Pulse Patents (Class 372/30)
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Patent number: 8824515Abstract: A laser processing apparatus, a filter device and a method are used for controlling a pulse laser, which is controllable in terms of its pulse energy and of a temporal triggering of laser pulses, during material processing of an object, in particular during the marking of a plastics-based document. The method includes comparing a pulse energy signal which assumes voltage values, in temporal correlation with a clock signal, which represent a pulse energy for the laser pulses for processing, with a threshold value condition and generating a logic result signal. The clock signal is passed to a gate and controlling the gate using the logic result signal and generating a retrieval signal thereby. An energy control signal is provided which has a voltage according to a specification of a control voltage. The retrieval signal and the energy control signal are used to control the pulse laser.Type: GrantFiled: November 18, 2011Date of Patent: September 2, 2014Assignee: Bundesdruckerei GmbHInventor: Daniel Mysliwitz
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Patent number: 8811436Abstract: A laser apparatus may include a master oscillator configured to output a laser beam, at least one amplifier disposed in a beam path of the laser beam from the master oscillator, at least one power source for applying a high-frequency voltage to the at least one amplifier, and a controller for varying the high-frequency voltage to be applied to the at least one amplifier from the at least one power source.Type: GrantFiled: February 8, 2012Date of Patent: August 19, 2014Assignee: Gigaphoton IncInventors: Kenichi Miyao, Motoki Niwano, Osamu Wakabayashi
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Patent number: 8804787Abstract: A laser system includes a semiconductor laser having a laser driver coupled thereto. An output of the semiconductor laser is optically coupled to an input of an optical splitter that provides outputs including or coupled to a first branch having a first branch fiber coupled to a feedback reflector which provides a cavity boundary that defines a passive secondary cavity for the semiconductor laser, and a second branch including a back reflection reduction device. The roundtrip attenuation from an output facet of the laser to the feedback reflector is from ?30 dB to ?80 dB. The laser driver provides sufficient drive stability so that a frequency variation of the semiconductor laser is less than one free spectral range (FSR) of the secondary cavity. An output of said system is taken after the back reflection reduction device.Type: GrantFiled: August 13, 2013Date of Patent: August 12, 2014Assignee: Gooch and Housego PLCInventors: Steven Michael Coleman, Alexander Rosiewicz
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Patent number: 8797641Abstract: An input light pulse Pi, input at a constant incident angle to a transmission-type diffraction grating 20, is dispersed according to the wavelengths to be output at output angles according to the wavelengths, to be reflected by reflecting mirrors 41, 42, and 43 in series, and thereafter, the light rays are input at incident angles according to their wavelengths to the transmission-type diffraction grating 20, to be output at a constant output angle from the transmission-type diffraction grating 20.Type: GrantFiled: July 8, 2010Date of Patent: August 5, 2014Assignee: Hamamatsu Photonics K.K.Inventors: Masatoshi Fujimoto, Yoichi Kawada, Kodai Fukazawa
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Patent number: 8787411Abstract: Implementations and examples of mode-locked fiber lasers based on fiber laser cavity designs that produce self-similar pulses (“similaritons”) with parabolic pulse profiles with respect to time at the output of the fiber gain media to effectuate the desired mode locking operation. An intra-cavity narrowband optical spectral filter is included in such fiber lasers to ensure the proper similariton conditions.Type: GrantFiled: June 21, 2012Date of Patent: July 22, 2014Assignee: Cornell UniversityInventors: Frank Wise, William Renninger, Andy Chong
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Patent number: 8774240Abstract: A frequency-drift amplification device for a pulsed laser, including: a stretcher for time-stretching an incident laser pulse; at least one amplifying medium for amplifying the laser pulse; a main compressor for time-compressing the laser pulse to a desired duration for an output pulse of the amplification device; and at least one adjustment compressor between the stretcher and the main compressor, and in which the laser pulse undergoes four diffractions on diffraction gratings to time-compress the stretched laser pulse to a duration that is greater than the desired duration for the output pulse of the amplification device.Type: GrantFiled: September 30, 2011Date of Patent: July 8, 2014Assignee: Ecole PolytechniqueInventor: Gilles Cheriaux
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Patent number: 8761216Abstract: The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.Type: GrantFiled: January 11, 2013Date of Patent: June 24, 2014Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Glenn Simenson, Robert Hainsey, David Barsic, Jeffrey Howerton, Wayne Crowther, Patrick Leonard
