Abstract: Disclosed is a laundry treating apparatus. The present invention includes a cabinet, a tub provided within the cabinet, a drum provided within the tub to receive a treatment target therein, the drum made of metallic material, an induction module provided to the tub to heat the drum by induction, an infrared sensor provided to the tub to measure a temperature of the drum, and a barrel lens connected to the infrared sensor so that thermal radiation radiated from the drum enters the barrel lens, wherein the barrel lens includes a guide portion guiding vertically incident thermal radiation to the infrared sensor only.

Abstract: Systems and methods for measuring physiological responses caused by cognitive load and stress to calculate a probability of deception. The system comprises modules to determine changes in pupil dilation, flicker frequency, pupil eye trajectory, face temperature, respiratory rate, position of the user's facial points, heart rate, skin conductivity, body movements, arm temperature, temperature, and electroencephalography signals; and modules to provide stimuli to the user, record conscious responses from the user, receive physiological signals, and determine changes in the user's physiological variables associated with stress and cognitive load in response to the stimuli generated, to calculate a likelihood of deception in conscious responses.

Abstract: A device and system for promoting more recuperative sleep by regulating a user's body temperature. This may be done by using a series of devices that measure information about the user both while they are awake and while they are asleep, communicate that information to a processing unit, and create an ideal body temperature range profile based on that information. A temperature stimulus device may ensure that the core body temperature of the user stays substantially within the ideal body temperature range. By keeping the core body temperature of the user within the calculated range, the device and system will ensure deeper, and therefore more recuperative, sleep.

Abstract: A scale composition determination device (10) determines that Fe2O3 has been generated in the outermost layer of a scale (SC) in the case where the absolute value of a difference between temperatures of a steel material SM measured by radiation thermometers (20a, 20b) is equal to or more than a predetermined temperature, and determines that Fe2O3 has not been generated in the outermost layer of the scale (SC) in the case where the absolute value of the difference between the temperatures of the steel material SM measured by the radiation thermometers (20a, 20b) is not equal to or more than the predetermined temperature.

Abstract: A temperature measurement correction method for a temperature detection device is provided. The temperature detection device includes a case and a focal plane array module disposed on an inner of the case. The temperature measurement correction method includes measuring an ambient temperature, a temperature of the case and a temperature of the focal plane array module, determining a plurality of radiometric regression coefficients according to the ambient temperature, the temperature of the case and the temperature of the focal plane array module, utilizing the temperature detection device to sense infrared energy radiated from an object to generate an electrical signal, and calculating an actual temperature value of the object according to the plurality of radiometric regression coefficients and the electrical signal.

Abstract: A substrate and a display device are disclosed. The substrate includes: a base substrate; a first temperature sensing section disposed on the base substrate; and a first processing chip connected with the first temperature sensing section. The substrate includes a peripheral area and a central area; one part of the first temperature sensing section is disposed in the peripheral area of the substrate; another part of the first temperature sensing section is disposed in the central area of the substrate; and the first processing chip is configured to convert temperature sensing signals of the central area and the peripheral area of the substrate sensed by the first temperature sensing section into relevant control signals and output the signals. The above first temperature sensing section can more accurately measure the temperature difference between the peripheral area and the central area of the substrate.

Abstract: An apparatus for measuring body core temperature includes a light guide. The light guide can be coupled to an earpiece, or it can be a standalone device. The apparatus also includes a sensor positioned at one end of the light guide, and a processor coupled to the sensor. The sensor is operable to sense infrared radiation from an infrared source at the opposite end of the light guide. The processor is operable to determine a temperature of the infrared source at the opposite end of the light guide via a transfer function that correlates a measurement of the infrared radiation observed by the sensor and an effect of radiation of the light guide.

Abstract: Devices and corresponding methods can be provided to monitor or measure temperature of a target or to control a process. Targets can have low, unknown, or variable emissivity. Devices and corresponding methods can be used to measure temperatures of thin film, partially transparent, or opaque targets, as well as targets not filling a sensor's field of view. Temperature measurements can be made independent of emissivity of a target surface by, for example, inserting a target between a thermopile sensor and a background surface maintained at substantially the same temperature as the thermopile sensor. In embodiment devices and methods, a sensor temperature can be controlled to match a target temperature by minimizing or zeroing a net heat flux at the sensor, as derived from a sensor output signal. Alternatively, a target temperature can be controlled to minimize the heat flux.

