Abstract: An ear thermometer includes a probe including an infrared sensor unit for measuring a temperature of an eardrum of an ear of a temperature measurement target parson in a non-contact manner, the probe attached to an ear hole of the temperature measurement target parson. The probe includes a probe body inserted into the ear hole of the temperature measurement target parson, a housing for supporting the probe body; and an in-ear type earpiece attached to the probe body and abutting on an inside of the ear hole of the temperature measurement target person. The infrared sensor unit includes a first sensor and a second sensor arranged in the probe body and spaced apart by a predetermined distance along a direction substantially orthogonal to the eardrum when the probe body is inserted into the ear hole of the temperature measurement target person.

Abstract: A voltage-programmed display system allows measurement of effects on pixels in a panel that includes both active pixels and reference pixels coupled to a supply line and a programming line. The reference pixels are controlled so that they are not subject to substantial changes due to aging and operating conditions over time. A readout circuit is coupled to the active pixels and the reference pixels for reading at least one of current, voltage or charge from the pixels when they are supplied with known input signals. The readout circuit is subject to changes due to aging and operating conditions over time, but the readout values from the reference pixels are used to adjust the readout values from the active pixels to compensate for the unwanted effects.

Abstract: A substrate processing apparatus includes a base with a process-side surface and a substrate support arranged on the process-side surface and designed to carry a substrate at its periphery. The periphery, more specifically the plane defined by the periphery, is spaced apart from the process-side surface. The substrate processing apparatus also includes a radiation sensor adapted to measure electromagnetic radiation arranged on a side of a back-side surface of the base. A radiation channel is arranged between the radiation sensor and the periphery of the substrate support, more specifically between the radiation sensor and the plane defined by the periphery, wherein the radiation channel is at least partially permeable to electromagnetic radiation.

Abstract: A cavity blackbody radiation source is provided. The cavity blackbody radiation source comprises a blackbody radiation cavity and a carbon nanotube composite material. The blackbody radiation cavity comprises an inner surface. The carbon nanotube composite material is located on the inner surface. The carbon nanotube composite material comprises a black lacquer and a plurality of carbon nanotubes, and the plurality of carbon nanotubes is dispersed in the black lacquer.

Abstract: A cavity blackbody radiation source is provide. The cavity blackbody radiation source comprises a blackbody radiation cavity and a carbon nanotube composite material. The blackbody radiation cavity comprises an inner surface. The carbon nanotube composite material is located on the inner surface. The carbon nanotube composite material comprises a black lacquer and a plurality of carbon nanotubes, and the plurality of carbon nanotubes is in an upright state in the black lacquer.

Abstract: A radiometric camera and method for obtaining accurate radiometric readings of objects in a scene captured by a radiometric camera. The method comprises estimating a gamma drift coefficient based on an input thermal image, wherein the thermal image is captured by an infrared sensor; performing, based on the gamma drift coefficient and the input thermal image, a sensor temperature stabilization to provide an ambient-stabilized thermal image, wherein the ambient-stabilized thermal image is invariant to temperature changes of the infrared sensor; performing ambient calibration to estimate a scene temperature based on the ambient-stabilized thermal image; and measuring, based on the estimated scene temperature and a calibrated attenuation factor, a temperature of each of at least one object shown in the input thermal image, where the temperature of each of the at least one object is measured independently of the ambient temperature of the radiometric camera.

Abstract: Provided are a refrigerator, and a method for correcting temperature measurement errors of an infrared sensor including: verifying that the infrared sensor is running in an operating state; obtaining a measured operating-state value acquired by the infrared sensor sensing the temperature of a preset zone; obtaining a correction constant corresponding to the infrared sensor, the correction constant being obtained by means of a comparison between the value measured by the infrared sensor in a correction state and a standard temperature value; using the correction constant to correct the measured value and thus obtain a corrected temperature value. Using the method, the impact of an absolute error of the infrared sensor on temperature measurement is reduced; thus the accuracy of temperature measurement is improved, such that measured values directly reflect the actual temperature of the items inside a preset zone, and an accurate basis for control is provided for subsequent associated control.

