Abstract: An optical component mount with beam deviation monitoring and beam guiding system using such optical component mounts. The optical component mount has a location for mounting an optical element thereon for operating on the beam and at least one sensor attached to the optical mount at a predetermined position to at least one mode of the optical component mount. The predetermined position is selected depending on the state of the optical component mount. The state can be, e.g., a vibrational state or a thermal expansion state. The predetermined position is chosen near or at an anti-node of at least one mode contributing to the state. The state of the optical mount is determined based on the signals obtained from the at least one sensor, which can be an accelerometer in the case of monitoring a vibrational state or a temperature sensor in the case of monitoring a thermal expansion state.

Abstract: An image forming apparatus comprising a lens mounting device in an optical housing. The lens mounting device can prevent the lens mounted on a lens bonding member from being affected by fluctuations in an ambient temperature around the optical housing. The lens is fixed on the lens bonding member through an adhesive layer. The adhesive layer has a thickness of 0.2 mm or above.

Abstract: A lens adapted for securement to a holder, for transmission of light, comprising a lens body, defining an axis, threading on the lens body extending about said axis, for reception in threading associated with the holder.

Abstract: A position adjusting means is provided at an outer periphery of an objective lens opposite to an observation sample and the observation sample is moved by the position adjusting means in an optical axis direction of the objective lens to set a focal point of the objective lens to the observation sample.

Abstract: The invention relates to an optical lens holder comprising a supporting means and a first and a second arm defining a lens holder general plane, first and second arms being relatively movable with regards to each other and each arm having spaced apart first and second end portions and an intermediate portion, the arms being mounted on the supporting means through their first end portions and the second end portions of each arm comprising an optical lens accommodating means facing each other, whereby an optical lens can be maintained within the accommodating means of the first and second arms with its optical axis orthogonal to the general plane of the lens holder through at least one, preferably one or two contact points between the lens periphery and each of the first and second lens accommodating means, wherein at least the second end portion of each arm comprises a material having a dielectric constant at 1 MHz equal to or higher than the dielectric constant of the optical lens material.

Abstract: An optical data link comprises a housing, a circuit board, a semiconductor electrical device, an electrically insulating sealing resin, an optical subassembly, a first heat spreader, and a second heat spreader. The circuit board is provided in the housing. The semiconductor electrical device is provided on the circuit board. The electrically insulating sealing resin covers the semiconductor electrical device. The optical subassembly is supported by the housing. The optical subassembly includes a semiconductor optical device. The semiconductor optical device is connected to the semiconductor electrical device through the circuit board. The first heat spreader is provided between the housing and the semiconductor electrical device and is in contact with the housing. The second heat spreader is provided between the housing and the optical subassembly and is in contact with the housing and the optical subassembly. The second heat spreader is located apart from the first heat spreader.

Abstract: Distance holder for lenses, which in terms of shape or material structure is configured in such a way that it exerts a slight notching effect on lenses on contact surfaces between a distance holder and a lens, so that the lens surface is less easily damaged.

Abstract: A lens assembly adapted to be connected to a CRT and affixed to mounting structure in a projection television cabinet. The lens assembly includes a tubular lens mount having a longitudinal axis and at least a first optical lens element mounted along the longitudinal axis. A tubular focus mount extends along the longitudinal axis and fastening and locking structure connects the lens mount to the focus mount after a focus mount position is obtained. A CRT coupler is formed integrally with the focus mount and includes structure for securing a CRT and for securing the coupler to the mounting structure within the television cabinet. A second optical lens element is mounted to the CRT coupler. A flexible bladder may be used to contain coolant fluid between the CRT and the coupler.

Abstract: A passive focus device including a support rod, an optical assembly translatably mounted on the support rod, and a sealed drive assembly containing a substance that physically changes in response to a temperature change, wherein the drive assembly is configured to move the optical assembly along the support rod based on a physical change of the substance.

Abstract: According to the present invention, there is provided a method of designing a collimator array device which enables reduction of the insertion loss because of the variation of the optical length. When the beam waist is positioned at the intermediate position between the emitting side planar microlens and the receiving side planar microlens (d1=L/2), the distance d0 between the emitting side fiber array and the emitting side planar microlens can be used as the distance between the receiving side fiber array and the receiving side planar microlens, and thereby the design of the collimator array device can be simplified. The distance d0 for satisfying d1=L/2 is calculated and two values d0-2 and d0-4 are obtained. By selecting the smaller value d0-2, it is possible to reduce the insertion loss because of the shift at the time of coupling.

