Frequency Multiplying (e.g., Harmonic Generator) Patents (Class 372/22)
  • Patent number: 9166375
    Abstract: A semiconductor light emitting device includes a pump light source, a gain structure, and an out-coupling mirror. The gain structure is comprised of InGaN layers that have resonant excitation absorption at the pump wavelength. Light from the pump light source causes the gain structure to emit light, which is reflected by the out-coupling mirror back to the gain structure. A distributed Bragg reflector causes internal reflection within the gain structure. The out-coupling mirror permits light having sufficient energy to pass therethrough for use external to the device. A frequency doubling structure may be disposed between the gain structure and the out-coupling mirror. Output wavelengths in the deep-UV spectrum may be achieved.
    Type: Grant
    Filed: August 15, 2012
    Date of Patent: October 20, 2015
    Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
    Inventors: Andre Strittmatter, Christopher L. Chua, Peter Kiesel, Noble M. Johnson, Joerg Martini
  • Patent number: 9153941
    Abstract: The present invention relates to a laser device comprising at least one large area VCSEL (101) and at least one optical feedback element (201, 301) providing an angular-selective feedback for laser radiation emitted from the laser. The angular-selective feedback is higher for at least one portion of laser radiation emitted at angles ?>0 to the optical axis (601) of the laser than for laser radiation emitted on said optical axis (601). The invention also refers to a method of stabilizing a laser emission of a large area VCSEL in a desired angular distribution (501, 502). With the proposed device and method, the intensity distribution of a large area VCSEL can be stabilized in a desired shape, for example a ring shape.
    Type: Grant
    Filed: August 16, 2010
    Date of Patent: October 6, 2015
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Holger Moench, Stephan Gronenborn
  • Patent number: 9097683
    Abstract: An optical system for detecting contaminants and defects on a test surface includes an improved laser system for generating a laser beam and optics directing the laser beam along a path onto the test surface, and producing an illuminated spot thereon. A detector and ellipsoidal mirrored surface are also provided with an axis of symmetry about a line perpendicular to the test surface. In one embodiment, an optical system for detecting anomalies of a sample includes the improved laser system for generating first and second beams, first optics for directing the first beam of radiation onto a first spot on the sample, second optics for directing the second beam onto a second spot on the sample, with the first and second paths at different angles of incidence to the sample surface. In another embodiment, a surface inspection apparatus includes an illumination system configured to focus beams at non-normal incidence angles.
    Type: Grant
    Filed: October 6, 2014
    Date of Patent: August 4, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Vladimir Dribinski, Yung-Ho Alex Chuang, J. Joseph Armstrong, John Fielden
  • Patent number: 9083146
    Abstract: During temperature tuning, first, the temperature of a third harmonic generating element is swept to determine the optimal temperature Ttp of the third harmonic generating element in a state where the temperature of a second harmonic generating element has been set to a temperature shifted away from the vicinity of the optimal temperature. Next, the temperature of second harmonic generating element is swept to determine the optimal temperature Tsp of the second harmonic generating element in a state where the temperature of the third harmonic generating element has been set to a temperature shifted away from the vicinity of the optimal temperature.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: July 14, 2015
    Assignee: SHIMADZU CORPORATION
    Inventors: Naoya Ishigaki, Koji Tojo, Shingo Uno, Jiro Saikawa
  • Patent number: 9057927
    Abstract: Apparatus and method for high-power multi-function millimeter-wavelength (THz-frequency) signal generation using OPO and DFG in a single cavity. In some embodiments, the OPO-DFG cavity includes an optical parametric oscillator (OPO) non-linear material that receives pump light IP having pump-light frequency and generates two different lower intermediate frequencies of light—an OPO-signal beam IS and a spatially/temporally overlapping OPO-idler beam II. A difference-frequency generator non-linear material then receives the two intermediate-frequency beams II and IS, and the DFG then generates a THz-frequency output signal that has a frequency equal to the difference between the two intermediate frequencies. In some embodiments, a single-piece crystal of non-linear material is used for both OPO and DFG functions.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: June 16, 2015
    Assignee: Lockheed Martin Coroporation
    Inventors: Yongdan Hu, Andrew Xing, Angus J. Henderson
  • Patent number: 9044255
    Abstract: An apparatus has a pump module providing pump energy, a resonator and a controller. The resonator includes a gain medium receiving the pump energy from the pump module and producing light; reflective surfaces reflecting light produced by the gain medium back toward the gain medium; and a variable light attenuator receiving light produced by the gain medium. The controller controls the amount of light attenuated by the variable light attenuator such that the apparatus emits windows of pulses of laser light at spaced time intervals, each window containing a plurality of pulses of laser light and each interval between windows being larger than an interval between pulses within a window. The emitted windows of pulses of laser light heat tissue to a temperature that causes coagulation without vaporization.