Abstract: An object detection apparatus includes: a transmitter transmitting a radio wave with a predetermined intensity at the radio wave transmission end; a receiver receiving the radio wave, which is to be transmitted when the radio wave is transmitted from the transmitter, at the radio wave reception end; a setter setting a transmission scheme of the transmitter to a plurality of different transmission characteristics; a transmission controller controlling the transmitter to transmit the radio wave with the transmission scheme, which is to be set when the setter sets the transmission scheme; and a detector detecting a presence of the object at a position inside the vehicle, based on a detected reception intensity indicating a respective radio wave reception intensity received by the receiver, the object blocking the radio wave transmitted from the transmitter to the receiver at the position inside the vehicle.

Abstract: A method for measuring a temperature of a film in a reaction chamber is provided. The method includes: obtaining reflectivity sampling data R of a sampling point set in a detection area of the film for light with a wavelength ?, and thermal radiation value sampling data E of the sampling point set; obtaining a first correction factor ? and a second correction factor ? according to values of at least two sampling data groups, wherein 0<??1, 0???1; obtaining a blackbody radiation value Lb of the detection area of the film for the light with the wavelength ? according to the first correction factor ?, the second correction factor ? and the values of the at least two sampling data groups; obtaining a temperature T of the detection area by looking up a table according to the blackbody radiation value Lb and the wavelength ?.

Abstract: A test apparatus for testing an IR sensor of train undercarriage temperatures is disclosed. The IR sensor may be used to obtain infrared IR emission data by sensing a wheel or a wheel bearing of a rail vehicle. The test apparatus may comprise a heat emitter for supplying IR emissions at a reference temperature to the IR sensor. A support may support the heat emitter at a position spaced from the passage of the rail vehicle and in an orientation for directing the IR emissions at the IR sensor.

Abstract: Embodiments of the present invention generally relate to methods and apparatus for measuring, calibrating, and controlling substrate temperature during low temperature and high temperature processing.

Abstract: A test apparatus for testing an IR sensor of train undercarriage temperatures is disclosed. The IR sensor may be used to obtain infrared IR emission data by sensing a wheel or a wheel bearing of a rail vehicle. The test apparatus may comprise a heat emitter for supplying IR emissions at a reference temperature to the IR sensor. A support may support the heat emitter at a position spaced from the passage of the rail vehicle and in an orientation for directing the IR emissions at the IR sensor.

Abstract: An adaptive model training system and method for filtering asset operating data values acquired from a monitored asset for selectively choosing asset operating data values that meet at least one predefined criterion of good data quality while rejecting asset operating data values that fail to meet at least the one predefined criterion of good data quality; and recalibrating a previously trained or calibrated model having a learned scope of normal operation of the asset by utilizing the asset operating data values that meet at least the one predefined criterion of good data quality for adjusting the learned scope of normal operation of the asset for defining a recalibrated model having the adjusted learned scope of normal operation of the asset.

Abstract: A method of in-situ pyrometer calibration for a wafer treatment reactor such as a chemical vapor deposition reactor desirably includes the steps of positioning a calibrating pyrometer at a first calibrating position and heating the reactor until the reactor reaches a pyrometer calibration temperature. The method desirably further includes rotating the support element about the rotational axis, and while the support element is rotating about the rotational axis, obtaining first operating temperature measurements from a first operating pyrometer installed at a first operating position, and obtaining first calibrating temperature measurements from the calibration pyrometer. Both the calibrating pyrometer and the first operating pyrometer desirably are adapted to receive radiation from a first portion of a wafer support element at a first radial distance from a rotational axis of the wafer support element.

Abstract: A blackbody radiometric reference comprising a source plate or a target plate, metallic nanoparticles or other high emissivity coating disposed on the plate, and an intermediate coating such as paint. The plate may comprise copper, aluminum or composites thereof. Apparatus capable of functioning as a radiometric or thermometric reference. A pre-heater or weakly-coupled area may be disposed around or adjacent a highly thermally uniform area. A groove or perforations extending into a front surface of the source plate defining a weakly-coupled edge portion surrounding a thermally-controlled, optically-active area, and connected by bridges or structures thereto. An external probe may be located near the source plate for measuring ambient temperature, for compensating for ambient temperature or for radiative load on the blackbody.