Abstract: A plastic lens is fixedly held in precise position a lens holder by cramming a deformable retaining ring between a front collar and a periphery of the plastic lens loosely put in an annular mounting space formed in the lens holder and crushing the front collar against the retaining ring so as thereby to rivet the plastic lens to the lens holder.

Abstract: An optical element is disclosed that includes a non-planar lens having a lens perimeter with an integral flange surrounding the lens perimeter. The flange has a first surface and a second surface opposing the first surface. An annular plastic opaque mask layer is fused to the flange first surface or the flange second surface and extending onto the non-planar lens.

Abstract: A cabinet provided with light input/output holes accommodates a VIPA optical element, a lens, a fixing material fixing the VIPA optical element. A temperature-controlled heater controls the temperature of and inside the cabinet. Both the light input and output holes of the cabinet are blocked by the fixing material and the lens, respectively, so that temperature inside the cabinet is not influenced by the outside air.

Abstract: A hot crimping structure for fixing at least one lens element to a lens frame made of synthetic resin, the lens element being accommodated in a lens holder opening of the lens frame, a portion of the lens frame being crimped by heat to serve as a crimped edge which lies on a surface of the lens element adjacent to a rim of the lens element. The lens frame includes an outward expansion surface which extends outwards from a close vicinity of the rim of the lens element. A hot crimping tool is brought into contact with the outward expansion surface to form a recess on the outward expansion surface by heat, to thereby produce the crimped edge by movement of melting synthetic resin which is melted due to the formation of the recess.

Abstract: A laser diode collimating system comprises a collimating lens for receiving a laser beam from a laser diode LD. First and second orthogonally arranged cylindrical lenses are provided through which the laser beam passes. The cylindrical lenses are positioned so as to have a substantially common focal plane and operate substantially independently on the divergence and/or convergence of the laser beam in its fast axis and slow axis directions respectively. A convex lens, through which the beam passes, has a focus lying in the said common focal plane.

Abstract: An apparatus or mounting an optical element in an optical system, in particular a mirror or a lens, in a projection exposure machine, in particular a projection lens in semiconductor lithography, is connected to an external base structure with the aid of at least three articulation sites that are arranged on the circumference of the optical element and at which a bearing device acts in each case, wherein the bearing device has at least one bending element, resembling a leaf spring, arranged tangentially to the optical element, and at least one bending element, resembling a leaf spring, arranged in the radial direction relative to the optical element.

Abstract: A system is provided for nulling out or eliminating alignment errors in an optical system by moving a lens to capture and center a collimated beam laterally-shifted by thermal excursions, thus to couteract the boresight error caused by the thermally-induced lateral shifting. As a result, alignment error the thermal coefficient of expansion characteristics of the optical elements and their mounting systems caused by lateral off-sets is corrected by moving a lens or lens system in response to thermal changes in a direction which moves the lens so that the collimated light impinging on the lens is made to come in on the optical axis of the lens.

Abstract: An optical module of the present invention can stabilize e.g. the temperature of a wavelength monitor portion so that the oscillating wavelength of a laser diode is stabilized. The laser diode and the wavelength monitor portion for monitoring the wavelength of the laser diode are included in a package, and are mounted onto a thermo module. The wavelength monitor portion comprise at least an optical filter positioned to receive and filter at least a component of the laser beam and a light receiving device to receive the filtered light through the optical filter and monitor a wavelength of the laser beam. A heat shield member for reducing heat transmission from the package to the wavelength monitor portion is arranged in at least one portion of a peripheral area of the wavelength monitor portion.

Abstract: A system for compensating for heating effects in a mirror. Different areas of the mirror are associated with buried temperature sensors. Each temperature sensor is monitored, and used to create a map of current temperatures. The map of current temperatures may be corrected according to baseline values, and then is used to compensate for temperature differences.

Abstract: An optical device has: a metal cooling device (500) disposed between a liquid crystal panel (441) and a light-incident side of a cross dichroic prism (443) and having a holding surface for holding polarization plates (521, 522) attached with a polarization films (521A and 522A) in a mutually spaced manner, the cooling device cooling the polarization films; a base (445) provided on the upper and lower sides of the cross dichroic prism (443) and having a cooling device attachment surface (449A) for the cooling device (500) to be attached; and a fixing member (600) provided on a light-incident side of the cross dichroic prism for locating and fixing the liquid crystal panel (441) on the light-incident side, the fixing member (600) being formed with a attachment surface (631) on which a pin (730) for mounting the liquid crystal panel (441) is formed.