    Type: Grant
    Filed: March 26, 2010
    Date of Patent: June 2, 2015
    Assignee: AMS Research Corporation
    Inventors: Hyun Wook Kang, Michael Ray Hodel, Raymond Adam Nemeyer
  • Patent number: 9048616
    Abstract: A method, system and apparatus for automatically determining operating conditions of a periodically poled lithium niobate crystal in a laser system are provided. The system comprise: a laser; a periodic poled lithium niobate (PPLN) crystal for receiving laser input from the laser; a temperature control device for adjusting the temperature of the PPLN crystal; a temperature sensor for monitoring the temperature of the PPLN crystal; and a computing device. While the PPLN crystal is receiving laser input, temperature of the PPLN crystal is changed using the temperature control device. The computing device monitors the temperature of the PPLN crystal and corresponding power of the temperature control device during the changing, the temperature monitored using the temperature sensor. The computing device determines one or more of operating conditions of the temperature control device and an operating temperature of the PPLN crystal from a function of the power vs. the temperature.
    Type: Grant
    Filed: November 21, 2013
    Date of Patent: June 2, 2015
    Assignee: CHRISTIE DIGITAL SYSTEMS USA, INC.
    Inventor: Wayne Robinson
  • Patent number: 9048611
    Abstract: The present application discloses a wavelength conversion device. The wavelength conversion device includes a light source for generating excitation light, a laser medium for generating fundamental light from the excitation light, a resonator mirror for forming a resonator for the fundamental light in cooperation with the laser medium, and a wavelength convertor for converting wavelength from the fundamental light into harmonic light. The wavelength convertor includes a first end surface inclined by an angle ? from a surface orthogonal to an optical axis of the resonator and a second end surface parallel to the first end surface.
    Type: Grant
    Filed: April 2, 2012
    Date of Patent: June 2, 2015
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Kenji Nakayama, Tetsuro Mizushima, Tatsuo Itoh, Hirohiko Oowaki, Tomohiro Matsuo
  • Patent number: 9036248
    Abstract: A terahertz light generation device 1 comprises a resonator structure 12 for intensifying incident light and outputting the intensified light and laser oscillation units 10, 11 for feeding the incident light into the resonator structure 12. The incident light comprises first and second incident light components having polarization states different from each other and frequencies different from each other. The laser oscillation units 10, 11 feed the resonator structure 12 with the first and second incident light components at an angle inclined from a principal surface in the resonator structure 12. The resonator structure 12 outputs light having a frequency corresponding to the difference between the respective frequencies of the first and second incident light components.
    Type: Grant
    Filed: December 8, 2011
    Date of Patent: May 19, 2015
    Assignees: Osaka Prefecture University Public Corporation, Sumitomo Electric Industries, Ltd.
    Inventors: Hajime Ishiahara, Atsuyuki Oyamada, Satoshi Kuzuhara, Hisanobu Kitaguchi, Keiji Ebata
  • Patent number: 9031101
    Abstract: A multi-color harmonic synthesized laser system for laser processing and a laser processing method using multi-color harmonic synthesized laser are disclosed. The multi-color harmonic synthesized laser system includes a laser source for providing a single laser wave, a converter for converting the single laser wave into a plurality of harmonic waves with different frequencies, and a modulating unit for modulating amplitudes and relative phases of the harmonic waves to form a plurality of modulated harmonic waves, so as to synthesize the modulated harmonic waves as a single synthesized laser wave, wherein the single synthesized laser wave is focused on an object to perform a laser processing. The converter includes a plurality of non-linear crystals for converting the single laser wave into a fundamental harmonic wave and a plurality of multi-frequency harmonic waves. The harmonic waves are coherent and collinear, and the phases of the harmonic waves are related to one another.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: May 12, 2015
    Assignee: National Tsing Hua University
    Inventors: Ci-Ling Pan, Chan-Shan Yang, Alexey Zaytsev, Yu-Liang Cai
  • Patent number: 9025626
    Abstract: A semiconductor laser excited solid state laser device and method. The device including a semiconductor laser; a driving device; a solid state laser module which has maximum output efficiency at the set temperature and which generates, from excitation light, an output light of a predetermined output level when the optical noise is at or below a fixed level and the output level of the excitation light is the set output level; a single temperature adjustment device which adjusts the temperature of the semiconductor laser and the temperature of the solid state laser module; and a control device which controls the driving device such that the output light will be at the predetermined output level and controls the temperature adjustment device such that the temperature of the semiconductor laser and the solid state laser module will be the set temperature.
