Abstract: In an optical switch with a mirror, the inclination angle of which varies depending on an application voltage, a low-frequency signal is superimposed on the application voltage, and a low-frequency component is detected in output light reflected on the mirror. Then, an application voltage is increased/decreased based on the detected low-frequency component.

Abstract: An optical switch and method of switching provide 1×N optical switching. The optical switch comprises a plurality of optical ports arranged in an annular pattern visible to and aligned with a movable mirror. The mirror is equidistant from each port of the plurality. The optical switch having a 1-dimensional (1D) annular array of ports comprises the mirror located at a center of a circle and the 1D array disposed on a portion of a circumference of the circle. The optical switch having a 2-dimensional (2D) annular array of ports comprises the mirror located at a center of a sphere and the 2D array disposed on a portion of a surface of the sphere. The mirror is movable about one or more axes to direct an optical signal from any port to any other port of the plurality.

Abstract: Disclosed herein is an optical switch for changing over a running direction of a light passing through an optical waveguide between a first direction and a second direction by moving a switching member disposed on an optical path of an optical waveguide. The switching member has a plurality of switching positions for selectively guiding each of lights of at least two different wavelengths into the first direction or second direction.

Abstract: Numerous novel structures and methods are presented for their ability to correct angular and offset alignment errors caused by thermal distortion of a device formed out of dissimilar materials, such as a movable platform and waveguide coupled to a fixed platform and another waveguide. A flexure connected between two platforms corrects offset alignment errors along the centerline axis of the flexure. Thermal distortion is corrected also by varying the relative size of the two platforms and the addition of slots and/or extraneous waveguides. A waveguide may be sandwiched between two matching materials, with or without an extra thermal compensation layer portion. A method uses simple processes to build a substrate with matching waveguides on each side of the substrate. Another simple method creates a suspended structure by using simple semiconductor processes.

Abstract: A pressure actuated optical relay containing a transparent mirror housing, located at the intersection of two optical paths. A solid slug is moved within a channel passing through the transparent mirror housing by the action of pressure exerted by an actuation fluid. The solid slug is moved in or out of the transparent mirror housing to select between the optical paths and is wetted by a liquid metal. When the solid slug is within the optical path, an incoming optical signal is reflected from a wetted surface of the slug. The liquid metal forms a surface tension bond between the slug and wettable metal surfaces within the channel to provide a latching mechanism.

Abstract: A method and structure for an optical switch. According to the structure of the present invention, a gas-filled chamber is housed within a solid material. A plurality of contacts within the gas-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements within the gas-filled chamber are also coupled to the solid material. A slug within the gas-filled chamber is coupled to one or more of the plurality of contacts and further coupled to one or more of the plurality of piezoelectric elements. A liquid metal within the gas-filled chamber is coupled to the slug, and coupled to the plurality of contacts.

Abstract: A method and structure for an optical switch. According to the structure of the present invention, a liquid-filled chamber is housed within a solid material. A plurality of seal belts within the liquid-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements are coupled to a plurality of membranes. The plurality of membranes are coupled to the liquid-filled chamber, and a plurality of optical waveguides are coupled to the liquid-filled chamber. The plurality of seal belts are coupled to a plurality of liquid metal globules. According to the method, one or more piezoelectric elements are actuated, causing one or more corresponding membrane elements to be deflected. The deflection of the membrane element changes a pressure of actuator liquid and the change in pressure of the actuator liquid breaks a liquid metal connection between a first contact and a second contact of the electrical switch.

Abstract: An electromagnetic optical relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An optical path passing through the switching channel is blocked or unblocked by motion of the solid slug. Motion of the solid slug is controlled by at least two electromagnetic actuators, such as electrical coils surround the switching channel. Motion of the solid slug is resisted by a liquid, such as a liquid metal, that wets between the solid slug and at least one fixed contact pad in the switching channel. The surface tension of the liquid provides a latching mechanism for the relay. An optical signal may be reflected from the wetted surface of the solid slug and switched to an alternative optical path.

Abstract: A piezoelectric optical relay array having one or more array elements. Each array element contains a transparent mirror housing, located at the intersection of two optical paths. A solid slug is moved within a channel passing through the transparent mirror housing by the action of piezoelectric elements. A surface of the solid slug is wetted by a liquid metal to form a reflective surface. The solid slug is moved in or out of the transparent mirror housing to select between the optical paths. When the solid slug is within the transparent mirror housing, an incoming optical signal is reflected from the reflective surface of the liquid metal. The liquid metal adheres to wettable metal surfaces within the channel to provide a latching mechanism.

