Abstract: An electrical cooking appliance with automatic cleaning of a cooking chamber is provided. The appliance may include a steam supply device configured to generate steam and supply the steam to the cooking chamber; a water supply pump that supplies water from a water tank to the steam supply device; a water discharge pump that collects condensed water from the steam supply device into the water tank; and a controller configured to activate the water supply pump to supply water to the cooking chamber to clean the cooking chamber; and activate the steam supply device to supply steam to the cooking chamber to clean the cooking chamber.

Abstract: In order to improve heat recovery efficiency in purifying oil from an organic substance using superheated steam, the present invention provides an oil purifying apparatus for thermally decomposing an organic substance with superheated steam and purifying oil from gas components generated by thermal decomposition, which includes: a heat treatment container for storing the organic substance; and a superheated steam generating part for generating the superheated steam to be supplied into the heat treatment container, and the superheated steam generating part is provided in the heat treatment container.

Abstract: The present invention relates to a steam head of a cleaner. The present invention includes a steam head including: a body defining an exterior, and a steam generating device provided on the body to generate steam through heating water supplied through a heater, the heater including a radiator of a ceramic material, and a plurality of insulation layers for insulating the radiator, wherein the plurality of insulation layers is formed of one of or a combination of one or more of magnesium oxide (MgO), a slurry-phase insulator, and an insulation film. Thus, through the present invention, a heater's heat radiating performance is improved to facilitate generation of steam.

Abstract: The present invention relates to a steam generator and a washing machine therewith. The present invention provides a steam generator including a water chamber for holding water actually, the water chamber having a heater mounted thereto for heating the water, and a steam chamber for holding steam generated as the water is heated actually, wherein the water chamber has a vertical direction length (a vertical length) relatively greater than a horizontal direction length (a horizontal length).

Abstract: The present invention relates to an automatic water supply-type steam generator using vapor pressure for creating the optimum vacuum pressure inside a pressurized water supply tank, and for smoothly providing water to the pressurized water supply tank by using the strong aspiration force that is created by means of the vacuum pressure while continuously generating steam. The present invention is characterized by allowing control of the vacuum pressure to the optimum state when creating the vacuum pressure inside the pressurized water supply tank by introducing an adequate amount of outside air from the atmosphere through an air vent. In addition, the present invention is characterized by providing a means for cooling the pressurized water supply tank so as to control the vacuum pressure inside the tank to the optimum state.

Abstract: Provided are a method and device for generating a steam heating medium, the method involving generating, from a nozzle, Aqua-gas or low-temperature superheated steam that is a steam heating medium by operating an electrothermal-type generator or a steam-type generator. The method comprises the step of generating Aqua-gas by increasing a water supply amount in such a manner that an internal nozzle pressure takes on a constant value exceeding a saturated water vapor pressure of water at each internal nozzle pressure set temperature; or generating low-temperature superheated steam by reducing the water supply amount in such a manner that the internal nozzle pressure does not exceed the saturated water vapor pressure of water at each internal nozzle pressure set temperature, in a relational expression relating to a flow rate of water vapor sprayed from the nozzle, and given by Expression 1 or Expression 2, as prescribed in the present invention.

Abstract: The invention relates to a device for storing and distributing a high-purity pressurized liquefied gas at a rate which is higher than or equal to 1 kg/h, said device having: a container comprising a liquefied phase of said gas in its lower part, and a gaseous phase of said gas in its upper part, a system for bleeding the gaseous phase of said gas, and a heating system used to maintain a constant pressure of the gas at the moment of use. The invention is characterized in that the heating system involves the circulation of a hot fluid in a circuit built into the surface of the container.

Abstract: A member having high non-electrostatic properties and high hydrophilicity and preventing an adhesion of contaminants, a surface-treating process and an apparatus for the surface-treating process are provided. A surface-treatment apparatus comprises a water vapor-generating unit 1, a superheating unit 5 for superheating a water vapor to generate a superheated water vapor, and a processing unit 11 for spraying the superheated water vapor to a member 14 to be treated (a ceramic, a metal) or for exposing the member to the superheated water vapor. Treating the untreated member with a superheated water vapor having a temperature 300 to 1000° C., hydrophilicity and antistatic properties are imparted to the member. The untreated member may be a member (a window member) contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.

