Abstract: Embodiments of semiconductor devices and methods for forming the same are disclosed. In an example, a semiconductor device includes at least one dielectric layer pair including a first dielectric layer and a second dielectric layer different from the first dielectric layer, an interlayer dielectric (ILD) layer in contact with the at least one dielectric layer pair, and one or more capacitors each extending vertically through the ILD layer and in contact with the at least one dielectric layer pair.

Abstract: A foot presence sensor system for an active article of footwear can include a sensor housing configured to be disposed at or in an insole of the article, and a controller circuit, disposed within the sensor housing, configured to trigger one or more automated functions of the footwear based on a foot presence indication. In an example, the sensor system includes a capacitive sensor configured to sense changes in a capacitance signal in response to proximity of a body. A dielectric member can be provided between the capacitive sensor and the body to enhance an output signal from the sensor.

Abstract: A control circuitry (11) comprises an adjustable capacitor (C1), and a bias source (111) configured to apply a bias voltage (V2) to said adjustable capacitor (C1) to adjust a capacitance value of the adjustable capacitor (C1). Such a control circuitry may for example be part of a sealing device (1) to seal a medical tubing (2), the sealing device (1) comprising a receptacle (100) to receive said medical tubing (2), the receptacle (100) comprising an electrode arrangement for causing a heat action on the tubing (2).

Abstract: An electronic device incudes a rotatable interface configured to be placed on an input device, the rotatable interface including a conductor region and an adjacent patterned region. The rotatable device further includes a first set of coupling electrodes configured to be electrically coupled to the conductor region and to receive a reference signal from a first electrode of the input device, and a second set of coupling electrodes configured to be electrically coupled to the patterned region and to be electrically coupled to a second electrode of the input device, the second electrode configured to receive a resulting signal modified by the rotatable interface. In embodiments, at least a portion of each electrode of the first set of coupling electrodes and the second set of coupling electrodes is respectively provided underneath the conductor and patterned regions, and is configured to abut the input device.

Abstract: Various implementations of a current flattening circuit are disclosed, including those utilizing a feedback current regulator, a feedforward current regulator, and a constant current source.

Abstract: A method of forming a microelectromechanical device wherein a beam of the microelectromechanical device may deviate from a resting to an engaged or disengaged position through electrical biasing. The microelectromechanical device comprises a beam disposed above a first RF electrode and a second RF electrode. The microelectromechanical device further comprises one or more electrical contacts disposed below the beam. The one or more electrical contacts comprise a first layer of ruthenium disposed over an oxide layer, a titanium nitride layer disposed on the first layer of ruthenium, and a second layer of ruthenium disposed on the titanium nitride layer.

Abstract: A variable capacitor includes an enclosure having first and second conductive collars separated by an intermediate electrically insulating element. A movable capacitor plate assembly is electrically coupled to the first conductive collar, and a fixed capacitor plate assembly is electrically coupled to the second conductive collar. An actuator extends into the enclosure for advancing and retracting the movable capacitor plate assembly relative to the fixed capacitor plate assembly. A hermetically sealed volume within the enclosure contains a dielectric fluid serving as a dielectric between a capacitor plate of the movable capacitor plate assembly and a capacitor plate of the fixed capacitor plate assembly. A flexible structure is provided to contain the dielectric fluid displaced when the movable capacitor plate assembly is advanced toward the fixed capacitor plate assembly.

Abstract: A component analyzing apparatus is provided. The component analyzing apparatus includes: an impedance measurer including: a plurality of electrodes having an electrode width that is determined based on an effective measurement depth for analyzing a component of an analyte and a gap between two electrodes among the plurality of electrodes, and an electrode controller configured to apply a first current to a first electrode and a second electrode among the plurality of electrodes and configured to measure impedance based on a voltage between a third electrode and a fourth electrode; and a processor configured to analyze the component of the analyte based on the impedance measured by the electrode controller.

Abstract: A pallet system (10) for transporting goods has a pallet (12) and a measuring component (14) located on top of the upper surface (18) of the pallet (12). The measuring component (14) comprises a first conductive layer (32) and a second conductive layer (34) spaced apart from each other forming a capacitor with a gap (36). At least one elastic element (30) is arranged within the gap, and a control unit (31) is electrically connected to the first conductive layer (32) and the second conductive layer (34), wherein the control unit (31) is configured to measure the capacitance of the capacitor. Further, a measuring component (14) is shown.

