Abstract: Voltage application device includes voltage application circuit. Voltage application circuit applies a voltage to load including discharge electrode that holds liquid, voltage application circuit generating discharge in discharge electrode. During a drive period, voltage application circuit periodically changes a magnitude of the voltage applied to load at a drive frequency within a predetermined range including a resonance frequency of liquid, voltage application circuit mechanically vibrating liquid.

Abstract: The present invention relates to the technical field of earphones and provides a reasonable and feasible firmware upgrade solution for TWS earphones. Disclosed in the present application are a TWS earphone, a charging case, an upgrading method thereof and a storage medium. The method comprises: acquiring an upgrading firmware package sent by a preset terminal by means of a first audio output device; upgrading the first audio output device by using a first upgrading firmware in the upgrading firmware package acquired by the first audio output device; sending a second upgrading firmware in the upgrading firmware package acquired by the first audio output device to a second audio output device by means of a charging case, so as to upgrade the second audio output device by using the second upgrading firmware. The upgrade solution of the present application enables a reasonable and feasible firmware upgrade operation of TWS earphones.

Abstract: An ion generating device includes a high voltage transformer, a discharge electrode connected to a terminal of the high voltage transformer on a secondary side, and an induction electrode that generates ions between the induction electrode and the discharge electrode and is connected to a terminal of the high voltage transformer on the secondary side. A first conductive path includes the terminal and extends from the terminal to the discharge electrode and a second conductive path includes a terminal and the induction electrode. Part of the first conductive path is located in proximity and opposed to part of the second conductive path.

Abstract: A method of controlling charging of a wireless headphone device includes estimating a usage time value that corresponds to an anticipated future occurrence of usage of the wireless headphone device and estimating a resume time value that corresponds to a time for charging to commence to allow for completion of charging from a first predetermined state of charge value to a second predetermined state of charge value by the usage time value. The method also includes determining that the wireless headphone device has been placed in a charging case. A battery of the wireless headphone device is charged to the first predetermined state of charge value and then enters a deactivated mode, wherein the charging case is configured to return the wireless headphone device to an activated mode according to the resume time value.

Abstract: Systems and methods are disclosed for plasma discharge ignition to reduce surface particles and thereby decrease defects introduced during plasma processing. A microelectronic workpiece is positioned on a holder within a process chamber that includes a first radio frequency (RF) power source configured to couple RF power to a top portion of the process chamber, a second RF power source configured to couple RF power to the holder, and a direct current (DC) power supply. Initially, a process gas for plasma process is flowed into the process chamber. The process gas is ignited to form plasma by activating the second RF power source to apply RF power to the holder. Subsequently, the microelectronic workpiece is clamped to the holder by applying the positive voltage to the holder with the DC power supply, and the first RF power source is activated to maintain the plasma within the process chamber.

Abstract: Described is an apparatus which comprises: a plurality of transistors coupled to an input power supply and to a load; a first comparator with a first node coupled to the load, and a second node coupled to a first reference; a second comparator with a first node coupled to the load, and a second node coupled to a second reference, the second reference being different from the first reference; and a logic unit to receive output of the first comparator and output of the second comparator, the logic unit to turn on or off transistors of the plurality of transistors according to outputs of the first and second comparators.

Abstract: A power system for a vehicle includes a traction battery that provides power to drive the vehicle, a load, and a harness having wires electrically connecting the traction battery and load, and shielding covering the wires. The power system further includes one or more control blocks that drive a signal onto the shielding, and responsive to an absence of detecting feedback from the signal, issue an interlock integrity alert.

Abstract: A plasma processing method is provided that includes a step of loading a substrate into a chamber where a plasma process is to be executed, a step of applying a high frequency bias power that has a lower frequency than a high frequency excitation power for plasma excitation to a mounting table on which the substrate is mounted, and a step of applying a DC voltage to an electrostatic chuck configured to electrostatically attract the substrate that is mounted on the mounting table. The step of applying the DC voltage is performed after the step of applying the high frequency bias power.