Abstract: An opto-mechanical platform for supporting truncated optical elements having at least one substantially flat side surface is disclosed. In one particular exemplary embodiment, the opto-mechanical platform may be realized as an apparatus for supporting truncated optical elements having at least one substantially flat side surface. Such an apparatus may comprise a platform having a substantially flat surface area for supporting the substantially flat side surface of the truncated optical elements. Such an apparatus may also comprise at least one substantially vertical wall formed on at least a portion of the platform for providing mechanical rigidity to the platform.

Abstract: A temperature controlled optoelectronic device includes an optoelectronic transducer having an active area, an electronic cooling device, on which the optoelectronic transducer is mounted, and a temperature sensor installed in the electronic cooling device. The temperature sensor and the electronic cooling device control a temperature of the optoelectronic transducer. A surface of an electronic cooling device directly contacts a base of the optoelectronic transducer for efficient thermal coupling. When the temperature sensor for monitoring the temperature of the optoelectronic transducer is directly attached to a substrate of the electronic cooling device, e.g., to an inside surface of a plate on which the optoelectronic transducer is mounted, the temperature of the optoelectronic transducer can be accurately sensed and adjusted to a precise target temperature.

Abstract: A catadioptric objective is provided with a beam splitter surrounded at least partially by a mount, with a mirror, with a plurality of lenses and with a &lgr;/4 plate arranged between the mirror and the beam splitter.

Abstract: A retainer includes a plurality of support members for supporting an optical element, and a plurality of elastic members arranged between the plurality of support members, each elastic member applying an elastic force to the optical element in a direction perpendicular to a gravity direction.

Abstract: A Mach-Zehnder interferometer having two optical couplers interconnected by two optical fibers at least one of which is temperature insensitive. In use, temperature induced changes in the geometrical length and refractive index of the temperature insensitive fibers offset each other so that the optical path length of the fiber is unaffected by the temperature change. Where two temperature insensitive fibers are included these may be of the same or of different lengths. The interferometer may be used in a Dense Wavelength Division Multiplex system.

Abstract: An exposure apparatus to be used with an excimer laser as a light source includes an optical system disposed along a path of excimer laser light, a chamber for accommodating the optical system therein and having an inside space being able to be replaced by a predetermined gas, a gas circulation mechanism having a gas circulation path for connecting a gas discharging port for discharging a gas from the chamber and a gas supplying port for supplying a gas into the chamber, and a switching device for selectively using plural purifiers disposed in the gas circulation path.

Abstract: The present invention provides an optical module and a method for manufacturing the optical module, in which a V-shaped or trapezoidal groove having a first slope and a second slope facing to the first slope is formed at the surface of a silicon substrate by anisotropic etching, an adhesive is applied to a portion of at least the second slope in a region except the first slope of the groove, and lens is fixedly put in the groove.

Abstract: The illustrative embodiment of the present invention is an apparatus and method that is capable of non-contact cooling of a hot body by optically-enhanced radiation. An apparatus in accordance with the illustrative embodiment includes a cold body and an optical system. The optical system couples the cold body to a hot body for the transmission of infrared radiation. Once optically coupled, heat will flow, at an enhanced rate, from the hot body to the cold body, as dictated by thermodynamics, thereby cooling the hot body. In some embodiment, the temperature of the cold body is held substantially constant.

Abstract: An optical element holder for holding an optical element includes a holding element to hold the optical element or a holding part provided to the optical element unitedly, wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element.

Abstract: A mechanical device includes a female component having a right-circular cylindrical internal surface and a cylindrical axis, and a first helical recess in the internal surface of the female component. A male component having a right-circular cylindrical external surface is sized to be slidably received within the right-circular cylindrical internal surface of the female component and has a second helical recess in its external surface. The second helical recess has a helical pitch which is the same as that of the first helical recess, so that the second helical recess is in facing relationship along its length to the first helical recess when the male component is assembled to the female component. A retainer is received within the first helical recess and the facing second helical recess when the male component is assembled to the female component. The retainer has an organic plastic retainer outer surface, preferably a polytetrafluoroethylene retainer outer surface.