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Patent number: 8761215Abstract: A digital pulse shaping module provides a digital waveform such as a pulse shape, gating or a synchronizing digital signal for use with a pulsed laser oscillator. The digital pulse shaping module includes a waveform data generator that generates N-bit words having a number N of bits. A serializer is further provided to receive the N-bit words from the waveform data generator and outputs each bit individually in a series of bits corresponding to the digital waveform. The digital pulse shaping module further includes a delay module that provides a fine delay in the outputting of the bits by the serializer. This fine delay corresponds to a number of bits smaller than N, impacting on the timing of the outputted signal at the bit level. A pulse shaping generator has a plurality of digital pulse shaping modules.Type: GrantFiled: December 7, 2011Date of Patent: June 24, 2014Assignee: Institut National d'OptiqueInventors: Michel Jacob, Pascal Deladurantaye, Yves Taillon
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Patent number: 8761214Abstract: The present invention relates to an apparatus for stabilizing second harmonic wave pulse output in a laser system operating by pulses. The apparatus of the present invention comprises: a pulse laser oscillating unit (110) which outputs a laser pulse; a nonlinear crystal (120) which converts the laser pulse of a first wavelength output by the pulse laser oscillation unit (110) into a second harmonic wave with a value that is half of the first wavelength, and outputs the converted second harmonic wave; and an optical absorption filter (130) which absorbs a portion of the energy of the converted second harmonic laser pulse from the nonlinear crystal (120) to output the second harmonic wave with a lower energy. The thus-configured apparatus of the present invention supplies a fundamental wave in a stable state and having a small PTP value and high level energy to the nonlinear crystal, in order to obtain the second harmonic wave which is in a more stable state and has a small PTP value and a variety of energies.Type: GrantFiled: April 28, 2010Date of Patent: June 24, 2014Assignee: Lutronic CorporationInventors: Haelyung Hwang, Seunghwan Kong, Huicheol Lee
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Patent number: 8728176Abstract: A battery fabrication method comprises forming at least one battery cell on a battery substrate by depositing a plurality of battery component films on the battery substrate, the battery component films comprising at least a pair of electrodes about an electrolyte. An overlying protective multilayer coating is formed over the battery cell. A plurality of pulsed laser bursts of a pulsed laser beam is applied to the battery substrate, the pulsed laser bursts having sufficient power and duration to cut through the battery substrate and the overlying protective multilayer coating.Type: GrantFiled: January 4, 2011Date of Patent: May 20, 2014Assignee: Front Edge Technology, Inc.Inventors: Jianchao Li, Kai-Wei Nieh, Sandeep Makhar
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Patent number: 8724666Abstract: A laser oscillator to generate a pulsed light beam includes an output coupler mirror, configured to reflect a reflected portion of the pulsed light beam back into the laser oscillator, and to couple an outputted portion of the pulsed light beam out from the laser oscillator; an end-mirror, configured to return the pulsed light beam into the laser oscillator; a gain material, positioned between the output coupler mirror and the end-mirror along an optical path, configured to amplify the pulsed light beam; a self-starting saturable absorber, configured to self-start a pulsed mode-locking operation of the laser oscillator; and a pulse-shaping saturable absorber, configured to shape pulses of the pulsed light beam into laser pulses with a pulse length of less than 1,000 femtoseconds.Type: GrantFiled: January 4, 2013Date of Patent: May 13, 2014Assignee: Alcon LenSx, Inc.Inventor: Ferenc Raksi
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Patent number: 8718103Abstract: The present invention relates to an apparatus for generating an ultra-short ultra-high intensity pulse laser, comprising: a pulse laser providing unit which generates an ultra-short ultra-high intensity pulse laser, stretches pulse width, then selects and provides only a pulse laser having a predetermined polarizing angle; a polarization characteristic adjusting unit which divides the pulse laser provided by the pulse laser providing unit into S-polarizing component light and P-polarizing component light, varies the phase difference and amplitude difference between the S-polarizing component light and the P-polarizing component light, and combines the two types of light to generate a pulse laser with varied polarization characteristics; and a pulse compression unit which compresses the pulse width of the pulse laser, the polarization characteristics of which are varied by the polarization characteristic adjusting unit, and outputs the pulse laser.Type: GrantFiled: March 11, 2011Date of Patent: May 6, 2014Assignee: Electronics and Telecommunications Research InstituteInventors: Nam-Soo Myung, Seung-Hwan Kim
