Abstract: A device for transferring articles between an atmospheric pressure environment and a vacuum environment includes a transfer housing having an atmospheric transfer port, a pumping port, a vacuum transfer port, and a venting port disposed in a circumferentially-spaced relationship. The vacuum transfer port is in communication with the vacuum environment and the atmospheric transfer port is in communication with the atmospheric pressure environment. The device can include a carrier disc rotatably disposed within the transfer housing, the carrier disc having a pocket formed in a sidewall thereof for holding an article. The device may further include an air bearing associated with the transfer housing and configured to expel gas to maintain a gap between the transfer housing and the carrier disc.

Abstract: Methods and apparatus for transferring one or more substrates from a first pressure environment to a second pressure environment is provided. In one embodiment, a load lock chamber is provided. The load lock chamber comprises a first circular housing, and a second circular housing disposed within and movable relative to the first circular housing, one of the first circular housing or the second circular housing comprising a plurality of discrete regions, wherein at least a portion of the plurality of discrete regions are in selective fluid communication with one of at least two vacuum pumps based on the angular position of the second circular housing relative to the first circular housing.

Abstract: There is provided a slit valve unit including: a body disposed on an outer side of a process chamber and having an entrance connected to an opening of the process chamber; a slit valve provided in an internal space of the body and selectively opening and closing the entrance; a plurality of packing members provided along the circumference of the entrance on an inner side of the body and tightly attached to the slit valve when the slit valve shields the entrance; and a connection pipe having one end exposed between the plurality of packing members on the inner side of the body so as to be connected to an airtight space formed among the plurality of packing members, the body, and the slit valve, and the other end exposed to the outer side of the body, the connection pipe penetrating the body.

Abstract: A lock device for adding and removing containers to and from a vacuum treatment chamber includes carrier plates for the containers. The carrier plates are fastened to revolving transport chains and are transported through lock channels provided in straight sections along the transport chains. The carrier plates also achieve a sealing effect with the channels as they are moved past suction or ventilation openings in the lock channels to form a differential pressure stage.

Abstract: In a load port portion of a conventional clean device, it can happen that cleanliness is reduced by dust caused by wear of bellows and a lid is not separated by its weight from a main body. In order to solve such problems, a clean device is structured as follows: a lid of a clean box has a non-circular reception hole, a load port portion of the clean device has an opening/closing mechanism with a projection fittable in the receiving hole and has a buffer chamber, one end of bellows of the buffer chamber is connected to the bottom surface of the buffer chamber, and the other end of the bellows is fixed, on the outside of the buffer chamber, to raising/lowering means of a port door.

Abstract: A method of a single wafer wet/dry cleaning apparatus comprising: a transfer chamber having a wafer handler contained therein; a first single wafer wet cleaning chamber directly coupled to the transfer chamber; and a first single wafer ashing chamber directly coupled to the transfer chamber.

Abstract: An electronic device manufacturing system is disclosed. The system includes a processing tool having one or more processing chambers each adapted to perform an electronic device manufacturing process on one or more substrates; a substrate carrier adapted to couple to the system and carry one or more substrates; and a component adapted to create a sealed environment relative to at least a portion of the substrate carrier and to substantially equalize the sealed environment with an environment within the substrate carrier. Methods of the invention are described as are numerous other aspects.

Abstract: A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports.

Abstract: The invention relates to a method for performing a function or an operation involving a material and/or a device, in particular a non-gaseous material such as a biological material or an electronic material subjected to an operation as a scientific investigation, a medical test or a handling during production, under a gaseous atmosphere in an inner chamber. The invention provides a new principle for avoiding contamination by gaseous materials, airborne particles and other contamination to an inner space, such as a workbench or working chamber, from an adjacent surrounding space such as the ambient atmosphere, or emigration of materials such as hazardous medical material, toxic substances or other pollution to the adjacent surrounding space from the inner space. A workbench is obtained fulfilling all the strictest requirements to a clean working chamber.

Abstract: A transfer chamber for a cluster system includes a first body, a second body attached at one side of the first body, and a cover combined with an upper portion of the first body. The transfer chamber further includes a third body at another side of the first body, wherein the third body has the same shape as the second body.