Abstract: A method of analyzing a thermal image of a body section is disclosed. The method comprises obtaining a thermospatial representation of the body section, calculating a surface integral of the thermal data over the surface, and determining the likelihood that a thermally distinguishable region is present in the body section, based on a value of the surface integral.

Abstract: A non-contact pyrometer and method for calibrating the same are provided. The pyrometer includes a radiation sensor configured to measure at least a portion of a radiance signal emitted from a target medium and output a voltage that is a function of an average of the absorbed radiance signal, and an optical window disposed proximate the radiation sensor and configured to control a wavelength range of the radiance signal that reaches the radiation sensor. The pyrometer may further include a reflective enclosure configured to receive the target medium therein, wherein the radiation sensor and the optical window are disposed within the reflective enclosure, an amplifier in communication with an output of the radiation sensor, and a data acquisition system in communication with an output of the amplifier.

Abstract: A photodiode excellent in responsivity receives flashes of light emitted from flash lamps in the process of heating a semiconductor wafer by irradiation with flashes of light, and the waveform of the intensity of the flashes of light versus time is acquired using voltage data obtained from an output from the photodiode. Then, a temperature calculating part performs a heat conduction simulation using the acquired data to calculate the temperature of the semiconductor wafer irradiated with the flashes of light from the flash lamps. The temperature of the semiconductor wafer is computed using data corresponding to the intensity of the flashes of light obtained from the output from the photodiode. This allows the determination of the surface temperature of the semiconductor wafer irradiated with the flashes of light, irrespective of the waveform of the emission intensity of the flash lamps.

Abstract: A system and a method for calibrating an ambient light sensor (ALS) are disclosed. The ALS, an adjustable resistor and a switch are located on a first surface of a printed circuit board (PCB), and the adjustable resistor and the switch are connected in series between an adjustable probe of the ALS and the ground. A resistor is connected between two pads located on a second surface of the PCB via two probes touching the pads. A controller connected to the PCB reads a light sensitivity of the ALS and calculates a calculated resistance value of the adjustable resistor by a formula “detected light sensitivity/resistance value of the resistor=objective light sensitivity/resistance value of the adjustable resistor”, wherein the objective light sensitivity and the resistance value of the resistor are given.

Abstract: A method and apparatus for automated field calibration of temperature sensors uses a series of readings including a reading of a known source, such as an LED, for use in calculating a factor that is compared to a reference for adjusting the sensor output signal. Calibration readings are taken more frequently after start up to compensate for sensor drift during storage, as opposed to less frequent readings during operation to compensate for slower sensor drift while operational.

Abstract: An infrared temperature sensing device with projecting function is using for sensing temperature of a measured body. The infrared temperature sensing device includes a temperature-sensing element, a Fresnel lens, a microprocessor and a projecting module. The temperature-sensing element is used for sensing infrared radiation and deriving at least a temperature signal. The Fresnel lens is located between the measured body and the temperature-sensing element for focusing the infrared radiation on the temperature-sensing element. The microprocessor is electrically connected to the temperature-sensing element. The projecting module is electrically connected to the microprocessor and projecting at least a body temperature value corresponding to the temperature signal.

Abstract: An ear thermometer with an infrared sensor, a control unit and a power supply unit in a housing has a wireless communication interface. The wireless communication interface is a WLAN or Bluetooth interface for communication with a base station, in which temperature measurement values are displayed and stored.

Abstract: An infrared clinical thermometer able to communicate is disclosed. The infrared clinical thermometer has a control module arranged inside a casing and electrically connected with an infrared body temperature sensation unit, a communication interface, a measurement key, a transmission key, and a power key. When intending to measure body temperature, the user presses the power key to start the infrared clinical thermometer. According to the signal of the measurement key, the control module controls the infrared body temperature sensation unit to detect body temperature. When intending to transmit measurement results, the user links the communication interface to the computer via a detachable communication cable and then presses the transmission key or common key. Then, the control module transmits measurement results to the computer. The infrared clinical thermometer is detachably linked to the computer and thus easy to measure temperature and transmit data.

