Abstract: A device for optically imaging at least a part of an object, the device having an optical axis and including a two-dimensional first array of first microlenses, having a first side intended to face the object, and a second side, opposite the first side, a two-dimensional second array of second microlenses, each first microlens being aligned with a second microlens on an axis parallel to the optical axis, wherein each first microlens comprises a first catoptric system, and preferably a first catadioptric system.

Abstract: A freeform optical surface includes, in part, an off-axis optical surface and a departure optical module. The off-axis optical surface may be an off-axis conic optical surface. The departure optical module may be substantially perpendicular to the off-axis conic optical surface.

Abstract: A new projector design combines one spatial light modulator that affects only the phase of the illumination, and one spatial light modulator that only affects its amplitude (intensity). The phase-only modulator curves the wavefront of light and acts as a pre-modulator for a conventional amplitude modulator. This approach works with both white light and laser illumination, generating a coarse image representation efficiently, thus enabling, within a single image frame, significantly elevated highlights as well as darker black levels while reducing the overall light source power requirements.

Abstract: An implementation of an optical system for expanding the field of view can include a first optical element and a second optical element. The first optical element can include a first surface and a second surface. The first surface can be configured to reflect a first light beam incident on the first surface at a first incident angle greater than a first predetermined angle, and the second surface can be configured to reflect the reflected first light beam towards a location. The second optical element can include a third surface and a fourth surface. The third surface can be configured to reflect a second light beam incident on the third surface at a second incident angle greater than a second predetermined angle, and the fourth surface can be configured to reflect the reflected second light beam towards the location. Related apparatus, systems, techniques and articles are also described.

Abstract: A laser collimation- measuring system, including: a first laser source; a second laser source; a light combining device; a collimator; and a light divergence device. The first laser source and the second laser source emit a first laser and a second laser, respectively, to the light combining device. The first laser and the second laser are transmitted through the light combining device as a third laser and a fourth laser, respectively, and the third laser partially overlaps the fourth laser. The collimator is disposed in a light path of the third and fourth lasers and positioned between the light combining device and the laser divergence device. The laser collimation-measuring system enhances intensity of the laser collimation-measuring system.

Abstract: An all-reflective optical system is described including a concave primary mirror having a central aperture and a radius, the primary mirror having one of a parabolic, non-parabolic conical, or aspherical surface, a convex secondary mirror facing the primary mirror, the secondary mirror having an aspherical surface, where an optical axis extends from a vertex of the primary mirror to a vertex of the secondary mirror, a concave tertiary mirror arranged behind the primary mirror, the tertiary mirror having one of a parabolic, non-parabolic conical or aspherical surface, a concave quaternary mirror arranged in the central aperture of the primary mirror or behind the primary mirror, the quaternary mirror having one of a spherical, parabolic, non-parabolic conical or aspherical surface, and at least one image plane having one or more aggregated sensors, wherein the image plane is positioned at a radial distance from the optical axis that is no more than the radius of the primary mirror.

Abstract: A freeform surface off-axial three-mirror imaging system comprising a primary mirror, a secondary mirror, a tertiary mirror, and a detector. The secondary mirror defines a first location and a second location. Each reflective surface of the primary mirror, the secondary mirror and the tertiary mirror is an xy polynomial freeform surface. A working distance of the freeform surface off-axial three-mirror imaging system is greater than 125 mm.

Abstract: A freeform surface off-axial three-mirror imaging system comprising a primary mirror, a secondary mirror, a tertiary mirror, and a detector. The secondary mirror comprises a first freeform surface and a second freeform surface. Each reflective surface of the primary mirror, the first freeform surface, the second freeform surface and the tertiary mirror is an xy polynomial freeform surface. The freeform surface off-axial three-mirror imaging system comprises a first field of view formed by the first freeform surface and a second field of view formed by the second freeform surface.

Abstract: Described examples include a projection system having a light source. The projection system also has a light integrator having an output face, the light integrator configured to receive an output of the light source, wherein a length of the light integrator is less than at least one diametric measurement of the output face of the light integrator. The projection system also has a spatial light modulator and focusing optics configured to receive a light output of the light integrator and configured to focus the light output of the light integrator onto the spatial light modulator. The projection system also has projection optics configured to project modulated light from the spatial light modulator.

Abstract: A reflective afocal switching assembly permits variable fields of view while at the same time providing a common axis and mechanism to achieve an optical de-roll of the image. This complex arrangement provides a relatively large change in magnification for an all-reflective optical system than can image over 0.4-12.0 micron spectrum.