Abstract: Various implementations of a current flattening circuit are disclosed, including those utilizing a feedback current regulator, a feedforward current regulator, and a constant current source.

Abstract: A variable voltage generator circuit is described for generating, from a substantially constant supply voltage VS, a variable high-voltage control voltage VC for a variable power capacitor (1) having a variable-permittivity dielectric. The control voltage generator circuit comprises a top-up circuit (10) for maintaining the voltage VCin on an input capacitor (12) at least at supply voltage VS, and a bidirectional DC-DC converter circuit (20) having a variable voltage conversion factor G controlled by control input signal (27). The bidirectional DC-DC converter (20) is arranged to convert voltage, at the voltage conversion factor G, between the input capacitor voltage VCin and the output voltage VC. When VC<G×VCin, the DC-DC converter circuit (20) uses charge stored in the input capacitor (12) to charge the capacitive load (1). When VC>G×VCin, the DC-DC converter circuit (20) uses charge stored in the load capacitance (1) to charge the input capacitor (12).

Abstract: Some embodiments relate to a semiconductor structure including a semiconductor substrate having a frontside surface and a backside surface. An interconnect structure is disposed over the frontside surface. The interconnect structure includes a plurality of metal lines and vias that operably couple semiconductor transistor devices disposed in or on the frontside surface of the semiconductor substrate to one another. A trench is disposed in the backside surface of the semiconductor substrate. The trench is filled with an inner capacitor electrode, a capacitor dielectric layer overlying the inner capacitor electrode, and an outer capacitor electrode overlying the capacitor dielectric layer.

Abstract: An electronic device according to various embodiments comprises: a housing, extended to be long, including a first end part having an opening of a first diameter and a second end part having an opening of a second diameter that is larger than the first diameter; a first internal structure which includes a third end part located between the first end part and the second end part and a fourth end part located between the third end part and the second end part, and which is arranged in a first space of the housing between the first end part and the second end part; a pen tip part which includes a dielectric tip extending outwardly from the inside of the housing through the first end part, and which is mounted on the third end part of the first internal structure; a printed circuit board mounted on the first internal structure between the third end part and the fourth end part; a second internal structure which includes a fifth end part engaged with the fourth end part and a sixth end part exposed to the outside

Abstract: Metal e-fuse structure formed during back-end-of-line during processing and integral with on-chip metal-insulator-metal (MIM) capacitor (MIMcap). The metal e-fuse structures are extensions of MIMcap electrodes and are structured to isolate BEOL MIM capacitors for trimming and/or to isolate shorted or rendered highly leaky due to in process, or service induced defects. In one embodiment, the method incorporates the integral, co-processed metal e-fuse in series between the MIM capacitor and an active circuit. When a high current passes through the e-fuse element, the e-fuse element is rendered highly resistive or electrically open thereby disconnecting the MIM capacitor or electrode plate from the active circuitry. The e-fuse structure may comprise a thin neck portion(s) or zig-zag neck portion that extend from an MIMcap electrode away from the MIMcap between two inter-level interconnect via structures.

Abstract: A foot presence sensor system for an active article of footwear can include a sensor housing configured to be disposed at or in an insole of the article, and a controller circuit, disposed within the sensor housing, configured to trigger one or more automated functions of the footwear based on a foot presence indication. In an example, the sensor system includes a capacitive sensor configured to sense changes in a capacitance signal in response to proximity of a body. A dielectric member can be provided between the capacitive sensor and the body to enhance an output signal from the sensor.

Abstract: According to one embodiment, a sensor includes a base body, a first structure body, and a second structure body. The first structure body includes a first fixed portion, a first conductive portion, and first electrodes. The first fixed portion is fixed to the base body. The first conductive portion is held by the first fixed portion. The first conductive portion is separated from the base body in a first direction. The first electrodes are held by the first conductive portion. A distance between the base body and the first electrodes is changeable. The second structure body includes a second conductive portion and second electrodes. The second conductive portion is fixed to the base body. The second electrodes are held by the second conductive portion. One of the second electrodes is between the one of the first electrodes and the other one of the first electrodes.