Abstract: An ear thermometer with an ear canal sensing device and a measurement method thereof is disclosed. The ear thermometer mainly comprises two sensors. One is an approach sensor installed on a probe. The approach sensor used as the ear canal sensing device determines whether the probe is inserted into an ear canal. Also, the approach sensor is used as the basis to switch the measurement mode to an ear temperature mode or a second measurement mode, such as the forehead temperature mode, surface temperature mode, or room temperature mode. The other is an infrared sensor used to measure temperatures. After the approach sensor determines the measurement mode, the infrared sensor measures the temperature to obtain a signal. Then, the signal is processed through a control module to be shown on a display unit.

Abstract: A vacuum pump capable of accurately detecting a rotor temperature based on a change in permeability of a magnetic material. Two targets are fixed to a nut opposed to a gap sensor. The nut is made of pure iron, and a surface of the nut opposed to the gap sensor serves as a target. The target has a Curie temperature greater than a temperature monitoring range, and each of the targets has a Curie temperature falling within the temperature monitoring range. When the targets become opposed to the gap sensor in turn according to rotation of a rotor, three types of signals are output from the gap sensor. The difference-signal generation means generates a difference signal of each the targets, on the basis of a signal of the target. The difference signal is compared with a reference signal V0 for detecting the Curie temperatures to detect a rotor temperature.

Abstract: A system and method for determining the temperature of an object without physically contacting the object. The method involves reading a spectral radiation of the object over a plurality of wavelengths to obtain a set of radiation data related to a temperature of the object. A known characteristic of a black body is determined at a plurality of predetermined, different test temperatures. The spectral data and the characteristic of the black body at the various test temperatures are used to calculate a temperature of the object.

Abstract: A system for curing a binders applied to glass fibers is disclosed. The curing of the binder is accomplished by passing the binder coated glass fibers through a curing oven having one or more temperature zones. The temperature of the binder coated glass fibers is monitored and the temperature in the curing oven is adjusted to ensure proper heating of the glass fibers thereby ensuring uniform curing of the binder composition. Temperature measurements are made either as the product traverses the oven or as the cured product exits the curing oven. The invention is particularly useful for curing acrylic thermoset binders and formaldehyde-free binders.

Abstract: An object is to realize an ear thermometer that is configured to easily arrange a sensor in a sensor mirror and is suitable for mass production. The ear thermometer has a probe. The probe includes a probe body and a temperature measuring part joined with the probe body. The temperature measuring part includes a flange coupled with the probe body and a front end part extending from the flange, the front end part incorporating a sensor mirror.

Abstract: A mechanism of a monitoring unit of an electric rotating machinery covered in a housing that intercepts photoelectron transmission, the mechanism has: a monitoring window penetrating a part of the housing and configured to allow passage of photoelectrons and not to allow passage of gas; a camera arranged outside the monitoring window and configured to receive radiated photoelectron generated in the housing and passing through the monitoring window and to generate image data from the radiated photoelectron; and a computing unit configured to process the image data. The computing unit has reference image data storage means for storing image data resulting from blackbody radiation occurring in a reference state in the housing, as reference image data, and temperature calculating means for comparing the image data with the reference image data, thereby to calculate the temperature in the housing.

Abstract: Infrared Ir Thermometer Calibration Systems and Methods are Disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system.

Abstract: An approach to noninvasively, remotely and accurately detect core body temperature in a warm-blooded subject, human or animal, via thermal imaging. Preferred features such as the use of in-frame temperature references, specific anatomical target regions and a physiological heat transfer model help the present invention to overcome pitfalls inherent with existing thermal imaging techniques applied to physiological screening applications. This invention provides the ability to noninvasively, remotely and rapidly screen for diseases or conditions that are characterized by changes in core body temperature. One human application of this invention is the remote screening for severe acute respiratory syndrome (SARS), since fever is a common, early symptom. Other diseases and conditions that affect the core body temperature of humans or animals may also be noninvasively and remotely detected with this invention.

Abstract: Temperature states of a clinical thermometer body and an environment are estimated by temperatures measured by a first temperature sensor integrally formed together with an infrared sensor arranged to the distal end of a probe and a second temperature sensor arranged on the bottom side of a probe holder, and processes suitable for the respective temperature states are performed. An estimation error or the reliability of an estimation value is calculated by the temperatures to notify a user of the estimation error or the reliability by an LCD or the like.

