and so on. This optical system comprises a taking optical system and a finder optical system. The taking optical system comprises an optical path splitter means operable to split an optical path into the finder optical system, and the finder optical system includes a relay optical system RLS for re-forming a subject image once. Anti-shake is implemented by shifting an optical subsystem RL that forms a part of the finder optical system in a plane vertical to an optical axis.Type: GrantFiled: January 3, 2006Date of Patent: March 24, 2009Assignee: Olympus Imaging Corp.Inventors: Akiyoshi Tochigi, Teruhisa Mitsuo, Keiichi Kuba, Hisashi Goto
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Publication number: 20090034085Abstract: A packaged electro-optic integrated circuit and a multi-fiber connector including an integrated circuit substrate, at least one optical signal providing element, at least one optical signal sensor, sensing at least one optical signal from the at least one optical signal providing element and at least one discrete reflecting optical element, mounted onto the integrated circuit substrate, cooperating with the at least one optical signal providing element and being operative to direct light from the at least one optical signal providing element.Type: ApplicationFiled: October 9, 2008Publication date: February 5, 2009Applicant: XLoom Communications, Ltd.Inventors: Avner Badehi, Sylvie Rockman
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Publication number: 20090021845Abstract: A catadioptric optical system having a high numerical aperture operates in a wide spectral range. The catadioptric optical system includes a correcting plate, a first reflective surface and a second reflective surface. The correcting plate conditions electromagnetic radiation to correct at least one aberration. The first reflective surface is positioned to reflect the electromagnetic radiation conditioned by the correcting plate. The second reflective surface is positioned to focus the electromagnetic radiation reflected by the first reflective surface onto a target portion of a substrate. The electromagnetic radiation reflected by the first reflective surface and focused by the second reflective surface is not refracted by a refractive element, thereby enabling the catadioptric optical system to operate in a broad spectral range.Type: ApplicationFiled: July 18, 2007Publication date: January 22, 2009Applicant: ASML Holding N.V.Inventors: Yevgeniy Konstantinovich Shmarev, Stanislav Y. Smirnov, Irina I. Pozhinskaya
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Publication number: 20080304036Abstract: A catadioptric imaging optical system with a high numerical aperture and including an effective imaging region shaped optimally for use in a batch type exposure apparatus and having an imaging magnification with a small absolute value. The catadioptric imaging optical system includes a dioptric first imaging system, which forms a first intermediate image based on light from the first plane, a second imaging system, which forms a second intermediate image based on light from the first intermediate image, a third dioptric imaging system, which forms a reduced image on the second plane based on light from the second intermediate image, and a deflecting mirror arranged in an optical path extending from the first imaging system to the second imaging system and an optical path extending from the second imaging system to the third imaging system. The first imaging system and the second imaging system provide a composite imaging magnification having an absolute value ?12 of less than 0.Type: ApplicationFiled: August 6, 2008Publication date: December 11, 2008Inventor: Yasuhiro OMURA
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Patent number: 7446952Abstract: A catadioptric projection objective for imaging an off-axis effective object field arranged in an object surface of the projection objective onto an off-axis effective image field arranged in an image surface of the projection objective has: an optical axis; an effective object field situated entirely outside the optical axis and having a length A in a first direction and a width B in a second direction perpendicular to the first direction such that a circular area of minimum size enclosing the effective object field defines a radius REOF of the effective object field according to: R EOF = ( A / 2 ) 2 + ( B / 2 ) 2 ; and a circular design object field centered around the optical axis having a design object field radius RDOF, where the projection objective is essentially corrected with respect to image aberrations in zones having radial coordinates smaller than RDOF and wherein the projection objective is not fully corrected in zones having radial coordinates larger than RDOF.Type: GrantFiled: April 7, 2005Date of Patent: November 4, 2008Assignee: Carl Zeiss SMT AGInventor: Alexander Epple
