Rotating Mirror Patents (Class 372/15)
  • Patent number: 11815653
    Abstract: An assembly and method for using weather sensors with enhanced modular capability is disclosed. The weather sensor assembly generally comprises a cap module, middle module, and a base module, where the cap module, middle module(s) and the base module are stacked adjacently to provide environmental sealing, weather sensing, and electrical connectivity to the weather sensor assembly. One or more ring mechanisms may be included that interlock the cap module, middle module(s), base module to form the weather sensor assembly into an integrated unit. Moreover, the ring mechanisms enable further modules to be added to the weather sensor assembly for additional capabilities. By doing so, each of the modules in the weather sensor assembly may be independent units that can be removed, reordered, swapped, and added for desired sensing modalities and environments.
    Type: Grant
    Filed: January 20, 2023
    Date of Patent: November 14, 2023
    Assignee: INTELLISENSE SYSTEMS, INC.
    Inventors: Christopher Ulmer, David Miller, Anthony Michael, Thomas Vu, Jeffrey Norell, David Gustavson, Gregory Peng, Drew Yenzer, Haider Rasool
  • Patent number: 11011883
    Abstract: A radio-frequency, RF, slab laser 10 with a Z-fold resonator cavity defined by an output mirror 32, a first fold mirror 34, a second fold mirror 36 and a rear mirror 30. The second fold mirror 36 is rotated by an adjustment angle away from the angle it would have if the mirrors were all plane mirrors and directed the round trip beam path by direct reflection. Moreover, the rear mirror 30 is rotated by an adjustment angle that is approximately twice the adjustment angle of the second fold mirror 36. These rotations of the rear mirror 30 and second fold mirror 36 suppresses parasitic mode paths that would otherwise exist.
    Type: Grant
    Filed: February 10, 2020
    Date of Patent: May 18, 2021
    Assignee: KERN TECHNOLOGIES, LLC
    Inventors: Gerald L. Kern, Paul E. Jackson
  • Patent number: 10337355
    Abstract: Aspects of the disclosure are directed to a first device coupled to a bearing compartment structure, a second device coupled to an engine case structure, and a controller. The controller is configured to: issue a command to one of the first device or the second device to generate a signal, obtain data from the other of the one of the first device or the second device, where the data is based on the signal, process the data to determine that a skew exists between the bearing compartment structure and the engine case structure in an amount that is greater than a threshold, identify at least one torqueing device to activate based on processing the data, and cause the at least one torqueing device to activate to cause the bearing compartment structure and the engine case structure to align within the threshold amount.
    Type: Grant
    Filed: January 22, 2016
    Date of Patent: July 2, 2019
    Assignee: United Technologies Corporation
    Inventors: Russell B. Witlicki, Daniel Rosen, Alexander Rothchild, Armando Amador
  • Patent number: 8929409
    Abstract: A tunable narrow linewidth laser is provided, wherein an adjustable etalon structure is employed to simultaneously tune the wavelength of the laser transmission and the length of the laser cavity. The etalon structure is an effective, relatively thick shear plate comprised of transparent matched wedge-shaped substrates and a pair of parallel, partially transmissive mirrors with a space therebetween. Rotation of the etalon structure relative to the laser input changes the angle of incidence to the first substrate and the etalon angle, thereby changing the wavelength of the laser light and also changing the length of the external laser cavity. Thus, reliable frequency tuning is achieved, without mode hopping.
    Type: Grant
    Filed: December 22, 2008
    Date of Patent: January 6, 2015
    Assignee: Renishaw PLC
    Inventors: Nigel Copner, Nayla El Dahdah
  • Patent number: 8811440
    Abstract: A method and apparatus for stabilizing the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed. In one embodiment, the cavity length of the laser may be adjusted by means of a movable mirror forming one end of the cavity. The time delay from the release of an output pulse to the lasing threshold next being reached is measured at different mirror positions, and a mirror position selected which results in a cavity mode being aligned with the gain peak of the laser, thus producing a minimum time delay from an output pulse of the laser to the next lasing threshold. A Q-switch in the laser allows for pre-lasing and thus jitter-free timing of output pulses. Feedback loops keep the laser output at maximum gain and efficiency, and the attenuation and timing at a desired operating point.
    Type: Grant
    Filed: September 7, 2012
    Date of Patent: August 19, 2014
    Assignee: ASML Netherlands B.V.