Abstract: Embodiments of the invention provide for an improved optical component mounting apparatus and method. In one embodiment, the invention provides an optical component mounting apparatus that provides for accurate mounting of an optical component without the use of epoxy or other affixing agents. The optical component mounting apparatus includes a body having a bore formed longitudinally therethrough between a first and second end. The body also includes an inner sidewall of the body disposed adjacent the first end that defines a first component holding region. The first component holding region is in an offset alignment with the bore, the inner wall is adapted to frictionally accept a first component therein and exert a biasing force thereon to maintain the first component in a desired optical alignment. In another embodiment, the body includes an outer sidewall disposed between the first and second ends, wherein the inner and outer sidewalls define a second component holding region therebetween.

Abstract: Heat of optical devices is transferred to a bottom surface portion 512B of an optical parts housing portion 512 of an optical parts casing 5A. A duct 6 is formed on the bottom surface portion 512B. A cooling air passing through a first passage 6A cools the bottom surface portion 512B, and then is supplied to a hole 515R to cool a liquid crystal panel 441R, etc. The cooling air passing through a second passage 6B of the duct 6 is introduced into holes 515B, 515G to cool the liquid crystal panels 441B, 441G. Accordingly, the optical parts casing projector capable of cooling sufficiently the optical modulator devices and other parts, e.g., the bottom surface portion, etc. of the optical parts casing.

Abstract: An improved optical system for scanning optical codes is disclosed. A laser beam produced thereby is a diverging, nearly diffraction free beam and may be used to produce an elongated scanning spot. A laser assembly which may be used to produce such beams and spots, combines various optical functions in structures which are relatively insensitive to temperature change.

Abstract: Modern optoelectronic components have very tight coupling tolerances. Small misalignments of a strong lens that occur during the alignment and bonding process seriously degrade optical coupling. A weak lens is actively mounted using a flexure to correct misalignments of the strong lens. Since the weak lens does not exert as much steering force on a beam for a similar movement as the strong lens, misalignments that may occur during weak lens positioning and bonding do not appreciably degrade coupling.

Abstract: Disclosed is a holding system and an exposure apparatus having the same, wherein deformation of an optical member resulting from its thermal expansion and causing degradation of imaging performance can be reduced to assure desired imaging performance. The holding system for holding an optical member includes a barrel for at least partially surrounding the optical member and/or a heat source, an average of radiation coefficient of an inside surface of the barrel is not less than 0.8.

Abstract: Apparatus and methods for reducing optical distortion in an optical system by thermal means are disclosed. The apparatus includes a heating/cooling system spaced apart from and in thermal communication with an internally reflecting surface of a refractive element in the optical system. The heating/cooling system is adapted to create a select temperature distribution in the refractive optical element near the internally reflecting surface to alter the refractive index and/or the surface profile in a manner that reduces residual distortion.

Abstract: An exposure apparatus illuminates a pattern on an original form, introduces light from the pattern to a plate, and exposes the plate. The exposure apparatus includes at least one optical element, and forcing member that applies a force to the at least one optical element in a non-contact manner.

Abstract: In a method for applying a scale (7) to a carrier (1,2), a material layer (11) is applied to the carrier in such a way that the change in length on account of temperature change of the material layer (11) corresponds at least approximately to changes in length of the carrier (1,2) on account of temperature change. The scale (7) is introduced into or applied to the material layer (11) with a measuring graduation (7a). The carrier may be an optical element, e.g. a lens (1) of an objective (5) for semiconductor lithography.

Abstract: A lens unit for a scanning device includes a frame having a hollow cylindrical shape, the frame being defined with a lens contact portion therein, a lens accommodated in the frame with contacting the lens contact portion defined in the frame, and a retainer accommodated in the frame to retain the lens in position, the retainer having a hollow cylindrical shape, one end side face of the retainer contacting a peripheral portion of the lens received by the frame, an other end portion of the retainer being secured to the frame so that the retainer presses the lens toward the lens contact portion of the frame to fix the lens to the frame.

Abstract: An optical unit (10) comprising a plurality of optical elements, a receiving structure (12) with a plurality of element supports (40, 41) for receiving the optical elements. The element supports (40, 41) are in the form of a plate or shell or tube, whose dimensions are greater than the dimensions of the optical elements to be received, and is connected to another element support. At least one element support (40, 41) comprises temperature elements (43-49) that can be heated and/or cooled. The optical unit (10) furthermore comprises a control unit for driving the temperature elements (43-49) in order to locally change the temperature of the at least one element support (40, 41) so as to influence in a controlled manner the shape of the at least one element support (40, 41).