    Type: Grant
    Filed: September 19, 2013
    Date of Patent: May 5, 2015
    Assignee: Shimadzu Corporation
    Inventors: Kazutomo Kadokura, Katsuhiko Tokuda, Mamoru Hisamitsu, Kazuya Inoue
  • Patent number: 9025624
    Abstract: A beam generator for an aerial image generating apparatus includes a laser source for emitting a laser beam and a short wavelength beam source for generating a short wavelength beam by processing the laser beam such that the short wavelength beam is coherent with and has a wavelength shorter than that of the laser beam. A spectral unit includes a quartz plate and a spectral layer coated on a surface of the quartz plate. The spectral layer has a Brewster's angle greater than 70° with respect to the laser beam such that the short wavelength beam is reflected from the spectral unit without the laser beam, increasing the reflectivity of the shortwave beam while decreasing the reflectivity and absorptivity of the laser beam in the spectral unit.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: May 5, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-Gun Lee, Seong-Sue Kim, Hwan-Seok Seo
  • Patent number: 9025625
    Abstract: In a method for operating a laser system in a Q-switched mode, the laser system provided with a laser resonator with a laser medium and an electro-optical modulator, wherein the electro-optical modulator has an EOM crystal, wherein the EOM crystal has a characteristic ringing time (t0) when subjected to acoustic ringing, the EOM crystal is driven by modulator voltage pulses (pm) having a modulator voltage pulse duration (tml). A train of at least two subsequent laser pulses (pl) is generated. The modulator voltage pulse duration (tml) is selected to be at least approximately equal to the characteristic ringing time (t0) of the EOM crystal multiplied by an integer factor.
    Type: Grant
    Filed: May 1, 2014
    Date of Patent: May 5, 2015
    Assignee: Fotona d.d.
    Inventors: Dejan Skrabelj, Marko Marincek
  • Patent number: 9019999
    Abstract: A compact, optically-pumped solid-state microchip laser device uses efficient nonlinear intracavity frequency conversion for obtaining low-cost green and blue laser sources. The laser includes a solid-state gain medium, such as Nd:YVO4, and a nonlinear crystal. The nonlinear crystal is formed of periodically poled lithium niobate or periodically poled lithium tantalate, and the crystal is either MgO-doped, ZnO-doped, or stoichiometric to ensure high reliability. The nonlinear crystal provides efficient frequency doubling to translate energy from an infrared pump laser beam into the visible wavelength range. The laser device is assembled in a package having an output aperture for the output beam and being integrated with an optical bench accommodating a laser assembly. The package encloses and provides heat sinking for the semiconductor diode pump laser, the microchip laser cavity assembly, the optical bench platform, and electrical leads.
    Type: Grant
    Filed: September 4, 2009
    Date of Patent: April 28, 2015
    Assignee: Spectralus Corporation
    Inventors: Stepan Essaian, Dzhakhangir Khaydarov, Andrei V. Shchegrov
  • Patent number: 9008132
    Abstract: A pulsed laser system may include a Raman fiber that is configured to act as multiple wavelength Raman laser. The fiber is configured to receive a pulsed input beam from an input source and convert the input beam to an output beam having narrow band outputs at first and second frequencies v1 and v2.
    Type: Grant
    Filed: April 20, 2011
    Date of Patent: April 14, 2015
    Assignee: IPG Photonics Corporation
    Inventors: Gregory L. Keaton, Manuel J. Leonardo, Mark W. Byer, Kiyomi Monro
  • Patent number: 9001851
    Abstract: A tunable light includes a super continuum light source and a non-linear crystal, the super continuum light source comprising a pump source and a generator fiber, the generator fiber having an input end and an output end, and the super continuum light source and the non-linear crystal being arranged so that at least a part of output light emitted from the output end of the generator fiber is brought into interaction with the non-linear crystal under an angle of incidence ? relative to a surface of the non-linear crystal.
    Type: Grant
    Filed: March 20, 2014
    Date of Patent: April 7, 2015
    Assignee: NKT Photonics A/S
    Inventor: Scott Charles Buchter
  • Patent number: 8995494
    Abstract: Techniques and architecture are disclosed for providing a laser system. In one specific example embodiment, the system includes a thulium-doped fiber laser coupled by silica glass fiber to a remote optical converter (ROC) including a Ho:YAG laser and, optionally, an optical parametric oscillator (OPO) utilizing zinc germanium phosphide (ZnGeP2; ZGP) or orientation-patterned gallium arsenide (OPGaAs). The fiber laser may emit a low-peak-power, continuous wave pump signal that pumps the Ho:YAG laser, which in turn emits a higher-peak-power, pulsed signal. When included, the OPO can be used to convert the resultant, pulsed signal to a longer wavelength (e.g., about 2-5 ?m, or greater). In some cases, distributed architecture and reduced weight/bulk may be realized while eliminating the need to actively cool the ROC for operation, for example, over a broad temperature range (e.g., ?55-125° C.). Also, methods of preparing high-peak-power, pulsed signals using such systems are disclosed.
    Type: Grant
    Filed: April 6, 2012
    Date of Patent: March 31, 2015
    Assignee: BAE Systems Information and Electronic Systems Integration Inc.
    Inventors: Leonard A Pomeranz, Joseph M Owen, Michael J. Shaw, David P. Kelly, Philip R. Staver, Peter A. Budni, John C. Wikman
  • Patent number: 8995478
    Abstract: The device is proposed which provides mode-locked operation of a fiber laser. The principle of its operation is based on a focusing effect of Kerr lens. At high intensities of the light beam the Kerr element exhibits light focusing properties. The beam focused by the Kerr element enters a fiber core without losses thus providing an effective generation of mode-locked laser. In the preferred embodiment the Kerr element is positioned at one degree relative to a perpendicular to the beam direction.