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Publication number: 20140109678Abstract: Provided is a laser apparatus including a cavity having an output mirror and a reflective mirror, a laser medium and an excitation lamp disposed inside the cavity, a wavelength selector allowing selection of a wavelength for laser light pulses to be emitted from among a plurality of wavelengths, and a controller controlling emission timing of the excitation lamp, emission energy of the excitation lamp that is determined depending on at which wavelength, of the plurality of wavelengths, the pulses are to be emitted, and emission of the pulses. The controller continuously emits a pulse train formed of a plurality of pulses including pulses of at least two wavelengths.Type: ApplicationFiled: October 11, 2013Publication date: April 24, 2014Applicant: Canon Kabushiki KaishaInventor: Shigeru Ichihara
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Publication number: 20140098830Abstract: An extreme ultraviolet light generation system may include an optical device configured to cause an optical path of a pulse laser beam to approximately match one of a first optical path in which the pulse laser beam is focused at a plasma generation region and a second optical path in which the pulse laser beam passes outside the plasma generation region, and a control unit configured to output a control signal to the optical device so that the optical device sets the optical path of the pulse laser beam to the second optical path from when a predetermined time starts to when the number of pulses contained in a timing signal reaches a predetermined value and sets the optical path of the pulse laser beam to the first optical path from when the number of pulses reaches the predetermined value to when the predetermined time ends.Type: ApplicationFiled: October 7, 2013Publication date: April 10, 2014Applicant: GIGAPHOTON INC.Inventors: Takayuki YABU, Takashi SAITO, Hideyuki HAYASHI, Kazuhiro SUZUKI, Hiroaki NAKARAI
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Patent number: 8687662Abstract: Methods and systems for generating pulses of laser radiation at higher repetition rates than those of available excimer lasers are disclosed that use multiple electronic triggers for multiple laser units and arrange the timings of the different triggers with successive delays, each delay being a fraction of the interval between two successive pulses of a single laser unit. Methods and systems for exposing nanoscale patterns using such high-repetition-rate lasers are disclosed.Type: GrantFiled: May 16, 2013Date of Patent: April 1, 2014Assignee: Anvik CorporationInventor: Kanti Jain
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Patent number: 8675697Abstract: A master oscillator system may include a grating configured to function as one resonator mirror in an optical resonator, a spectral bandwidth tuning unit configured to tune the spectral bandwidth of a laser beam transmitted within the optical resonator, a storage unit configured to store a control value of the spectral bandwidth tuning unit corresponding to a desired spectral bandwidth and a controller configured to control the spectral bandwidth tuning unit based on the control value stored in the storage unit.Type: GrantFiled: August 29, 2012Date of Patent: March 18, 2014Assignee: Gigaphoton Inc.Inventors: Satoshi Tanaka, Hiroshi Tanaka, Osamu Wakabayashi
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Patent number: 8670175Abstract: An optical amplifier system includes an input aperture operable to receive light propagating along an optical path in a first direction and a first polarizer disposed along the optical path. The first polarizer is operable to pass light having a polarization state aligned with a first polarization axis. The system also includes a first Pockels cell operable to receive light passing through the first polarizer, an optical gain element disposed along the optical path, a second Pockels cell disposed along the optical path, and a second polarizer disposed along the optical path. The second polarizer is operable to pass light having a polarization state aligned with the first polarization axis. The system further includes a first mirror operable to receive light reflected from the second polarizer, a second mirror operable to receive light reflected from the first polarizer, and an output aperture operable to transmit light passing through the second polarizer.Type: GrantFiled: September 2, 2010Date of Patent: March 11, 2014Assignee: Lawrence Livermore National Security, LLCInventor: Alvin Charles Erlandson
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Patent number: 8649412Abstract: The closed cycle solid state optically pumped gas hybrid (chemical recovery) system utilizes a laser diode excited solid state, fiber or bulk, laser as a pump for a molecular gas, or gas mix, medium. The existence of efficient high power laser diode excited solid state fiber or bulk lasers, output spectrally matched to suitable principle and excited level 1st and 2nd overtones of relevant gases, is the enabling system technology. The utilization of such in combination with suitable gases introduces a range of viable, in principle sourcing on laser diodes and thus effectively laser diode pumped, gas laser systems with access to the approximately 3.5 ?m to approximately 5.2 ?m and approximately 9 ?m to approximately 11 ?m spectral regions. Continuous wave or pulsed operation, with significant energy capability courtesy of solid state storage, is admitted.Type: GrantFiled: June 29, 2011Date of Patent: February 11, 2014Inventor: Robert Neil Campbell