    Inventor: Richard L. Sandstrom
  • Publication number: 20140202247
    Abstract: A laser source unit obtains Q switch pulse oscillation with a simple structure while continuously switching a plurality of wavelengths. A laser source unit emits pulsed laser beams with a plurality of different wavelengths. A flash lamp radiates excitation light to a laser rod. A pair of mirrors face each other with the laser rod interposed therebetween. The pair of mirrors form an optical resonator. Wavelength selection unit controls the wavelength of light which resonates in the optical resonator to any one of a plurality of wavelengths to be emitted by the laser source unit. Driving unit drives the wavelength selection unit such that the optical resonator performs the Q switch pulse oscillation.
    Type: Application
    Filed: March 26, 2014
    Publication date: July 24, 2014
    Applicant: FUJIFILM Corporation
    Inventors: Tadashi KASAMATSU, Kazuhiro HIROTA
  • Patent number: 8709004
    Abstract: A method and device for improved minimally invasive vascular treatments. The method comprises introducing a catheter into a vein to be treated. The catheter is adapted to introduce an energy transmitting member and a fluid into the vein to be treated. The fluid introduced via the catheter can include, but is not limited to: saline solutions, cooled saline solutions, liquids for vapor generation, vasoconstricting agents, anesthetic agents and/or a formulation containing an ingredient which can be activated by the applied energy.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: April 29, 2014
    Assignee: Biolitec Pharma Marketing Ltd
    Inventors: Julio H. G. Ferreira, Jorge O. Löpez D'Ambola, Wolfgang Neuberger, Antonio C. Reichelt, Jorge E. Soracco
  • Patent number: 8693510
    Abstract: An optical transmitter includes a laser configured to emit light, a power of the light increasing with temperature decreasing, a Faraday rotator configured to rotate a polarization direction of the light in accordance with the temperature, and a first polarizer that has a principal axis inclined at a given angle and inputs the light output from the Faraday rotator.
    Type: Grant
    Filed: February 28, 2012
    Date of Patent: April 8, 2014
    Assignee: Fujitsu Optical Components Limited
    Inventor: Manabu Komiyama
  • Patent number: 8660154
    Abstract: A digitally-controllable laser apparatus includes a resonator, which includes a two-dimensional micromirror array, and an output facet configured to output a laser beam. The array has a controllable two-dimensional reflectivity to provide control of a two-dimensional wave front of the laser beam. A digitally-controlled Q-switching of the laser apparatus, and shaping of the laser beam wave front to thereby steer the laser beam can be realized.
    Type: Grant
    Filed: January 10, 2012
    Date of Patent: February 25, 2014
    Assignee: Google Inc.
    Inventor: Jasmine Louise Strong
  • Patent number: 8588269
    Abstract: A laser crystallization device is provided, which includes a vibration device vibrating a laser beam along its long axis, wherein a vibration frequency at which the laser beam vibrates is satisfied by Equation 1 below. F<(P*f)/(2*W)??Equation 1 where F is the mirror vibration frequency, W is the laser beam width, P is the laser scan pitch, and f is the laser pulse frequency.
    Type: Grant
    Filed: March 28, 2012
    Date of Patent: November 19, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventor: Hiroshi Okumura
  • Patent number: 8422529
    Abstract: A tunable laser light source having emission wavelengths in a visible or an adjoining spectral region includes a rotationally disposed laser substrate having more than one emission wavelength, a drive unit coupled to the laser substrate, a pulsed light source having a pulse transmitter, a trigger device, and a signal-delay unit. The trigger device, the signal-delay unit and the pulse transmitter are sequentially connected downstream of the drive unit.
    Type: Grant
    Filed: August 19, 2010
    Date of Patent: April 16, 2013
    Assignee: Karlsruher Institut Fuer Technologie
    Inventors: Thomas Woggon, Soenke Klinkhammer, Sebastian Valouch, Johannes Bach, Uli Lemmer
  • Patent number: 8369366
    Abstract: To make it possible to use a type I nonlinear optical crystal or a quasi phase matching element as a third harmonic generation crystal there is provided a semiconductor laser, a solid state laser medium that outputs a fundamental wave, a second harmonic generation crystal that outputs a second harmonic wave from the fundamental wave, and a third harmonic generation crystal that outputs a third harmonic wave from the fundamental wave and the second harmonic wave. A quasi phase matching elements is utilized as the second harmonic generation crystal. It is possible to use a type I nonlinear optical crystal or a quasi phase matching element as the third harmonic generation crystal.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: February 5, 2013
    Assignee: Shimadzu Corporation
    Inventors: Koji Tojo, Naoya Ishigaki
  • Patent number: 8351474
    Abstract: In accordance with the present invention, a compact laser system with nearly continuous wavelength scanning is presented. In some embodiments, the compact laser system can be scanned over a broad range. In some embodiments, the compact laser system can be scanned at high scan rates. In some embodiments, the compact laser system can have a variable coherence length. In particular, embodiments with wavelength scanning over 140 nm with continuously variable scan rates of up to about 1 nm/?s, and discrete increase in scan rates up to about 10 nm/?s, and variable coherence lengths of from 1 mm to about 30 mm can be achieved.
