Abstract: System for handling components in connection with circuit board assembly in a component mounting machine. The system comprises a number of component tapes provided on component tape reels, and a number of tape guides arranged for receiving component tapes of a given component tape width and for bringing the component tape in position for feeding of the component tape and for picking components from the component tape in the component mounting machine. The tape guides have a similar geometrical outline and basic configuration, and each tape guide comprises a component exposure device for exposing a component at a picking position by removing the portion of the cover tape covering the component. The tape guides are divided into sub-sets of tape guides, wherein the tape guides of each individual sub-set have component exposure devices of the same design, which design is dependent on the configurations of the component tapes intended for that sub-set of tape guides.

Abstract: In an electronic component feeding apparatus for feeding components with use of a taping component, a brushless motor is used as a drive motor in a tape sending mechanism that transports the taping component so as to improve productivity in an electronic component mounting apparatus equipped with the electronic component feeding apparatus. Also, an electronic component feeding apparatus is provided with a control part that automatically executes initial processing such as sending of the taping component, as well as detects and reports a sending failure of the taping component when the electronic component feeding apparatus is installed in the electronic component mounting apparatus, which makes it possible to provide an electronic component feeding apparatus enabling easy and prompt detection of the sending failure of the taping component.

Abstract: An apparatus 101 for supplying a component carrier in the form of a tape is provided. The component carrier 102 has a number of cavities 116 formed on one surface thereof for containing components 115. A pair of spaced first and second guide plates 106 and 107 guide one surface of the component carrier. A movable guide plate 109 is disposed between the first and second guide plates so that it can move back and forth between a first position adjacent to the first guide plate for defining a component pickup station 111 and a second position adjacent to said second guide plate. The movable guide plate has an extension 112 which extends along at least one longitudinal edge of the component carrier and opposes to said one surface of said component carrier for preventing movement thereof when the movable guide plate takes the first position.

Abstract: A wafer container having a latching mechanism utilized to lock the door of the wafer container in an airtight status. The latching mechanism comprises a cam rotated to move a link and a locking plate pivoted to one end of the link, and a guide block adapted to guide the locking plate sliding into an insertion hole in the container body of the wafer container by using a straight guide means and a curved guide means of the guide block and then to turn the locking plate about pivot rods at the link, causing the locking plate to withstand against part of the container body and to hold down the door toward the inside of the container body and to lock the door in an airtight status.

Abstract: The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

Abstract: A system and method for unloading a viscous product from a bag constrained by a bin where movable scrapers are utilized to increase the amount of product evacuated from the bag, to prevent damage to the bag containing the product, and to ease removal of the pump after pumping is complete by breaking the vacuum created during pumping.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: A method and apparatus for batch processing of semiconductor wafers in a furnace advantageously allow for wafers to be supported for processing at very high temperatures (e.g., about 1350° C.). Each wafer is supported during processing by a wafer support with full perimeter support, such as a ring or plate. The wafers, on their supports, are removable and vertically spaced apart in a wafer support holder. A transfer station is provided wherein, during loading, a wafer is placed on a wafer support and, during unloading, the wafer is separated from the wafer support. A FOUP (Front Opening Unified Pod) is adapted to accommodate a plurality of wafer supports and to accommodate the transfer station. The wafer support, with a wafer supported on it, is transferred from the transfer station to a wafer support holder for processing.

Abstract: In some preferred embodiments of the media packaging apparatus and method according to the present invention, a plurality of stations are positioned adjacent to a conveyor. A disc case enters a feed path preferably from an empty disc case receptacle, is conveyed to a disc case opening station where a wedge separates the lid from the housing of the case, is then conveyed to a media disc insertion station where a media disc is inserted in the case, and is then conveyed to a case closing station where the case is closed. Other additional stations are possible such as an additional item insertion station or a disc case unloading station. The functions performed at the various stations can alternatively be performed at the same location along the conveyor. In some embodiments, the present invention is equipped with a drive system that can be operated in the absence of power.