Abstract: Methods, apparatus, devices, and systems for three-dimensional (3D) displaying objects are provided. In one aspect, a method includes obtaining data including respective primitive data for primitives corresponding to an object, determining an electromagnetic (EM) field contribution to each element of a display for each of the primitives by calculating an EM field propagation from the primitive to the element, generating a sum of the EM field contributions from the primitives for each of the elements, transmitting to each of the elements a respective control signal for modulating at least one property of the element based on the sum of the EM field contributions, and transmitting a timing control signal to an illuminator to activate the illuminator to illuminate light on the display, such that the light is caused by the modulated elements of the display to form a volumetric light field corresponding to the object.

Abstract: An optical surgical probe includes a handpiece, a light guide within the handpiece, and a multi-spot generator at a distal end of the handpiece. The handpiece is configured to optically couple to a light source. The light guide is configured to carry a light beam from the light source to a distal end of the handpiece. The multi-spot generator includes a faceted optical element with a faceted end surface spaced from a distal end of the light guide. The faceted end surface includes at least one facet oblique to a path of the light beam.

Abstract: The present invention provides a projection optical system including a first concave reflecting surface, a first convex reflecting surface, a second concave reflecting surface, and a third concave reflecting surface, wherein the first concave reflecting surface, the first convex reflecting surface, the second concave reflecting surface, and the third concave reflecting surface are arranged such that light from an object plane forms an image on an image plane by being reflected by the first concave reflecting surface, the first convex reflecting surface, the second concave reflecting surface, the first convex reflecting surface, and the third concave reflecting surface in an order named.

Abstract: A reflective afocal switching assembly permits variable fields of view while at the same time providing a common axis and mechanism to achieve an optical de-roll of the image. This complex arrangement provides a relatively large change in magnification for an all-reflective optical system than can image over 0.4-12.0 micron spectrum.

Abstract: A lens includes a base body having a light incidence face through which light can enter the base body and a light exit face, through which light which has entered the base body can emerge, the light exit face includes a microlens structure having a plurality of microlenses, the light incidence face has at least two collimator segments that collimate light and a light entry region formed differently from the collimator segments, the base body has at least two back-reflection regions respectively assigned to one of the two collimator segments, to reflect back light collimated by a corresponding collimator segment, in a direction of the corresponding collimator segment, and the base body is a reflection region to reflect light that has entered through the light incidence region in the direction of the microlens structure so that the reflected light can emerge from the base body through the microlens structure.

Abstract: An optical apparatus comprises an optical resonator defining an optical resonator path for an optical resonator beam and an optical beam expander optically coupled to the optical resonator, the optical beam expander defining an optical beam expander path for an optical beam expander beam. The optical resonator path and the optical beam expander path may be configured such that the optical resonator beam and the optical beam expander beam at least partially intersect. Such an optical apparatus may be configured for use as a laser target designator or a laser range finder.

Abstract: Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.

Abstract: A compact, on-axis telephoto lens camera includes an arrangement of mirrors which receives incident light, and compresses and redirects the light, the arrangement having a primary mirror which receives the incident light, compresses and redirects the light toward a focal point of the primary mirror and has an opening defined at a central portion thereof, and a secondary mirror which receives light from the primary mirror and further redirects same. The camera also includes a cavity which extends into the camera from the opening of the primary mirror, aspheric lenses disposed at least partially within the cavity which receive the light from the multiple-mirror arrangement, and progressively expand and redirect the light received from the mirror arrangement, and an image sensor which receives the light from the aspheric lenses. The image sensor is disposed closely adjacent to the cavity such that a back focal length is substantially zero.

Abstract: A projector includes a first cooling object and a second cooling object, a first circulatory cooling device having a first closed housing, and adapted to circulate a first cooling gas in the first closed housing to cool the first cooling object disposed in the first closed housing, and a second circulatory cooling device having a second closed housing, and adapted to circulate a second cooling gas in the second closed housing to cool the second cooling object disposed in the second closed housing, the first cooling object is an image forming section including a light modulation device adapted to modulate light entering the light modulation device to form an image, and the second cooling object is a first optical component included in an optical component making a contribution to the formation of the image by the light modulation device.

Abstract: A system for forming a light-sustained plasma capable of emitting vacuum ultraviolet light includes an illumination source configured to generate illumination, a plasma cell including a transmission element having one or more openings, one or more flanges disposed at the openings of the transmission element and configured to enclose the internal volume of the transmission element in order to contain a volume of gas within the plasma cell. The system further includes a collector element arranged to focus the illumination from the illumination source into the volume of gas to generate a plasma within the volume of gas contained within the plasma cell. Further, the plasma emits broadband radiation including at least vacuum ultraviolet radiation. In addition, the transmission element of the plasma cell is transparent to the illumination generated by the illumination source and at least the vacuum ultraviolet radiation emitted by the plasma.