    Type: Grant
    Filed: October 21, 2010
    Date of Patent: January 8, 2013
    Assignee: Thorlabs, Inc.
    Inventors: Alex Ezra Cable, Johan Michael Larsson, Lars Goran Sandstrom, Bengt Kleman
  • Patent number: 8204088
    Abstract: An external resonator type wavelength tunable laser has a laser medium, a dispersion system which spatially disperses light emitted from the laser medium by wavelength, and a wavelength selecting system having a reflecting surface which selectively reflects a part of the light which is reflected by the reflecting surface as a return light, and the wavelength selecting system is structured so that the inverse of a number of a wavelength of the return light linearly changes with time.
    Type: Grant
    Filed: March 22, 2007
    Date of Patent: June 19, 2012
    Assignees: FUJIFILM Corporation, Fujinon Corporation
    Inventor: Kouki Nakabayashi
  • Patent number: 8139616
    Abstract: A pulsed light generator of the invention includes: an excitation light source; a fiber grating into which excitation light from the excitation light source enters; a rare-earth doped optical fiber optically coupled with the fiber grating, in which a rare-earth element is doped into a core, serving as an optical transmitting section; an optical switch including a deflection element for causing a Q-switching operation; a first optical fiber that causes light from the rare-earth doped optical fiber to enter into the optical switch; and a second optical fiber for waveguiding pulsed light output from the optical switch. One surface side of the optical switch, into which light enters, is subjected to anti-reflection treatment with a reflectance with respect to a wavelength of the pulsed light output from the optical switch being 0.1% or less.
    Type: Grant
    Filed: July 22, 2010
    Date of Patent: March 20, 2012
    Assignee: Fujikura Ltd.
    Inventor: Michihiro Nakai
  • Patent number: 8130800
    Abstract: A mode-locked laser employs a coupled-polarization scheme for efficient longitudinal pumping by reshaped laser diode bars. One or more dielectric polarizers are configured to reflect a pumping wavelength having a first polarization and to reflect a lasing wavelength having a second polarization. An asymmetric cavity provides relatively large beam spot sizes in gain medium to permit efficient coupling to a volume pumped by a laser diode bar. The cavity can include a collimation region with a controlled beam spot size for insertion of a saturable absorber and dispersion components. Beam spot size is selected to provide stable mode locking based on Kerr lensing. Pulse durations of less than 100 fs can be achieved in Yb:KGW.
    Type: Grant
    Filed: March 14, 2007
    Date of Patent: March 6, 2012
    Assignee: Battelle Memorial Institute
    Inventor: Gary R. Holtom
  • Publication number: 20120033687
    Abstract: Disclosed is a laser device. The laser device includes a pulse generator which irradiates a laser beam between a high reflector mirror and an output coupler mirror to amplify and resonate the laser beam, a pulse output section which receives a laser beam pulse amplified and resonated through the output coupler mirror to output the laser beam pulse, and a Q switch which moves backward or forward in a direction perpendicular to a path of the laser beam formed between the pulse generator and the high reflector mirror. The output coupler mirror includes first and second mirrors provided on a base plate. Positions of the first and second mirrors are selectively changed as the Q switch moves backward or forward.
    Type: Application
    Filed: June 17, 2010
    Publication date: February 9, 2012
    Applicant: JAWON MEDICAL CO., LTD.
    Inventor: Wonhee Park
  • Patent number: 7920607
    Abstract: A wavelength conversion apparatus capable of keeping high wavelength conversion efficiency for a longer time than ever before is provided. A wavelength conversion apparatus includes: a wavelength conversion section including a nonlinear optical crystal, and performing wavelength conversion of incident laser light by allowing the incident laser light to pass through the nonlinear optical crystal; and a relative position control section, when wavelength conversion is performed by the wavelength conversion section, relatively displacing the incident position of the incident laser light in an incident plane into which the incident laser light enters of the nonlinear optical crystal in a direction including a projection direction component of a +C axis to the incident plane in the nonlinear optical crystal or a direction orthogonal to the projection direction component.