Abstract: An optical switch is fabricated using micro-electro-mechanical system (“MEMS”) techniques. A thin mirror is fabricated in the major plane of the substrate and rotates about an axis perpendicular to the major plane to move into and out of an optical beam path. The mirror surface is open for chemical polishing and deposition, resulting in a high-quality mirror. In one embodiment, the backside of the mirror is patterned with reinforcing ribs. In another embodiment, a two-sided mirror is fabricated.

Abstract: A multi-wavelength or white-light optical switch including an array of mirrors tiltable about two axes, both to control the switching and to provide variable power transmission through the switch, both for optimization and for power equalization between wavelength channels in a multi-wavelength signal. The output power of a channel is monitored, thereby allowing feedback adjustment of the transmitted power. The mirrors are preferably formed in a micro electromechanics system array to be tiltable in orthogonal directions and having electrostatically controlled tilting by two pairs of electrodes beneath the mirrors. Input power of the separate channels may also be monitored.

Abstract: A device and method for detecting rotational drift of mirror elements in a MEMS tilt mirror array used in an optical crossconnect. The optical crossconnect directs optical signals from an input fiber to an output fiber along an optical path by rotatably positioning mirror elements in desired positions. A monitoring device disposed outside of the optical path is used to obtain images of the MEMS array or to transmit and receive a test signal through the crossconnect for detecting the presence of mirror element drift.

Abstract: An optical switch is provided for selectively coupling outputs of one or more fibers of a first array to one or more inputs of fibers of a second array. The first array includes a first groove disposed within a front face of the first array. The second array optionally includes a second groove disposed within a front face of the second array. The first and second fiber arrays are oriented so that their respective front faces are disposed in a facing relationship. A roller element is located within at least the first groove, permitting the first array to translate relative to the second array upon the roller element along the direction of the first groove. In addition, detents may be formed within the grooves of each array to create areas in which the roller element may at least temporarily seat. The location and number of detents are arranged to correspond to the location and number of rows of fibers in the respective arrays.

Abstract: A packaged optical micro-mechanical device. A die includes one or more optical micro-mechanical devices on a first surface of a substrate. The first surface includes a die reference surface. A package frame includes an aperture and a package frame reference surface proximate the aperture adapted to receive the die reference surface such that the optical micro-mechanical devices are located in the aperture. One or more V-grooves are positioned relative to an optical interface reference plane adjacent to the micro-mechanical devices and terminating adjacent to the aperture. One or more optical fibers are located in the V-grooves optically coupled with one or more of the optical micro-mechanical devices.

Abstract: An optical switch has first to fourth optical matrix switches in each of which a plurality of 2-input/2-output optical switch elements are arranged in a matrix to form a plurality of input ports, a plurality of auxiliary input ports, a plurality of output ports, and a plurality of auxiliary output ports. The auxiliary output ports in the first optical matrix switch are connected to the respective input ports in the third optical matrix switch, the output ports in the second optical matrix switch are connected to the respective auxiliary input ports in the third optical matrix switch, the output ports in the first optical matrix switch are connected to the respective auxiliary input ports in the fourth optical matrix switch, and the auxiliary output ports in the second optical matrix switch are connected to the respective input ports in the fourth optical matrix switch.

Abstract: A reflective optical switch device includes a diamond-like carbon (DLC) heat sink layer disposed adjacent a reflective layer. In one embodiment, the reflective optical switch is a MEMS mirror having a substrate layer, a DLC heat sink layer, which is vapor deposited on the substrate layer, and a reflective layer deposited over the heat sink layer. In another embodiment, the optical switch device is a reflective LC-based switch having a first substrate, a DLC heat sink layer deposited over the first substrate, and an LC medium provided between a reflective electrode layer and a transmissive electrode layer. The DLC heat sink enables rapid dissipation and distribution of laser light induced heat away from the local target area of the reflective surface, thereby reducing deformation of the reflective surface and/or alteration of the optical properties within the local region to enhance performance.