Abstract: A steam generating appliance such as an electric iron comprises a base unit and a hand-held mobile unit which can be releasably coupled to the base unit. The base unit comprises a reservoir for water and a pump for pumping water from the reservoir into the mobile unit when the mobile unit is coupled to the base unit. The mobile unit comprises a boiler and an on-board reservoir for water, wherein the on-board reservoir is adapted to store water received from the base unit under pressure and to deliver the water to the boiler under the control of a user-operable valve.

Abstract: A steam generator e.g. for a hand-held portable appliance such as a domestic iron or steam cleaner comprises a water inlet, a boiler, a valve for controlling the entry of water into the boiler and means for delivering a surge of water to the boiler when the valve is opened. Also disclosed is an adaptor for supplying electrical power to a mobile electrical appliance. The adaptor is operable in a corded mode when secured to the appliance for supplying electrical power and water while the appliance is being used; or a cordless mode when secured to a base unit such that electrical and water connection can be made by placing the appliance on or against the base unit; and broken by lifting or moving the appliance away from the base unit.

Abstract: Systems, apparatuses and methods for vapor phase fluid delivery to a desired end use are provided, wherein the conditions of the system are monitored to determine when the water concentration or supply vessel surface temperature exceeds a specified value or when the low vapor pressure fluid pressure falls below a specified value for the purpose of removing a first supply vessel from service by discontinuing vapor flow from the first supply vessel and initiating vapor flow from a second supply vessel.

Abstract: A system for supplying water vapor in a process for treatment of a semiconductor wafer, comprising a treatment chamber having an interior for receiving at least one semiconductor wafer and a water vapor dispenser. The water vapor dispenser comprises i) a hot water source, ii) a water vapor separator, iii) a first conduit fluidly connecting the hot water source to the water vapor separator, iii) a fluid control valve in the first conduit controlling the flow of fluid between the hot water source and the water vapor separator, and iv) a second conduit fluidly connecting the water vapor separator to the treatment chamber for delivery of water vapor to the interior of the treatment chamber.

Abstract: Disclosed are an evaporator, an evaporation method, and a substrate processing apparatus, which can increase the concentration of generated vapor of an organic solvent and efficiently heat the organic solvent. The evaporator includes a fluid tube, a liquid organic solvent supply device for supplying the organic solvent liquid to one end of the fluid tube, and heating units for heating the fluid tube. The fluid tube has a cross section that increases from the one end to the other end. When the organic solvent liquid supplied to one end of the fluid tube is heated, the organic solvent vapor is discharged from the other end of the fluid tube. The substrate processing apparatus includes the above-described evaporator.

Abstract: One or more coating precursors are selected from metal or silicon compounds at a temperature above their melting points but substantially below their standard vaporization temperature, thereby causing the coating precursors to be in the form of a liquid. A vaporization chamber has a structure for continually injecting the liquid coating precursor into the chamber to produce a vapor. A seal-less, magnetically driven portion rotates a structure for distributing the liquid coating precursor in the vaporization chamber. In one embodiment, a barrier gas is injected adjacent the chamber at a velocity greater than the diffusion velocity of the vapor to prevent the vapor from communicating with the magnetically driven portion. In another embodiment, a first portion of the magnetically driven portion is connected to a structure for distributing the liquid coating precursor in the vaporization chamber.

Abstract: The present invention concerns capillary force vaporizers for use in vaporizing liquids and emitting pressurized vapors. In one embodiment, the inventive capillary force vaporizer includes a porous member, a heater component to convey heat to the porous member, and a vapor containment region. The porous member further includes a capillary network, a surface for receiving liquid and a vaporization area in which vapor is produced from the liquid. The vapor is collected and pressurized within the vapor containment region, which includes one or more openings for the release of vapor at a velocity greater than zero. Several different embodiments for capillary force vaporizers and systems comprising capillary force vaporizers are disclosed along with methods for their use.

Abstract: A superheated steam generator, capable of generating superheated steam which exceeds 400° C. even if a litz wire is adopted as an induction heating coil, and capable of being used as a middle-sized or small-sized home-available apparatus, is provided. The invention provided a superheated steam generator in which induction heating elements 22 which generates heat by electromagnetic induction are housed in a heat-resistant container 21, a hose 24 which allows cooling water to pass therethrough is wound around an outer peripheral surface of the heat-resistant container, a water supply unit 4 for the cooling water is connected to one end of the hose, the other end of the hose is connected to a steam inlet 21A of the heat-resistant container, an induction heating coil 25 is mounted on an outer peripheral surface of the hose, a high-frequency power supply unit 3 is connected to the induction heating coil.