Abstract: The present invention relates to an apparatus for inhibiting scale formation and microorganism growth within a moving water system, with the apparatus including: (i) a pulse-power assembly having a fly-back pulse generator circuit effective to produce a current pulse that when terminated yields a voltage spike and generates a plurality of frequencies of energy, where the fly-back pulse generator circuit comprises a coil as an integral portion of the fly-back pulse generator circuit; and (ii) a chamber for passing water from the moving water system therethrough, where the coil is wound around the chamber so as to transmit the plurality of frequencies of energy into the chamber in order to inhibit scale formation and microorganism growth within the moving water system. Water treatment systems and methods of using the apparatus are also provided.

Abstract: An image forming apparatus that transfers a toner image to a medium being conveyed includes: an image carrier configured to carry the toner image; a transfer member configured to apply, to the medium being conveyed, a first AC voltage which is opposite in polarity to the toner image and on which a DC component and an AC component are superimposed, and transfer the toner image to the medium; a charge removing member configured to apply, to the medium being conveyed, a second AC voltage which is opposite in polarity to the first AC voltage and on which a DC component and an AC component are superimposed after the first AC voltage is applied to the medium; and a control unit configured to change a frequency of the second AC voltage when a distance between the medium being conveyed and the charge removing member becomes shorter than a predetermined distance.

Abstract: The invention provides a system and method for controlling corona discharge and arc formations during a single corona event, i.e. intra-event control. A driver circuit provides energy to the corona igniter and detects any arc formation. In response to each arc formation, the energy provided to the corona igniter is shut off for short time. The driver circuit also obtains information about the arc formations, such as timing of the first arc formation and number of occurrences. A control unit then adjusts the energy provided to the corona igniter after the shut off time and during the same corona event based on the information about the arc formations. For example, the voltage level could be reduced or the shut-off time could be increased to limit arc formations and increase the size of the corona discharge during the same corona event.

Abstract: An image forming apparatus has an image carrier that carries a toner image; a transfer member that is opposed to the image carrier, a transfer voltage being applied to the transfer member so that the toner image is transferred from the image carrier to a print medium passing between the transfer member and the image carrier; a first voltage application device that applies the transfer voltage to the transfer member; a separation member to which a separation voltage is applied so that the print medium is separated from the image carrier; a second voltage application device that applies the separation voltage to the separation member; a sensing device that senses an image density of the toner image; and a control section that controls a magnitude of the separation voltage based upon the image density of the toner image.

Abstract: An electronic system includes a carrier including at least one waveguide feeding, a semiconductor chip including a first surface and a second surface, and an integrated RF circuit, and a cooling element including a backshort. The semiconductor chip is mounted to the carrier such that the first surface faces the carrier. The integrated RF circuit is connected to the at least one waveguide feeding. The cooling element is mounted to the carrier such that the backshort is adjacent one end of the at least one waveguide feeding, and the cooling element at least partially covers the semiconductor chip such that the second surface of the semiconductor chip faces the cooling element.

Abstract: Methods and apparatus, including computer program products, are provided for charging and audio usage. In one aspect there is provided a method, which may include detecting, by an accessory including a first connector and a second connector configured to enable coupling to a user equipment, a charger being coupled to the first connector; sending, based on at least the detected charger, an indication to the user equipment to change to a power receive mode; detecting, by the accessory, the change to the power receive mode; and allowing, based on at least the detected change, power to flow from the first connector to the second connector. Related systems, apparatus, and articles of manufacture are also disclosed.

Abstract: Medical devices utilizing shock waves with spark gap electrodes that include fluid holes into the respective electrode cores.