    Type: Grant
    Filed: July 7, 2009
    Date of Patent: April 5, 2011
    Assignee: Sony Corporation
    Inventors: Ryo Furutachi, Tetsuro Kuwayama, Hisashi Masuda
  • Patent number: 7866831
    Abstract: An image projector realizing image projection with high image quality by reducing speckle noise. An image projector comprising a coherent light source, a collimation lens for transforming coherent light emitted from the coherent light source into coherent parallel light, and a projection optical system for projecting coherent parallel light is further provided with a reflection element for reflecting the coherent parallel light and capable of oscillating in parallel with the direction normal to the reflection plane, and a reflection element drive means for causing oscillatory motion of the reflection element.
    Type: Grant
    Filed: March 13, 2006
    Date of Patent: January 11, 2011
    Assignee: Panasonic Corporation
    Inventors: Ken'ichi Kasazumi, Yoshikazu Hori
  • Patent number: 7724785
    Abstract: Multiple laser resonators share a common acousto-optic Q-switch. The Q-switch is driven by a radio-frequency (RF) transducer that causes an acoustic wave to propagate in the Q-switch. Turning off the RF transducer discontinues propagation of the acoustic wave and causes each of the laser resonators to deliver an optical pulse. The finite velocity of the acoustic wave causes the pulses to be delivered temporally spaced apart.
    Type: Grant
    Filed: June 29, 2007
    Date of Patent: May 25, 2010
    Assignee: Coherent, Inc.
    Inventors: Luis A. Spinelli, Sergei V. Govorkov
  • Patent number: 7672343
    Abstract: A high power laser processing system is disclosed that includes a laser source and at least one optical element. The laser source provides a high power laser illumination of a first wavelength. The optical element includes a substrate that is substantially transparent to the first wavelength illumination, at least one highly reflective coating on a first side of the substrate, and at least one anti-reflective coating on a second side of the substrate.
    Type: Grant
    Filed: July 7, 2006
    Date of Patent: March 2, 2010
    Assignee: GSI Group Corporation
    Inventor: David C. Brown
  • Patent number: 7618415
    Abstract: A device and method for steering a laser beam to a focal point in target tissue requires generating a laser beam. Diversions of the laser beam from a central beam path are minimized by a sequential arrangement of optical steering components. In order, the beam is first directed to the center of a z-scanning apparatus which will move the focal point in the medium in a z-direction. The beam is then passed to the center of a first galvanometric mirror which introduces focal point movements in the x-direction. A second galvanometric mirror then compensates for the x-direction movement by redirecting the beam to the center of a third galvanometric mirror where focal point movements in the y-direction are introduced.
    Type: Grant
    Filed: April 9, 2004
    Date of Patent: November 17, 2009
    Assignee: Technolas Perfect Vision GmbH
    Inventors: Ralf Kessler, Frieder Loesel, Thomas Sauter
  • Patent number: 7581835
    Abstract: A light show device includes a light source configured to generate a light beam having a substantially constant diameter, a container having a substantially transparent portion, a plurality of mirrors, each mirror connectable or connected to the container rotatably about at least one axis, and a particulate source configured to create inside the container a substantial suspension of particulates, where the device is configured to allow a reflection of the light beam between at least a majority of the mirrors.
    Type: Grant
    Filed: November 22, 2004
    Date of Patent: September 1, 2009
    Inventor: Brian W. Walker
  • Patent number: 7545838
    Abstract: A method of combining beams from a plurality of laser resonators includes frequency modulating the output of each of the lasers with one or more of the lasers frequency modulated out-of-phase with the others. The frequency modulated beams are directed along parallel spaced-apart paths and overlap in a plane along the paths to form a combined beam having a flat-topped intensity distribution.
    Type: Grant
    Filed: June 4, 2007
    Date of Patent: June 9, 2009
    Assignee: Coherent, Inc.
    Inventors: Joel Fontanella, David E. Brown, Eric R. Mueller, Raymond Michaud
  • Patent number: 7519096
    Abstract: An apparatus and source arrangement for filtering an electromagnetic radiation can be provided which may include at least one spectral separating arrangement configured to physically separate one or more components of the electromagnetic radiation based on a frequency of the electromagnetic radiation. The apparatus and source arrangement may also have at least one continuously rotating optical arrangement which is configured to receive at least one signal that is associated with the one or more components. Further, the apparatus and source arrangement can include at least one beam selecting arrangement configured to receive the signal.