Abstract: A method and system for delivering iodine gas is presented. The pure iodine gas flow can be at a controlled, known flow rate, and furthermore be held at a positive pressure in relation to a process chamber. In an exemplary embodiment, pure iodine gas is transported without the use of an inert carrier gas. This is facilitated in part by maintaining the iodine gas chamber at a higher pressure than the processing chamber. In one exemplary embodiment, an iodine vessel receives solid iodine supplied by an iodine fill source and is heated to produce pure iodine gas. In addition, a control system monitors and controls the operating conditions in the iodine vessel and maintains a positive pressure in the iodine vessel. The iodine delivery system may include a valve system configured to control the flow of iodine gas through the iodine delivery system and into a process chamber.

Abstract: A simulated smoke generator method and apparatus is provided for generating a consistent smoke plume. By using a closed loop controller to maintain at least one property, affecting one or more characteristics of the oil, at a desired level, a consistent type of simulated smoke is generated.

Abstract: A member having high non-electrostatic properties and high hydrophilicity and preventing an adhesion of contaminants, a surface-treating process and an apparatus for the surface-treating process are provided. A surface-treatment apparatus comprises a water vapor-generating unit 1, a superheating unit 5 for superheating a water vapor to generate a superheated water vapor, and a processing unit 11 for spraying the superheated water vapor to a member 14 to be treated (a ceramic, a metal) or for exposing the member to the superheated water vapor. Treating the untreated member with a superheated water vapor having a temperature 300 to 1000° C., hydrophilicity and antistatic properties are imparted to the member. The untreated member may be a member (a window member) contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.

Abstract: This invention relates to an evaporator comprising a casing (1; 21) and a heater (7; 27). Gas is supplied through an inlet (4; 24) and discharged through an outlet (5; 25). The casing forms an evaporating space (2; 22) and a heating space (3; 33) heated by the heater (7; 27). The evaporating space (2; 22) may be partially filled with a liquid (16; 36). The gas flows from the inlet (4; 24) via the heating space (3; 23) to the evaporating space (2; 22) and further to the outlet (5; 25). This invention moreover relates to an evaporator comprising an outer and an inner tub. The outer tub is heated. The inner tub may contain a water reserve and is inserted into the outer tub. The upper side of the bottom of the outer tub (8; 28) or the underside of the bottom of the inner tub (10; 30) is made of a soft elastic material. The invention finally relates to corresponding methods.

Abstract: A heating device for a smoke generator includes at least one heating rod and a vaporization tube. The vaporization tube includes a longitudinal passageway. The vaporization tube coils around the heating rod and includes an end connected to an outlet of a pump of a smoke generator. Preferably, the vaporization tube helically coils around the heating rod to form a coiling structure having at least one layer. Preferably, the vaporization tube includes a non-circular cross-section having at least one side in surface contact with a circumference of the heating rod.

Abstract: A steam generator 40? provided in a substrate processing apparatus includes a tank 301 having a hollow cylindrical member 302 formed of a composite of PTFE and PFA and a pair of side wall plates 303 connected to the opposite ends of the cylindrical member 302. The tank 301 is surrounded by a shell 305 of an aluminum alloy to prevent deformation of the tank due to internal pressure of the tank. A heater 308 is attached to the outer surfaces of the plate members 307 of the shell 305. The shell 305 restrains the tank 301 and compresses elastic sealing members 305 to sealingly engage the cylindrical member 302 and the side wall plate 303 with each other.

Abstract: The invention concerns a device and a process for applying a lubricant by means of vapour deposition to a target object, especially a magnetic data carrier. The device in accordance with the invention comprises a lubricant supply means (1) that can be filled from outside, possibly by means of a feed line. The produced lubricant vapour (5) is expanded through one or more exit openings (6) in the direction of a target object (8) on which the vapour deposition is to be effected. The vapour at first becomes adsorbed on the walls of a cone-shaped distribution element (4) situated between the lubricant supply means (1) and the target object (8), from which it subsequently desorbs again. Said adsorption/desorption process assures an even and homogeneous vapour distribution over the target object (8). A device for interrupting the vapour supply makes it possible for the device to be operated in a discontinuous manner.

Abstract: A steam-supplying apparatus for hairdressing and beauty care in which pressurized steam is sent from a steam-generating portion through an electromagnetic valve and a connecting tube, and forced to jet out of a steam-blowing portion. The electromagnetic valve has a heating steam circulation passage to preliminary heat inside the electromagnetic valve by the steam from the steam-generating portion also in closed state, and the steam-blowing portion has an electric heater to heat a steam passage in the blowing portion.