Abstract: The invention provides a system and method for controlling corona discharge and arc formations during a single corona event, i.e. intra-event control. A driver circuit provides energy to the corona igniter and detects any arc formation. In response to each arc formation, the energy provided to the corona igniter is shut off for short time. The driver circuit also obtains information about the arc formations, such as timing of the first arc formation and number of occurrences. A control unit then adjusts the energy provided to the corona igniter after the shut off time and during the same corona event based on the information about the arc formations. For example, the voltage level could be reduced or the shut-off time could be increased to limit arc formations and increase the size of the corona discharge during the same corona event.

Abstract: A transfer device includes a transfer bias power source, a switching device, and a sheet dependent condition setting device. The transfer bias power source applies to a transfer member, based on sheet dependent conditions for a recording medium onto which a toner image is transferred, one of a DC transfer bias and a superimposed transfer bias including an alternating current (AC) component superimposed on a DC component. The switching device switches a transfer mode between a DC transfer mode in which the DC transfer bias is applied to the transfer device and a superimposed-bias transfer mode in which the superimposed transfer bias is applied to the transfer device. The sheet dependent condition setting device sets arbitrarily at least one of the sheet dependent conditions for the recording medium at the superimposed-bias transfer mode. The sheet dependent conditions include a DC component value and an AC component value.

Abstract: A high voltage generating device includes a control portion configured to raise a voltage output from a transformer to a first voltage by controlling a driving signal generated by a signal generating portion based on a voltage detected by a voltage detecting portion. The control portion raises the voltage with a predetermined rate of change until the voltage detected by the voltage detecting portion reaches a value of a second voltage smaller than a value of the first voltage, and the control portion raises the voltage output from the transformer with a rate of change smaller than the predetermined rate of change after the voltage detected by the voltage detecting portion reaches the value of the second voltage.

Abstract: An image forming apparatus includes an image carrier; a facing member facing the image carrier via a transfer position; a power supply to output a voltage between a first position on the image carrier side and a second position on the facing member side; a resistance detector to detect electrical resistance between the first position and the second position via the transfer position; and a controller to switch between a first transfer mode in which the power supply outputs a direct current voltage, and a second transfer mode in which the power supply outputs a superimposed voltage. When a toner image on the image carrier is transferred onto a recording medium at the transfer position, the controller selects either the first transfer mode or the second transfer mode. When the resistance detector detects the electrical resistance, the controller selects the first transfer mode.

Abstract: A power supply circuit includes a comparator, first to third electronic switches, a D-trigger, a power supply unit (PSU), and a complex programmable logic device (CPLD). When a voltage from the PSU is greater than a reference voltage, the first electronic switch is turned on. An electronic device connected to the first electronic does not receive power from the PSU. The second electronic switch is turned on. The third electronic switch is turned off. The D-trigger outputs a low level signal to make the CPLD control the PSU stop supplying power.

Abstract: The invention concerns environmentally compatible methods and apparatuses for local modification of atmosphere, and in particular, for causing precipitation, dissipating fogs and/or clouds, removing air-pollutants in a target area. SUBSTANCE: the method involves applying air ionizers (1a, 1b, 1c) to generate ion flows into atmosphere to form convective flows and/or spatial charges. To control characteristics of the ion flow, it is proposed to use one or multiple air ionizers (1a, 1b, 1c) provided with variable-inclination electrode working cells. EFFECT: wide application of an air ionizer (1) with variable layout (inclination angle) of the electrodes in weather condition modification over a target area.

Abstract: An air ionizing apparatus for enhancing plant growth that includes a housing, solar cells mounted atop the housing, a voltage regulator/conditioner circuit coupled to the solar cells, an oscillator/modulator circuit coupled to the voltage regulator/conditioner circuit, a high voltage converter/multiplier circuit coupled to the oscillator/modulator circuit, and an ion emitter element coupled to the high/voltage converter/multiplier circuit and disposed at the bottom of the housing. Solar energy transferred to the solar cells and converted into current is converted to high voltage through the voltage/regulator, oscillator/modulator, and high voltage converter/multiplier circuits. The high voltage is then applied to the ion emitter element to produce ions from ambient air in close proximity to a plant being treated.