    Type: Grant
    Filed: April 8, 2014
    Date of Patent: March 31, 2015
    Assignee: Tekhnoscan-Lab LLC
    Inventors: Sergey Mikhailovich Kobtsev, Sergey Vladimirovich Kukarin, Liudmila Pavlovna Simonova
  • Publication number: 20150078409
    Abstract: The wavelength of fundamental wave light emitted from a semiconductor laser is converted by a wavelength conversion element, and the wavelength-converted light is emitted. A power supply circuit feeds electric power to the semiconductor laser. A control part controls an amount of electric power to be fed to a heater such that the wavelength conversion element becomes a temperature that optimizes the wavelength conversion efficiency. Temperatures detected by an element temperature detector and a light source part temperature detector are introduced to the control part, and the control part takes a wavelength conversion element temperature, at which a temperature detected by the light source part temperature detector is minimum, as a set temperature that makes the wavelength conversion efficiency optimal, and feedback-controls the wavelength conversion element temperature such that the wavelength conversion element temperature is at the set temperature by controlling the heating quantity of the heater.
    Type: Application
    Filed: March 28, 2013
    Publication date: March 19, 2015
    Applicant: USHIO DENKI KABUSHIKI KAISHA
    Inventors: Nobuhiko Sugihara, Kazuhiro Yoshida, Kentaro Fujita, Takanori Samejima
  • Publication number: 20150071316
    Abstract: A laser for generating deep ultra-violet (DUV) continuous wave (CW) light includes a second-harmonic generator and a fourth-harmonic generator. The fourth-harmonic generator includes a plurality of mirrors as well as first and second non-linear optical (NLO) crystals. The first NLO crystal generates the light having the fourth harmonic wavelength, and is placed in operative relation to the plurality of mirrors. The second NLO crystal is placed in operative relation to the first NLO crystal such that the light having the second harmonic wavelength passes through both the first and the second NLO crystals. Notably, the second optical axes of the second NLO crystal are rotated about a direction of propagation of the light within the second NLO crystal approximately 90 degrees relative to the first optical axes of the first NLO crystal. The second NLO crystal provides no wavelength conversion.
    Type: Application
    Filed: November 14, 2013
    Publication date: March 12, 2015
    Applicant: KLA-Tencor Corporation
    Inventor: Yung-Ho Chuang
  • Patent number: 8976823
    Abstract: In at least one embodiment a laser system includes a fiber laser source, a polarization controller and a wavelength converter. The relative power distribution between a pump wavelength and a signal wavelength is controllable using the polarization controller. An optional phase compensator is used to control polarization state of the output laser beam. In various embodiments the relative power distribution among multiple wavelengths may be controlled over a range of at least about 100:1.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: March 10, 2015
    Assignee: IMRA America, Inc.
    Inventors: Jingzhou Xu, Gyu Cho
  • Publication number: 20150063385
    Abstract: A method for extending and enhancing bright coherent high-order harmonic generation into the VUV-EUV-X-ray regions of the spectrum involves a way of accomplishing phase matching or effective phase matching of extreme upconversion of laser light at high conversion efficiency, approaching 10?3 in some spectral regions, and at significantly higher photon energies in a waveguide geometry, in a self-guiding geometry, a gas cell, or a loosely focusing geometry, containing nonlinear medium. The extension and enhancement of the coherent VUV, EUV, X-ray emission to high photon energies relies on using VUV-UV-VIS lasers of shorter wavelength. This leads to enhancement of macroscopic phase matching parameters due to stronger contribution of linear and nonlinear dispersion of both atoms and ions, combined with a strong microscopic single-atom yield.
    Type: Application
    Filed: September 4, 2014
    Publication date: March 5, 2015
    Inventors: Tenio V. Popmintchev, Dimitar V. Popmintchev, Margaret M. Murnane, Henry C. Kapteyn
  • Patent number: 8970948
    Abstract: Disclosed are systems and methods for using a semiconductor optical amplifier (SOA) as an optical modulator for pulsed signals. In accordance with the principles of the invention, the SOA can be biased with a negative voltage to suppress transmission and improve modulator extinction and biased with a positive pulsed signal with sufficient amplitude to forward bias the amplifier (SOA), both transmitting the carrier and increasing its amplitude by means of a gain provided by the SOA under forward biased conditions. In addition, the forward bias voltage may be selected to compensate for losses within the SOA.
    Type: Grant
    Filed: September 11, 2013
    Date of Patent: March 3, 2015
    Assignee: Innovative Photonic Solutions, Inc.
    Inventors: John C. Connolly, Donald E Ackley, Scott L Rudder, Harald R. Guenther
  • Patent number: 8971361
    Abstract: Processing of incoherent electromagnetic radiation is described, said incoming incoherent electromagnetic radiation comprising radiation in a first wavelength interval. An arrangement comprises a focusing arrangement for focusing the incoming incoherent electromagnetic radiation, a first cavity configured to comprise an intra cavity laser beam, a nonlinear crystal arranged in the first cavity such that it is capable of receiving the focused incoherent electromagnetic radiation and, in dependence on the spatial overlap between the focused incoherent electromagnetic radiation and the intra-cavity laser beam, by interaction with the intra-cavity laser beam provide processed electromagnetic radiation, said processed electromagnetic radiation comprising radiation in a second wavelength interval. In other words, such an arrangement is capable of enabling imaging, e.g.