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Patent number: 8644356Abstract: A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.Type: GrantFiled: September 12, 2012Date of Patent: February 4, 2014Assignee: Imra America, Inc.Inventors: Lawrence Shah, James M. Bovatsek, Alan Y. Arai, Tadashi Yamamoto, Rajesh S. Patel, Donald J. Harter
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Patent number: 8634441Abstract: A master oscillator may include: a pumping laser that outputs pumping light; a seed laser that is oscillated by the pumping light; an amplifier that amplifies the pulsed laser light outputted by the seed laser using the pumping light; at least one optical shutter disposed in the optical path between the seed laser and the amplifier; and a controller that causes the pumping laser to oscillate continuously at a predetermined repetition rate and that controls the optical shutter to open and close.Type: GrantFiled: March 15, 2012Date of Patent: January 21, 2014Assignee: Gigaphoton Inc.Inventors: Takashi Onose, Shinji Ito
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Patent number: 8630321Abstract: Methods and apparatuses for performing temporal scanning using ultra-short pulse width lasers in which only minimal (micro-scale) mechanical movement is required, and related methods for obtaining high-accuracy timing calibration, on the order of femtoseconds, are disclosed. A dual laser system is disclosed in which the cavity of one or more of the lasers is dithered using a piezoelectric element. A Fabry-Perot etalon generates a sequence of timing pulses used in conjunction with a laser beam produced by the laser having the dithered laser cavity. A correlator correlates a laser pulse from one of the lasers with the sequence of timing pulses to produce a calibrated time scale. The invention is applicable to applications requiring rapid scanning and time calibration, including metrology, characterization of charge dynamics in semiconductors, electro-optic testing of ultrafast electronic and optoelectronic devices, optical time domain reflectometry, and electro-optic sampling oscilloscopes.Type: GrantFiled: August 2, 2012Date of Patent: January 14, 2014Assignee: Imra America, Inc.Inventors: Gregg D. Sucha, Martin E. Fermann, Donald J. Harter
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Patent number: 8599890Abstract: Systems and methods provide laser pulse equalization at different pulse repetition frequencies (PRFs). After initially pumping a lasing medium from a first pumping level to a peak pumping level, a controller may cause a pump source to continue pumping the lasing medium according to a pulse equalization pumping curve. The equalization pumping curve may be determined based on testing laser pulse parameters at different PRFs to achieve an optimal equalization result of the pulse parameters. The optimization metric used to evaluate various equalization pumping curves may include a consistency of the pulse energy level, peak power level, and/or pulse width of the laser under different PRFs. The equalization pumping curve may be a descending curve from the peak pumping level to the first pumping level. The equalization pumping curve may be a linearly declining curve, a substantially exponentially declining curve, a parametrically declining curve, or any other curve type.Type: GrantFiled: March 25, 2008Date of Patent: December 3, 2013Assignee: Electro Scientific Industries, Inc.Inventors: Yunlong Sun, Feng Chang
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Patent number: 8594141Abstract: The present invention provides a femtosecond laser apparatus using laser diode optical pumping. To provide a stable mode locking and improve power stability and beam stability in an ultrafast laser such as a femtosecond laser, optical mounts which have mounted thereon optical parts of a diode pumping unit are mechanically engaged using bars of low thermal expansion coefficients and form a pumping module, and the pumping module is maximally separated from a laser platform or case.Type: GrantFiled: July 30, 2012Date of Patent: November 26, 2013Assignee: Korea Electrotechnology Research InstituteInventors: Guang Hoon Kim, Uk Kang, Ju Hee Yang, Elena Sall, Sergey Chizhov, Andrey Kulik
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Patent number: 8588263Abstract: Apparatus and method for generating controlled-linewidth laser-seed-signals for high-powered fiber-laser amplifier systems. In some embodiments, the natural chirp (frequency change of laser light over a short start-up time) of a DBR laser diode when driven by pulsed current is used to broaden the linewidth of the laser output, while adjusting the peak current and/or the pulse duration to obtain the desired linewidth.Type: GrantFiled: August 28, 2012Date of Patent: November 19, 2013Assignee: Lockheed Martin CorporationInventors: Eric C. Honea, Jason D. Henrie, Matthias P. Savage-Leuchs, Lawrence A. Borschowa, Anping Liu
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Patent number: 8582609Abstract: Techniques and devices for generating laser light that use large mode area fiber amplifiers and curved fiber sections to achieve desired operations in a fundamental fiber mode with high pulse quality and optical beam quality while reducing presence of high order fiber modes in continuous wave and pulsed laser devices.Type: GrantFiled: February 23, 2012Date of Patent: November 12, 2013Assignee: Calmar Optcom, Inc.Inventors: Sha Tong, Jerry Prawiharjo, Anthony Hong Lin