Abstract: An apparatus is provided for positioning a plurality of cassettes within an automated printing plate handler. In a plate handler, a plurality of cassettes each contain a supply of printing plates for delivery to an automatic plate-recording device. The apparatus includes a separate support table for supporting each of the plurality of cassettes within the plate handler and an elevator device for moving each of the support tables along a vertical axis of the automated plate handler. The automated plate handler is configured to automatically position a selected cassette in a first position to facilitate removal of the cassette from the handler. The plate handler further includes a platform, which substantially forms an extension of the support table supporting the selected cassette in the first position. The platform provides a second position, at which the selected cassette is to be one of, loaded or unloaded.

Abstract: System for handling components in connection with circuit board assembly in a component mounting machine. The system comprises a number of component tapes provided on component tape reels, and a number of tape guides arranged for receiving component tapes of a given component tape width and for bringing the component tape in position for feeding of the component tape and for picking components from the component tape in the component mounting machine. The tape guides have a similar geometrical outline and basic configuration, and each tape guide comprises a component exposure device for exposing a component at a picking position by removing the portion of the cover tape covering the component. The tape guides are divided into sub-sets of tape guides, wherein the tape guides of each individual sub-set have component exposure devices of the same design, which design is dependent on the configurations of the component tapes intended for that sub-set of tape guides.

Abstract: A disc cassette delidder and feeder system that includes a frame supporting; a feed-in conveyor with a movable conveyor portion, a delidder assembly attached to a lid elevator, a caddy grip and rotate assembly secured to a caddy elevator, and a re-lid assembly portion of an out-feed conveyor. The feed-in conveyor advances a disc cassette with a caddy portion confining a disc to the delidder assembly, the delidder assembly removes a lid portion of the disc cassette, the caddy grip and rotate assembly secures and rotationally aligns the caddy portion for removal of the disc, the caddy elevator indexes the caddy portion to finally present the disc for removal from the caddy portion, and the re-lid assembly confines the caddy portion while the delidder assembly rejoins the lid portion to the caddy portion.

Abstract: An apparatus is provided for positioning a plurality of cassettes within an automated printing plate handler. In a plate handler, a plurality of cassettes each contain a supply of printing plates for delivery to an automatic plate-recording device. The apparatus includes a separate support table for supporting each of the plurality of cassettes within the plate handler and an elevator device for moving each of the support tables along a vertical axis of the automated plate handler. The automated plate handler is configured to automatically position a selected cassette in a first position to facilitate removal of the cassette from the handler. The plate handler further includes a platform, which substantially forms an extension of the support table supporting the selected cassette in the first position. The platform provides a second position, at which the selected cassette is to be one of, loaded or unloaded.

Abstract: A slide pack container housing a plurality of piled slide packs has a cut-off portion. The cut-off portion has a width slightly larger than the width of a slide contained in each slide pack. As a sucker of a package take-out apparatus draws one of the slide packs from the slide pack container through the cut-off portion, a sealed portion of the slide pack interfering with the edge of the cut-off portion is folded inward so that the slide pack is successfully taken out. The sucker transfers the slide pack to a separated unwrapping apparatus. The sucker releases the slide pack when the front edge of the slide pack is caught between paired rollers of the unwrapping apparatus. After a cutter makes a slit on the slide pack, the paired rollers transfer only a wrapping sheet to separate the wrapping sheet from the slide wrapped therewith.

Abstract: Robotic apparatus for transferring and distributing small particles, such as seeds, contained in covered or uncovered containers, such as capped jars, are disclosed. An exemplary apparatus includes a vacuum-activated probe configured to pick up a selected number of seeds from a donor container and to deposit the seeds in a selected recipient container. The seeds being transferred may be weighed during the transfer process by depositing the seeds in a crucible of a microgram balance or analogous device. After weighing, the seeds are picked up using a second probe that transfers the seeds to a recipient container. Also disclosed are automated methods for transferring and weighing particles, such as seeds.

Abstract: An elastically expandable positioning device for positioning a cover of a unified pod is disclosed, which has a central fastener having one end protruded on the interface plate and an axial input hole opened at another end, and at least one radial distributing hole equally opened at its circular surface; a ring-shaped inflatable body made from an expandable elastic material; a supporting ring encircled around the central bolt and positioned above the distributing hole, for supporting the inflatable body, the supporting ring having at least one radial inflating hole equally positioned corresponding to the radial distributing hole of the central bolt; and an input fluid source connected to the axial input hole of the central bolt, for providing an input fluid.