    Type: Grant
    Filed: July 9, 2009
    Date of Patent: March 3, 2015
    Assignee: Danmarks Tekniske Universitet
    Inventors: Christian Pedersen, Peter Tideman-Lichtenberg, Emir Karamehmedovic
  • Patent number: 8964798
    Abstract: A laser system for semiconductor inspection includes a fiber-based fundamental light source for generating fundamental light that is then converted/mixed by a frequency conversion module to generate UV-DUV laser light. The fundamental light source includes a nonlinear chirp element (e.g., a Bragg grating or an electro-optic modulator) that adds a nonlinear chirp to the seed light laser system prior to amplification by the fiber amplifier(s) (e.g., doped fiber or Raman amplifiers). The nonlinear chirp includes an x2 or higher nonlinearity and is configured to compensate for the Self Phase Modulation (SPM) characteristics of the fiber-based amplifiers such that fundamental light is generated that has a spectral E95 bandwidth within five times that of the seed light. When multiple series-connected amplifiers are used, either a single nonlinear chirp element is provided before the amplifier string, or chirp elements are included before each amplifier.
    Type: Grant
    Filed: July 10, 2013
    Date of Patent: February 24, 2015
    Assignee: KLA-Tencor Corporation
    Inventor: J. Joseph Armstrong
  • Patent number: 8964802
    Abstract: A ring laser-resonator generating plane-polarized fundamental-frequency radiation includes an optically nonlinear crystal configured for type-II second-harmonic generation of fundamental-frequency radiation. The resonator is configured such that fundamental-frequency radiation circulating either clockwise or counter-clockwise therein makes two passes through the optically nonlinear crystal per round-trip in the resonator in opposite directions, with polarization planes perpendicular to each other. This arrangement forces unidirectional circulation of radiation in the resonator during which second-harmonic radiation is not generated by the crystal.
    Type: Grant
    Filed: November 8, 2013
    Date of Patent: February 24, 2015
    Assignee: Coherent, Inc.
    Inventor: Andrea Caprara
  • Publication number: 20150016479
    Abstract: A laser-resonator is terminated between an outcoupling mirror and a semiconductor saturable absorbing mirror (SESAM). A beam-translator including two spaced-apart mirrors is located in the laser resonator in a beam-path of laser radiation circulating in the laser-resonator. The two spaced apart mirrors are selectively rotatable as a pair about two axes perpendicular to each other for selectively translating an incidence point of the laser radiation on the SESAM.
    Type: Application
    Filed: July 12, 2013
    Publication date: January 15, 2015
    Inventor: Louis MCDONAGH
  • Patent number: 8934510
    Abstract: A wavelength converter may include a non-linear optical crystal, and an optical member bonded to a region of a contact surface of the non-linear optical crystal, located a predetermined distance or more on an inner side from an outer periphery of the contact surface. The wavelength converter may receive laser light and stably output light having a wavelength different from that of the laser light.
    Type: Grant
    Filed: December 11, 2012
    Date of Patent: January 13, 2015
    Assignee: Gigaphoton Inc.
    Inventors: Kouji Kakizaki, Takashi Onose, Hideo Hoshino
  • Publication number: 20150010028
    Abstract: Provided is an external resonance-type laser device with high wavelength conversion efficiency in which a nonlinear optical crystal is disposed outside of a resonator. The laser device includes a laser generation device configured to generate high-intensity laser light, a nonlinear optical crystal on which the high-intensity laser light generated by the laser generation device is incident and which is configured to generate a second harmonic wave light, and a different-element-fluxless-grown nonlinear optical crystal on which the second harmonic wave light generated by the nonlinear optical crystal is incident and which is configured to generate a fourth harmonic wave light. In the laser device, the different-element-fluxless-grown nonlinear optical crystal is not damaged even when high-intensity laser light of 100 MW/cm2 or more is incident.
    Type: Application
    Filed: September 19, 2012
    Publication date: January 8, 2015
    Inventors: Takunori Taira, Rakesh Bhandari, Yasunori Furukawa, Akio Miyamoto, Masayuki Habu, Tsuyoshi Tago
  • Patent number: 8929410
    Abstract: An ultraviolet laser device comprises a laser beam output unit that outputs infra-red laser beams, and a wavelength conversion unit that wavelength converts the infra-red laser beams. The laser beam output unit comprises a first laser beam output unit that outputs a first infra-red laser beam whose wavelength is 1900-2000 nm, and a second laser beam output unit that outputs a second infra-red laser beam whose wavelength is 1000-1100 nm. The wavelength conversion unit comprises a first element series that the first infra-red light beam is incident upon and propagated through, and a second element series that the laser light propagated through the first element series and the second infra-red laser beam are incident upon, combined in, and propagated through, and constructed so that ultraviolet laser light is outputted, due to the first and second infra-red laser beams being wavelength converted by optical wavelength conversion elements.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: January 6, 2015
    Assignee: Nikon Corporation
    Inventors: Yoshinori Oshita, Akira Tokuhisa
  • Patent number: 8929406
    Abstract: A laser for generating an output wavelength of approximately 193.4 nm includes a fundamental laser, an optical parametric generator, a fourth harmonic generator, and a frequency mixing module. The optical parametric generator, which is coupled to the fundamental laser, can generate a down-converted signal. The fourth harmonic generator, which may be coupled to the optical parametric generator or the fundamental laser, can generate a fourth harmonic. The frequency mixing module, which is coupled to the optical parametric generator and the fourth harmonic generator, can generate a laser output at a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal.