Abstract: According to one embodiment of the invention a method for determining the location of a potential defect in a device includes scanning a surface of the device with a temperature sensor while operating the device. The method also includes measuring a temperature of the device by a temperature sensor at a plurality of locations while scanning. Based upon the measured temperatures, a temperature profile is constructed for the device. The method also includes comparing the constructed temperature profile to a reference profile to determine a location of the potential defect in the device.

Abstract: A system for adjusting parameters of a temperature sensor for settling time reduction is disclosed. The system includes an input for receiving a signal for triggering an adjustment of one or more parameters associated with one or more portions of the temperature sensor. And, an adjuster that includes a current sourcing/sinking adjuster, a feedback loop current adjuster and a feedback loop resistance adjuster coupled to the input. The adjuster adjusts one or more voltages associated with one or more portions of the temperature sensor in response to a receipt of the signal for triggering an adjustment to achieve the settling time reduction.

Abstract: A multimeter with non-contact temperature measurement capability. The multimeter is contained in a housing, and has outputs relating to measured electrical parameters. There is also an output display contained in the housing, for displaying results to a user. A non-contact optically-based temperature sensing device is coupled to the housing, and has an output related to sensed temperature. Circuitry contained in the housing processes both the multimeter outputs and the temperature sensing device output, and transmits the processed output to the output display.

Abstract: A multimeter with non-contact temperature measurement capability. The multimeter is contained in a housing, and has outputs relating to measured electrical parameters. There is also an output display contained in the housing, for displaying results to a user. A non-contact optically-based temperature sensing device is coupled to the housing, and has an output related to sensed temperature. Circuitry contained in the housing processes both the multimeter outputs and the temperature sensing device output, and transmits the processed output to the output display.

Abstract: A system and method for remotely measuring the temperature of an object using microwave radiometry that may be used in hostile environments. A single pole-single throw reflective PIN diode switch is operable in a PASS mode and a BLOCK mode. In the PASS mode, the switch passes the power received from the object to a low-noise block converter (“LNB”) for amplification. In the BLOCK mode, the switch blocks the object power and reflects the load noise power of an ambient temperature load to the LNB. A detector diode detects the amplified power output during both the BLOCK and PASS mode and the AC signal from the detector is converted to an output signal proportional to the difference in the noise powers detected in the PASS and BLOCK modes.

Abstract: A multiple measurement memory-type electronic thermometer includes an ear temperature measuring unit, a microprocessor, a keypad unit, a display unit, and a memory unit. The ear temperature measuring unit, the display unit, and the memory unit are controlled by the microprocessor. When the activation key of the keypad unit is pressed by the user, being controlled by the microprocessor, the ear temperature unit is activated to perform measurement. The measuring result of the ear temperature unit is sent back to the microprocessor, displayed by the display unit, and saved in the memory unit. The memory unit is partitioned into a plurality of independent memory sectors. Each sector includes a queue data structure, such that the ear temperature measured from each person and the measuring time can be stored in the corresponding memory sector. Therefore, measurement of multiple people can be performed, memorized and retrieved.

Abstract: A method for the correction of the output signal of an infra red radiation multiple element sensor comprises the steps of determining and storing a parameter of a sensor element of the sensor and of generating a corrected signal of the sensor element in accordance with the stored parameter, where the storage of the parameter takes place in a memory supplied by the manufacturer and where prior to the correction being carried out, the parameter is transmitted to a correction device which is separate from the sensor. A sensor has several sensor elements (11a to 11i) which generate an output signal and a memory (14) provided on the sensor for the storage of at least one parameter of at least one sensor element.

Abstract: In a system for thermal processing of a semiconductor substrate, an RTP system employs a reflector plate which is highly reflective of radiation in a target wavelength range, and less reflective of radiation outside that target wavelength range. In one embodiment, the reflector plate has a highly reflective portion overlying a less reflective portion, wherein the highly reflective portion is highly reflective of radiation in the target wavelength range. As radiation emitted by the substrate is received on the reflector, the radiation in the target wavelength range is reflected, thereby facilitating measurement of the substrate temperature by the pyrometer(s), while radiation outside the target wavelength range is absorbed, thereby facilitating cooling of the substrate.