Abstract: An optical switch that can restrain the occurrence of cross talk is provided. A first waveguide path 11 and a second waveguide path 12 are provided on a waveguide substrate PCL so as to intersect each other at a given angle. A trench T is formed in a straight line in the surface of the waveguide substrate PCL so as to cross the central axes of the first waveguide path and the second waveguide path. The trench T is as deep as to expose the whole end face of the first waveguide path and the second waveguide path. The first waveguide path 11 and the second waveguide path 12 are arranged such that their central axes are arranged asymmetrically with respect to the straight line.

Abstract: An optical switch (11, 111, 211) includes a member (26) having a plurality of openings (31-42) therethrough which are arranged in a periodic pattern. A path (86-87, 91-92, 96-97) extends through the member from an input to an output, with a subset of the openings disposed along the path. In one operational mode, each of the openings contains a material having an index of refraction which is different from the index of refraction of the member, so as to define a photon band gap configuration that inhibits propagation through the member of radiation at a predetermined wavelength. In a different operational mode, the index of refraction of the subset of openings along the path has a different value, which permits radiation to propagate along the path.

Abstract: Disclosed is a variable optical attenuator comprising: a transmitting fiber for transmitting light; a receiving fiber concentrically placed with said transmitting fiber for absorbing light; a shutter between said transmitting fiber and said receiving fiber for absorbing light to adjust optical transmittance; and an actuator for driving said shutter. The size and price of the optical attenuator is remarkably reduced compared to a conventional mechanical connector-type attenuator to provide an article excellent in competitive edge.

Abstract: A package for optical micro-mechanical devices including a die with one or more optical micro-mechanical devices on a first surface of a substrate. The first surface includes a die reference surface. One or more optical interconnect alignment mechanisms are formed in the first surface of the die. The optical interconnect alignment mechanisms are positioned to optically couple an optical interconnect with one or more of the optical micro-mechanical devices on the die. A package frame including an aperture and a package frame reference surface proximate the aperture is adapted to receive the die reference surface such that the optical micro-mechanical devices are located in the aperture. One or more optical interconnect alignment mechanisms are formed in the package frame.

Abstract: An optical switch, preferably an add/drop switch, includes a minimal number of two-state switching arrangements, thereby facilitating a reduction of switch complexity. Light pulses entering the switch via a given input port may be directed to either a corresponding output port or a corresponding drop port by the operation of the switching arrangements. Light pulses entering the switch via a given add port may be directed to a corresponding output port or may be disbursed by the operation of the switching arrangements. The switching arrangements are toggled between reflective and transmissive states. In the preferred embodiment, the two-state switching arrangements are controlled by the manipulation of index matching fluid within trenches. Additionally, in the preferred embodiment, the switching arrangements are configured such that a given light pulse interacts with only one trench, thereby minimizing the overall signal loss and loss non-uniformities within the switch.

Abstract: An optical microswitch comprising a support body and first and second output fibers carried by the body. A rotary electrostatic microactuator is carried by the body and extends in a plane. A micromirror is disposed out of the plane. The microactuator has a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting a laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.

Abstract: A method and apparatus for measuring optical power or insertion loss within an optical cross-connect system utilizing a plurality of parallel light beams sampled at switch fabric input and output portions via imaging devices.

Abstract: An optical device is provided, including two dual-fiber collimators, two single-fiber collimators, two filters connected respectively to the two dual collimators, and two mirrors. The two dual-fiber collimators are interconnected by coupling an optical fiber thereof to each other. One mirror is fixed in position, and the other mirror is mounted on a mechanism capable of moving up and down so as to switch an optical path.

Abstract: Disclosed is an MEMS variable optical attenuator comprising a substrate having a planar surface, a micro-electric actuator arranged on the planar surface of the substrate, a pair of optical waveguides having a receiving end and a transmitting end, respectively, and coaxially aligned with the other while being arranged on the planar surface, an optical shutter movable to a predetermined position between the receiving end and the transmitting end of the optical waveguides, and driven to move by the micro-electric actuator, and a surface layer formed on the optical shutter, having reflectivity less than 80% so as for incident light beams to partially transmit thereinto, and having a characteristic of light extinction, thereby extinguishing the partially transmitted light beams therein.