Abstract: The disclosed technology describes methods and apparatus to convert and control power provided to a precipitator. An example embodiment of the disclosed technology includes a method for providing power to a device. The method includes receiving a first silicon controlled rectifier (SCR) signal and a second SCR signal from a controller device, generating a demand signal by the controller device based on a comparison of the first and second SCR signals, transmitting the demand signal to a power converter device, converting a first power signal from a first base frequency to a second power signal at a second base frequency, wherein the first base frequency is in the range of approximately 50 Hz to approximately 60 Hz and wherein the second base frequency is controlled in the range of approximately 100 Hz to approximately 1000 Hz, and switching the second power signal to the controller device.

Abstract: The disclosed technology describes methods and apparatus to convert and control power provided to a precipitator. An example embodiment of the disclosed technology includes a method for providing power to a device. The method includes receiving a first silicon controlled rectifier (SCR) signal and a second SCR signal from a controller device, generating a demand signal by the controller device based on a comparison of the first and second SCR signals, transmitting the demand signal to a power converter device, converting a first power signal from a first base frequency to a second power signal at a second base frequency, wherein the first base frequency is in the range of approximately 50 Hz to approximately 60 Hz and wherein the second base frequency is controlled in the range of approximately 100 Hz to approximately 1000 Hz, and switching the second power signal to the controller device.

Abstract: The presently disclosed technology provides a responsive ion beam source power supply system capable of handling fault events without relying on conventional protection circuitry (e.g., fuses and breakers) so that physical power supply hardware intervention by a user is minimized for typical fault conditions and the ion beam source power supply system may recover automatically after experiencing a fault condition. The presently disclosed technology further discloses an ion beam source power supply system capable of detecting and diagnosing fault states, autonomously implementing command decisions to preserve or protect the function of other ion source modules or sub-systems, and/or mitigating or recovering from the disruptive fault event and returning the ion beam source system to desired user settings.

Abstract: A corona ignition system 20 includes a corona drive circuit 26 and an auxiliary energy circuit 28. The energy circuit 28 stores energy during a standard corona ignition cycle. When arc discharge occurs or corona discharge switches to an arc discharge, the energy circuit 28 discharges the stored energy to the electrode 30 to intentionally maintain a robust arc discharge 29 and thus provide reliable ignition. The stored energy is transmitted to the electrode 30 over a predetermined period of time. The arc discharge is detected and an arc control signal 60 is transmitted to the energy circuit 28, triggering discharge of the stored energy to the electrode 30. The stored energy can be transmitted to the electrode 30 along a variety of different paths. The voltage of the stored energy is typically increased by an energy transformer 70 before being transmitted to the electrode 30.

Abstract: Charge pump circuits having circuit components such as transistors which may be damaged by voltage transients greater than the normal operating voltage levels of the charge pump circuit, such as may be experienced during powering down. The circuit components to be protected are connected in parallel with a leakage element arranged to have a leakage current that is small enough during normal operation to allow the charge pump to operate effectively but which is large enough, during development of a voltage transient, to prevent excess voltage levels being achieved. The leakage element may have a significant leakage current at a voltage less than the breakdown voltage of the circuit component. Suitable leakage elements are poly diodes.

Abstract: Self-balancing, corona discharge for the stable production of electrically balanced and ultra-clean ionized gas streams is disclosed. This result is achieved by promoting the electronic conversion of free electrons into negative ions without adding oxygen or another electronegative gas to the gas stream. The invention may be used with electronegative and/or electropositive or noble gas streams and may include the use of a closed loop corona discharge control system.