Abstract: A prediction type electronic thermometer having an actively controlled heater element thermally isolating the probe tip from the probe shaft. Rapid and accurate temperature measurements are made using predictive algorithms. Control circuitry reads input from the temperature sensing element to compute best heater control signals so that the temperature of the probe shaft rapidly follows changes in the temperature of the probe tip. Thermal isolation between probe shaft and tip impedes heat flow from the heater element to the tip providing more accurate measurements. Rapid and accurate management of shaft temperature allows heat from the patient being measured to be most efficiently transmitted to the temperature sensor element resulting in very fast temperature measurements.

Abstract: Temperature states of a clinical thermometer body and an environment are estimated by temperatures measured by a first temperature sensor integrally formed together with an infrared sensor arranged to the distal end of a probe and a second temperature sensor arranged on the bottom side of a probe holder, and processes suitable for the respective temperature states are performed. An estimation error or the reliability of an estimation value is calculated by the temperatures to notify a user of the estimation error or the reliability by an LCD or the like.

Abstract: The present invention is generally directed to various methods of controlling the formation of metal silicide regions, and a system for performing same. In one illustrative embodiment, the method comprises forming a layer of refractory metal above a feature, performing at least one anneal process to convert a portion of the layer of refractory metal to at least one metal silicide region on the feature, and measuring at least one characteristic of at least one metal silicide region while the anneal process is being performed. In another illustrative embodiment, the method comprises forming a layer of refractory metal above a feature, performing at least one anneal process to convert a portion of the layer of refractory metal to at least one metal silicide region on the feature, and performing at least one scatterometric measurement of the metal silicide region after at least a portion of the anneal process is performed to determine at least one characteristic of the metal silicide region.

Abstract: An imager temperature sensor and a current correction apparatus are provided which use dark pixel measurements from an imager chip during operation together with a fabrication process constant as well as a chip dependent constant to calculate chip temperature. The chip temperature may be used to generate a current correction signal. The correction signal is used to tune a current on the imager chip to correct for temperature variations.

Abstract: A method and device for photothermal imaging tiny metal particles which are immersed in a given medium like a living cell deposited onto a transparent glass slide. The given medium and immersed tiny metal particles are illuminated through separate phase reference laser beam and sensitive probe laser beam, with the sensitive probe laser beam including a heating laser beam undergoing through impingement on the given medium slight phase changes induced by photothermal effect due to a local heating, in the absence of any substantial phase changes to the phase reference laser beam. Illuminating is performed by focusing the separate phase reference and sensitive probe laser beam through the transparent glass slide at a given depth within the given medium and a transmitted phase reference laser beam and a transmitted sensitive probe laser beam undergoing the slight phase changes are generated.

Abstract: This invention is a fiber-based multi-color pyrometry set-up for real-time non-contact temperature and emissivity measurement. The system includes a single optical fiber to collect radiation emitted by a target, a reflective rotating chopper to split the collected radiation into two or more paths while modulating the radiation for lock-in amplification (i.e., phase-sensitive detection), at least two detectors possibly of different spectral bandwidths with or without filters to limit the wavelength regions detected and optics to direct and focus the radiation onto the sensitive areas of the detectors. A computer algorithm is used to calculate the true temperature and emissivity of a target based on blackbody calibrations. The system components are enclosed in a light-tight housing, with provision for the fiber to extend outside to collect the radiation.

Abstract: A sensor assembly for glass-ceramic cooktop appliances includes an optical detector having an reference component and an active component. The active component is arranged to receive radiation from the glass-ceramic plate, and the reference component is insulated from radiation from the glass-ceramic plate. The sensor assembly further includes a temperature sensor and a heater located adjacent to the reference component and a controller having a first input connected to the optical detector and a second input connected to the temperature sensor. The controller is responsive to the optical detector and the temperature sensor to calibrate the sensor assembly. Calibration is accomplished by noting the temperature reading of the temperature sensor after the burner assembly has not been used for a predetermined period of time to obtain a first calibration point. Then, the burner assembly is activated so that the temperature of the glass-ceramic plate is raised, and the output of the optical detector is noted.

Abstract: Disclosed is a temperature sensing device and system including a processor, a memory, and optics for collecting incident infrared energy to produce a temperature signal. The device and system function in accordance with a disclosed method to derive one or more signal parameters from the infrared energy, such as signal strength and signal dilution, and compare the parameter(s) with acceptable, pre-defined limits. A filtered or unfiltered temperature indication is provided if all parameters lies within pre-defined limits, and a different temperature indication is displayed if one or more parameters exceeds pre-defined limits.