    Type: Grant
    Filed: January 17, 2014
    Date of Patent: January 6, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Chuang, J. Joseph Armstrong, Vladimir Dribinski, Yujun Deng, John Fielden
  • Patent number: 8917751
    Abstract: Provided is an optical device capable of bonding each optical part to a substrate with the same applied load by surface activated bonding even if the planar shape sizes of a plurality of optical parts to be mounted on the substrate are different from one another. The optical device includes a substrate, a plurality of optical parts different in planar shape size, bonded to the substrate by surface activated bonding adjacent to one another, and optically coupled with one another, and a plurality of bonding parts provided on the substrate in correspondence to the plurality of optical parts and including metallic micro bumps for bonding each optical part. The total area of the top surfaces of the micro bumps to be bonded to the corresponding optical part of each of the plurality of bonding parts is substantially the same.
    Type: Grant
    Filed: August 24, 2013
    Date of Patent: December 23, 2014
    Assignee: Citizen Holdings Co., Ltd.
    Inventor: Kaoru Yoda
  • Publication number: 20140362880
    Abstract: A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 ?m and 1.1 ?m, a third harmonic generator module including one or more periodically poled non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and one of a fourth harmonic generator module and a fifth harmonic generator. The fourth harmonic generator module includes a cavity resonant at the fundamental frequency configured to combine the fundamental frequency with the third harmonic to generate a fourth harmonic. The fourth harmonic generator module includes either a cavity resonant at the fundamental frequency for combining the fundamental frequency with the third harmonic to generate a fifth harmonic, or a cavity resonant at the second harmonic frequency for combining the second harmonic and the third harmonic to generate the fifth harmonic.
    Type: Application
    Filed: June 2, 2014
    Publication date: December 11, 2014
    Applicant: KLA-Tencor Corporation
    Inventors: Yung-Ho Chuang, Xiaoxu Lu, John Fielden
  • Patent number: 8896911
    Abstract: The present invention is a laser system including a DFB laser 10 emitting a laser light 50, a semiconductor optical amplifier 20 that modulates an intensity of the laser light, and a harmonic generation element 30 that converts the laser light modulated to a visible light 54 that is a harmonic of the laser light. According to the present invention, it is possible to employ the highly efficient harmonic generation element capable of modulating the intensity of the laser light and to reduce power consumption.
    Type: Grant
    Filed: July 30, 2009
    Date of Patent: November 25, 2014
    Assignee: QD Laser, Inc.
    Inventors: Mitsuru Sugawara, Makoto Usami, Tomoyuki Akiyama
  • Patent number: 8891158
    Abstract: A laser frequency converter includes a first substrate material forming a first planar surface that includes a first nonlinear material situated along a portion of the first planar surface of the first substrate material to perform a frequency conversion of a laser signal. The frequency converter includes a second substrate material forming a second planar surface and separated by a distance from the first planar surface of the first substrate material. The second substrate material includes a second nonlinear material situated along a portion of the second planar surface of the second substrate material to perform the frequency conversion of the laser signal in conjunction with the first non-linear material. The second nonlinear material is offset from the first nonlinear material along an axis of propagation for the laser signal.
    Type: Grant
    Filed: June 12, 2013
    Date of Patent: November 18, 2014
    Assignee: Northrup Grumman Systems Corporation
    Inventors: Hiroshi Komine, Joseph M. Fukumoto, Chun-Ching Shih, William H. Long
  • Patent number: 8891563
    Abstract: A two-chip OPS laser includes first and second OPS-chips each emitting the same fundamental wavelength in first and second resonators. The first and second resonators are interferometrically combined on a common path terminated by a common end-mirror. The interferometric combination provides for automatic wavelength-locking of the laser, which can eliminate the need for a separate wavelength selective device in the laser.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: November 18, 2014
    Assignee: Coherent, Inc.
    Inventor: Qi-Ze Shu
  • Publication number: 20140334506
    Abstract: A light deflector for deflecting a propagation direction of laser includes: a first metallic piece and a second metallic piece spaced apart from each other; and a transparent medium and an electronic cooling element disposed between the first metallic piece and the second metallic piece such that each of the transparent medium and the electronic cooling element is in contact with the first metallic piece and the second metallic piece. The electronic cooling element creates a temperature difference between the first metallic piece and the second metallic piece to vary a refractive index of the transparent medium.