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Publication number: 20080247061Abstract: A device, system and method integrating forward and panoramic fields is disclosed, comprising: a primary reflector, comprising a convex surface in relation to the forward field, reflective on at least part of the convex surface; a secondary reflector, forward of the primary reflector relative to the forward field, reflective on at least part a surface thereof facing rearward toward the primary reflector; a primary reflector hole in the primary reflector, substantially centered about an optical axis of the apparatus; and a secondary reflector hole in the secondary reflector, substantially centered about the optical axis.Type: ApplicationFiled: February 3, 2005Publication date: October 9, 2008Inventors: Michelle D. Simkulet, Jiayin Ma, Jason E. Smith
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Patent number: 7397615Abstract: An eye mirror in which a first defining ray 5 is reflected from a further defined mirror 2 and intersects a fixed defined unit 75 at a respective further point 8 within a circular cone 91 defined by the angular input aperture at that point. A second defining ray 6 is reflected from said further defined mirror 2 and intersects the fixed defined unit 75 at a respective further point 10 within a circular cone 92 defined by the angular input aperture at that point. There are two such defining rays for every point on the further defined mirror. The further defined mirror 2 lies outside the aperture described by the leading edge 147 of the first stage defining mirror 30 and is axially symmetric about the axis of symmetry 18.Type: GrantFiled: May 3, 2006Date of Patent: July 8, 2008Inventor: John Ernest Anderson
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Publication number: 20080158665Abstract: In general, in one aspect, the invention features a catadioptric projection objective having a plurality of optical elements arranged along an optical axis to image a pattern arranged in an object surface of the projection objective onto an image surface of the projection objective. The optical elements include a concave mirror; a first deflecting mirror tilted relative to the optical axis by a first tilt angle t1 about a first tilt axis to deflect light from the object surface towards the concave mirror or to deflect light from the concave mirror towards the image surface; and a second deflecting mirror tilted relative to the optical axis by a second tilt angle t2 about a second tilt axis. The first deflecting mirror has a first reflective coating with reflectivity Rs1(?1) for s-polarized light and a reflectivity Rp1(?1) for p-polarized light incident on the first deflecting mirror at first angles of incidence ?1 from a first range of angles of incidence according to (t1???1)??1?(t1+??1).Type: ApplicationFiled: December 26, 2007Publication date: July 3, 2008Applicant: CARL ZEISS SMT AGInventors: Ralf Mueller, Aksel Goehnermeier, Wolfgang Singer
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Patent number: 7391580Abstract: A mono-bloc catadioptric imaging lens comprising a solid body and a single-focal Maksutov type construction characterized by two refractive surfaces and two reflective surfaces wherein all surfaces are surfaces of revolution and wherein at least one surface is aspheric.Type: GrantFiled: October 10, 2006Date of Patent: June 24, 2008Inventor: Zeev Maresse
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Patent number: 7385756Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface.Type: GrantFiled: January 14, 2005Date of Patent: June 10, 2008Assignee: Carl Zeiss SMT AGInventors: David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple
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Publication number: 20080106902Abstract: A display includes a panel and a backlight module. The backlight module includes a reflective board, a shell, at least two lenses and a light source. The lenses are installed on the reflective board. The reflective board is installed on the shell. The light source is installed in the shell and the light from the light source passes through the lenses. Each lens includes a bottom portion on the reflective board and an extending portion protruding slantwise from the bottom portion. The extending portion includes a reflective surface opposite to the reflective board approximately. A light from the light source is reflected onto the reflective board via the reflective surface, and then reflected onto the panel via the reflective board.Type: ApplicationFiled: August 28, 2007Publication date: May 8, 2008Applicant: AU OPTRONICS CORP.Inventors: Ci-Guang Peng, Shen-Hong Chou
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Patent number: 7348575Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.Type: GrantFiled: November 4, 2005Date of Patent: March 25, 2008Assignee: Nikon CorporationInventor: Yasuhiro Omura