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Patent number: 8582611Abstract: In a frequency-tripled fiber-MOPA, a pre-amplified plane-polarized seed-pulse having a fundamental frequency is divided into two pulse-components, plane-polarized in polarization-orientations at 90-degrees to each other. The fundamental-wavelength pulse-components are amplified in a common amplifier-fiber. The amplified components are separately propagated on different optical paths. One of the amplified components is frequency-doubled. The frequency-doubled component on one path and fundamental-frequency component on the other path are then combined on a common-path and sum-frequency mixed to provide a frequency-tripled pulse.Type: GrantFiled: January 20, 2012Date of Patent: November 12, 2013Assignee: Coherent, Inc.Inventor: Andrei Starodoumov
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Patent number: 8582612Abstract: The various laser architectures described herein provide increased gain of optical energy as well as compensation of optical phase distortions in a thin disk gain medium. An optical amplifier presented herein provides for scalable high energy extraction and gains based on a number of passes of the signal beam through a gain medium. Multiple, spatially separate, optical paths may also be passed through the same gain region to provide gain clearing by splitting off a small percentage of an output pulse and sending it back through the amplifier along a slightly different path. By clearing out the residual gain, uniform signal amplitudes can be obtained.Type: GrantFiled: January 27, 2012Date of Patent: November 12, 2013Assignee: Applied Energetics, Inc.Inventors: Paul B. Lundquist, Hector Martin, Eric Nelson-Melby, Jiamin (Jim) Zhang
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Publication number: 20130272328Abstract: The present invention relates to a high-power femtosecond pulsed laser, the laser including: a source able to generate a train of input laser pulses having an envelope frequency and a carrier frequency; a chirped pulse amplification unit; and, a unit for controlling the phase drift between the envelope frequency and the carrier frequency of the output laser pulses. According to the invention, the unit for controlling the phase drift between the envelope frequency and the carrier frequency includes electro-optical phase-modulation unit that are placed on an optical path of the chirped pulse amplification unit in order to stabilize the phase drift between the envelope frequency and the carrier frequency of the output laser pulses as a function of time.Type: ApplicationFiled: December 21, 2011Publication date: October 17, 2013Applicants: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, AMPLITUDE TECHNOLOGIESInventors: Olivier Gobert, Michel Comte, Pierre-Mary Paul, Jean-Francois Hergott
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Patent number: 8548016Abstract: A tunable laser system having fine and coarse wavelength discrimination is provided. The tunable laser system includes a first filter having a first free spectral range (FSR) and a second filter having a second FSR different from the first FSR. The first filter provides a first series of pulses from a first portion of a laser output, and a second filter provides a second series of pulses from a second portion of the laser output. A processing system compares the first series of pulses and the second series of pulses to identify a series of markers, in which the markers are separated by a beat period of the first series of pulses and the second series of pulses. Advantageously, the series of markers may be used for mode-hop detection and/or for wavelength referencing.Type: GrantFiled: August 30, 2012Date of Patent: October 1, 2013Assignee: JDS Uniphase CorporationInventors: Chris Wagner, Grant Tessaro
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Patent number: 8537871Abstract: A high power cladding light stripper and high power laser systems using the same are described. A cladding light stripper includes a housing, a section of fiber disposed in relation to the housing wherein a portion of the section of fiber has an exposed cladding region, a plurality of glue regions sequentially arranged adjacent to each other along the section of fiber and covering the exposed cladding region, and wherein at least one glue region between a first glue region and a last glue region of the plurality of glue regions has a refractive index higher or lower than both an adjacent previous glue region and an adjacent subsequent glue region.Type: GrantFiled: July 11, 2011Date of Patent: September 17, 2013Assignee: nLIGHT Photonics CorporationInventor: Matthieu Saracco
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Patent number: 8514899Abstract: A laser system may include a master oscillator that outputs pulsed laser light, an amplification device that amplifies the pulsed laser light outputted from the master oscillator, and a controller that controls the master oscillator and the amplification device. The master oscillator may have a pumping laser that outputs pumping light, a seed laser that is oscillated by the pumping light, an amplifier that amplifies the pulsed laser light outputted by the seed laser using the pumping light, and at least one optical shutter disposed in the optical path between the seed laser and the amplifier. The controller may control the opening and closing of the optical shutter and discharging of the amplification device so that the amplification device discharges when the pulsed laser light that has passed through the optical shutter passes through the amplification device.Type: GrantFiled: March 14, 2012Date of Patent: August 20, 2013Assignee: Gigaphoton Inc.Inventor: Takashi Onose