Abstract: A steam generator with improved safety and ease of use is provided. In this steam generator, water provided from a water tank is heated by a heater to generate a steam in a chamber, and then the steam is sprayed out through a steam channel. An overflow port is formed in the water tank such that an adequate water level is safely maintained even when an excessive amount of water is supplied into the water tank from a water inlet. The steam generator has a shutter disposed in a drain channel for water drained from the water tank through the overflow port and an interlocking mechanism for opening and closing the shutter in response to an opening and closing motion of a cover for the water inlet. This achieves good usability of the steam generator.

Abstract: A method and apparatus for depositing a dielectric material at a rate of at least 3000 Angstroms per minute on a large area substrate that has a surface area of at least about 0.35 square meters is provided. In one embodiment, the dielectric material is silicon oxide. Also provided is a large area substrate having a layer of dielectric material deposited by a process yielding a deposition rate in excess of about 3000 Angstroms per minute and a processing chamber for fabricating the same.

Abstract: A vapor flow controller apparatus for delivery of chemical reagent vapors from a liquid phase source material is provided which includes a source container containing the liquid phase source material, a pump to transport the liquid phase source material to a vaporizor module, the pump having a flow rate controller, and the vaporizer module having a source material inlet, a carrier gas inlet, and a vaporized gas outlet. The vaporizer module converts the liquid phase source material to a vapor. The vapor flow controller apparatus further includes a source material conduit for passage of the liquid phase source material from the source container to the source material inlet of the vaporizer module. The vapor flow controller apparatus further includes a carrier gas container containing a carrier gas and having a carrier gas outlet conduit controlled by a mass flow controller.

Abstract: A delivery system and method for vaporizing and delivery of vaporized solid and liquid precursor materials at sub-atmospheric pressures between a heatable vaporization vessel and a processing tool. The system includes a pressure regulator internally positioned within the vaporization vessel and in fluid communication with a downstream mass flow controller to maintain a consistent flow of vaporized source material. The system further comprises introducing a carrier/diluent gas for diluting the vaporized source material before entry into the processing tool. A venturi is positioned directly upstream of the processing tool and provides for mixing of the carrier gas with the vaporized source material while providing the negative pressure required to open the gas pressure regulator within the vaporization vessel.

Abstract: The present invention recognizes that the build-up of residue in a metal alloy injection valve used to inject a liquid phosphorous precursor compound is due to the nickel in the alloy affecting the liquid phosphorous precursor compound. The invention thus provides components manufactured of an alloy having a low nickel content, preferably less than 5% nickel, and more preferably less than 1%. In an additional aspect of the invention, the alloy is provided with a higher chromium content, preferably at least 15% chromium, more preferably 16-27%.

Abstract: Provided are apparatuses and methods for vaporizing a liquid chemical to form a vapor phase product. One exemplary apparatus includes: a vaporization chamber, which includes a first annular wall having a plurality of openings and enclosing a vaporization space and a second annular wall disposed within the first annular wall, the first and second annular walls forming an annular space therebetween; a first conduit connected to the vaporization chamber for introducing thereto a liquid chemical to be vaporized; a second conduit connected to the vaporization chamber for introducing a carrier gas to the annular space, wherein the carrier gas flows from the annular space through the first annular wall to the vaporization space; and a third conduit connected to the vaporization chamber for supplying the vapor phase product to a point of use.

Abstract: The device for regulation of a generator of hot fluid in liquid or gaseous phase comprises a vat provided with at least one heating body, a pump for supplying the vat with cold liquid, and at least one appliance supplied by the hot fluid leaving the vat. This regulation device comprises a detector (15, 20, 24) of the liquid level present in the vat, comprising a float (15, 16) connected by a flexible tube (20) to a ferrule (24) passing in sealed fashion through the cover of the vat. An angle switch (M) is disposed immediately adjacent the float (15, 16), its electrical conductor leaving the vat through said flexible tube (20).

Abstract: A vaporizing device for chemical vapor deposition (CVD) source materials includes a vaporizer for vaporizing introduced CVD source materials by heating, a spray nozzle of which an end portion is fixedly attached to the vaporizer for spraying the CVD source materials into the vaporizer, a cooling mechanism for cooling the spray nozzle, and a heat conduction restrictor attached to the end portion, proximate of the end portion, or to the vaporizer. Generation of non-vaporized residues and particles is decreased, improving productivity owing to prolongation of continuous operation time of the apparatus and a decrease in film defects.