Abstract: An apparatus for integrity verification of an IR detector that is configured to detect a temperature of an IR emission from an undercarriage component is described. The apparatus includes an IR emitter which emits an IR signal at a reference temperature and the IR signal is directed at the IR detector. A controller is connected to the IR detector and the IR emitter. The controller is configured to compare the reference temperature of the IR signal and the detected temperature of the IR signal to determine the integrity of the IR detector.

Abstract: A substrate for processing in a heating system is disclosed. The substrate includes a bottom portion for absorbing heat from a radiating heat source, the bottom portion having a first region having a first emissivity and a second region having a second emissivity less than the first emissivity. The first region and the second region promote thermal uniformity of the substrate by compensating for thermal non-uniformity of the radiating heat source.

Abstract: A device is disclosed including a substrate; an infrared detector coupled to and thermally isolated from the substrate; and a heat shield coupled to the substrate by a plurality of contacts, the heat shield disposed above the infrared detector to block external thermal radiation from being received by the infrared detector. The heat shield is configured to receive a current through the contacts to heat the heat shield to a first temperature, and the infrared detector is configured to detect the first temperature and provide an output signal that is related to a vacuum pressure within the device. Methods for using and forming the device are also disclosed.

Abstract: Disclosed is a calibrating apparatus which is adapted to remove a measurement deviation of a pyrometer, and more particularly, to an apparatus for calibrating a pyrometer, which calibrates a reference value so as to remove a deviation in a temperature measured in a pyrometer. The apparatus for calibrating a pyrometer includes a blackbody including a radiant space from which radiant energy is radiated, a body housing configured to receive the blackbody therein and including a light output wall having a light output port connected with the radiant space, a light output wall protecting cover configured to be coupled with the light output wall of the body housing so as to define a passage connecting the light output wall of the body housing and an outside environment, and a fixing member configured to fix the light output wall protecting cover to the light output wall of the body housing.

Abstract: Disclosed is a calibrating apparatus which is adapted to remove a measurement deviation of a pyrometer, and more particularly, to an apparatus for calibrating a pyrometer, which calibrates a reference value so as to remove a deviation in a temperature measured in a pyrometer. The apparatus for calibrating a pyrometer includes a blackbody including a radiant space from which radiant energy is radiated, a body housing configured to receive the blackbody therein and including a light output wall having a light output port connected with the radiant space, a light output wall protecting cover comprising a transparent blocking plate disposed at a position opposite to the light output port so as to transmit a long wavelength of approximately 5 ?m to approximately 20 ?m may and configured to be coupled with the light output wall of the body housing, and a fixing member configured to fix the light output wall protecting cover to the light output wall of the body housing.

Abstract: A method for calibrating distributed temperature sensing (DTS) systems is disclosed. The method includes: receiving temperature data associated with one or more locations along a length of an optical fiber; calculating a set of unique calibration coefficients specific to each of the one or more locations along the fiber length; and applying the set of calibration coefficients specific to each of the one or more locations along the fiber length to the temperature data for calibrated correction thereof. Also disclosed is a system for calibrating DTS data and a wellbore for providing calibrated DTS data.

Abstract: A dual parameter sensor for sensing temperature and mechanical or chemical or related information is disclosed. The sensor is formed of an optical waveguide suitable for use in-situ in a high temperature environment having a Bragg grating written into a core region thereof with short-pulsed electromagnetic radiation. By noting the thermal Black Body radiation level above 650° C., wavelength shifts due to temperature can be decoupled from wavelength shifts due to the other parameter being sensed. Advantageously the thermal radiation can be used as an optical source to probe the Bragg grating, considerably simplifying the interrogating apparatus, removing the need for an extrinsic optical source to probe the sensor.