    Type: Grant
    Filed: June 4, 2004
    Date of Patent: April 14, 2009
    Assignee: The General Hospital Corporation
    Inventors: Brett Bouma, Seok-Hyun (Andy) Yun, Wang-Yuhl (William) Oh, Johannes deBoer, Guillermo Tearney
  • Patent number: 7489714
    Abstract: A speckle reduction laser and a laser display apparatus having the speckle reduction laser are provided. The speckle reduction laser includes a semiconductor unit that comprises an active layer and emits laser light through a first side surface thereof by resonating light generated from the active layer, and a vibration mirror unit disposed adjacent to a second side surface of the semiconductor unit. The laser further includes a mirror, and the resonance of the laser light is generated between the first side surface of the semiconductor unit and the mirror, and a resonance mode of the laser light is changed according to the vibration of the mirror.
    Type: Grant
    Filed: August 22, 2007
    Date of Patent: February 10, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yong-hwa Park, Kyoung-ho Ha, Jun-o Kim, Yong-kweun Mun
  • Patent number: 7480321
    Abstract: A vertical external cavity surface emitting laser (VECSEL) having an improved mirror that forms an external cavity to modulate an emitted laser beam and display apparatus employing the same are provided. The VECSEL includes: a pumping light source; a laser chip that is excited by a pump beam emitted by the pumping light source to emit a laser beam of a predetermined wavelength; a folding mirror that is separated from the laser chip and is obliquely disposed relative to an axis of incident light emitted by the laser chip and converts the propagation path of an incident laser beam; a movable mirror unit facing the folding mirror and rotates so as to selectively reflect a laser beam reflected from the folding mirror to the folding mirror.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: January 20, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Soo-haeng Cho
  • Patent number: 7411989
    Abstract: A CO2 laser has a resonator mirror that oscillates about an axis perpendicular to the resonator axis through an angular range of oscillation sufficient that the resonator is only able to deliver radiation for a fraction of an oscillation period of the mirror. In one example of the laser, the oscillating mirror is an end-mirror of the resonator. In another example, the oscillating mirror is a fold mirror of the resonator.
    Type: Grant
    Filed: December 13, 2006
    Date of Patent: August 12, 2008
    Assignee: Coherent, Inc.
    Inventors: Luis A. Spinelli, Anthony J. DeMaria, Vernon Seguin
  • Publication number: 20080144675
    Abstract: A CO2 laser has a resonator mirror that oscillates about an axis perpendicular to the resonator axis through an angular range of oscillation sufficient that the resonator is only able to deliver radiation for a fraction of an oscillation period of the mirror. In one example of the laser, the oscillating mirror is an end-mirror of the resonator. In another example, the oscillating mirror is a fold mirror of the resonator.
    Type: Application
    Filed: December 13, 2006
    Publication date: June 19, 2008
    Inventors: Luis A. Spinelli, Anthony J. DeMaria, Vernon Seguin
  • Patent number: 7366221
    Abstract: A laser apparatus is disclosed. The laser apparatus has a diffraction grating that receives laser light from a semiconductor laser, emits first order diffracted light having a predetermined wavelength to the semiconductor laser, and reflects zero-th order light, a reflection section that reflects the zero-th order light reflected by the diffraction grating, a hold section that holds the diffraction grating and the reflection section while an open angle of the diffraction grating and the reflection section is kept constant, the hold section being rotatable with a fulcrum of an intersection of an extended line of a front surface of the diffraction grating and an extended line of a front surface of the reflection section, and a linear drive section that rotates the hold section with a linear motion of a piezoelectric device that expands and shrinks by the piezoelectric effect.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: April 29, 2008
    Assignee: Sony Corporation
    Inventors: Tomiji Tanaka, Hiroyuki Yamagata, Masaki Chiba
  • Patent number: 7352783
    Abstract: A loop is formed with an optical fiber by providing a gain medium having a gain with respect to an oscillation wavelength. Light retrieved by the optical circulator 13 from the optical fiber loop is enlarged and projected to a mirror 23. A diffraction grating 25 is provided with respect to the light reflected in the mirror. The diffraction grating 25 has a Littrow arrangemnt wherein the light is reflected in a same direction as incident light. A selected wavelength is changed in accordance with an incident angle with respect to the diffraction grating 25. Therefore, when the mirror 23 is rotated so as to change the selected wavelength, the oscillation wavelength can be changed at high speed.
    Type: Grant
    Filed: February 18, 2005
    Date of Patent: April 1, 2008
    Assignee: Santec Corporation
    Inventor: Changho Chong
  • Patent number: 7260131
    Abstract: A symmetrization device and laser diode system using such a device is shown. The device has adjacent lens components transforming beamlets from a laser diode array. Each lens component has input and output surfaces, each having a profile in the propagation direction of the beamlets and a contour perpendicularly thereto. The profiles of the input and output surfaces and distances therebetween are selected to permute the divergence along the slow and fast axes of the beamlets. The contour of each surface matches the cross-sectional shape of the beamlets thereat.