Abstract: Apparatus for producing a wet oxygen stream for a semiconductor furnace to form oxide layers on silicon wafers. A quartz vessel with quartz chips is heated to 450° C. and a mixture of water and oxygen is introduced at the bottom of the vessel. Vaporization occurs at the input of the water and oxygen into the vessel. The output of wet oxygen as superheated stream passes through the chips and is taken from the top of the vessel to the furnace. The quartz vessel is nested in an aluminum body containing heaters to maintain constant temperature. The ratio of water vapor to oxygen in the wet stream is constant to produce layers of predictable characteristics.

Abstract: An inactive gas is introduced into an organic material evaporation source to place a thin organic film material in the organic material evaporation source in an atmosphere having a relatively high pressure, and the temperature of the thin organic film material is increased up to a certain temperature. Then, the organic material evaporation source is evacuated to lower the pressure around the thin organic film material for thereby causing the thin organic film material to emit a vapor. Since no wasteful vapor is emitted from the thin organic film material, the thin organic film material is effectively utilized. Because the inactive gas acts as a heating medium, the temperature of the thin organic film material is increased at a high rate, and the thin organic film material is uniformly heated. When the temperature of the thin organic film material is lowered in an inactive gas atmosphere, it can be lowered at a high rate.

Abstract: A superheated vapor generator system comprises at least two vapor generators connectable to a controller for causing at least one of the superheated vapor generators to generate superheated vapor during a time interval in which the at least one other superheated vapor generator does not generate superheated vapor whereby at least one superheated vapor generator produces superheated vapor as desired during a selected time interval. The system may be adjusted to generate vapor substantially continuously.

Abstract: A liquid vaporizer apparatus and method for chemical vapor deposition of liquid solutions into a controlled atmosphere of a CVD reaction chamber. The apparatus comprises an atomizer, gas curtain, heated porous media disks and a carrier gas mixer. The invention provides for the independent control of temperature, pressure and precursor stoichiometry during the atomizing and vaporization process thereby rendering the precise precursor vapor quality and quantity required for a given application. The invention employs the use of removable porous media disks which may be varied according to the desired operating pressure and precursors. In operation, the apparatus provides for a liquid precursor to first be atomized into a mist using an ultrasonic nozzle, then vaporized by heated media disks, and mixed with a carrier gas, then forced into CVD reaction chamber.

Abstract: A liquid vaporizer apparatus and method for chemical vapor deposition of liquid solutions into a controlled atmosphere of a CVD reaction chamber. The apparatus comprises an atomizer, gas curtain, heated porous media disks and a carrier gas mixer. The invention provides for the independent control of temperature, pressure and precursor stoichiometry during the atomizing and vaporization process thereby rendering the precise precursor vapor quality and quantity required for a given application. The invention employs the use of removable porous media disks which may be varied according to the desired operating pressure and precursors. In operation, the apparatus provides for a liquid precursor to first be atomized into a mist using an ultrasonic nozzle, then vaporized by heated media disks, and mixed with a carrier gas, then forced into CVD reaction chamber.

Abstract: The humidifier for controlling humidity in a semi-conductor manufacturing environment provides a trickle water refill level control system for maintaining an accurate flow of refill water into the humidifier water tank. A water supply provides a substantially constant rate of flow of water to a conduit connected between the humidifier tank inlet port and the water overflow tank inlet port, to allow the excess water supplied to the humidifier water tank to flow to the overflow tank. The overflow tank has a float level control allowing for operation of the steam generating humidifier at higher steam pressures, and increased stability of the steam generation rate. A pressure equalization line is also connected between an upper portion of the humidifier water tank and an upper air reservoir of the water overflow tank for equalizing pressure between the humidifier water tank and the water overflow tank.

Abstract: A hot water and electricity generator including a casing having a water inlet provided with a float ball valve, an engine arranged within the casing and having an exhaust pipe, a power generator drivingly connected with the engine, a pump drivingly connected with the power generator, a water reservoir disposed above the power generator within the casing and provided with a heat exchanging pipe, a first electric heater electrically connected to the power generator and installed within the water reservoir, an outlet pipe having an end connected with another end of the heat exchanging pipe and another end extending out of the casing, a steam chamber mounted on the water reservoir, and a second electric heater electrically connected to the power generator and installed with the steam chamber, whereby hot water and electricity will be generated as desired.