Abstract: A method adjusts a pressure in a substrate processing device. The substrate processing device has a processing chamber for executing a predetermined processing for a substrate to be processed mounted on a mounting table; a pressure adjustment unit for the processing chamber which adjusts a pressure within the processing chamber; a transfer chamber connected to the processing chamber via a gate valve; and a pressure adjustment unit for the transfer chamber which adjusts a pressure in the transfer chamber and adjusts a pressure within the processing chamber while the gate valve is opened. The method is to adjust a pressure within the processing chamber to a predetermined pressure by using both the pressure adjustment unit for the processing chamber and the pressure adjustment unit for the transfer chamber.

Abstract: A transfer chamber for a cluster system includes a first body, a second body attached at one side of the first body, and a cover combined with an upper portion of the first body. The transfer chamber further includes a third body at another side of the first body, wherein the third body has the same shape as the second body.

Abstract: An apparatus for pneumatically conveying particulate material containing reaction products of a high pressure reactor from a supply vessel at a pressure of at least two bar to a receiving vessel at a considerably lower pressure. The apparatus includes a conveyor line attached to the supply vessel, a collecting vessel between the conveyor line and the receiving vessel, the collecting vessel including (i) a discharge conduit for the carrier gas, (ii) a device for controlling the discharge velocity of the carrier gas from the collecting vessel, and (iii) a device for controlling the pressure of the material collected in the collecting vessel, and a device for conveying the material directly from the collecting vessel to the receiving vessel essentially at the same pressure as is prevailing in the receiving vessel.

Abstract: A chamber for transitioning a semiconductor substrate between modules operating at different pressures is provided. The chamber includes a base defining an outlet. The outlet permits removal of an atmosphere within the chamber to create a vacuum. A substrate support for supporting a semiconductor substrate within the chamber is included. A chamber top having an inlet is included. The inlet is configured to allow for the introduction of a gas into the chamber to displace moisture in a region defined above the substrate support. Sidewalls extending from the base to the chamber top are included. The sidewalls include access ports for entry and exit of a semiconductor substrate from the chamber. A method for conditioning an environment above a region of a semiconductor substrate within a pressure varying interface is also provided.

Abstract: An apparatus for measuring a component that can carry out processes such as visual inspection, characteristic measurement, screening, and taping efficiently while transporting the electronic component at high speed. In order to transport the electronic components to the index table where the processes such as characteristic measurement, screening, and taping is carried out, a component transporting device is used in which the electronic component delivered from the component delivery section 10 is transported to the component intake port 23 based on negative pressure, transported with the airflow through the transportation path 25, and discharged from the part discharging port 24. The transporting device includes a gas discharging port 33 in the vicinity of the component discharging port, which serves to decrease the transport speed of the electronic component before transporting it to the index table.

Abstract: An apparatus safely fills and empties a pressurized vessel charged with flammable and/or reactive gas. The apparatus features an upper flap combination, an intermediate lock vessel having a flushing apparatus, and a lower flap combination. The present invention also relates to a pressurized reactor which is charged with flammable and/or reactive gas and is equipped with a filling lock apparatus and an emptying lock apparatus for the simultaneous preparation of tetrachlorosilane, trichlorosilane and hydrogen. In addition, the present invention relates to a special process for filling and emptying such a reactor.

Abstract: The present invention relates to an apparatus for the safe filling and emptying of a pressurized vessel charged with flammable and/or aggressive gas. The apparatus features an upper flap combination, an intermediate lock vessel having a flushing apparatus, and a lower flap combination. The present invention also relates to a pressurized reactor which is charged with flammable and/or aggressive gas and is equipped with a filling lock apparatus and an emptying lock apparatus for the simultaneous preparation of tetrachlorosilane, trichlorosilane and hydrogen. In addition, the present invention relates to a special process for filling and emptying such a reactor.