Abstract: A charge volume configuration for use in delivery of gas to a reactor for processing semiconductor wafers is provided. A charge volume includes a chamber that extends between a proximal end and a distal end. A base connected to the proximal end of the chamber, and the base includes an inlet port and an outlet port. A tube is disposed within the chamber. The tube has a tube diameter that is less than a chamber diameter. The tube has a connection end coupled to the inlet port at the proximal end of the chamber and an output end disposed at the distal end of the chamber.

Abstract: The present invention comprises: a first region, having a display area for outputting images, for receiving touch input or acquiring fingerprint data by means of a touch entered on the display area; a touchscreen comprising a second region for receiving touch input; and a control unit for switching the first region from a touch receiving mode, which receives touch input, to a fingerprint sensing mode when a touch input is entered in the first region, wherein the touchscreen is provided with a touch sensor layer for receiving touch input at a first sense resolution in the touch receiving mode, and the control unit which, in the fingerprint sensing mode, switches the first region from the first sense resolution to a second sense resolution, which is higher than the former, so as to acquire fingerprint data, and maintains the second region at the first sense resolution so that the former receives touch input.

Abstract: The disclosure provides a fingerprint identification system, which is formed in an integrated circuit. The fingerprint identification system includes: a pixel array circuit; a first peripheral top electrode; a first capacitive sensing circuit for sensing a capacitance associated with the first peripheral top electrode in a sleep mode and for generating a sensing result; and a logic control circuit for generating the control signal according to the sensing result. When the sensing result shows that the first peripheral top electrode is touched by a finger, the control signal is generated by the logic control circuit so that the pixel array circuit is switched from the sleep mode to the normal operation mode.

Abstract: The present subject matter relates to systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element. In particular, a micro-electro-mechanical systems (MEMS) can comprise a fixed electrode positioned on a substrate, a moveable electrode positioned substantially above the fixed electrode and separated from the fixed electrode by a gap, and at least one standoff bump positioned between the fixed electrode and the moveable electrode, wherein the at least one standoff bump extends into the gap. In this configuration, one or both of the fixed electrode or the moveable electrode can be patterned to define one or more hole that is substantially aligned with the one or more of the at least one standoff bump. The bump and the hole can both help to reduce the rate of surface dielectric charging and the total amount of charge generated.

Abstract: A displacement sensor for sensing a change in separation between a first element and a second element along a displacement direction. The sensor comprises a reference electrode mounted to the second element in the form of a conductive trace on a surface of the second element facing the first element. A deformable electrode, e.g. a conductive elastomeric material, is arranged between the first element and the second element so as to overlie the reference electrode. The deformable electrode has a contact surface facing the reference electrode and insulated therefrom. At least part of the contact surface is inclined relative to an opposing surface of the reference electrode such that when the deformable electrode is compressed along the displacement direction there is a reduction in volume between the contact surface and the opposing surface of the reference electrode, thereby changing the capacitive coupling between them.

Abstract: Systems and methods are disclosed herein to a power factor adjustor comprising: a power factor measurement unit configured to measure the power factor on an input line to a load and generate a power factor correction signal based on the measured power factor; and a power factor adjustment unit connected to the power factor measurement unit comprising: a fixed capacitor connected in series to a first switching device; and an adjustable element having a variable capacitance connected in parallel to the fixed capacitor and in series to a second switching device, wherein the overall capacitance of the power factor adjustment unit is adjusted by adjusting the capacitance of the adjustable element or by toggling the first and second switching devices in response to the power factor correction signal.

Abstract: A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.

Abstract: A foot presence sensor system for an active article of footwear can include a sensor housing configured to be disposed at or in an insole of the article, and a controller circuit, disposed within the sensor housing, configured to trigger one or more automated functions of the footwear based on a foot presence indication. In an example, the sensor system includes a capacitive sensor configured to sense changes in a capacitance signal in response to proximity of a body. A dielectric member can be provided between the capacitive sensor and the body to enhance an output signal from the sensor.

Abstract: It is described an arrangement (560, 660, 760) for fingerprint sensing/verification, comprising: a sensor system (100) comprising plural sensor capacitors (101), each sensor capacitor including a central electrode (103) and a peripheral electrode (105) annularly surrounding the central electrode and being connected to a ground potential; wherein changes of the electric fields between each of the central electrode and the peripheral electrode of the plural sensor capacitors upon positioning a finger (317) close to the sensor system is used to detect the fingerprint.