    Type: Grant
    Filed: January 14, 2005
    Date of Patent: August 21, 2007
    Assignee: Institut National D'Optique
    Inventors: Paul Grenier, Yves Taillon, Bruno Labranche, Patrice Topart, Daniel Asselin
  • Patent number: 7242697
    Abstract: A wavelength selection filter, a wavelenth selection laser, and a tunable laser for suppressing adverse effects of non-selected light when selected light is obtained by the wavelength selection filter. A linear polarizer is arranged on a side of the wavelength selection filter from which incoming light enters, and a first faraday element and a second faraday element arranged at respective locations between the linear polarizer and the wavelength selection filter, and between the wavelength selection filter and a reflection mirror for reflecting light having passed through the wavelength selection filter. After incoming light passes through a linear polarizer, selected light passes through the wavelength selection filter and is reflected by the reflection mirror, while non-selected light is reflected by the wavelength selection filter. The selected light and the non-selected light differ in the number of times they pass through faraday elements before they return to the linear polarizer.
    Type: Grant
    Filed: June 12, 2003
    Date of Patent: July 10, 2007
    Assignee: Fujitsu Limited
    Inventor: Kazumasa Takabayashi
  • Patent number: 7218651
    Abstract: The invention is directed to an arrangement for generating a pulsed laser beam with high average output, in particular for generating a hot plasma which emits extreme ultraviolet (EUV) radiation. It is the object of the invention to find a novel possibility for generating a laser beam with a high repetition rate and average output which allows the repetition frequency and, therefore, the output of the laser system to be increased by connecting together a plurality of individual lasers having limited repetition rate without degradation of the beam quality on the target compared to that of an individual laser.
    Type: Grant
    Filed: December 2, 2005
    Date of Patent: May 15, 2007
    Assignee: Xtreme technologies GmbH
    Inventors: Guido Hergenhan, Christian Ziener, Kai Gaebel
  • Patent number: 7190707
    Abstract: A beam delivery unit and method of delivering a laser beam from a laser light source for excimer or molecular fluorine gas discharge laser systems in the DUV and smaller wavelengths is disclosed, which may comprise: a beam delivery enclosure defining an output laser light pulse beam delivery pat from an output of a gas discharge laser to an input of a working apparatus employing the light contained in the output laser light pulse beam; a purge mechanism operatively connected to the beam delivery enclosure; an in-situ beam parameter monitor and adjustment mechanism within the enclosure, comprising a retractable bean redirecting optic; a beam analysis mechanism external to the enclosure; and, a retraction mechanism within the enclosure and operable from outside the enclosure and operative to move the retractable beam redirecting optic from a retracted position out of the beam path to an operative position in the beam path.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: March 13, 2007
    Assignee: Cymer, Inc.
    Inventors: Palash P. Das, Khurshid Ahmed, Gregory Francis, Holger Glatzel, Alexei Lukashev, Jeremy Tyler, R. Kyle Webb
  • Patent number: 7123632
    Abstract: In a laser beam source for projecting laser pulses, having a laser-active medium (10), a controllable pump device (11) for exciting the medium (10), a resonator (13) for inducing oscillation of the medium (10), which resonator has an end mirror (14) and an output mirror (15) with an orientation axially parallel to the medium (10), for the sake of projecting laser pulses of constant pulse energy immediately upon release of the laser beam source, one of the resonator mirrors (14) is pivotably supported and is pivoted out of its resonator position and back into its resonator position by an actuator (19) at selectable times (FIG. 1).
    Type: Grant
    Filed: December 20, 2001
    Date of Patent: October 17, 2006
    Assignee: Robert Bosch GmbH
    Inventors: Johannes Wais, Thomas Wawra
  • Patent number: 7114858
    Abstract: A laser based ignition system for stationary natural gas engines, a distributor system for use with high-powered lasers, and a method of determining a successful ignition event in a laser-based ignition system are provided. The laser based ignition (LBI) system for stationary natural gas engines includes a high power pulsed laser providing a pulsed emission output coupled to a plurality of laser plugs. A respective one of the plurality of laser plugs is provided in an engine cylinder. The laser plug focuses the coherent emission from the pulsed laser to a tiny volume or focal spot and a high electric field gradient at the focal spot leads to photoionization of the combustible mixture resulting in ignition.
