Abstract: A substrate processing apparatus having a supply of substrates, a substrate transport module, and a substrate processing module. The transport module has a movable arm assembly and two substrate holders mounted to the movable arm assembly. The substrate holders each have two separate holding areas for simultaneously holding two substrates. The movable arm assembly has two pairs of driven arms. Each pair of driven arms is connected to a separate one of the holders for extending and retracting the holders along a radial path relative to a center of the movable arm assembly.

Abstract: Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector.

Abstract: The present invention generally provides a robot that can transfer workpieces, such as silicon wafers, at increased speeds and accelerations and decelerations. More particularly, the present invention provides a robot wrist associated with the robot arm for mechanically clamping a workpiece to a workpiece handling member attached to the arm. The wafer clamp selectively applies sufficient force to hold the workpiece and prevent slippage and damage to the workpiece during rapid rotation and linear movement of the handling member. In a particular embodiment, a clamp for securing silicon wafers uses a flexure assembly to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that the wafers are normally clamped near full extension of the workpiece handling member to deliver or pick up a wafer.

Abstract: An upper arm 4 and a lower arm 6 of a parallel link system that perform extension and retraction action in the same direction without mutual interference are arranged within a vacuum enclosure 1. Three magnetic couplings are arranged coaxially at three levels, through which extension/retraction action and swivel action of upper and lower arms are effected. Using a cam box having three output shafts driven by a single input shaft to which an arm drive motor is connected, extension/retraction drive and Z axis drive of upper and lower arms are performed, while swiveling action of upper and lower arms is driven by a swivel motor.

Abstract: The apparatus comprising a partition, a plurality of inner magnetic rings, and a plurality of outer magnetic rings is disclosed. The outer magnetic rings are magnetically coupled to the inner magnetic rings via the partition. The inner magnetic rings comprises a plurality of magnets disposed around a first yoke member. The outer magnetic rings comprise a plurality of magnets disposed around a second yoke member. One or both of the first and second yoke members can be disassembled.

Abstract: A wafer handling robot system (10) operates in a wafer chamber (40) and comprises two independent robot blades, an upper blade (18) surmounting a lower blade (26). A pair of wafers (28, 32) are supported and positioned at the outer ends (78) of the upper and lower blades (18, 26). The upper robot blade (18) keeps an upper wafer (28) at a level just above the level at which the lower robot blade (26) keeps a lower wafer (32). Because the wafers are virtually at the same level, the same wafer lift mechanism can be used in the wafer chamber to lift and remove or replace the wafers on the two blades. By offsetting the height of the wafers by minimal amounts, the throughput of the system can be increased by up to a factor of two over a single robot blade system, particularly if the robot is the limiting factor on throughput. This throughput enhancement represents a substantial gain with a relatively simple and inexpensive addition to the equipment.

Abstract: The apparatus comprising a partition, a plurality of inner magnetic rings, and a plurality of outer magnetic rings is disclosed. The outer magnetic rings are magnetically coupled to the inner magnetic rings via the partition. The inner magnetic rings comprises a plurality of magnets disposed around a first yoke member. The outer magnetic rings comprise a plurality of magnets disposed around a second yoke member. One or both of the first and second yoke members can be disassembled.

Abstract: A substrate transport apparatus having a movable arm assembly, two substrate holders and a coaxial drive shaft assembly. In a first embodiment, the movable arm assembly has a general X-shaped section that has its center connected to the coaxial drive shaft assembly. The substrate holders are connected to different pairs of arm sections of the X-shaped section. The coaxial drive shaft assembly moves the arms of the X-shaped section relative to each other to move the two substrate holders in reverse unison motion between extended and retracted positions. A second embodiment the movable arm assembly has two generally wide V-shaped arms at a common axis of rotation. Each arm has two arm sections that are angled relative to each other at the common axis of rotation.

Abstract: A door transport system includes a carriage slidably mounted on an upright column for movement therealong. A swing arm, pivotally mounted to the carriage, carries at its distal end a gripper mechanism. The gripper mechanism is connected to the swing arm so that as the swing arm is moved through an arc to place its distal end over selected ones of door pickup stations for door pickup and transport to a workstation, the orientation of the gripper mechanism remains unchanged.