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Patent number: 8502957Abstract: A system for equalizing pulse to pulse energy of a light beam includes a group of optical devices including an optical device configured to exhibit nonlinear properties, e.g., higher order or third order nonlinear properties. Transmission properties of an unequalized light beam passing through the group of optical devices change such that an output intensity of a resulting light beam output from the optical devices is equalized. One example configuration includes at least first and second prisms having nonlinear properties, i.e., higher order or third order, and configured as a beam steering system.Type: GrantFiled: April 16, 2012Date of Patent: August 6, 2013Assignee: ASML Holding N.V.Inventor: Muhammad Arif
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Patent number: 8494016Abstract: A laser resonator cavity is presented. The laser resonator cavity comprises an optical manipulator of different longitudinal modes propagating along different optical paths. The optical manipulator is configured for adjusting a difference in optical lengths of the different optical paths thereby adjusting a frequency spacing between the different longitudinal.Type: GrantFiled: July 29, 2009Date of Patent: July 23, 2013Assignee: Legato Laser Technology Ltd.Inventors: Yoram Karni, Guy Cohen
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Patent number: 8467424Abstract: Methods and systems for generating pulses of laser radiation at higher repetition rates than those of available excimer lasers are disclosed that use multiple electronic triggers for multiple laser units and arrange the timings of the different triggers with successive delays, each delay being a fraction of the interval between two successive pulses of a single laser unit. Methods and systems for exposing nanoscale patterns using such high-repetition-rate lasers are disclosed.Type: GrantFiled: June 30, 2011Date of Patent: June 18, 2013Assignee: Anvik CorporationInventor: Kanti Jain
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Patent number: 8462826Abstract: A laser device includes a seed laser, an amplifier, a detector, and an optical element arranged to direct radiation emitted by the seed laser towards a plasma generation site. The optical element is arranged to direct towards the detector amplified spontaneous emission radiation which has been emitted by the seed laser and has been reflected from a droplet of fuel material. The detector is arranged to trigger generation of a laser radiation pulse by the seed laser when the reflected amplified spontaneous emission radiation is detected.Type: GrantFiled: January 7, 2010Date of Patent: June 11, 2013Assignee: ASML Netherlands B.V.Inventors: Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Erik Petrus Buurman
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Patent number: 8457166Abstract: A method of controlling a wavelength-tunable laser selecting an oscillation wavelength with a combination of a plurality of wavelength selection portions of which wavelength peak is different from each other, comprising: a first step of confirming a control direction of the wavelength selection portion in a case where a setting value is changed from a first setting value for achieving the first wavelength to a second setting value for achieving the second wavelength; a second step of setting a setting value that is shifted from the second setting value in a direction that is opposite of a pre-determined changing direction on the wavelength selection portion as a prepared setting value, when the control direction confirmed in the first step is opposite to the pre-determined changing direction; and a third step of changing the prepared setting value set in the second step to the second setting value.Type: GrantFiled: October 4, 2012Date of Patent: June 4, 2013Assignee: Sumitomo Electric Device Innovations, Inc.Inventors: Masao Shibata, Hirokazu Tanaka, Tsutomu Ishikawa
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Patent number: 8451873Abstract: Disclosed is a method for creating a mark desired properties on an anodized specimen and the mark itself. The method includes providing a laser marking system having a controllable laser pulse parameters, determining the laser pulse parameters associated with the desired properties and directing the laser marking system to mark the article using the selected laser pulse parameters. Laser marks so made have optical density that ranges from transparent to opaque, white color, texture indistinguishable from the surrounding article and durable, substantially intact anodization. The anodization may also be dyed and optionally bleached to create other colors.Type: GrantFiled: August 30, 2010Date of Patent: May 28, 2013Assignee: Electro Scientific Industries, Inc.Inventor: Haibin Zhang
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Patent number: 8442090Abstract: A method and apparatus recycle residual energy in an optical parametric burst source.Type: GrantFiled: September 29, 2011Date of Patent: May 14, 2013Assignee: Lockheed Martin CorporationInventors: G. Paul Perryman, James Richard Wood, Mark K. Browder, Edward Miesak