    Type: Application
    Filed: February 26, 2014
    Publication date: November 13, 2014
    Applicant: Showa Optronics Co., Ltd.
    Inventor: Minoru Kadoya
  • Patent number: 8885676
    Abstract: Laser devices are presented in which a graphene saturable absorber and an optical amplifier are disposed in a resonant optical cavity with an optical or electrical pump providing energy to the optical amplifier.
    Type: Grant
    Filed: November 14, 2012
    Date of Patent: November 11, 2014
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Marc Currie
  • Patent number: 8885246
    Abstract: A device for extending the lifetime of a frequency-converting non-linear optical system (19) subjected to the radiation of an intense laser beam includes two plates (2, 3) with flat and parallel surfaces angled on the beam and elements for transverse rotation of the plates (2, 3) suitable for changing the angle of inclination of the first plate in an angular range (i20±?i2) to move the incident beam relative to the optical system (19), while minimizing the amplitude of movement of the output beam (37, 47) on the angular inclination range (i20±?i2) of the first plate. The application of the device in a non-linear optical source including one or more non-linear crystals (1, 16) is also described.
    Type: Grant
    Filed: November 20, 2009
    Date of Patent: November 11, 2014
    Assignee: Eolite Systems
    Inventors: David Horain, Louis Mcdonagh, Julien Saby, Francois Salin, Philippe Metivier
  • Patent number: 8879589
    Abstract: A beam-stabilized laser system using optical frequency conversion in a nonlinear optical crystal is disclosed. An optimal phase-matching angle in the crystal depends on both wavelength and temperature. If the crystal temperature changes, the optimal phase-matching direction will change as well. A different wavelength can be selected so that the optimal phase-matching occurs along the original beam path and returns the output beam to the original direction. Thus, a central wavelength of the laser beam illuminating the nonlinear optical crystal can be slightly adjusted to compensate for the pointing drift. Since the illuminating wavelength can normally be tuned much faster than the crystal temperature, a more agile and responsive pointing stabilization can be achieved.
    Type: Grant
    Filed: March 19, 2013
    Date of Patent: November 4, 2014
    Assignee: JDS Uniphase Corporation
    Inventors: Martin H. Muendel, Loren Eyres
  • Patent number: 8879588
    Abstract: A method and device are provided for fast, continuous tuning of an optical source. A first pump signal with a first pump frequency is input into a mixer along with a first seed signal having a first seed frequency. Within the mixer, the first pump signal and the first seed signal generate at least one idler having an idler frequency defined as two times the pump frequency minus the seed frequency. Shifting the pump signal across a frequency range at a sweep rate causes the idler frequency to be shifted by two times the frequency range at two times the sweep rate. The shifted at least one idler is mixed with the shifted pump signal to generate a first mix product that has two times the sweep rate and frequency range of the pump signal.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: November 4, 2014
    Assignee: The Regents of the University of California
    Inventor: Stojan Radic
  • Patent number: 8873596
    Abstract: A mode-locked laser system operable at low temperature can include an annealed, frequency-conversion crystal and a housing to maintain an annealed condition of the crystal during standard operation at the low temperature. In one embodiment, the crystal can have an increased length. First beam shaping optics can be configured to focus a beam from a light source to an elliptical cross section at a beam waist located in or proximate to the crystal. A harmonic separation block can divide an output from the crystal into beams of different frequencies separated in space. In one embodiment, the mode-locked laser system can further include second beam shaping optics configured to convert an elliptical cross section of the desired frequency beam into a beam with a desired aspect ratio, such as a circular cross section.
    Type: Grant
    Filed: March 5, 2012
    Date of Patent: October 28, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Vladimir Dribinski, Yung-Ho Alex Chuang, J. Joseph Armstrong, John Fielden
  • Patent number: 8867584
    Abstract: An optical parametric oscillator comprising: an optical cavity; a semiconductor gain-medium located within the optical cavity, such that together they form a semiconductor laser, and a nonlinear material located within the cavity such that the nonlinear material continuously generates down-converted idler- and signal-waves in response to a pump-wave continuously generated by the semiconductor gain-medium, wherein the pump wave is resonant within the optical cavity and one or other but not both of the down-converted waves is resonant within the pump wave cavity or a further optical cavity. Brewster plates ensure singly resonant optical parametric oscillators and a birefringent filer is used for frequency setting. Coupled cavities allow for setting the photon lifetime in the cavity that relaxation oscillations are prevented.
    Type: Grant
    Filed: April 13, 2010
    Date of Patent: October 21, 2014
    Assignee: University Court of the University of St Andrews
    Inventors: Malcolm H. Dunn, David Stothard
  • Patent number: 8867577
    Abstract: A laser light source according to the present invention includes a laser element that outputs a fundamental wave; a wavelength conversion element into which the fundamental wave is input and that converts at least a part of the fundamental wave input therein to a converted wave having a wavelength shorter than the wavelength of the fundamental wave; a waveguide that attenuates a component of the fundamental wave included in an output wave from the wavelength conversion element; and a diffraction grating that is formed on the waveguide and feeds back the fundamental wave output from the wavelength conversion element to lock the wavelength or the frequency of the fundamental wave output from the laser element. The diffraction grating is formed at a position determined taking into account an amount by which the fundamental wave is attenuated in the waveguide.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: October 21, 2014
    Assignee: Citizen Holdings Co., Ltd.