Abstract: A multi-sectional linear ionizing bar with at least four elements is disclosed. First, disclosed bars may include at least one ionization cell with at least one axis-defining linear ion emitter for establishing an ion cloud along the length thereof. Second, disclosed bars may include at least one reference electrode. Third, disclosed bars may include a manifold for receiving gas or air from a source and for delivering same past the linear emitter(s) such that substantially none of the gas/air flows into the ion cloud. Fourth, disclosed bars may include means for receiving the ionizing voltage and for delivering same to the linear emitter(s) to thereby establish the ion cloud. In this way, disclosed ionizing bars may transport ions from the plasma region toward a charge neutralization target without inducing substantial vibration of the linear emitter and without substantial contaminants from the gas/air flow reaching the linear emitter.

Abstract: Self-balancing, corona discharge for the stable production of electrically balanced and ultra-clean ionized gas streams is disclosed. This result is achieved by promoting the electronic conversion of free electrons into negative ions without adding oxygen or another electronegative gas to the gas stream. The invention may be used with electronegative and/or electropositive or noble gas streams and may include the use of a closed loop corona discharge control system.

Abstract: A method for optimizing performance of a static neutralizing power supply coupled to a controller and configured to provide an output to at least one ionizer includes, (a) during a first time period, sensing a current flow to the at least one ionizer, and (b) comparing, in the controller, an expected current flow to the sensed current flow. A difference between the expected and sensed current flows is proportional to a charge on an object to be neutralized proximate the at least one ionizer. The method further includes (c) adjusting, by the controller and based on the comparison, one or more properties of the output to the at least one ionizer to neutralize the charge on the object during a second time period following the first time period, and (d) periodically repeating steps (a)-(c) for successive first and second time periods.

Abstract: Provided is an Electromagnetic Interference (EMI) reduction apparatus. The EMI reduction apparatus includes: an electromagnetic wave absorbing unit absorbing electromagnetic waves from an electromagnetic wave generator and converting the absorbed electromagnetic waves into thermal energy through thermal conversion and emitting the thermal energy; and a thermoelectric unit converting the emitted thermal energy into electric energy.

Abstract: A method and a device for automatic positive and negative ion balance control in a bipolar ion generator. The method may include applying bias voltage from a bias voltage source to a bias electrode from a power supply that includes an AC voltage generator and a voltage multiplying circuit of at least one cascade. The method may also include controlling a bias current flowing through the bias electrode for the purpose of stabilization of that current, wherein the step of controlling of the bias current is performed during charging of a capacitor in the voltage multiplying circuit.

Abstract: A coating dispensing device includes a trigger assembly for actuating the coating dispensing device to dispense coating material and a nozzle through which the coating material is dispensed. The coating dispensing device further includes a first port adapted to supply compressed gas to the coating dispensing device and a second port adapted to supply coating material to the coating dispensing device. The coating dispensing device further includes a generator having a shaft. A turbine wheel is mounted on the shaft. Compressed gas coupled to the first port impinges upon the turbine wheel to spin the shaft, producing voltage. An electrode adjacent the nozzle is coupled to the generator to receive electricity therefrom to electrostatically charge the coating material. First and second seals seal the shaft where the shaft protrudes from the generator at its ends.

Abstract: A semiconductor device includes a first pad, and a sub-trunk line elongated in a first direction; a main-trunk line arranged between the first pad and the sub-trunk line and elongated in the first direction. The semiconductor device further includes a first plug line elongated in a second direction crossing the first direction, the first plug line being connected between the first pad and the main-trunk line without being direct contact with the sub-trunk line. The semiconductor device further includes a second plug line elongated in the second direction, the second plug line being connected between the main-trunk line and the sub-trunk line, and a first element coupled to the sub-trunk line.

Abstract: A memory power supply circuit is used for providing power to a first memory module received in a first memory slot and a second memory module received in a second memory slot, and comprises a logic circuit and a switching power supply. The logic circuit comprises a first input terminal electrically connected to the first memory slot, a second input terminal electrically connected to the second memory slot, and a first signal terminal. The switching power supply comprises a first power terminal, a second power terminal, and a second signal terminal electrically connected to the first signal terminal. When the first memory slot and the second memory slot receive the first memory slot and the second memory module, the switching power supply turns on the first power terminal and the second power terminal; otherwise, the switching power supply turns off the first power terminal or the second power terminal.