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Patent number: 8422521Abstract: A laser device of an equal-energy pulse synchronous with motion includes: a resonant cavity, outputting a plurality of pulses with stable pulse-width and energy; a beam switch modulator, selectively enabling one of the pulses to pass; a beam energy modulator, adjusting the energy of the pulse according to a power feedback signal; an optical power sensor, sensing the energy and the pulse-width of the pulse; a motion controller, providing processing motion information; an optical feedback controller, outputting the power feedback signal to the beam energy modulator according to the energy of the pulse and the processing motion information; a trigger controller, measuring a time difference between time when the pulse is triggered and time when the optical power sensor detects the pulse, and correcting a turn-on time point of the beam switch modulator. The processing quality is therefore stabilized, and the device is applicable to various laser industrial processes.Type: GrantFiled: December 22, 2011Date of Patent: April 16, 2013Inventor: Chun-Hao Li
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Patent number: 8422529Abstract: A tunable laser light source having emission wavelengths in a visible or an adjoining spectral region includes a rotationally disposed laser substrate having more than one emission wavelength, a drive unit coupled to the laser substrate, a pulsed light source having a pulse transmitter, a trigger device, and a signal-delay unit. The trigger device, the signal-delay unit and the pulse transmitter are sequentially connected downstream of the drive unit.Type: GrantFiled: August 19, 2010Date of Patent: April 16, 2013Assignee: Karlsruher Institut Fuer TechnologieInventors: Thomas Woggon, Soenke Klinkhammer, Sebastian Valouch, Johannes Bach, Uli Lemmer
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Patent number: 8416819Abstract: The present disclosure relates to a method and to a device (1) by which a train (2, 2) of short laser pulses of a mode-coupled laser (3) is compensated with respect to the carrier envelope offset frequency of the individual lines contained in the associated frequency comb. The aim of the disclosure is to determine the carrier envelope offset frequency and to utilize said frequency to operate an acousto-optical frequency shifter (13). In said shifter, the uncompensated train of temporally equidistantly short laser pulses is diffracted in a first order such that the individual lines of the frequency comb are shifted by the carrier envelope offset frequency. The resulting compensated train of short laser pulses has a frequency comb, the individual lines of which are integral multiples of the repetition frequency of the individual light pulses in the train of short laser pulses.Type: GrantFiled: December 2, 2009Date of Patent: April 9, 2013Assignee: Femtolasers Produktions GmbHInventors: Christian Grebing, Sebastian Koke, Günter Steinmeyer
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Patent number: 8411713Abstract: A process and system for processing a thin film sample are provided. In particular, a beam generator can be controlled to emit at least one beam pulse. The beam pulse is then masked to produce at least one masked beam pulse, which is used to irradiate at least one portion of the thin film sample. With the at least one masked beam pulse, the portion of the film sample is irradiated with sufficient intensity for such portion to later crystallize. This portion of the film sample is allowed to crystallize so as to be composed of a first area and a second area. Upon the crystallization thereof, the first area includes a first set of grains, and the second area includes a second set of grains whose at least one characteristic is different from at least one characteristic of the second set of grains. The first area surrounds the second area, and is configured to allow an active region of a thin-film transistor (“TFT”) to be provided at a distance therefrom.Type: GrantFiled: September 9, 2009Date of Patent: April 2, 2013Assignee: The Trustees of Columbia University in the city of New YorkInventor: James S. Im
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Patent number: 8411710Abstract: The present invention relates to a laser apparatus with a structure for realizing a fast response in carrying out a start and an end of output of pulsed laser light while effectively suppressing damage to an optical amplifying medium. The laser apparatus is provided with a seed light source, an optical amplification section, a pulse modulator, a pump power controller, and a main controller. The pulse modulator receives an output start instruction and an output end instruction fed from the main controller and controls a start and an end of output of seed light from the seed light source. The pump power controller receives a pump trigger signal fed from the main controller and increases or decreases a power of pump light supplied to the amplification section.Type: GrantFiled: June 14, 2011Date of Patent: April 2, 2013Assignee: Sumitomo Electric Industries, Ltd.Inventor: Shinobu Tamaoki
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Patent number: 8406261Abstract: A laser driving device includes: a pulse signal generating unit that, after a voltage has risen from a predetermined reference voltage to a predetermined output voltage and a time of a sum of an oscillation period of relaxation oscillation and a light emission start time in a predetermined laser diode has nearly elapsed, generates a pulse signal having a waveform that falls divisionally in two or more stages from the output voltage to the reference voltage; and an output unit that generates a laser drive signal by performing signal processing on the pulse signal and outputs the signal to the laser diode.Type: GrantFiled: June 2, 2010Date of Patent: March 26, 2013Assignee: Sony CorporationInventors: Goro Fujita, Tsutomu Maruyama, Seiji Kobayashi