    Inventors: Shinpei Fukaya, Masafumi Ide
  • Patent number: 8861555
    Abstract: Compact laser systems are disclosed which include ultrafast laser sources in combination with nonlinear crystals or waveguides. In some implementations fiber based mid-IR sources producing very short pulses and/or mid-IR sources based on a mode locked fiber lasers are utilized. A difference frequency generator receives outputs from the ultrafast sources, and generates an output including a difference frequency. The output power from the difference frequency generator can further be enhanced via the implementation of large core dispersion shifted fibers. Exemplary applications of the compact, high brightness mid-IR light sources include medical applications, spectroscopy, ranging, sensing and metrology.
    Type: Grant
    Filed: November 20, 2012
    Date of Patent: October 14, 2014
    Assignee: IMRA America, Inc.
    Inventors: Martin E. Fermann, Jens Bethge, Ingmar Hartl
  • Patent number: 8848751
    Abstract: A master oscillator power amplifier (MOPA) system includes an oscillator having a neodymium-doped gadolinium vanadate gain-medium and delivering seed-pulses. A length of single mode fiber is used to broaden the spectrum of the seed pulse. An amplifier having a neodymium-doped yttrium vanadate gain-medium amplifies the spectrally broadened seed-pulses. The gain-spectrum of the amplifier partially overlaps the broadened pulse-spectrum, providing spectral selection of the seed-pulses in addition to amplification. This provides amplified output-pulses having a duration about one-third that of the corresponding seed-pulses.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: September 30, 2014
    Assignee: Coherent GmbH
    Inventor: Stefan Spiekermann
  • Publication number: 20140269791
    Abstract: A light spectrum generator uses an input continuous light source well within the normal GVD of a resonator to produce a multi-wavelength spectrum having irregularly spaced harmonics that could span wavelengths of more than six octaves from one another. Combined with a tuner that adjusts the power and wavelength of the light source, a turner that adjusts a temperature or a pressure applied to the resonator, and a filter, the generator could be used to produce any wavelength of light between 0.1 and 10 ?m.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 18, 2014
    Applicant: Oewaves, Inc.
    Inventors: Wei Liang, Andrey Matsko, Lute A. Maleki, Anatoily A. Savchenkov, Vladimir S. Ilchenko, David Seidel
  • Patent number: 8824514
    Abstract: The present invention includes a fundamental laser light source configured to generate fundamental wavelength laser light, an optical crystal configured to receive fundamental laser light from the fundamental laser light source, the optical crystal configured to generate alternate wavelength light by frequency converting a portion of the received fundamental laser light to alternate wavelength light, an auxiliary light source configured to generate auxiliary wavelength light, the auxiliary wavelength light having a wavelength different from the fundamental wavelength laser light and the alternate wavelength light, the fundamental laser light source and the auxiliary light source oriented such that the fundamental laser light copropagates with the auxiliary light through a surface of the optical crystal, and a detector configured to detect at least one of fundamental wavelength laser light scattered by the optical crystal, alternate wavelength light scattered by the optical crystal, or auxiliary light scattere
    Type: Grant
    Filed: November 2, 2011
    Date of Patent: September 2, 2014
    Assignee: KLA-Tencor Corporation
    Inventor: J. Joseph Armstrong
  • Patent number: 8817827
    Abstract: Laser master oscillator-power amplifier system for generating high pulse energy, high average power laser pulses in the ultraviolet 191.25-201.25 nm and 243-246.25 nm spectral ranges, and in the visible 450-537.5 nm spectral range with controllable pulse duration and pulse repetition rate employ a master oscillator seed laser operating in the infra-red spectral range, and a single series connected chain of hybrid fiber-bulk optical amplifiers coupled to a non-linear frequency conversion unit to convert the laser pulses to the ultraviolet and visible spectral ranges.
    Type: Grant
    Filed: May 6, 2013
    Date of Patent: August 26, 2014
    Assignee: Veralas, Inc.
    Inventor: Valeri V. Ter-Mikirtychev
  • Patent number: 8817831
    Abstract: A method and apparatus for spatially separating beams with different wavelengths is presented. The system includes: a light source (i.e. a laser with multiple harmonic output beams) with multiple wavelengths emitted along a single beam path or very nearly collinear beam paths, a path which connects the light source to a wavelength dependent beam separator, and a second path for blocking unwanted output wavelengths which connects the beam separation region to the laser output.
    Type: Grant
    Filed: January 30, 2013
    Date of Patent: August 26, 2014
    Assignee: Photonics Industries Int'l.
    Inventors: Matthew Terraciano, Yusong Yin, Andrea Burzo