Abstract: An input device, comprising an input interface, an adjustable capacitor, a memory and a processor, wherein the input interface is abutted with the adjustable capacitors; the memory is electrically connected with the adjustable capacitor and the processor, respectively, the input interface is used for generating pressing signals after being physically pressed so as to change the capacitance of the adjustable capacitor, the adjustable capacitor is used for correspondingly responding to the pressing signals of the input interface and outputting the capacitance changing signals, the memory is used for receiving the capacitance changing signals of the adjustable capacitor and finding corresponding output signals from the look-up table pre-stored in the memory; and the processor is used for receiving the output signals of the memory and feeding back the first input signal or the second input signal.

Abstract: A line charge volume and methods for use in delivery of gas to a reactor for processing semiconductor wafers is provided. The line charge volume includes a chamber that extends between a first end and a second end, and the first end includes an inlet port and an outlet port. A pressure sensor is integrated with the chamber. The pressure sensor has a measurement side for measuring a deflection of a diaphragm. The diaphragm is directly exposed to an interior of the chamber so that pressure produced by a gas that is provided into the chamber via the inlet port produces a force upon the diaphragm. The measurement side includes electronics for measuring a capacitance value corresponding to the deflection of the diaphragm. The deflection is correlated to a pressure difference, and the pressure difference is equivalent to a pressure volume (Pv) of the chamber.

Abstract: A fingerprint recognition system and method are disclosed. The fingerprint recognition system includes: a fingerprint recognition apparatus, a detection electrode, and a contact detection apparatus. The contact detection apparatus includes: an analog to digital converter configured to charge and discharge the detection electrode and to detect a capacitance value of the detection electrode; a determining module configured to determine whether the detection electrode is touched by a finger according to the capacitance value, and to generate finger touch information when determining that the finger touches the detection electrode to start the fingerprint recognition apparatus to perform fingerprint recognition.

Abstract: An interference-free fingerprint identification device includes a TFT substrate, a TFT layer having plural TFTs, a sensing electrode layer having plural fingerprint sensing electrodes, a gate line layer having plural gate lines, a data line layer having plural data lines, and a first shielding layer. Each fingerprint sensing electrode corresponds to a plurality of the TFTs, and is connected to sources or drains of at least two corresponding TFTs. At least two gate lines are electrically connected to gates of a plurality of the TFTs corresponding to a fingerprint sensing electrode. Each data line is electrically connected to a source or drain of a TFT in a plurality of the TFTs corresponding to a fingerprint sensing electrode. The first shielding layer is electrically connected to a source or drain of a TFT in a plurality of the TFTs corresponding to each fingerprint sensing electrode.

Abstract: A multilayer ceramic capacitor includes a multilayer body including dielectric layers stacked on one another, inner electrodes, and auxiliary electrodes, and outer electrodes on end surfaces of the multilayer body. The inner electrodes include first through fifth inner electrodes on different planes. The auxiliary electrodes include a first auxiliary electrode on the same plane as the first inner electrode, a second auxiliary electrode on the same plane as the second inner electrode, a third auxiliary electrode on the same plane as the third inner electrode, and a fourth auxiliary electrode on the same plane as the fourth inner electrode.

Abstract: A fingerprint detection device including a sensor array including a plurality of fingerprint sensor elements arranged in a form of a matrix having a plurality of rows and columns, a filter and buffer unit including a plurality of first banks, each of which is configured to perform a noise elimination operation and a temporal storage operation in parallel with respect to output signals of some different columns of the sensor array. Each of the plurality of first banks simultaneously or consecutively acquires output signals from the fingerprint sensor elements belonging to columns spaced apart from each other by a predetermined distance. A sample and hold unit including second banks, the number of which being the same as the number of the plurality of first banks, performs a sampling and hold function in parallel in response to output signals from the plurality of first banks. An input/output unit receives an output signal from the sample and hold unit to output data of the sensor array.

Abstract: A passive discrete device may include a first asymmetric terminal and a second asymmetric terminal. The passive discrete device may further include first internal electrodes extended to electrically couple to a first side and a second side of the first asymmetric terminal. The passive discrete device may also include second internal electrodes extended to electrically couple to a first side and a second side of the second asymmetric terminal.