Abstract: A method and means for exposing components (13) positioned in sequence in a carrier tape (7) and covered by a cover tape (8), in order to release and lift the cover tape from the carrier tape and expose the components in a picking position (12) for subsequent picking by a pick-up head in a component mounting machine. Comprising steps and means for continuously directing and discharging any released debris such that accumulation of debris is prevented.

Abstract: A system and method for moving a canister of spent nuclear fuel from a first location, which may be within a nuclear power generation facility to a second location such as a storage cask that is used for short-term or long-term storage of spent nuclear fuel includes a first lifting mechanism for engaging a transfer cask and a second lifting mechanism for engaging and lifting the canister of spent nuclear fuel. Preferably, the method is practiced by first positioning a canister of spent nuclear fuel within the transfer cask and then engaging the transfer cask with the first lifting mechanism. The canister is engaged with the second lifting mechanism. The transfer cask having the canister positioned within is moved to the vicinity of a storage cask, and the canister is lowered from the transfer cask into the storage cask by the second lifting mechanism without disengagement of the first lifting mechanism from the transfer cask.

Abstract: A robot wherein the condition for a work and a sequence of movements to be performed may be set in connection with positions. In addition to setting a position at which a work is performed, the robot sets the conditions for performance of a work at a set position and of a sequence of movements between set positions. The set conditions may be memorized in connection with the set positions so as to be performed as are read out.

Abstract: The present invention is a method and apparatus for the automatic loading and advancement of component feeder tape in a component feeder for use with a pick-and-place system. The feeder employs sensing technology to determine when a component tape leader is inserted into a tape guide, and subsequently auto-loads the feeder with the tape, including initiating the peeling of cover tape. Subsequently, the feeder operates to sense the presence of parts or components in the component tape pockets and to advance the component tape to a position where the first component is presented at the pick location. The feeder is also capable of detecting repeatable features in the component tape in order to automatically determine the component tape pitch.

Abstract: The present invention is a method and apparatus for supplying components, via a carrier tape having a cover tape thereon and a plurality of pockets retaining components therein, for retrieval by an automated insertion machine, including a carrier tape reel support, a tape feed path with a peel edge, about which to peel the cover tape from the carrier tape prior to the component being presented for retrieval at the pick location, and a cover tape path preferably having a V-bar and O-ring drive system for directing the travel of the cover tape in a rearward and downward direction to facilitate disposal beneath the tape feeder. Such a system provides a cover tape disposal path that enables the use of spliceable carrier tapes on such feeders.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: A clean box is composed of a box body having an opening in one surface thereof and a lid member for closing the opening. An annular groove is formed so as to surround the opening on one of the box body or the lid member for defining a suction space sealed between the lid member and the box body under the condition that the lid member is mounted on the box body. Furthermore, intake/exhaust ports are provided for vacuum exhaust/release from the outside.

Abstract: A slide pack container housing a plurality of piled slide packs has a cut-off portion. The cut-off portion has a width slightly larger than the width of a slide contained in each slide pack. As a sucker of a package take-out apparatus draws one of the slide packs from the slide pack container through the cut-off portion, a sealed portion of the slide pack interfering with the edge of the cut-off portion is folded inward so that the slide pack is successfully taken out. The sucker transfers the slide pack to a separated unwrapping apparatus. The sucker releases the slide pack when the front edge of the slide pack is caught between paired rollers of the unwrapping apparatus. After a cutter makes a slit on the slide pack, the paired rollers transfer only a wrapping sheet to separate the wrapping sheet from the slide wrapped therewith.

Abstract: A system and method for unloading a viscous product from a bag constrained by a bin where movable scrapers are utilized to increase the amount of product evacuated from the bag, to prevent damage to the bag containing the product, and to ease removal of the pump after pumping is complete by breaking the vacuum created during pumping.