Abstract: A method for on-orbit calibration of the temperature sensors of a simulated blackbody is disclosed. The method may include selecting a simulated blackbody traveling in a micro-gravity environment and comprising a sensor, a container positioned proximate the senor and containing a material, and a heat transfer device positioned proximate the at least one container. The heat transfer device may transition the material through a phase change. The temperature sensor may monitor the temperature of the material during the phase change. A correction may be calculated to correct any disparity between the temperature reported by the temperature sensor during the phase change and the known plateau temperature corresponding to that phase change. The correction may be applied to subsequent temperature readings obtained using the temperature sensor.

Abstract: A system for operating a gas turbine includes a compressor, a combustor, and a turbine. The combustor and turbine define a hot gas path. A sensor disposed outside the hot gas path measures internal thermal emissions from the combustor or turbine and generates a first signal reflective of the internal thermal emissions. The internal thermal emissions are infrared or ultraviolet emissions. A controller connected to the sensor receives the first signal and adjusts the compressor, combustor, or turbine in response to the first signal from the sensor. A method for operating a gas turbine includes measuring internal thermal emissions from inside a combustor or turbine using a sensor disposed outside the hot gas path. The method further includes generating a first signal reflective of the internal thermal emissions and adjusting the operation of the compressor, combustor, or turbine in response to the first signal from the sensor.

Abstract: A flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer. The invention provides a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit. According to the invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources.

Abstract: A method for on-orbit calibration of the temperature sensors of a blackbody is disclosed. The method may include selecting a blackbody traveling in a micro-gravity environment and comprising a sensor, a container positioned proximate the sensor and containing a material, and a heat transfer device positioned proximate the at least one container. The heat transfer device may transition the material through a phase change. The temperature sensor may monitor the temperature of the material during the phase change. Additionally, the state of the material may be measured by displacement of the container to improve the accuracy of the plateau temperature measurement. A correction may be calculated to correct any disparity between the temperature reported by the temperature sensor during the phase change and the known plateau temperature, measured at a threshold state of the material, corresponding to that phase change.

Abstract: Systems and methods that facilitate calibrated temperature measurements are discussed. Such a system can include a target object that changes temperature, a test infrared (IR) temperature sensor that can make a first set of measurements of the temperature of the target object over a period of time, and a standard IR temperature sensor that can make a second set of measurements of the temperature of the target object over the period of time. Additionally, the system can include a calibration unit that compares the first set of measurements with the second set of measurements and determines an accuracy of the test IR temperature sensor based on the comparison.

Abstract: A substrate for processing in a heating system is disclosed. The substrate includes a bottom portion for absorbing heat from a radiating heat source, the bottom portion having a first region having a first emissivity and a second region having a second emissivity less than the first emissivity. The first region and the second region promote thermal uniformity of the substrate by compensating for thermal non-uniformity of the radiating heat source.

Abstract: The present invention provides a quantum theory correction method for improving the accuracy of temperature measurement of radiation thermometer and a radiation thermometer system. The invention is related to the radiation thermometer in the field of instrumentation. The present invention acquires parameters reflecting energy level structure by adopting effective physical model to process data and using keyboard input or data transmission. The temperature of the object to be measured is finally acquired and displayed on the displayer. The quantum theory correction method and radiation thermometer system effectively overcome the difficulty that the value of radiance ?(?·T) cannot be accurately measured in the event that radiance correction method is used to improve the accuracy of radiation thermometer. Thus, the accuracy of thermometer is improved significantly.

Abstract: A test apparatus for testing an IR sensor of train undercarriage temperatures is disclosed. The IR sensor may be used to obtain infrared IR emission data by sensing a wheel or a wheel bearing of a rail vehicle. The test apparatus may comprise a heat emitter for supplying IR emissions at a reference temperature to the IR sensor. A support may support the heat emitter at a position spaced from the passage of the rail vehicle and in an orientation for directing the IR emissions at the IR sensor.

Abstract: A method for calibrating a pyrometer a temperature of a calibration sample is determined from the ratio of a first reflectance and a second reflectance and the pyrometer is calibrated by assigning the determined temperature of the calibration sample with a thermal radiation signal measured by the pyrometer.

Abstract: A method and apparatus for automated field calibration of temperature sensors uses a series of readings including a reading of a known source, such as an LED, for use in calculating a factor that is compared to a reference for adjusting the sensor output signal. Calibration readings are taken more frequently after start up to compensate for sensor drift during storage, as opposed to less frequent readings during operation to compensate for slower sensor drift while operational.