Abstract: A micromachine and a manufacturing method are provided for a micromachine that has a dynamic first microstructured portion serving as a drive portion, and a static second microstructured portion adapted to perform a switching function and which functions as an optical element. The second microstructured portion can be manufactured at least without complex steps, such as a silicon process, by forming a static second microstructure on the dynamic first microstructured portion, or in such a way as to be overlaid thereon by mold transfer. Thus, the microstructured portion of a complex shape can be easily formed with good reproducibility. When a plurality of elements are arranged in an array, similarly as in the case of a spatial light modulator, the stable reproduction thereof is achieved by the mold transfer. Thus, as compared with the case of manufacturing all elements in a silicon process, the probability of an occurrence of a defect is very low.

Abstract: An optical system of a display including a light conducting plate introduced with light and a panel portion provided to oppose to one plate surface of the light conducting plate. The panel portion includes a driving part arranged with actuator parts each corresponding to a plurality of pixels so as to control displacement motions of the actuator parts in the contacting and separating directions to and from the light conducting plate correspondingly to attributions of input image signals, thereby controlling leaked light-beams in predetermined regions of the light conducting plate, to thereby cause the light conducting plate to display an image corresponding to the input image.

Abstract: A method reduces movement of a reflector in an unintended mechanical mode during movement of the reflector in an intended mechanical mode. The method includes using a reflector driver to apply a distribution of forces to the reflector so as to move the reflector in both the intended mechanical mode and in the unintended mechanical mode. The distribution of forces is applied at a resonant frequency of the unintended mechanical mode. The method further includes adjusting the reflector driver to alter the distribution of forces applied to the reflector such that the movement of the reflector in the unintended mechanical mode is reduced.

Abstract: A scanning optical microscope which includes an optical fiber which serves as a point source of light and for collecting reflected light is disclosed. A lens for focusing the light from the optical fiber onto an image plane and for gathering light reflected form the image plane and focusing it into the optical fiber is also disclosed, together with a scanning mechanism for scanning the light to scan a field of view.

Abstract: An optical switching assembly comprised of a substrate, a first plurality of waveguides in a first plane in the substrate, a second plurality of waveguides in a second plane parallel to said first plane in the substrate, the optical signals being selectively transferable from one substrate to the other. The second waveguides cross the first waveguides at an angle and the first waveguides each have a segment extending generally parallel to a segment of the second waveguides at the crossing. Controllable coupling material is disposed between the segments of the waveguides at the crossing and a control circuit is employed for selectively changing the index of refraction of the coupling material by electrical or thermal means.

Abstract: An optical cross connect switch having a beam generating, beam directing, and beam receiving portions is disclosed. In one embodiment, the beam generating portion receives a number of optical fibers and generates a communication and companion alignment beam for each fiber. The communication and alignment beams may be spatially separated, substantially collimated beams, and are aligned to propagate away from the beam generating portion in substantially parallel paths. The communication and alignment beams then strike a beam directing element where they may be redirected to the beam receiving portion. A beam receiving portion includes a plurality of optical output fibers, each having an associated position sensor. The location where the alignment beam strikes the position sensor provides position information regarding the corresponding communication beam. Using the position information, the beam directing elements may be finely adjusted to direct the focused communication beam onto an optical output fiber.

Abstract: Disclosed is a display device comprising an optical waveguide plate 12 for introducing light 10 thereinto; an actuator substrate 18 provided opposingly to one plate surface of the optical waveguide plate 12 and arranged with actuator elements 14 of a number corresponding to a large number of pixels; a pixel structure 102 formed on each of the actuator elements 14 of the actuator substrate 18; and a crosspiece 70 formed at a portion other than the pixel structure 102 between the optical waveguide plate 12 and the actuator substrate 18. Accordingly, it is easy to form a gap between the optical waveguide plate and the pixel structure. Further, the gap can be formed uniformly for all of the pixels.

Abstract: In one aspect of the invention, an optical switching element includes a variable blazed grating operable to receive and reflect one or more input signals while the grating remains in a first position and to receive and diffract one or more input signals while the grating remains in a second position. The switching element further includes a first circulator operable to receive from the variable blazed grating a first output signal traveling approximately along the path of an input signal to the grating but in an approximately opposite direction to that input signal, and to redirect the first output signal from the path of the input signal.

Abstract: A micro-optical switch including a flexureless magnetic micromirror hinged centrally over a pin, cone or the like. The pin, cone or the like allows the micromirror to rapidly switch or tilt into a plurality of predefined positions as accurately controlled by an microelectromagnetic assembly. A liquid surrounds the pin or cone, connects the bottom of the surface of the mirror with the substrate supporting the pin or cone, and provides a capillary force holding the mirror onto the pin or cone. The liquid low vapor pressure also dissipates heat generated by the fiberoptic beam reflecting off the top surface of the micromirror.