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Patent number: 8379679Abstract: The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.Type: GrantFiled: February 11, 2010Date of Patent: February 19, 2013Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Glenn Simenson, Robert Hainsey, David Barsic, Jeffrey Howerton, Wayne Crowther, Patrick Leonard
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Patent number: 8379678Abstract: The invention is a method and apparatus for creating marks on an anodized aluminum specimen with selectable color and optical density. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters. The laser marking system is directed to produce laser pulses having laser pulse parameters associated with the desired color and optical density in the presence of a fluid directed to the surface of the anodized aluminum specimen while marking.Type: GrantFiled: August 30, 2010Date of Patent: February 19, 2013Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Glenn Simenson, Patrick Leonard
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Patent number: 8358671Abstract: Processing a workpiece with a laser includes generating laser pulses at a first pulse repetition frequency. The first pulse repetition frequency provides reference timing for coordination of a beam positioning system and one or more cooperating beam position compensation elements to align beam delivery coordinates relative to the workpiece. The method also includes, at a second pulse repetition frequency that is lower than the first pulse repetition frequency, selectively amplifying a subset of the laser pulses. The selection of the laser pulses included in the subset is based on the first pulse repetition frequency and position data received from the beam positioning system. The method further includes adjusting the beam delivery coordinates using the one or more cooperating beam position compensation elements so as to direct the amplified laser pulses to selected targets on the workpiece.Type: GrantFiled: July 19, 2011Date of Patent: January 22, 2013Assignee: Electro Scientific Industries, Inc.Inventors: Brian W. Baird, Kelly J. Bruland, Clint R. Vandergiessen, Mark A. Unrath, Brady Nilsen, Steve Swaringen
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Patent number: 8351476Abstract: A system and methods for the quasi-remote compression and focusing of a moderate-intensity laser pulse to form a much higher intensity beam that can be directed at a target and used as a probe beam or used in a probe beam converter to generate other forms of electromagnetic radiation or energetic particles. A system for the quasi-remote propagation of high-intensity laser beams in accordance with the present invention comprises a main platform on which a first, “seed” laser pulse is generated, stretched, and amplified, and a remote platform, located at a distance from the main platform, which is configured to receive the amplified and stretched pulse and convert it into the high-intensity laser beam. The high-intensity laser beam in turn can then be converted into one or more probe beams directed at a target object.Type: GrantFiled: June 21, 2012Date of Patent: January 8, 2013Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Richard F. Hubbard, Antonio C. Ting, Joseph R. Peñano, Daniel F. Gordon, Phillip A. Sprangle, Bahman Hafizi, Arie Zigler
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Patent number: 8345718Abstract: A pulse shaper for compensating group runtime effects is provided. The pulse shaper comprising a first and a second dispersive element. An optical pulse can be coupled to the pulse shaper along a coupling direction such that said pulse exits from the pulse shaper after passing through the first and the second dispersive element along an exit direction. The first and the second dispersive element are formed and arranged to be movable relative to each other such that the path length to be traversed by the optical pulse through the first and the second dispersive element after coupling to the pulse shaper can be adjusted without any change in an offset between the coupling direction and the exit direction. The first and the second dispersive element are arranged in such a way that the shape of the optical pulse experiences a change as the pulse travels through the pulse shaper.Type: GrantFiled: May 6, 2009Date of Patent: January 1, 2013Assignee: Freie Universitaet BerlinInventors: Karsten Heyne, Mathias Hartmann, Klaus Molkenthin
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Patent number: 8325771Abstract: In a cavity-dumped, repetitively-pulsed, solid-state laser cavity dumping is protracted over a predetermined time longer than a round-trip time of the resonator of the laser. The cavity dumping is effected by a Pockels cell optical switch. During a dumping period a voltage applied to the Pockels cell falls in a predetermined time. Varying the voltage fall-time varies the duration of pulses provided by the laser, independent of the pulse-repetition frequency.Type: GrantFiled: June 10, 2010Date of Patent: December 4, 2012Assignee: Coherent, Inc.Inventors: Gary Y. Wang, Norman Hodgson