Abstract: In one embodiment, a system includes a first cold noise source, a first radiometer receiver, and a first detector. The first cold noise source generates a first thermal radiation signal having a first carrier frequency band. The first thermal radiation signal carries a first information signal. The first cold noise source also transmits the first thermal radiation signal through a first antenna. The first radiometer receiver receives the first thermal radiation signal through a second antenna, and the first detector extracts the first information signal from the first thermal radiation signal.

Abstract: A system and method is disclosed that reliably determines the transmissivity of a substrate. By determining the transmissivity of a calibration substrate, for instance, a temperature measuring device can be calibrated. The method and system are particularly well suited for use in thermal processing chambers that process semiconductor wafers used for forming integrated circuit chips.

Abstract: A temperature monitoring technique for collecting radiation intensity (blackbody emission) across a broad wavelength range. A solid state spectrometer (26) acquires spectra from a sample (10) in real time and resolves the spectra to a radiation intensity (I) versus wavelength (?) curve. This curve is fitted to Planck's equation using a non-linear least squares fitting analysis. The system can be configured to self-calibrate and then lock in an amplitude value (A) which is used in subsequent temperature measurements by fitting to the blackbody emission curve. Preferably, the spectrometer (26) is flat field corrected (36) in an initial step to counteract variations in the spectrometer response with wavelength.

Abstract: A temperature measuring device incorporates a fixed point cell to provide an integrated structure. The fixed point cell houses a pure substance within a substantially cylindrical graphite crucible. The pure substance is to be melted to give an absolute temperature. The crucible is enclosed within a sealed metal container. An annular metal tube surrounds the container and the inner wall of the tube is formed by the outer peripheral wall of the container. This provides excellent heat conduction from the interior of the tube to the interior of the crucible. The tube is arranged to define either a heat pipe or a thermal siphon and includes an appropriate vaporizable fluid.

Abstract: A method of in-situ pyrometer calibration for a wafer treatment reactor such as a chemical vapor deposition reactor desirably includes the steps of positioning a calibrating pyrometer at a first calibrating position and heating the reactor until the reactor reaches a pyrometer calibration temperature. The method desirably further includes rotating the support element about the rotational axis, and while the support element is rotating about the rotational axis, obtaining first operating temperature measurements from a first operating pyrometer installed at a first operating position, and obtaining first calibrating temperature measurements from the calibration pyrometer. Both the calibrating pyrometer and the first operating pyrometer desirably are adapted to receive radiation from a first portion of a wafer support element at a first radial distance from a rotational axis of the wafer support element.

Abstract: A method for correcting the output signal of a radiation sensor 20 includes obtaining two or more temperature signals from a corresponding number of measurements of quantities at different times and/or different locations relating to the temperature of the sensor, and correcting the output signal with reference to said temperature signals.

Abstract: A tip assembly for an IR thermometer apparatus includes a heat sink having a heat sink cavity and a tip section and a fluid path and at least one hydraulic port. The tip assembly also includes an IR sensor mechanically seated in the tip section and thermally coupled to the heat sink. The tip assembly also includes an electrical connector configured to provide an electrical connection to the tip assembly. A fluid having a fluid temperature is introduced into the fluid path via the hydraulic port. The fluid causes the heat sink and the IR sensor to substantially reach one or more pre-determined temperatures by thermal conduction during calibration of the tip assembly. Another tip assembly having an internal heat source is described. Another tip assembly having an internal heat pump is described. A method to calibrate a tip assembly is also described.

Abstract: Infrared IR thermometer calibration systems and methods are disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system.

Abstract: Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The absorption may be determined by directing light towards the wafer and measuring light reflected from the wafer from below the surface upon which the incident light impinges. Calibration wafers and measurement systems may be arranged and configured so that light reflected at predetermined angles to the wafer surface is measured and other light is not. Measurements may also be based on evaluating the degree of contrast in an image of a pattern in or on the wafer. Other measurements may utilize a determination of an optical path length within the wafer alongside a temperature determination based on reflected or transmitted light.