Abstract: A memory module includes a ground terminal, a power terminal, a voltage regulator down, and a storing unit. The power terminal and the ground terminal are connected to a power source that supplies a first direct voltage. The voltage regulator down is connected to the power terminal and configured for converting the first direct current voltage to a second direct current voltage. The storing unit is connected the voltage regulator down for storing data and reading or writing data when the storing unit receives the second direct current voltage.

Abstract: A multi-sectional linear ionizing bar with at least four elements is disclosed. First, disclosed bars may include at least one ionization cell with at least one axis-defining linear ion emitter for establishing an ion cloud along the length thereof. Second, disclosed bars may include at least one reference electrode. Third, disclosed bars may include a manifold for receiving gas or air from a source and for delivering same past the linear emitter(s) such that substantially none of the gas/air flows into the ion cloud. Fourth, disclosed bars may include means for receiving the ionizing voltage and for delivering same to the linear emitter(s) to thereby establish the ion cloud. In this way, disclosed ionizing bars may transportions from the plasma region toward a charge neutralization target without inducing substantial vibration of the linear emitter and without substantial contaminants from the gas/air flow reaching the linear emitter.

Abstract: An electrostatic chuck includes a metal base member and an insulating substrate having an opposite surface to an attraction surface joined onto the base member via an adhesive layer. In the substrate, an electrode layer to which a direct current voltage for attraction is applied is embedded in a portion of the substrate, close to the attraction surface. In addition, a plurality of independent RF electrode layers to which different radio frequencies for plasma control are fed, respectively, are embedded in portions of the substrate, at an opposite side of the first electrode layer to the attraction surface. The RF electrode layers are arranged separately in different layers which are not on an identical plane in such a manner as to partially overlap each other in a plan view.

Abstract: In an ion generating unit configured to control driving of a plurality of ion generating elements for generating ions by a controller, the controller drives the ion generating elements upon start up, and is configured to keep driving for a predetermined time period; thereby, the ion concentration of a space upon start up is quickly raised to a predetermined concentration. Further, the controller is configured to drive the ion generating elements intermittently and one after another in order after the predetermined time period has elapsed; the product life is elongated while maintaining the predetermined ion concentration and shortening the driving time of the ion generating elements.

Abstract: A system that incorporates teachings of the present disclosure may include, for example, an apparatus having a tube with an ingress opening to receive a liquid, and an egress opening to release the liquid, a conductor positioned in a conduit of the tube, the conductor and the conduit having dimensions to cause a surface tension of the liquid to prevent a constant flow of the liquid from the egress opening, and a power supply coupled to the conductor to apply a charge to the liquid to overcome the surface tension and form at the egress opening a single jet stream of the liquid applicable on a substrate to create a pattern. The single jet stream can be controllable in part by a viscosity of the liquid. Additional embodiments are disclosed.

Abstract: One embodiment of the present invention relates to a method for declamping a semiconductor wafer that is electrically adhered to a surface of an electrostatic chuck by a clamping voltage. In this method, the clamping voltage is deactivated. For a time following the deactivation, a first region of the wafer is lifted an first distance from the surface of the electrostatic chuck while a second region of the wafer remains adhered to the surface of the electrostatic chuck. A predetermined condition is monitored during the time. The second region is lifted from the surface of the electrostatic chuck when the predetermined condition is met.

Abstract: The present invention describes methods and apparatus to convert and control power provided to a precipitator. An exemplary embodiment of the present invention provides a precipitator power frequency converter system, which includes an insulated-gate bipolar transistor (“IGBT”) system and a converter control system comprising a microprocessor in communication with the IGBT system. In addition, the power frequency converter system provides a rectifier set in communication with the IGBT system. Furthermore, the input power received by the precipitator power frequency converter system is in a first frequency range of approximately 50 Hz to 60 Hz and the precipitator power frequency converter system can be enabled to provide an output power in a second frequency range between 400 Hz and 1000 Hz.