Abstract: A method of transferring and processing a substrate in an evacuable chamber which is located adjacent a process chamber and back-to-back process chambers, and other combinations of evacuable chambers and process chambers. The method includes the use of various isolation valves disposed between adjacent chambers, as well as gas flow valves and vacuum valves. By controlling the positions of the valves, the flow of gas to and from the different chambers can be controlled.

Abstract: In an air lock for continuous introduction into and/or removal of workpieces from spaces (1,4) separated atmospherically, the individual substrates (3,13) are transported through a transfer channel (24). At least one lock chamber (7a-7m) serving to accommodate the substrates (3,13) is arranged movably in the transfer channel (24). During the substrate transport in the transfer channel (24), the lock chamber (7a-7m) is atmospherically separated both from the exterior (1) having normal pressure and from the coating chamber (4). The air lock (2) includes a carrousel lock which has a carrousel housing (24) and a lock chamber wheel (10). On the periphery in the lock chamber wheel (10) individual lock chambers (7a-7m) are provided, in which the workpieces (3,13) to be brought into the chamber to be loaded (4) are inserted freely accessible on the normal pressure side.

Abstract: A method of transferring a sample to and from a treating chamber kept in a vacuum atmosphere through a pressure regulative preparatory chamber. The sample is contained in the sample transfer container, which is kept air-permeable by a dust filtering filter, in a cleaned atmosphere before the sample is transferred to the treating chamber. The sample transfer container is transferred into the preparatory chamber, and the inside of the preparatory chamber is evacuated to a vacuum atmosphere. The sample is then extracted from the sample transfer container in the vacuum atmosphere and is transferred into the treating chamber. Also disclosed is an apparatus for supporting the sample transferring method.

Abstract: The present invention relates to a rotary valve for conveying and metering bulk material into a pneumatic conveying conduit. Exemplary embodiments include a housing with a supply opening, a discharge opening and a cellular wheel supported rotatably about a substantially horizontal axis within a cavity of the housing. The cellular wheel rotates in a predetermined direction of rotation so that as some of its cells move upward, other cells move downward. The housing has at least one venting opening for venting the upward moving cells, the venting opening being arranged before the supply opening when seen in the direction of rotation. A perimeter of the at least one venting opening lies on a peripheral wall of the housing and has a plurality of recesses which extend in a direction towards the cellular wheel when the latter rotates in the direction of rotation.

Abstract: An apparatus and method are described for stripping the photoresist from a wafer while in a substantially parallel manner, another wafer is being transferred between a load lock chamber and a transfer chamber, where the processing occurs. Further, a system is described whereby two load lock chambers are employed so that processing of wafers can continue uninterrupted by a delay caused by the need to open, empty, reload and re-equilibrate a single load lock chamber. Still further, a system is described for performing multi-step dry-stripping applications requiring different conditions for two or more of the steps wherein the steps may be performed simultaneously or sequentially. Finally, a system combining a dry-stripping module and a wet-cleaning module is described which combination system permits the continuous, fully-automated dry-stripping and wet-cleaning of wafers and, upon completion of the entire processing cycle, returning wafers to their original wafer cassettes.

Abstract: A wafer transfer system is described for transferring a wafer while at substantially the same time another wafer is being processed. The wafer transfer system comprises, in one embodiment, a transfer chamber having a wafer transfer blade, a load lock chamber coupled to the transfer chamber, an atmospheric robot for loading and unloading the wafer into the load lock chamber, and a slider coupled to the wafer transfer blade for moving the wafer transfer blade between the transfer chamber and the load lock chamber. According to a preferred embodiment, the slider utilizes a magnetic coupling mechanism. In a further embodiment, a device comprising a transfer chamber coupled to a plurality of plasma sources capable of simultaneously or sequentially providing different plasma structures within the transfer chamber, is described.

Abstract: A wafer transfer system is described for transferring a wafer while at substantially the same time another wafer is being processed. The wafer transfer system comprises, in one embodiment, a transfer chamber having a wafer transfer blade, a load lock chamber coupled to the transfer chamber, an atmospheric robot for loading and unloading the wafer into the load lock chamber, and a slider coupled to the wafer transfer blade for moving the wafer transfer blade between the transfer chamber and the load lock chamber. According to a preferred embodiment, the slider utilizes a magnetic coupling mechanism and a plurality of plasma sources are coupled to the transfer chamber. The plurality of plasma sources are arranged in a plurality of pairs of plasma sources. Each plasma source in a pair of plasma sources share the other plasma source's induction coils.