Abstract: A thermopile, utilizing the Seebeck effect, is placed into a blackbody cavity or other ambient heat source, where the hot junctions are inside the heat source, and the cold junctions are outside the heat source, and thereby produces a voltage.

Abstract: A probe cover for an infrared electronic thermometer including a generally tubular body having open first and second ends. The body is sized and shaped to receive a probe of the infrared electronic thermometer into the body through the first end. The probe cover further includes a film closing the second end of the body. The film has a metallic region defining a blackbody portion for rapidly equilibrating to a temperature corresponding to the temperature of an object for viewing by a sensor of the electronic thermometer to measure the temperature of the object.

Abstract: The temperature of an object such as a semiconductor wafer that includes silicon can be determined based on the variation of the optical absorption coefficient of silicon with temperature. Temperatures above about 850° C., can be found by measuring phenomena that are affected by the magnitude of the optical absorption coefficient, especially at wavelengths >˜1 ?m. Phenomena could include measuring light reflected, transmitted, emitted, absorbed, or scattered by the wafer and deriving the absorption coefficient from the measurements and then deriving temperature from the absorption coefficient. Temperature could be determined from a model relating phenomena directly to temperature, the model constructed based on absorption behavior and techniques discussed herein. The resulting temperature could be used to calibrate or control a rapid thermal processing chamber or other apparatus.

Abstract: A method for on-orbit calibration of the temperature sensors of a blackbody is disclosed. The method may include selecting a blackbody traveling in a micro-gravity environment and comprising a sensor, a container positioned proximate the sensor and containing a material, and a heat transfer device positioned proximate the at least one container. The heat transfer device may transition the material through a phase change. The temperature sensor may monitor the temperature of the material during the phase change. Additionally, the state of the material may be measured by displacement of the container to improve the accuracy of the plateau temperature measurement. A correction may be calculated to correct any disparity between the temperature reported by the temperature sensor during the phase change and the known plateau temperature, measured at a threshold state of the material, corresponding to that phase change.

Abstract: A method and apparatus for determining an operating voltage lower bound for preventing photovoltaic (PV) cell reverse breakdown during power conversion. The method comprises determining a PV cell operating temperature; computing, at a controller, an operating voltage corresponding to a maximum power point (MPP) based on the PV cell operating temperature; and determining, at the controller, an operating voltage lower bound based on the operating voltage.

Abstract: The present standard radiation source comprises a black body having a cavity, a shielding plate positioned at an open end of the cavity, at least one first heater positioned in the shielding plate, at least one second heater positioned on the outer wall of the black body, a first insulation device covering the second heater and a temperature-controlling device positioned on the first insulation device.

Abstract: A fixed-point cell is provided which can provide a fixed-point in a wide temperature range by changing the fixed-point material. During the use of the fixed-point cell, the fixed-point material can be prevented from being contaminated, and the crucible of the cell can be prevented from being cracked. The fixed-point cell includes: the crucible composed of carbon; the fixed-point material enclosed in the crucible and composed of one of a metal, a eutectic of a metal and carbon, and a eutectic of a metal carbide and carbon; and a woven fabric of graphite fibers containing 10 ppm or lower of impurities and interposed between the crucible and the fixed-point material.

Abstract: The present invention relates to a method for calibrating a pyrometer, a method for determining the temperature of a semiconducting wafer and a system for determining the temperature of a semiconducting wafer. It is an object of the present invention to provide a method for calibrating a pyrometer which overcomes the disadvantages of the prior art.

Abstract: An apparatus for use with automatic testing equipment for testing infrared sensors on integrated circuits is provided. The apparatus includes an infrared source, a heat mass, and an electronic frequency modulator. The infrared source is modulated according to a predetermined test frequency such that the infrared source emits an infrared test signal representative of a test temperature and corresponding to the temperature of the heat mass and the predetermined test frequency. A signal processor, electrically coupled to an integrated circuit having an infrared sensor, receives a sensed signal from the infrared sensor in response to the infrared test signal and uses the sensed signal according to the predetermined test frequency to determine a measured temperature.