Abstract: A system for unloading a container of bulk particulate material, having attachment means for lifting the container and a spout for discharging material therefrom, generally consisting of an unloading apparatus including a material hopper, a mobile apparatus and a carrier member including an arrangement for detachably connecting a container thereto, an arrangement for detachably mounting on a mobile apparatus and an arrangement for detachably mounting on the unloading apparatus.

Abstract: Bank notes placed in a tray (13) are slid into an enclosure (10), whereupon a lever (15) is operated to drive down a plunger (17) which opens flaps (21,22) in the bottom of the tray to displace the notes into a carrier (12) in a lower part of the enclosure. The carrier (12) has snap-fitted into its top a frame (107) which also has flaps (21A,22A) which deflect downward as the money enters a bag (108) provided by elasticated material which spans the frame (107). Thereafter a cover plate (111) seals the frame (107) which can then be removed from the carrier (12) to be transported e.g. to a bank.

Abstract: A SMIF interface is disclosed for buffering one or more cassettes within a minienvironment affixed to a process tool. The interface includes a load port formed of a port door and a port plate circumjacent thereabout, and a minienvironment mounted to port plate. The SMIF interface and/or process tool includes at least one shelf for storing a cassette after the load port separates the cassette from its transport pod. In operation, while a first cassette is located within the process tool, a second pod is seated on the load port, the cassette is separated from the pod and the cassette is stored on a storage shelf. When processing on the first cassette is completed, the second cassette is loaded into the processing tool. The first cassette is returned to the pod and removed from the load port. A cassette from a new pod is then seated on the load port, separated from its pod and stored on the storage shelf. This process continues until processing on each scheduled wafer lot is completed.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from containers under clean room conditions. These transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and transporting container are opened simultaneously in that the container cover and the closure are moved down jointy into the semiconductor processing installation.

Abstract: The present invention provides an automated safety cap removal mechanism for an automated medication preparation system. The mechanism includes an automated gripping device for securely holding and transporting a vial containing the medication to and from a first station and a cap removal device for removing a safety cap of the vial in a just-in-time for use manner. The cap removal device being located at the first station. By providing a just-in-time for use safety cap removal mechanism, the labor intensive task of removing safety caps can be incorporated into an automated medication preparation system.

Abstract: Provided herein is a process chamber lid service system comprising a process chamber lid service cart and a process chamber lid service frame. The lid service frame holds the process chamber lid. The cart and the lid service frame are aligned with guide pin and alignment capture, meanwhile, the cart is aligned at the process chamber with guide frame, which is installed at the base frame of the process chamber. This lid service system may be used for opening/closing a process chamber as well as wet-cleaning the process chamber for semiconductor manufacturing.

Abstract: A novel feeder construction, and method of operation, that is easily interfaced to a variety of conventional pick-and-place machines and can readily and reliably feed components suspended from a carrier for pickup at a pickup location by the pick-and-place machine. In a preferred embodiment, the carrier with suspended components is fed in a line spaced laterally from the pickup location. The lead component when separated from the strip must then be moved laterally to the pickup location. By laterally spacing the carrier strip of components from the pickup location it is ensured that the feeder parts involved in separating the component from the carrier do not obstruct movement of the vacuum nozzle of the pick-and-place machine during the pickup operation and advancement of the carrier to present the next component.

Abstract: The present invention provides an automated safety cap removal mechanism for an automated medication preparation system. The mechanism includes an automated gripping device for securely holding and transporting a vial containing the medication to and from a first station and a cap removal device for removing a safety cap of the vial in a just-in-time for use manner. The cap removal device being located at the first station. By providing a just-in-time for use safety cap removal mechanism, the labor intensive task of removing safety caps can be incorporated into an automated medication preparation system.

Abstract: A series of successive filled and closed containers for filter rod sections or other products of the tobacco processing industry is advanced stepwise along a horizontal path. When the foremost container of the series reaches a given portion of the path, it is moved forwardly and away from the next-following container into the cage of an elevator. The foremost container is opened while in or at the cage, and the cage is thereupon lifted to a level at which the opened container therein can be tilted to dump its contents into a chute, a magazine of the like. The thus emptied container is thereupon tilted back to its original orientation and is transported away to a dump, to a recycling station or to a refilling station. All of the above-enumerated undertakings are carried out automatically. The next-following container, i.e., the foremost container of the remainder of the series, is thereupon manipulated in the same way as the aforementioned foremost container, and so forth.