Abstract: A fiber optic circuit provides signal access and monitoring using a set of various switches. The various switches can be remotely controlled using a programmable controller. This controller implements a method for programming and controlling a fiber optic circuit. The fiber optic circuit includes a plurality of signal connection modules, a signal switching network, and a master controller module. The method receiving a circuit configuration command from a remote computing system, retrieving a connection table containing data entries used to specify how the signal connection modules and the signal switching network are to be configured, constructing a module configuration command for each data entry retrieved from the connection table and transmitting the module configuration command to the corresponding module to configure the fiber optic circuit.

Abstract: An optical switch and method of making in which a large number of optical elements, which may be diffractive or refractive, are formed within the plane of a wafer to transmit light approximately perpendicularly to the wafer plane. The optical elements are formed on separate deformable mechanical elements, such as a plate rotatable about two axes lying approximately parallel to the wafer plane. Electrical elements, such as capacitor plates with a free-space gap therebetween selectively deform the mechanical elements in a micro electromechanical system (MEMS) arrangement with the optical elements disposed upon the mechanical elements to separately control the directions in which the light beams are transmitted. The optical switches may be formed in an array, and two levels of such arrays formed in separate wafers which are bonded together allow two-stage switching of light through the assembled structure.

Abstract: A mechanical optic switch is disclosed that is of high mirror quality, high in the accuracy of opto-axial alignment between a mirror and a fiber aligning structure and yet of low insertion loss, permitting fiber optic switching by an electromagnetic force. It is made by a crystallographically oriented face dependent etching process, which simultaneously forms in a Si (100) crystallographically faced single crystal substrate (1), V-grooves (3) for fixing optical fibers (2, 2a, 2b, 2c, 2d) with the V-groove's longitudinal axes oriented in the <110> crystallographic direction or in a direction equivalent thereto; and a resilient support beam (5) and a mirror (4, 6) with the longitudinal axis of the resilient support beam and the mirror surface of the mirror oriented in the <100> direction or in a direction equivalent thereto. Slitting into the substrate from a rear surface thereof by etching renders the support beam resilient and flexible.

Abstract: There is provided an apparatus for fabricating an apodized fiber grating.

Abstract: Apparatus and methods are disclosed for alignment of an input mirror and an output mirror in a photonic cross-connect.

Abstract: A microelectromechanical system (MEMS) optical device is introduced which includes a mirror constructed on a substrate. The mirror is movable parallel to the surface of the substrate to control whether an input ray passes undisturbed or is reflected to an alternate output. In one embodiment, a variation on a comb-drive designed to produce larger forces than usual uses an envelope-like electrode into which the mirror is drawn. In a second embodiment, a mirror is supported on flexible beams which are attracted or repelled by electrostatically charging curved electrodes thereby actuating the mirror. In a third embodiment, a magnetic field around the switch induces lateral forces when electric current flows in conductive supporting beams.

Abstract: An optical switching element has a movable optically transmissive microstructure to change the optical paths of the optical signals. The movable microstructure is “optically transmissive” because it includes structures such as waveguides and waveguide networks which transmit optical signals. The apparatus uses MEMS and micromachining technology to build an optical switch having an optically transmissive microstructure which moves from one position to another position in a direction (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap with different waveguides, or with different inputs to the waveguides, depending on the position of the movable microstructure. As a result, the optical signals travel different optical paths (e.g., straight pass through or cross over) depending on the position of the movable microstructure.

Abstract: An optical switch (100) includes a shell (40) forming an input port (10) and first and second output ports (50, 60) with an optical switching subassembly enclosed therein between the input port and the output ports. The optical switch subassembly includes two light transmitting blocks (21, 22) having surfaces spaced from and opposing each other. Two light transmitting liquid sections having a refractive index substantially identical to that of the blocks are movably retained between the surfaces. The liquid sections are spaced from each other forming an air section therebetween. A piezoelectric element (31) is in physical engagement with the liquid sections.