Abstract: An ion implantation system that rapidly and efficiently processes large quantities of workpieces, such as flat panel displays. The ion implantation system includes a high vacuum process chamber that mounts an ion source, a single workpiece translating stage, and a loadlock. The single workpiece handling assembly mounted within the process chamber both removes the workpiece from the loadlock and supports the workpiece during implantation by the ion beam generated by the ion source. The process chamber is in selective fluid communication with a loadlock assembly, which in turn is mechanically integrated with a workpiece loading or end station. Additionally, the workpiece handling assembly includes a translation stage or element for translating the workpiece in a linear scanning direction during implantation. This linear scanning direction extends along a path transverse or orthogonal to the horizontal longitudinal axis of the implantation system.

Abstract: A pressure-tight sluice includes a housing having an inside wall shaped substantially as a torus with a superelliptical cross section. The housing has an inlet and an outlet. A rotor includes an axle rotatable within the housing and a plurality of lamellae extending outwardly therefrom. Each lamella has a superelliptical shape complementary with the inside wall on an outer edge of each lamella is mounted a gasket to seal against the inside wall. Each gasket includes an air hose one end of which communicates via a hole connection in the axle with a compressed air distributor.

Abstract: An assembly for recovering crystals from a slurry comprises a filtration unit including a rotatably mounted cylindrical filter, a slurry input for receiving slurry pressurized by a pump. The filtration unit has an outlet for discharging crystalline material separated from the slurry by the filtration unit. A first hopper connected to the filtration unit at the discharge outlet thereof is provided at a downstream side with a first valve unit which is in turn connected to a second hopper on a downstream side. A second valve unit is coupled to the second hopper at a downstream side thereof. Each of the valve units includes a rotatably mounted dome shaped valve member. The second hopper is provided with a vent extending to a gas storage tank. A conduit links the hoppers to one another for substantially equalizing pressure in the hoppers prior to an opening of the upstream valve during a discharge procedure.

Abstract: An apparatus for transferring objects from a first region to a second reg, the first and second regions having differing atmospheric environments. The apparatus includes a shell having an entrance and an exit, a conveyor belt running through the shell from the entrance to the exit, and a horizontally mounted "revolving door" with at least four vanes revolving about its axis. The inner surface of the shell and the top surface of the conveyor belt act as opposing walls of the "revolving door." The conveyor belt dips as it passes under but against the revolving vanes so as not to interfere with them but to engage at least two of the vanes and define thereby a moving chamber. Preferably, the conveyor belt has ridges or grooves on its surface that engage the edges of the vanes and act to rotate the vane assembly.

Abstract: An apparatus for attaching a bar code to a reticle case has an elevating base which is movable up and down and is rotatable with the reticle case placed thereon. The reticle case contains therein a reticle so as to be taken in and taken out through an outlet on a side thereof. An opening device for opening the outlet of the reticle case is positioned in a predetermined position. Take-in/takeout device lifts the reticle while the outlet is open and then transfer the reticle between an inside of the reticle case and a transfer device outside the reticle case. A carrying base receives the reticle held by the transfer device and then moves it to and from a position in front of a reading device for reading a mark which is marked on the reticle. A label attaching device prints, on a label, a bar code according to a signal from the reading device and then attaches the label, on which the bar code has been printed, to the reticle case.

Abstract: A fluid flow control for use with a process chamber. In the disclosed embodiment, the process chamber is for ion implantation of a workpiece such as a silicon wafer and the fluid flow control is to assure the flow rates are maintained at values which are efficient in evacuating and pressurizing the chamber do not dislodge particulate contaminants from the process chamber walls. In the disclosed design, wafers are inserted into the chamber by use of a loadlock which avoids the requirement that the process chamber be cyclicly pressurized and depressurized. A diffuser plate intercepts fluid flowing into and out of the process chamber.