Abstract: Capacitive measurements for monitoring vapor or deposits from a vapor in a radiation source for a lithography apparatus. The measurements may be used to control operation of the radiation source. In one particular arrangement measurements from a plurality of capacitors are used to distinguish between changes in capacitance caused by the vapor and changes in capacitance caused by deposits from the vapor.

Abstract: A MEMS force sensor has: a substrate; a fixed electrode coupled to the substrate; and a mobile electrode suspended above the substrate at the fixed electrode to define a sensing capacitor, the mobile electrode being designed to undergo deformation due to application of a force to be detected. A dielectric material region is set on the fixed electrode and spaced apart by an air gap from the mobile electrode, in resting conditions. The mobile electrode comes to bear upon the dielectric material region upon application of a minimum detectable value of the force, so that a contact surface between the mobile electrode and the dielectric material region increases, in particular in a substantially linear way, as the force increases.

Abstract: An angular acceleration detection device includes a rotating weight, a fixed portion, a support beam, and a detection portion. The rotating weight is rotatable about a Z-axis with respect to the fixed portion by action of an inertial force generated by an angular acceleration about the Z-axis. The fixed portion is disposed at a position spaced from the rotating weight. The support beam is disposed in an X-Y plane between the fixed portion and the rotating weight, the support beam elastically supporting the rotating weight with respect to the fixed portion. The detection portion outputs a detection signal corresponding to stress generated in the support beam. A gravity center position of the rotating weight is aligned with the support beam when viewed in a Z-axis direction.

Abstract: A sensing apparatus includes a substrate, N groups of sensing elements formed on the substrate, a sensing circuit and a switch control circuit. Each group of the N groups of sensing elements includes a plurality of sensing elements. Each of the sensing elements includes a thin-film transistor (TFT) switch and a sensing electrode. The sensing electrode drives the N groups of sensing elements to sequentially generate N groups of sensing signals. By controlling the TFT switches, the switch control circuit controls a plurality of sensing electrodes included in one group of the N groups of sensing elements to be coupled to the sensing circuit.

Abstract: A radio frequency (RF) die package includes a switch assembly comprising an RF transmission line and a plurality of conductive mounting pads formed on a first substrate. A switching mechanism selectively couples a first portion of the RF transmission line to a second portion of the RF transmission line. An inverted ground plane assembly is coupled to the plurality of conductive mounting pads such that an electromagnetic field generated between the RF transmission line and the inverted ground plane assembly does not permeate the first substrate in a region of the switch assembly proximate the switching mechanism.

Abstract: Aspects of the present disclosure are directed towards methods, systems, and apparatuses that include a pressure-sensor arrangement including a plate structure and a plurality or array of pressure-sensor cells. Additionally, the methods, systems, and apparatuses include integrated circuitry communicatively coupled to the pressure-sensor arrangement that senses pressure changes exhibited by changes in capacitance or vibrational characteristics.

Abstract: Methods and systems for provided for accurately estimating an engine intake or exhaust manifold pressure using a laser pressure transducer. Laser circuitry is coupled to a pressure sensitive diaphragm that is mounted to the engine manifold. Manifold pressure is inferred based on a deflection of the diaphragm, as estimated based on a timing between emission of a laser pulse into the diaphragm and detection of a reflected pulse from the diaphragm.

Abstract: A capacitive sensor for detecting the movement of an object, such as actuation of a key of an operating unit, includes first and second electrodes that are provided for connection or mechanical coupling to or arrangement on the object, the distance of which second electrode from the first electrode changes when the object moves. The electrodes form a first capacitor with a volume between the electrodes, the size of which changes when the object moves. An evaluation unit determines a change of capacitance between the two electrodes resulting from a change of their spacing and volume. A deformable, non-gaseous first dielectric is arranged between the electrodes and defines at least one gas volume that is filled by a gaseous second dielectric that can escape from the gas volume when the two electrodes approach one another.

Abstract: A method for production of a pressure sensor including a flat flexible membrane made of a ceramic material and a flat rigid support thereof made of a ceramic material is provided. Steps include: —establishing an electric circuit on the membrane; —establishing an electric contact with the outside on the support; —depositing an electrically conductive material on the support; —establishing an electrical and mechanical coupling between the membrane and the support. The electrical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of an electrically conductive sinterable electrical connection material. The mechanical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of sinterable mechanical connection material that is electrically insulating and/or isolated from the layer of sinterable electrical connection material.