Abstract: A radiation detector for axillary temperature measurement comprises a wand having an axially directed radiation sensor at one end and an offset handle at the opposite end. The radiation sensor is mounted within a heat sink and retained by an elastomer in compression. The radiation sensor views a target surface through an emissivity compensating cup and a plastic film. A variable reference is applied to a radiation sensor and amplifier circuit in order to maintain full analog-to-digital converter resolution over design ranges of target and sensor temperature with the sensor temperature either above or below target temperature.

Abstract: A method for determining the temperature of a surface upon which a coating is grown using optical pyrometry by correcting Kirchhoff's law for errors in the emissivity or reflectance measurements associated with the growth of the coating and subsequent changes in the surface thermal emission and heat transfer characteristics. By a calibration process that can be carried out in situ in the chamber where the coating process occurs, an error calibration parameter can be determined that allows more precise determination of the temperature of the surface using optical pyrometry systems. The calibration process needs only to be carried out when the physical characteristics of the coating chamber change.

Abstract: The present invention relates to a device useful for the measurement of the temperature of a radiating body. More particularly, the present invention relates to a radiation pyrometer that detects and compensates for emissivity that changes with wavelength, as in metals. Additionally the present invention relates to a device that enhances the resolution and repeatability of the measured temperature of the radiating body. Additionally, the present invention relates to the technique utilized to enhance the resolution and repeatability of the measured temperature.

Abstract: Apparatus for measuring the temperature of an electrically heated pot which uses the Planck formula and employs an infrared reflective hemisphere; first and second infrared wave guides, and first and second infrared filters and infrared detectors as well as a calculating device.

Abstract: The present invention describes a method of end point detecting a process. According to the present invention a surface characteristic is continually measured while the substrate is being processed. A predetermined change in the surface characteristic is utilized a signal and end to the processing step.

Abstract: A method of detecting a temperature of an object in a multiple-reflection environment by a radiation pyrometer includes the steps of detecting a radiation strength emitted from a target region of an object, applying a correction to the radiation strength so as to correct the effect of multiple reflections of a radiation emitted from the object, applying a correction to the radiation strength so as to correct a reflection loss caused at an end surface of an optical medium interposed between the object and a sensing head of the pyrometer, applying a correction to the radiation strength with regard to an optical absorption loss caused in the optical medium, and applying a correction to the radiation strength with regard to a stray radiation coming in to the sensing head from a source other than the target region of the object.

Abstract: A method and apparatus for active pyrometric measurement of the temperature of a body whose emissivity varies with wavelength. The emissivity is inferred from reflectivity measured at two wavelengths in an irradiation wavelength band and extrapolated to a wavelength in an emission wavelength band. The extrapolated emissivity is used to correct a blackbody estimate of the temperature of the body in the emission wavelength band. The extrapolation, being temperature-dependent, is done iteratively. Both reflectivity and emission measurements are performed via a common optical head that is shaped, and is positioned relative to the body, so that the optical head has a sufficiently large solid angle of acceptance that the measured temperature is independent of superficial roughness of the body.

Abstract: A radiation detector for axillary temperature measurement comprises a wand having an axially directed radiation sensor at one end and an offset handle at the opposite end. The radiation sensor is mounted within a heat sink and retained by an elastomer in compression. The radiation sensor views a target surface through an emissivity compensating cup and a plastic film. A variable reference is applied to a radiation sensor and amplifier circuit in order to maintain full analog-to-digital converter resolution over design ranges of target and sensor temperature with the sensor temperature either above or below target temperature.

Abstract: A temperature measuring method measures the temperature of a measuring object, such as a semiconductor wafer, by a radiation thermometer capable of approximating the relation between its output and the temperature of the measuring object by a predetermined straight line and of being calibrated by properly determining a slope and a y-intercept for the straight line. The measuring method carries out a procedure including the steps of measuring the reflectivity of a measuring object regarding the light of a wavelength that is not transmitted by the measuring object, and determining a slope and a y-intercept for a proper straight line for the measuring object on the basis of results of processing the measuring object by a predetermined process, such as a film forming process, that provides a result, such as the thickness of a film, corresponding to process temperature.