Abstract: A vacuum fill system for continuously deaerating and compacting flowable materials for transportation and storage in containers includes a first rotatable chamber valve for receiving the flowable materials. Attached to the rotatable chamber valve is a fixed position chamber connected to a vacuum source for receiving the flowable materials from the first rotatable chamber and for deaerating the flowable materials. The fixed position chamber is in turn connected to a second rotatable chamber valve for receiving the deaerated flowable materials from the fixed position chamber, maintaining the materials in a vacuum, then returning the materials to atmospheric pressure substantially instantaneously as the valve rotates to compact the deaerated materials into a substantially solid mass.

Abstract: The device comprises an external fixed hollow casing (20) provided with a concave surface (21) of revolution about a central axis A and with two apertures (22') and (22") for passage of the objects, each aperture communicating with a respective environment; within the casing (20) there is provided a structure (10) rotatable about the axis A and in sealed engagement with the concave surface (21); the structure (10) comprises at least one blind chamber (11) for containing the objects; the structure (10) rotates to carry the objects which it receives from one aperture (22') to the other aperture (22"); in whatever angular position the structure (10) lies, it closes communication between the two apertures (22') and (22"); the device is applicable in particular to sterilization or pasteurization plants and represents an improvement to known device, and in particular achieves very high productivity.

Abstract: A vacuum fill system for deaerating flowable material includes a cylindrical container partitioned into a plurality of chambers which rotate sequentially and which are connected to a vacuum pump for establishing a vacuum when filled with flowable material. The flowable material deaerates and compacts when atmospheric pressure is subsequently restored.

Abstract: A rotary feeder includes a housing which accommodates a rotor extending between two lateral disk members. Bearing against the peripheral area of each disk member is a slide ring which is acted upon by a pressure fluid with a constant holding force by which the slide ring is pressed against the associated disk member. Thus, the axial sealing of the rotor within the housing is independent of the wear of the slide ring. In addition to the holding pressure, the slide rings may also be subjected to a momentary displacement force which exceeds the holding force and ensures that the slide rings overcome frictional forces in the area of their guides.

Abstract: A vacuum-tight wafer carrier. The wafers are supported at each side by a slightly sloping shelf, so that minimal contact (line contact) is made between the wafer surface and the surface of the shelf. This reduces generation of particulates by abrasion of the surface of the wafer. The door of the vacuum carrier contains elastic elements to press the wafers lightly against the back of the carrier box. Thus, when the door of the box is closed, the wafers are restrained from rattling around, which further reduces the internal generation of particulates.

Abstract: A continuous flow ash lockhopper includes an ash hopper at the outlet of a high temperature, high pressure reactor vessel containing heated high pressure gas, a fluidics control chamber having an input port connected to the ash hopper's output port and an output port connected to the input port of a pressure letdown means, and a control chamber connected to a variable pressure control fluid (gas or steam) supply for regulating the pressure in the control chamber to be equal to or greater than the internal gas pressure of the reactor vessel, whereby the reactor gas is contained while ash is permitted to continuously flow from the ash hopper's output port, impelled by gravity. The fluidics control chamber may be provided with a variable port to inject control fluid at a desired velocity.

Abstract: Disclosed is a method and apparatus for continuous introduction and exit of workpieces into and out of a vacuum. A first seal is provided between the atmosphere and a first pumping station. This seal comprises compliant members positioned within cavities in a plate so that the pressure differential causes the members to push against the workpiece and the cavity wall to establish a rotating seal. A second seal may also be provided between the first pumping station and the vacuum chabmer. This seal includes compliant members mounted within a series of differentially pumped cavities and providing a low friction seal with the workpiece.