    Type: Grant
    Filed: September 14, 2004
    Date of Patent: October 3, 2006
    Assignee: The University of Chicago
    Inventors: Sreenath Borra Gupta, Ramanujam Raj Sekar, Gregory E. Hillman
  • Patent number: 7095762
    Abstract: An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.
    Type: Grant
    Filed: July 26, 2005
    Date of Patent: August 22, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Koichiro Tanaka
  • Patent number: 7010005
    Abstract: The output of a high power pulsed or CW laser (22), which may be mounted on a vehicle (17) is reflected from a convex mirror (27) to a concave mirror (29) that is displaced radially outward on a rotating structure (14) from the convex mirror by at least two beam diameters so that each pulse emanates from a position around a circle which is displaced from adjacent pulses by at least the diameter of the beam, thereby to minimize thermal blooming, or the position of a CW output laser beam is slewed. Directing the beams so that all of them will converge at a target area which is a given range from the apparatus is achieved by moving the convex mirror axially in response to range control signals provided through brushes (47) and slip rings (46). The rotating structure (14) including the laser waveguide (24) is journaled by bearings (50, 51) for rotation by a gear in response to a pinion (34) and gear reduction (37) driven by a motor (38).
    Type: Grant
    Filed: February 20, 2003
    Date of Patent: March 7, 2006
    Inventor: David C. Smith
  • Patent number: 6980572
    Abstract: A wavelength selectable light source is comprised of a two-dimensional (2-D) array of variable wavelength vertical-cavity surface-emitting lasers (VCSELs), wherein light beams emitted from the VCSELs are coupled into an output optical fiber. The light beams emitted from the VCSELs are collimated via a 2-D array of micro-lenses, the collimated light beams impinge upon a first fixed-position mirror that points each of the collimated light beams toward a second movable mirror located at a common focal point in a common area, and the second movable mirror redirects the collimated light beams into a lens coupled to the output optical fiber. By moving the second movable mirror, different ones of the collimated light beams can be directed into the output optical fiber, so that the second movable mirror performs a wavelength selection function.
    Type: Grant
    Filed: May 28, 2003
    Date of Patent: December 27, 2005
    Assignee: The Regents of the University of California
    Inventor: Jonathan Charles Geske
  • Patent number: 6952435
    Abstract: The present invention contemplates a method and apparatus to generate a laser probe beam free of speckles. The present invention employs a holographic phase plate inserted in a laser beam path to modulate the relative phase across the beam. The holographic phase plate is designed to optimize the phase modulation across the beam while to minimize the degradation of the beam quality. The modulated laser beam has only a small and confined divergent angle and can then be refocused or collimated into a narrow and near collimated probe beam. The present invention further rotates the holographic phase plate to randomize the speckles in a time sequence. As a result, the probe beam preserves substantially the beam quality of a laser and produces substantially no speckles on image of its, intersection with a surface or material.
    Type: Grant
    Filed: February 5, 2003
    Date of Patent: October 4, 2005
    Inventors: Ming Lai, Mei Juan Yuan
  • Patent number: 6944195
    Abstract: An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.
    Type: Grant
    Filed: December 10, 2002
    Date of Patent: September 13, 2005
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Koichiro Tanaka
  • Patent number: 6937626
    Abstract: A multiple wavelength laser apparatus is taught to select wavelengths for simultaneous generation of short pulses at multiple wavelengths having application in wavelength-division-multiplexed communications systems, photonic microwave systems, and pump-probe applications. The multiple wavelength laser comprises an optical fiber lasing material, a laser pump source connected to said lasing material for outputting coherent light, a splitter for dividing said coherent light into parallel paths of differing wavelengths, parallel band pass filters for selecting multiple wavelengths, and parallel Faraday mirrors for operating the multiple wavelength laser in a single polarization state.
    Type: Grant
    Filed: September 18, 2002
    Date of Patent: August 30, 2005
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Janet Lou, Thomas Clark, Marc Currie, Thomas Carruthers
  • Patent number: 6914916
    Abstract: A semiconductor laser capable of emitting in any one of standard communication wavelengths is of great practical value. To this end, a single semiconductor chip is fabricated on which many different distributed feedback (DFB) lasers are integrated. The device parameters of the different DFB lasers are varied such that each laser emits at a different wavelength. In addition a micro-mechanical optical element is packaged with the laser array, such that the position of the optical element controls which laser stripe is coupled to the output fiber. The micro-mechanical element or switch in various embodiments is a sliding waveguide, a movable lens, or a mirror that tilts. By selecting the particular DFB laser, controlling the temperature to fine tune the wavelength, and adjusting the position of the micro-mechanical optical element, the output wavelength is set to one of many communication wavelengths.