Abstract: Laser device comprising at least two gas laser units (10), stacked in layers, each laser unit comprising a plurality of resonator tubes (12), the resonator tubes being in fluidic communication with each other and forming a common tubular space, connecting elements (20, 21) for connecting adjacent resonator tubes so as to form a loop, mirrors (22) arranged in the connecting elements for reflecting the laser light between the resonator tubes, a rear mirror (44) and a partially reflecting output coupler (42) for coupling out a laser beam. In each laser unit an integrated output flange (40) comprises the rear mirror, the partially reflecting output coupler and an output mirror (46) which deflects the laser beam passing through the output coupler to a scanning device (80) located in the central space (8) surrounded by the resonator tubes. The invention also relates to a method for marking an object.

Abstract: An ignition facilitated electrodeless sealed high intensity illumination device is disclosed. The device is configured to receive a laser beam from a continuous wave (CW) laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber has an ingress window disposed within a wall of a chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, and a high intensity light egress window configured to emit high intensity light from the chamber. A path of the CW laser beam from the laser light source through the ingress window to a focal region within the chamber is direct. The ingress window is configured to focus the laser beam to within a predetermined volume, and the plasma is configured to be ignited by the CW laser beam, optionally by heating of a non-electrode ignition agent located entirely within the chamber.

Abstract: An off-axis three-mirror optical system with freeform surfaces includes a primary mirror, a secondary mirror, a tertiary mirror, and an image sensor. The primary mirror receives light rays first and the secondary mirror is located on a path of light reflected from the primary mirror. The tertiary mirror receives light reflected from the secondary mirror. The image sensor is located on a path of light reflected from the tertiary mirror. Each reflecting surface of the primary and tertiary mirrors is a sixth order xy polynomial freeform surface. The secondary mirror reflecting surface is a spherical surface. A field of view of the off-axis three-mirror optical system with freeform surfaces in Y-axis direction is greater or equal to 65°. A field of view of the off-axis three-mirror optical system with freeform surfaces in X-axis direction is greater or equal to 0.8°.

Abstract: In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of elements arranged so that during operation the plurality of elements image radiation at a wavelength ? from an object plane to an image plane. At least one of the elements is a reflective element that has a rotationally-asymmetric surface positioned in a path of the radiation. The rotationally-asymmetric surface deviates from a rotationally-symmetric reference surface by a distance of about ? or more at one or more locations of the rotationally-asymmetric surface.

Abstract: The invention relates to a method for producing an optical assembly, comprising at least two optical functional surfaces arranged in a fixed positional relationship to one another on a common supporting structure, wherein by means of a processing machine, in various process steps, at least two optical functional surfaces and at least one reference structure having a defined and measurable relative position to the optical functional surfaces are produced. The supporting structure remains rigidly connected to the processing machine until said process steps have been completed, and wherein the optical functional surfaces are then measured relative to the at least one reference structure, and any deviation from a target shape and target position is determined, after which said process steps are repeated at least once with modified actuation of the processing machine. The invention further relates to an optical device comprising an optical assembly produced in this way and to a unit for carrying out such a method.

Abstract: Apparatus for evaluating optical components and systems that uses a precision compact mirror support structure to present to an optical system or electro-optical system (e.g., a camera) multiple images of at least one optical evaluation target over a wide field to allow assessment of the performance or alignment of the optical or electro-optical system over its intended field of use. The mirror support structure generates multiple images of an optical evaluation target by providing multiple folded optical paths between the target and the desired field locations of the test optic. The mirrors employed may either be parallel or at angles with respect to one another.

Abstract: An off-axial three-mirror optical system with freeform surfaces includes a primary mirror, a secondary mirror, a tertiary mirror, and a detector. The primary mirror is located on an incident light path. The secondary mirror is located on a primary mirror reflecting light path. The tertiary mirror is located on a secondary mirror reflecting light path. The detector is located on a tertiary mirror reflecting light path. Each of the primary mirror, the secondary mirror, and the tertiary mirror is an xy polynomial freeform surface up to the fifth order.

Abstract: An off-axial three-mirror optical system with freeform surfaces includes a primary mirror, a secondary mirror, a tertiary mirror, and an image sensor. The primary mirror is located on an incident light path. The secondary mirror is located on a primary mirror reflecting light path. The tertiary mirror is located on a secondary mirror reflecting light path. The image sensor is located on a tertiary mirror reflecting light path. The primary mirror, the secondary mirror, and the tertiary mirror are all xy polynomial surfaces up to the sixth order. The off-axial three-mirror optical system with freeform surfaces can achieve push-broom image with small F-number and large field angles.