Abstract: An evacuable wafer processing machine includes a load-lock station, a wafer transfer station separated from the load-lock station by means of a gate-valve and a wafer coating station. Wafers contained within an evacuated wafer box are loaded into the load-lock station. The load-lock station is then closed and evacuated. A pair of pneumatically-operated plungers operable within the load-lock station, pick-up and remove the covers from the wafer box. The gate-valve is opened and the box of wafers is transferred into the wafer transfer station. Within the wafer transfer station, a wafer transfer blade passes vertically through the wafer box to serially transfer the wafers between the transfer station and the wafer coating station. After all the wafers have been coated, the wafer box is transferred through the open gate-valve into the load-lock station, the gate-valve closed and the covers replaced on the wafer box.

Abstract: An apparatus and method for treatment of hollow articles by evacuating existing gas or gases therefrom and purging or backfilling the articles with a second gas such as helium. The apparatus includes a sealed enclosure having an article storage drum mounted therein. A multiplicity of such articles are fed singly into the enclosure and loaded into radial slots formed in the drum. The enclosure is successively evacuated and purged with helium to replace the existing gas in the articles with helium. The purged articles are then discharged singly from the drum and transported out of the enclosure.

Abstract: A material-feeding apparatus having a casing provided with inlet and outlet openings. The casing encloses a rotor provided with circumferentially-arranged cylinders each fitted with a free piston. The cylinders progressively register with the inlet opening which is at or near atmospheric pressure and the outlet opening which is exposed to high pressure as the rotor is rotated intermittently by a drive mechanism. The casing and rotor are provided with a network of conduits which interconnect selected cylinders as the motor moves through one complete revolution and balances the pressure between the two extremes existing within the inlet and outlet openings. Fluid pressure slightly in excess of the pressure present within the outlet opening is fed to each cylinder is register with that opening to move the piston and discharge the material from the apparatus.

Abstract: In a system for moving large quantities of pulverulent material from receiving hoppers, such as those of a fly ash precipitator, into a pressurized air conveyor pipeline, separate auger conveyors move material from a first line of receiving hoppers and from a second line of receiving hoppers downstream into gravity material inlets at opposite ends of an effectively airtight pressure conveyor casing. In the casing auger conveyor flights of opposite hand and substantially smaller than the casing means it toward a central outlet through which it drops into the pressurized air conveyor pipeline. Above the outlet the auger conveyor shaft has radial material agitating rods. The system is cycled to alternately feed material into the pressure conveyor casing at receiving hopper pressure, which is about atmospheric pressure, and out of the pressure conveyor casing at pipeline pressure.

Abstract: An apparatus is disclosed for feeding a continuous supply of carbonaceous material into a pressurized reactor for producing a product gas from the material and which contains toxic and flammable gases. The apparatus comprises a first rotary gas lock for receiving the material from ambient atmospheric condition. The first lock is supplied with a flow of nitrogen as a sealing gas to prevent air from entering the lock and the apparatus. The first lock transfers the material to a second rotary gas lock which in turn transfers the material to a screw conveyor for delivery to the interior of the reactor. The second lock is supplied with a flow of a clean product gas as a buffer gas. The clean product gas supplied to the second lock is at a pressure greater than the pressure in the reactor and prevents flow of gases from the reactor to the apparatus.

Abstract: The food material to be processed is alternately transferred from two sources to an elongated treating chamber. The apparatus for carrying out the method includes rotary valve means employing two pocket areas, each pocket area including a plurality of pockets with each pair of diametrically located pockets having an interconnecting passage. The pockets of one area are angularly displaced or out-of-phase with the pockets of the other area. Owing to the out-of-phase relationship, the food material to be processed is alternately received by one pocket of one area, then by the next pocket of the other area and so on through each revolution of the valve means in which the pockets are contained, the material being discharged in the same out-of-phase relationship through the interconnecting passages and diametrically disposed pockets into the inlet of a pressurized elongated treating chamber.

Abstract: This invention provides a housing containing a rotatable coal bucket that is sealed at its ends in the housing with a reciprocal plunger that is sealed in the bucket at one end and has an opposite cone-shaped end that wedges up against a closed end of the bucket, and a method for feeding dry, variable size coal from an ambient atmosphere at low pressure into a high temperature, high pressure reactor between the seals for producing fuel gas substantially without losing any high pressure gas from the reactor or excessively wearing the seals.