Abstract: A detection circuit is provided for a power supply for an electrostatic chuck generating a trapezoidal waveform with approximately flat tops and minimal dead-time between phase reversals. The detection circuit includes an amplifying circuit which receives inputs from a secondary winding of a transformer of the power supply and produces an amplified buffered signal. A chucking detect circuit receives the signal from the amplifying circuit and is configured to produce a first signal indicative of a substrate on the electrostatic chuck and a second signal indicative of an electrostatic chuck without a substrate. A chucking quality circuit receives the signal from the amplifying circuit and produces a signal indicative of a quality of the chucking of the substrate. A movement detection circuit receives the signal from the amplifying circuit and produces a signal indicative of movement of the substrate on the electrostatic chuck.

Abstract: An ionic thermal dissipation device includes an ionic wind generation system and a power system. The power system first converts external direct current (DC) power signals into first alternating current (AC) power signals, and boosts, increases voltage, and rectifies the first AC power signals to generate high voltage DC power signals to drive the ionic wind generation system. The power system also detects current signals generated by ion excitation of the ionic wind generation system and voltage signals of the high voltage DC power signals, and regulates the high voltage DC power signals and time of driving the ionic wind generation system according to a first PWM signal and a first analog signal from an electronic device and the detected current signals and voltage signals.

Abstract: Provided is a power feeding structure of an electrostatic chuck including a lower insulation layer, an electrode layer and a surface insulation dielectric layer formed on an upper surface side of a metal substrate in order from the metal substrate, in which the lower insulation layer, the electrode layer and the surface insulation dielectric layer are not cracked easily.

Abstract: An aerodynamic ion generator is disclosed. The generator includes an electric motor coupled to a propeller for placing in an airflow to generate electrical energy, with ionizing electrodes coupled to the propeller; a generator powered by the electric motor for generating AC high-voltage; an electrical transmission arrangement for transmitting the AC high voltage to the ionizing electrodes of different polarities; and a cleaning device that includes arms, each of the arms for cleaning a corresponding ionizing electrode of the ionizing electrodes and pivotally attached to a shaft located on the propeller wherein most of the mass of the arm is closer to a cleaning end of the arm than to the shaft that arm is attached to.

Abstract: The electrostatic chuck includes a base including an aluminum nitride-containing member; a dielectric layer formed on the base including a member having a volume resistivity of at least 1×1015 ?·cm at a temperature range of about 25° C. to about 300° C. and including 2 to 5% by mass of yttrium oxide, 2 to 5% by mass of ytterbium oxide, and a balance of aluminum nitride based on the total mass of the dielectric layer; and an electrode embedded under the dielectric layer so as to be positioned between the dielectric layer and the base, configured to generate an electrostatic absorption force.

Abstract: A power supply is provided for an electrostatic chuck. A signal generating circuit of the power supply is configured to generate a square wave signal. An amplifying circuit is electrically connected to the square wave circuit and configured to amplify the square wave signal. A transformer has a primary and a secondary winding. The primary winding is electrically connected to the amplifying circuit and the secondary winding is configured to be electrically connected to the electrostatic chuck. The secondary winding produces a signal for the electrostatic chuck. A voltage divider circuit is electrically connected to the secondary winding and to the amplifying circuit. The voltage divider circuit is configured to reduce the voltage of the signal for the electrostatic chuck and feed back the reduced voltage signal to the amplifying circuit. The signal from the secondary winding is a trapezoidal waveform with approximately flat tops and minimal dead-time between phase reversals.

Abstract: In an ion generation apparatus, an induction electrode for generating positive ions and an induction electrode for generating negative ions are each formed as an independent part and separately mounted on a substrate. Therefore, even if the substrate is warped with changes in temperature, tip end portions of needle electrodes can be positioned at the centers of through holes in the induction electrodes, respectively, and positive ions and negative ions can be stably generated.