Abstract: An apparatus for processing wafers generally comprising a transfer chamber, a loadlock chamber mounted on the transfer chamber, one or more processing chambers mounted on the transfer chamber, a wafer handling member disposed in the transfer chamber, and a system controller programmed to move wafers through the transfer chamber following time optimal paths.

Abstract: A material handling device comprising first and second upper arm members having respective proximal and distal end portions and first and second forearm members having respective proximal and distal end portions. The proximal end portions of the first and second forearm members are pivotally coupled to the distal end portions of the respective first and second upper arm members by respective first and first and second pivot assemblies. The distal end portions of the first and second forearm members are attached together. A material handler is carried by the distal end portions of the first and second forearm members. The first and second forearm members have a retracted position in which the first and second forearm members extend linearly along an imaginary line passing through the first and second pivot assemblies with the distal end portions of the first and second forearm members being disposed approximately midway between the first and second pivot assemblies.

Abstract: A system for providing the reliable and numerically efficient generation of time-optimum trajectories with easy-to-track or continuous acceleration profiles for simple and blended moves of single- and multi-arm robotic manipulators, such as an extension and retraction move along a straight line or a rotary move following a circular arc, with velocity, acceleration, jerk, and jerk rate constraints. A time-optimum trajectory is the set of the position, velocity, and acceleration profiles which describe the move of a selected end effector along a given path in the shortest time possible without violating given constraints, with a special case being an optimum abort trajectory, which brings the moving arm into complete rest in the shortest time. The invention involves firstly identifying the set of fundamental trajectory shapes which cover all possible combinations of constraints for a given category of moves, e.g.

Abstract: A system is provided for determining an eccentricity vector &egr; which defines the magnitude and direction of an initial placement displaced from a desired location of a centroid O of a right quadrilateral semiconductor wafer which may be clear or opaque. With an initial point of reference desirably established on its peripheral edge for detection by an edge sensor, the wafer is rotated about a point P and a curve defining the profile of the peripheral edge is obtained. The eccentricity vector is computed from the sensed positions of the corners of the wafer and has a magnitude representative of the spatial dislocation of the centroid O relative to the point P and having an orientation &phgr; representative of the angle subtended by a first line connecting the point P and the centroid O relative to a second line connecting opposite corners of the wafer.

Abstract: A transfer robot includes a first pantograph assembly, a second pantograph assembly, a handling member carried by the second pantograph assembly, a rotation-transmitting mechanism for associating the first pantograph assembly with the second pantograph assembly, a stationary base member, a first shaft and a second shaft which are rotatable about a vertical axis. The transfer robot also includes first and second driving devices associated with the first shaft and the second shaft, respectively. The second pantograph assembly is offset toward the vertical axis relative to the first pantograph assembly.

Abstract: A handling robot prevents a positioning in a motor unit power transmission system from becoming inaccurate and can eliminate occurrence of vibrations due to a twisting deformation and so forth in the system. The handling robot has an arm fastened to an outside of each of a plurality of ring bosses that are arranged coaxially and turnably. Each of such arms is connected via a link to a carrier table so that turning the ring bosses in mutally opposite directions may cause the carrier table to reciprocate in a perpendicular direction to a turning axis; and turning them in a same direction may cause the carrier table to turn. A plurality of motor units corresponding to the ring bosses are arranged coaxially with each other and at positions that are insides of the ring bosses and lower than a position where the carrier table may operate.

Abstract: A manually operated pallet changer system for use with automatic machine tools includes a pallet changer and a compatible machine tool mounted pallet receiver. The pallet changer includes a massive, floor supported base to which a cantilevered first platform is pivotally attached for rotation between a pallet-exchange position and a work-setup position. A second platform rests atop the first platform and supports a pair of work pallet guides. The two platforms are rotatably attached near their centers so that the pallet guides can be interchanged by rotating the upper platform about its center by 180°. The configuration permits the platforms to be rotated as a unit away from a machine tool to the work-setup position. Work pallets are assembled and then the platforms are rotated together into the pallet-exchange position in which one of the pallet guides is aligned for transferring a work pallet to the machine tool mounted pallet receiver.