Abstract: A spatial light modulator (SLM) has electrically controllable microelectromechanical reflectors arranged in a chain-like manner along an axis such that an optical beam propagates by reflection from an input down the chain to an output. Each reflector can be moved to a selected one of a number of discrete switching positions. The position determines the angle at which the beam is reflected toward the next reflector in the chain. The combination of positions in which the reflectors are oriented is determinative of the angle at which the signal exits the output. The SLM can be included in a switch. An SLM in the input section of the switch can be adjusted to direct the beam such that it impinges upon a selected switch output. Multiple SLMs can be included in an array to provide a cross-connect or crossbar switch.

Abstract: A novel optical path switching system, architecture and technique wherein light beam data traffic is to be switched by MEMS mirrors between source and destination nodes, and test ports are used to set up optical paths even before the real data traffic is propagated, with a combination of an electrical mirror-sensing feedback loop for controlling coarse mirror positioning, and an optical path power-sensing feedback loop for controlling fine adjustments in the mirror position.

Abstract: An optical switching apparatus and a method of efficiently switching optical signals are disclosed. Optical insertion loss may be reduced in a planar lightwave circuit by determining an optimal spacing between perturbations including using passive perturbations, having a three dimensional refractive index distribution, in an array of waveguides, or by adjusting parameters of existing perturbations e.g. their spacing. The perturbation and each waveguide have different three dimensional refractive index distributions. The perturbation may be positioned anywhere in the array of waveguides. The perturbation may be a trench, a region of refractive index different from that in each waveguide, a broken waveguide core, or a modification of the topography of the array of waveguides. In one embodiment, the perturbation is a periodic or quasiperiodic perturbation.

Abstract: An optical function module comprises a collimator block having a substrate, at least two collimators disposed on the substrate in confronting relation to one another for collimating a light flux directed along a preselected path between the collimators, and support members each for supporting a respective one of the collimators on the substrate. An optical function device is removably connected by a connecting structure to the collimator block so that the optical function device is positioned along the preselected path of the light flux between the collimators.

Abstract: A highly reliable optical communications equipment is offered, which can control light more accurately than heretofore (i.e., less restrictions are imposed on the amount of attenuation and on the resolution) and which is equipped with a latching function. The optical communications equipment includes a piezoelectric actuator, a moving body moved by the piezoelectric actuator as a drive source, a multi-coating filter for controlling light that is a signal medium by movement of the moving body, a drive circuit for controlling the position of the multi-coating filter via the actuator, and a control circuit. The piezoelectric actuator uses bending vibrations produced in a piezoelectric vibrating body as a power source. If the moving body is not moved for a given time, the control circuit sends a function keeping signal to drive the actuator to such an extent that the moving body does not move. Thus, the function of the actuator is maintained.

Abstract: A reversible optical circulator has an optical switch that includes: an arm composed of piezoelectric material with first and second faces and first and second ends, an electrode coupled to the arm for providing a voltage difference between the first and second faces of the arm, a support coupled to the first end of the arm for fixedly supporting the first end, an object with a convex surface coupled to the second end of the arm, a polarization rotation element coupled to the second face of the arm, a first magnet proximately located to the object and the first face of the arm, and a second magnet proximately located to the object and the second face of the arm. By using this optical switch, the optical circulator has stable and reproducible operation, high switching speeds, and low sensitivity to slight optical mis-alignments.

Abstract: An optical switch constructed from first and second waveguides. The first and second waveguides have ends disposed across a gap such that light traversing the first waveguide enters the second waveguide when the gap is filled with a liquid having a first index of refraction, whereas light traversing the first waveguide is reflected by the gap when the gap is filled with a material having a second index of refraction that is substantially different from the first index of refraction. The gap is part of a trench that contains a liquid droplet made from a droplet material having the first index of refraction. The droplet is located in the trench and is movable between the first and second positions in the trench, the droplet filling the gap in the first position. The gap is filled with a material having the second index of refraction when the droplet is in the second position.

Abstract: An optical switching system that switches the path of an optical signal by moving a microstructure onto which a light-guiding structure is mounted. The microstructure is formed by a MEMs and semiconductor process to be integral to the substrate. The light-guiding structure may include waveguides. The microstructure moves from one position to another position (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap to different optical paths, depending on the position of the movable microstructure. As a result, the optical signal propagate along different optical paths (e.g., straight pass through or cross over) depending on the position of the movable microstructure. The optical paths have a large radii of curvature so as to change the direction of the optical signal gradually, thereby reducing insertion losses.