    Type: Grant
    Filed: October 30, 2001
    Date of Patent: July 5, 2005
    Assignee: Santur Corporation
    Inventors: Bardia Pezeshki, John Heanue, Ed Vail
  • Patent number: 6868098
    Abstract: Method of generating laser pulses using a semiconductor laser diode as a lasing amplification medium of an extended laser cavity are presented. Passive self-modulated mode-locked operation of the semiconductor laser diode is achieved by providing an above lasing threshold direct current input current to the semiconductor laser diode while the semiconductor laser diode is operational in a slightly misaligned extended laser cavity favoring the amplification of wavelengths shorter than a center wavelength of a continuous wave operational mode of the semiconductor laser diode at threshold.
    Type: Grant
    Filed: February 16, 2000
    Date of Patent: March 15, 2005
    Assignee: Universite Laval
    Inventors: Michel Piché, Patrick Langlois
  • Patent number: 6846080
    Abstract: An image display apparatus includes a plurality of light emission sources, a drive circuit for pulse-driving the plurality of light emission sources in order in a predetermined period, a moving reflecting mirror for swinging in order in an incidence direction of light from each of the light emission sources in response to the pulse driving timing of each of the light emission sources and reflecting light beams from the light emission sources in order approximately in the same direction, and a combining optical system for guiding the light reflected by the moving reflecting mirror into a light valve.
    Type: Grant
    Filed: August 7, 2003
    Date of Patent: January 25, 2005
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yoko Inoue, Teruo Fujita, Yoshiyuki Goto, Akira Sekiguchi
  • Patent number: 6785302
    Abstract: The invention relates to an optical system in the ray path of a confocal fluorescence microscope, comprising at least one laser light source (1, 2), a device positioned in the illuminating/detecting beam (3, 4, 5) for separating the exciting light (8) from the fluorescent light (9), an objective (10) arranged between the device and the object (7), and a detector (11) positioned downstream of the device situated in the detecting beam (5). The aim of the invention is to increase the fluorescence yield of the system while retaining its compact structure.
    Type: Grant
    Filed: May 12, 2000
    Date of Patent: August 31, 2004
    Assignee: Leica Microsystems Heidelberg GmbH
    Inventors: Johann Engelhardt, Heinrich Ulrich, William C. Hay
  • Patent number: 6775315
    Abstract: An optical bench for processing laser light in a laser system, including an optical bench housing, a beam dump mounted to the optical bench housing so as to be in optical communication therewith, steering optics mounted within the optical bench housing for directing the laser light in a path from a laser light input to an output, and a mechanism for causing the laser light to deviate from the path and be directed into the beam dump upon recognition of a specified condition in the laser system, wherein the laser light is thermally isolated from the steering optics. The mechanism can either cause at least one optically reflective element to be inserted into the path, cause at least one optical element of the steering optics to have a change in position with respect to the path, and/or causes at least one optical element of the steering optics to be removed from the path.
    Type: Grant
    Filed: June 8, 2001
    Date of Patent: August 10, 2004
    Inventors: Scott Allen Nield, Robert M. Trusty, William Conrad Stenton, A. James Gabura, Edward Malcolm Benneyworth
  • Patent number: 6731661
    Abstract: Systems for tuning external-cavity lasers are provided. A representative system includes a motor and first and second opposing surfaces that are displaceable by the motor. The opposing surfaces operatively engage a support at a drive segment and rotate the drive segment about a pivot point on the support. Between the drive segment and the pivot point of the support, a reflective element is attached. An optical gain medium optically communicates with the reflective element. Other systems are also provided.
    Type: Grant
    Filed: October 1, 2002
    Date of Patent: May 4, 2004
    Assignee: Agilent Technologies, Inc.
    Inventor: William Richard Trutna, Jr.
  • Patent number: 6693926
    Abstract: A MEMS-based selectable laser output optical device (10) includes a laser source (12) having a laser output 14. A MEMS switch (16) is optically coupled to the laser source (12) for selectively coupling the laser output (14) from the laser source (12) in one of two directions (141) or (142). The MEMS switch (16) has a mirror (160) that is slidable or otherwise movable from a first position (161), where the mirror (160) is laying flat or in another non-obstructing position to provide a non-obstructing linear exit optical path (141). A second position (162) where the mirror (160) is in its upright vertically aligned direction, obstructs the linear optical path to re-direct the optical path in a non-linear direction.
    Type: Grant
    Filed: February 7, 2001
    Date of Patent: February 17, 2004
    Assignee: Corning Incorporated
    Inventors: Ian Cayrefourcq, Pascal P. Maigne