Abstract: An isolation system, isolation capacitor, and Integrated Circuit are disclosed. The isolation capacitor is described to include a first capacitive element, a second capacitive element, a primary isolation layer positioned between the first and second capacitive elements, as well as a secondary isolation layer positioned between the first and second capacitive elements. The secondary isolation layer has an area that is larger than an area of one or both of the first and second capacitive elements, thereby reducing the likelihood of breakdown between the first and second capacitive elements.

Abstract: A method of forming a capacitive sensor includes forming a capacitive touch position sensor including a first plurality electrodes sense electrodes and drive electrodes in a touch sensing area of a capacitive sensor. The first plurality of sense electrodes and drive electrodes are configured to enable detection of the presence and position of a touch in the touch sensing area. The method also includes forming a capacitive finger print sensor including a second plurality of sense electrodes and drive in a fingerprint sensing area of the capacitive sensor. The second plurality of sense electrodes and drive are configured to enable identification of the fingerprint of a finger placed in the fingerprint sensing area.

Abstract: Techniques are generally described for touch-sensitive devices with biometric information determination capabilities. The touch-sensitive device may include one or more of a transmitter, a receiver, and a processor. The transmitter may be configured to emit light towards a surface of the touch-sensitive device and the receiver may be configured to receive reflected light from a touch to the touch-sensitive device. The processor may be arranged to receive signals from the receiver and determines biometric information, and in some examples location of touch, based on the signals.

Abstract: A tunable capacitor implemented as interdigitated arrays of finger elements arranged so that the spacing between finger arrays may be adjusted. The design has a number of advantages including high capacitance for a given circuit area, small area for a given desired capacitance, mechanical stability, high self resonance frequency, and high quality factor.

Abstract: A cylindrical annular detector is disposed at the periphery of the columnar body fixed at a central part of the upper surface of a supporting substrate. A space between the columnar body and the annular detector is connected by a thin flexible connection member (diaphragm). A washer-shaped insulation substrate is disposed on the upper surface of the supporting substrate, individual fixed electrodes are formed on the upper surface thereof, and they constitute capacitive elements together with a displacement electrode which is composed of the lower surface of the annular detector. Upon exertion of an external force on the annular detector, the flexible connection member deflects to cause displacement, which is detected as change in capacitance value of the capacitive element.

Abstract: A variable capacitance device that operates properly at a point along a signal line through which a high-voltage RF signal passes while reducing a necessary DC voltage includes a substrate, a beam, and lower drive electrodes. The beam is connected to the substrate through a support portion. Lower drive electrodes and the beam generate a capacitance when a DC voltage is applied, and an electrostatic force due to this capacitance deforms the beam. The lower drive electrodes face the beam and are coupled to each other through the beam. An RF signal propagates between the lower drive electrodes.

Abstract: A new type of variable coaxial, low frequency capacitor uses two cylindrical blocks, which are interdigitally insertable into each-other to create an adjustable capacitance. Each block is made using a conductive (aluminum, brass or copper) strip which is mounted vertically on a conductive basis and is wound in spiral form around a center axis. The blocks are guided coaxially into each-other and the relative orientation angle allows approaching the surfaces of the conductive strips from a maximum distance, which is half the width of the spiral gap, to full galvanic contact. The block penetration is motor controlled and a cascade of three or four such capacitors and associated lengths of coaxial cable is used to make wideband impedance tuners operating in the low MHz frequency range.

Abstract: Display elements of a display array include at least one fixed layer and a movable layer. The movable layer is positioned with respect to the at least one fixed layer by placing a charge on the movable layer and applying a voltage to the at least one fixed layer. The at least one fixed layer may be two layers positioned on either side of the movable layer. The movable layer may be positioned in a desired position when driving an array of display elements by executing a reset stage, a charging stage, and a bias stage.

Abstract: A variable capacitor includes a plurality of variable capacitor elements connected in parallel with one another, the variable capacitor elements each including a fixed electrode and a movable electrode facing each other, a beam supporting the movable electrode displaceably, and a drive electrode supplied with a drive voltage to change spacing between the fixed electrode and the movable electrode. The variable capacitor further includes a drive control unit configured to sequentially apply an AC drive voltage to the drive electrodes of the variable capacitor elements with a predetermined phase difference for each element. The sum of capacitances of the variable capacitor elements is an output capacitance.