Abstract: A pellet picking apparatus for separating a pellet adhered on an adhesive sheet from the sheet and picking the pellet thus separated is provided, which prevents the pellet from being damaged during the pellet picking process without lowering the productivity. This apparatus comprises (a) a stage having a surface with which a lower face of the adhesive sheet is contacted; the pellet being adhered on an upper face of the sheet; the stage having a suction hole that pulls down the sheet; the suction hole having a suction end to be contacted with the sheet on the surface of the stage; the stage being movable in a horizontal plane with respect to a specific reference position; and (b) a collet for holding the pellet by a suction force; the collet having a suction end to be contacted with the pellet; the collet being capable of holding the pellet by the suction force at the suction end.

Abstract: A SMIF load port assembly is disclosed including a port door position compensation assembly capable of dynamically adjusting a relative spacing between a front surface of a port door and a front surface of a pod door loaded onto the load port assembly so as to compensate for any improper positioning of the front surface of the pod. The position compensation assembly includes a plunger translationally mounted in the port door, and a sensor for detecting a position of the plunger. As a pod is loaded onto the load port assembly is advanced toward the port door, the front surface of the pod door contacts the plunger at which point the position compensation assembly in combination with an overall controller can identify the exact position of the pod door. From this identification, the position of the port and/or pod doors may be adjusted to compensate for any improper positioning of the front surface of the pod door on the load port assembly.

Abstract: A method for transporting a substrate between a carrier, which holds the substrate, and a semiconductor manufacturing unit, which receives the substrate. The method includes steps of applying the carrier, which holds the substrate, to a chamber, which houses the semiconductor manufacturing unit, in which chamber the environment of the semiconductor manufacturing unit is controlled, rotatably removing, by an opener, a door of the carrier and a door of the chamber, as a unit, from the carrier and the chamber, and transferring the substrate from the carrier and to the carrier, when the door of the carrier and the door of the chamber have been rotatably removed as a unit by the opener in the removing step. Also disclosed are semiconductor manufacturing apparatus utilizing such a method.

Abstract: A component feeding apparatus for pitch-feeding taping components (1) to a component feed position (30), peeling a cover tape (1b) short of the component feed position (30) and taking out and feeding a component (5) from an accommodation portion (1c) at the component feed position (30), wherein the component is supplied stably in an appropriate posture to the component feed position (30). A slit (36) is formed in a shutter (35) capable of moving between a position at which the upper surface of the taping component (1) is covered and a position at which the component feed position is opened so that a cover tape (1b) peeled from the taping component (1) can be passed through the slit (36) and can be pulled up, and the peeling step of the cover tape (1b) and the pitch-feeding step of the taping component (1) can be separated from each other to prevent the component (5) from greatly moving and assuming an irregular posture inside the accommodation portion (1c).

Abstract: An integrated wafer transport and transfer device is disclosed, which includes a vehicle with an integrated docking platform for holding a wafer carrier such as a FOUP (front opening unified pod). The docking platform is positioned at the correct height for sealing the FOUP to the load lock of a process tool. Vertical and/or horizontal movement is required in some cases. Methods for delivering wafers to process tools are also described. In a preferred embodiment, wafers are carried inside a FOUP on a cart, such as an automatically guided vehicle or a personally guided vehicle. The cart is docked at a process tool and the FOUP is sealed to the load lock of the tool without removing the FOUP from the cart. After processing on one tool, the cart along with the FOUP can be moved to the next process tool for further processing. The FOUP can stay on the same cart until all processing is completed. This is especially useful for moving priority lots through the fabrication facility quickly.

Abstract: A chip peeling apparatus has a plurality of protrusions which include first protrusions and second protrusions lower than the first protrusions. A vacuum pump communicates through holes with grooves defined between adjacent ones of the protrusions. A UV sheet is attached to chips, and the chips are supported in the vicinity of their corners by the tops of the first protrusions. When the vacuum pump is actuated, the chips and streets disposed between the chips are lowered, and the chips are curved and supported in abutment against the tops of the second protrusions. Each of the chips is gradually peeled off the UV sheet under a force tending to recover the original shape of the curved sheet. The chip peeling apparatus is effective in preventing the chips from being damaged and positionally deviated when the chips are attracted and carried.