Abstract: A heat sink assembly for a microscope including a baffle plate located proximate an air inlet of a microscope and a heat sink located proximate the baffle plate. The baffle plate is arranged to enable the passage of air through the air inlet while occluding the emanation of light from the microscope through the air inlet. The baffle plate and heat sink are arranged to induce airflow through the baffle plate, across the heat sink, and out an air outlet for the microscope.

Abstract: A composite optical component and its manufacturing method are disclosed. A holding member or an optical functional device is subjected to elastic deformation, with both of them fixed together, and the optical functional device is subjected to plastic deformation by heating to reduce stress between two components in such a way that the holding member and optical functional device will be slide-fitted with each other; sliding resistance between the optical functional device and enclosure per “b” in longitudinal direction of the optical component will be F≦a/b×S×E; or the optical functional device and holding member will be slide-fit by formation of one integral body in the mold, thereby preventing thermal distortion and distortion of the optical functional device due to recovery of elastic deformation of a reinforcing member, with the result that manufacturing costs can be reduced while a high degree of straightness and high surface precision are maintained.

Abstract: The invention relates to an optical bench that has a base plate and can be permanently connected to an associated component. A receiving element for other optical elements that is arranged in such a way in relation to the base plate with connecting elements that it is deformable in its entirety in relation to said base plate, is allocated to the same.

Abstract: An apparatus for immersion lithography that includes an imaging lens which has a front surface, a wafer that has a top surface to be exposed positioned spaced-apart and juxtaposed to the front surface of the imaging lens, and a fluid that has a refractive index between about 1.0 and about 2.0 filling a gap formed in-between the front surface of the imaging lens and the top surface of the wafer. A method for immersion lithography can be carried out by flowing a fluid through a gap formed in-between the front surface of an imaging lens and a top surface of a wafer. The flow rate and temperature of the fluid can be controlled while particulate contaminants are filtered out by a filtering device.

Abstract: In a temperature compensation apparatus for thermally loaded bodies made from materials of low specific thermal conductivity, a heat-distributing device having one or more heat-distributing bodies is adapted to surfaces of the thermally loaded body such that there remains between the thermally loaded body and the heat-distributing bodies a gap which is filled with a fluid for the purpose of the thermal coupling of thermally loaded bodies and heat-distributing bodies in conjunction with mechanical decoupling.

Abstract: A projection optical system forms an image of an object in a first plane onto a second plane. The projection optical system has an optical element group including at least one refractive member and plural reflective members, and a plurality of lens-barrel units holding the optical element group divided into a plurality of respective groupings. The reflective members are all held by a single lens-barrel unit of the plurality of lens-barrels units.

Abstract: A lithographic projection apparatus according to one embodiment of the invention includes a projection system having a plurality of optical elements or sensors mounted on a frame. The frame includes support portions made of a material (e.g. a glass ceramic) having a coefficient of thermal expansion of less than or approximately equal to 0.1×10−6 K−1.

Abstract: An opto-electronic module may be provided with an internal thermoelectric cooler. Components to be cooled may be positioned over the thermoelectric cooler. Other components may be positioned aside the cooled components but raised, using a riser, to position them away from the cooled components.

Abstract: A wavelength division multiplexer (WDM) including a support structure that is coupled to at least one optical component. A diffraction grating is optically coupled to at least one optical component coupled to the at least one optical component. A frame is coupled to the diffraction grating. Pins may be coupled between the support structure and the frame to substantially thermally isolate the support structure from the frame. The pins may be substantially geometrically equally spaced and have approximately the same exposed length extending from the lens barrel. The pins may have the same coefficient of thermal expansion as the support structure.

Abstract: A plate 2 with a photodiode PD is positioned with a slight interval with respect to a housing 1, a small amount of an ultraviolet curing adhesive 8a is applied to four portions each located between a corner of either side edge 2a of the plate 2 and the housing 1, the ultraviolet curing adhesive 8a is allowed to cure by application of ultraviolet rays thereto to temporarily fix the plate 2 to the housing 1, an appropriate amount of a thermosetting adhesive is applied to two portions each located between a central portion of either side edge 2a of the plate 2 and the housing 1, and the thermosetting adhesive 8b is allowed to cure by heating so as to finally fix the plate 2 to the housing 1.