Abstract: An imaging optical system for EUV projection lithography has a plurality of mirrors for imaging an object field in an object plane into an image field in an image plane. An image-side numerical aperture of the imaging optical system is at least 0.3. The imaging optical system has a pupil obscuration which is greater than 0.40 and an image filed size of at least 1 mm×10 mm. The imaging optical system can provide high quality imaging of the object.

Abstract: The substrate detection apparatus includes: a collimating reflector located on one side of substrates; an illumination unit configured to radiate light in a planar state toward the collimating reflector such that edge portions of the substrates are located in an optical path of the light; an image acquiring unit configured to acquire a passing light image including the edge portions formed on the collimating reflector with the light radiated in the planar state from the illumination unit; and an image processing unit configured to process the passing light image obtained by the image acquiring unit, thereby detecting the conditions of the substrates.

Abstract: The invention relates to a microlithography projection lens for wavelengths <=248 nm <=, preferably <=193 mm, in particular EUV lithography for wavelengths ranging from 1-30 nm for imaging an object field in an object plane onto an image field in an image plane, the microlithography projection lens developed in such a manner that provision is made for an accessible diaphragm plane, into which for instance an iris diaphragm can be introduced.

Abstract: The present invention relates to an optical imaging device, in particular for microscopy, with a first optical element group and a second optical element group, wherein the first optical element group and the second optical element group, on an image plane, form an image of an object point of an object plane. The first optical element group includes a first optical element with a reflective first optical surface and a second optical element with a reflective second optical surface. The second optical element group includes a third optical element with a reflective third optical surface. The first optical element and the second optical element are formed and arranged such that on formation of the image of the object point, in each case a multiple reflection of at least one imaging beam takes place on the first optical surface and the second optical surface.

Abstract: Beam guides for guiding a laser beam from a driver laser device in the direction of a target position for generating extreme ultraviolet (“EUV”) radiation are disclosed. The beam guides include a device for increasing or decreasing the beam diameter of the laser beam. The device includes a first off-axis parabolic mirror having a first convex curved reflecting surface and a second off-axis parabolic mirror having a second concave curved reflecting surface. The beam guides also include a moving device arranged to change a distance between the first and the second reflecting surfaces to change the opening angle (?), e.g., the convergence or divergence angle, of the laser beam. Methods for adjusting an opening angle (?) of a laser beam using such beam guides are also disclosed.

Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.

Abstract: Systems and methods are provided for a solid filled mirrored lens system capable of wider fields of view and wider spectra than current lens systems. The mirrored lens is used to focus light incident upon a right circular cylindrical central body comprising a substantially planar first surface and a substantially planar second surface. A primary reflecting surface is located on the second surface of the central body and shaped as an annulus with a void in the central region of the second surface. Further, a secondary reflecting surface is located in a central region of the first surface facing the primary reflecting surface.

Abstract: The disclosure generally relates to concentrating daylight collectors and in particular to concentrating daylight collectors useful for interior lighting of a building. The concentrating daylight collectors generally include a cassegrain-type concentrator section that provides for a full-tracking solar collector with one moving part and with a high efficiency of coupling of collected solar irradiation to a stationary duct. In some cases, the disclosed concentrating daylight collectors can be used more conventionally, such as for directing sunlight onto a photo-voltaic cell for generation of electrical power, or an absorbing surface for extraction of thermal energy.

Abstract: A device and method for providing a laser system utilizing high efficiency lasers emitters and optionally the high quality beam characteristics of a crystal gain medium single mode laser for emitting beamlets and utilizing an optical and mechanical method of forming the beam and directing it to the desired target using both a concave and a partially reflective convex mirror to reflect the beamlets, with the convex mirror transmitting a portion of the beamlets to a transmission medium for emitting the beamlets as a laser beam.

Abstract: An imaging optical system includes a plurality of mirrors configured to image an object field in an object plane of the imaging optical system into an image field in an image plane of the imaging optical system. An illumination system includes such an imaging optical system. The transmission losses of the illumination system are relatively low.

Abstract: A magnifying imaging optical system is disclosed that has precisely three mirrors, which image an object field in an object plane into an image field in an image plane. A ratio between a transverse dimension of the image field and a transverse dimension measured in the same direction of a useful face of the last mirror before the image field is greater than 3. In a further aspect, the magnifying imaging optical system is disclosed that has at least three mirrors, which image an object field in an object plane in an image field in an image plane. A first mirror in the beam path after the object field is concave, a second mirror is also concave and a third mirror is convex. An angle of incidence of imaging beams on the last mirror before the image field is less than 15°.

Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.

Abstract: The present disclosure relates to a deformable mirror including a deformable membrane with a reflecting face and an opposite face, a stiff plate and a structure of at least one actuator at least a part of which is fixed to the stiff plate and able to locally deform the membrane, wherein the deformable mirror also includes a not necessarily uniform adhesive layer against the opposite surface of the membrane, and a structure of at least one flexible coupling including a mechanical connection and upper and lower linking means coupling respectively the upper and lower ends of the mechanical connection to the adhesive layer and to the stiff plate. The disclosure also relates to a tool and a method making it possible to produce such a mirror.

Abstract: A coude gimbal structure includes a two-axis gimbal system having an outer gimbal pivotable about a first rotational axis, and an inner gimbal supported on the outer gimbal and pivotable about a second rotational axis which intersects the first rotational axis at an intersection point. A folded afocal three-mirror anastigmat has a positive-optical-power primary mirror, a negative-optical-power secondary mirror, and a positive-optical-power tertiary mirror, and a first flat fold mirror, and a second flat fold mirror. A beam path incident upon the primary mirror is reflected from the primary mirror to the secondary mirror. The tertiary mirror lies on the second rotational axis, the first flat fold mirror redirects the beam path reflected from the secondary mirror to the tertiary mirror, and the second flat fold mirror lies at the intersection point and redirects the beam path reflected from the tertiary mirror along the first rotational axis.

Abstract: A semiconductor laser driver includes a light detection circuit to detect a quantity of light as a detected light emission intensity and output the detected light emission intensity to the control circuit, and a control circuit to control a light emission intensity for the semiconductor laser based on the detected light emission intensity and on a predetermined light emission intensity setting value. The light detection circuit includes a photoelectric conversion element to convert the quantity of light emitted from the semiconductor laser into an electrical current and output the converted electrical current, a current magnification setting circuit to amplify the electrical current output from the photoelectric conversion element to a predetermined amplified current at one of multiple different predetermined magnifications, a detection resistor to convert the amplified current output from the current magnification setting circuit into a voltage and output the voltage as the detected light emission intensity.

Abstract: A reflective optical form that has both a telecentric image and a real entrance pupil. In one example, a non-relayed optical imaging system includes a real entrance pupil configured to admit a beam of electromagnetic radiation, an image plane, and a reflective triplet including a negative primary mirror, a positive secondary mirror optically coupled to the primary mirror, a negative tertiary mirror optically coupled to the secondary mirror, the reflective triplet configured to receive the beam of electromagnetic radiation from the real entrance pupil and to focus the beam of electromagnetic radiation onto the image plane to form a telecentric image at the image plane.

Abstract: An optical device is described herein which is a four mirror objective with a large numerical aperture and a small central obscuration. The four mirror objective places two Schwarzschild-like objectives in series with respect to one another. This allows a large numerical aperture, a long working distance, and small central obscuration. Each objective has a primary and secondary mirror. An imaging device and method for imaging a specimen are also described herein.

Abstract: The magnifying apparatus is based on two dimensional arrays of micro magnifying modules (MMMs) positioned along a plane perpendicular to the axis of the magnifying apparatus. In addition, the structure may include a two dimensional array of micro beam multipliers (MBMs) to improve the quality of the magnified image. The micro beam multipliers are positioned along a plane parallel to the array of micro magnifying modules. The structure also may include a two dimensional array of ray angle adjusters (RAAs) to extend the view angle. The ray angle adjusters are positioned along a plane parallel to the array of micro magnifying modules. The array of micro magnifying modules, with or without the micro beam multipliers and/or ray angle adjusters, may be constructed as a thin plate with a thickness of a few millimeters, through which the object is viewed.

Abstract: The inventions relate to beam guides for guiding a laser beam from a driver laser device in the direction of a target position for generating extreme ultraviolet (“EUV”) radiation. The beam guides include a device for increasing or decreasing the beam diameter of the laser beam. The device includes a first off-axis parabolic mirror having a first convex curved reflecting surface and a second off-axis parabolic mirror having a second concave curved reflecting surface. The beam guides also include a moving device arranged to change a distance between the first and the second reflecting surfaces to change the opening angle (?), e.g., the convergence or divergence angle, of the laser beam. The inventions also relate to methods for adjusting an opening angle (?) of a laser beam using such beam guides.

Abstract: In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.

Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.

Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.