Abstract: An unwrapping apparatus unwraps a slide pack wrapped with a wrapping sheet to obtain a slide contained therein. As paired rollers forward the slide pack, a squeezing member squeezes the slide backward within an unsealed space in the slide pack to form a wide cut allowance at the front edge of the slide pack. After the slide reaches the rear end of the unsealed space, nip pressure applied to the slide pack by the paired rollers is reduced to further forward the slide pack to a predetermined position. At the predetermined position, a cutter partially cuts the cut allowance to form a slit thereon. Then, the slide pack is transferred back by the paired rollers under a raised nip pressure which is sufficient to squeeze the slide out from the slit. Accordingly, the slide will be gradually separated from the wrapping sheet.

Abstract: An adapter device is placed on a movable plate of a base of an interface device to position a carrier pod at a preset height enabling a standard interfacing system with equipment machines to be used. A side wall of the adapter device comprises a guiding aperture enabling the carrier pod to pass to bring the first door and its lock into alignment with a front support plane of the side wall. A controller is provided to couple the first door with a second door and to unlock the first door when the side wall accosts against a front face of the interface device.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: A cassette sensing mechanism and a method for detecting the unevenness of a surface by detecting the difference between two paths on the surface. The mechanism contains two pawls connected to a connector at one end. The second end of one pawl contacts a portion of one path on the surface, and the second end of the other pawl contacts a portion of the other path on the surface. One path is smooth, and the other path contains grooves. A sensor on one pawl senses the relative position of the other pawl. The unevenness of the surface can be detected by monitoring the relative positions of the two pawls as the two pawls travel along the two paths. The sensing mechanism may be used for monitoring the position on a cassette in a sterilization system.

Abstract: An apparatus for presenting components stored in stackable trays, and removing empty trays having a base member having an input and an output portion; a discharge area; a shuttle member which removes empty storage trays and places them in the discharge area.

Abstract: A pick-up apparatus for picking up semiconductor chips comprising an integrated or a separately rotatable composite cam formed by a plurality of cylindrical cams, and a plurality of cylindrical pin holders having a plurality of push-up pins, and at least part of the pin holder is in contact with the composite cam. The rotation of the composite cam selects one of the pin holders suited for pushing up a desired semiconductor chip, and the counter rotation selects another pin holder suited for another semiconductor chip having a different size. In this manner, a plurality of semiconductor chips having different sizes can be properly picked up without replacing the pin holder.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: The present invention relates to a FOUP loading apparatus capable of implementing a stable horizontal and locking state when a FOUP is loaded and transferred by implementing a stable locking state of a locker on a stage of a FOUP opener and preventing ant interference when the FOUP is positioned. The FOUP loading apparatus for a FOUP opener includes a stage moved on a support base frame, a stage driving unit for forwardly and backwardly moving the stage along a set way, a locker locked on the stage for engaging the FOUP, and a locker driving unit for driving the locker. In the FOUP loading apparatus, a stable locking operation is implemented on a stage, and a stable positioning operation of the FOUP is obtained, so that it is possible to implement a stable FOUP positioning and loading operation from the positioning process to the transferring process.

Abstract: Disclosed is a tape feeder for use with electronic assembly machines. The feeder simultaneously presents multiple electronic components in a pick up zone for access by a pick up head having a plurality of pick up spindles. The effective feed rate for the electronic components is increased and waiting time for the pick up head is reduced.

Abstract: A self-teaching robot arm positioning method that compensates for support structure component alignment offset entails the use of a component emulating fixture preferably having mounting features that are matable to support structure mounting elements. Robot arm mechanism motor angular position data measured relative to component emulating fixture features are substituted into stored mathematical expressions representing robot arm vector motion to provide robot arm position output information. This information indicates whether the actual relative alignment between the robot arm mechanism and a semiconductor wafer carrier is offset from a nominal relative alignment. The robot arm mechanism position output information can be used to effect either manual or automatic correction of an offset from the nominal relative alignment.