Abstract: An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

Abstract: A liquid deposition source delivery system (22) includes a reactant source (50) of a liquid chemical reactant, a first heater (54) positioned adjacent to the reactant source (50) , and a vapor collection system (56) in communication with the reactant source (50) to collect vapor evolved from the reactant source (50). A flow controller (64) has an upstream side (66) in communication with the vapor collection system (56). A line (70) of a vapor distribution system is in communication with the downstream side (68) of the flow controller (64). A second heater (76) is positioned adjacent to the flow controller (64), at least a portion of the vapor collection system (56), and at least a portion of the vapor distribution system, to prevent the vapor from condensing in the lines (70) of the delivery system.

Abstract: An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

Abstract: The steam generator according to the invention consists of a main vessel 1 equipped with heating devices 12 controlled by control devices 13. The water level in the steam generator is kept at an average level 5 by control devices 13 which control a water inlet solenoid valve 10. Measurement of the average water level 5 is achieved by a pressure switch 20 that is exposed to the pressure inside a measuring vessel 18 that communicates with the main vessel 1 via a lower measuring opening 22. Balancing pipework 34 links the pressure switch 20 to the pressure of the steam produced in the steam generator. Pressure switch 20 generates measuring signals that are sent via conductors 17 to control devices 13 in order to actuate solenoid valve 10.

Abstract: A humidity measurement process and humidity measurement scale are derived from the physics of relative humidity. Absolute moisture content is determined independent of any measurement or knowledge of the source temperature. The humidity measurement is equivalent to the volumetric fraction of water vapor in the measured gas mixture, expressed as a percentage in a fixed range from 0 to 100%. The operating principles of the measurement process and measurement scale are described for use with an instrument suitable for humidity measurements in process ovens, product dryers, exhaust stacks, and similar environments operating at temperatures to 1250.degree. F. and near atmospheric pressure. The instrument is a point-source sampling system. A continuous sample of process air is induced to flow through the instrument for humidity measurement.

Abstract: A portable humidifier unit includes a base defining a water reservoir and a humidifier unit mounted over the base and movable relative to the base to provide access thereto. The humidifier unit contains an electrically energized humidification mechanism for inducing dispersion of the water from the reservoir into the space to be humidified. The humidifier unit is provided with a manually actuated On/Off switch for inducing energization of the humidification unit in the switch on position and deenergization thereof in the switch off position. In order to prevent unsafe operation, the switch and base are provided respectively with a latch arm and cooperating latch receptacle. The latch arm and latch receptacle are so arranged that in the switch on position the latch arm engages the latch receptacle to prevent movement of the humidifier unit relative to the base thus preventing access to the interior of the humidifier while the humidification unit is energized.

Abstract: Heating apparatus comprises a chamber (10) in which articles to be heated (e.g. sterilized) are located via a door (16) and which can be filled with a blanket of dense hot organic vapor during a heating phase. The liquid which creates the vapor blanket is located in an annular reservoir (20) and is heated to above vaporization temperature by an electrical band heater (22).

Abstract: An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

Abstract: A steam generator is disclosed for a cooking apparatus, having an intermediate duct admitting discharge water into the lowest central portion of the enclosure of the generator, and connected to a vane pump whose outlet feeds into an outlet duct rising as far as an upper bend then descending as far as an emptying duct. Heating tubes cause vaporization of the water which they contain and the steam escapes through a horizontal upper duct then a steam conduction duct. The generator applies in particular to ovens for cooking food.

Abstract: A steam generator for cooking appliances, having three vertical tubes connecting a lower duct and an upper duct together. The central tube is a heating tube having an electric resistance welded to the outside of the tube. The second tube is a return tube for returning water from the upper duct to the lower duct. The steam escapes through a discharge orifice in the upper duct. The third tube comprises a resistive probe measuring the level of the water and for regulating it to an intermediate level.

Abstract: A positive-acting mechanism for pressurizing a liquid CO.sub.2 storage cylinder involves a sealed tube suspended from the cylinder top and extending down into the bottom of the cylinder. The sealed tube contains an electric heating element and a temperature sensor connected to a thermostat. A pressure-stat with its capillary connected to the top of the cylinder is connected in electrical series with the thermostat. One wire from the heating element goes to a source of electricity and the other to the thermostat or pressure-stat. Another wire to the source of electricity is connected to the thermostat or pressure-stat whichever is not connected to the heating element.