And Moving Load Support Radially With Respect To Pivot Patents (Class 414/744.6)
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Patent number: 11651979Abstract: An apparatus for transferring a substrate is provided. A unit for transferring a substrate, includes a support structure, a first hand to place the substrate, a second hand stacked with the first hand and placing the substrate, a first guide rail guiding movement of a first support rod to support the first hand in the support structure, a second guide rail guiding movement of a second support rod in the support structure to support the second hand, and a pressure reducing member reducing pressure of an exhaust fluid passage provided in the support structure. The exhaust fluid passage includes a first fluid passage communicating with the first guide rail, a second fluid passage communicating with the second guide rail, and a third fluid passage formed by combining the first fluid passage with the second fluid passage. The pressure reducing member reduces pressure of the third fluid passage.Type: GrantFiled: July 22, 2020Date of Patent: May 16, 2023Assignee: SEMES CO., LTD.Inventors: Tae Kyung Kong, Jin Sung Sun, Kiwon Han
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Patent number: 11364620Abstract: A rail-mounted intelligent inspection robot includes a robot body and a guide rail, the robot body being hung on the guide rail and moving along the guide rail. One side of the guide rail facing the robot body is affixed with a plurality of barcodes, and the translation mechanism is provided with a barcode reader. A control module and a translation motor are disposed within the control platform. The lifting mechanism is connected to the control platform and the detection platform, and an intelligent holder is disposed below the detection platform. The rail-mounted inspection robot of the present invention may perform continuous inspection operations, and may meet the 7*24 hours of uninterrupted work through the power supply of the sliding contact wire. The recognized dial data is more accurate, and the read information may be transmitted to the background and processed in time.Type: GrantFiled: May 14, 2018Date of Patent: June 21, 2022Assignee: HANGZHOU SHENHAO TECHNOLOGY CO., LTD.Inventors: Rushen Chen, Yongyue Li, Shaohua Tian, Fuliang Luo, Wangfeng Chen
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Patent number: 11331788Abstract: The present disclosure provides a smart grabbing device including: a controller, a container configured to accommodate articles, a grabber configured to grab the articles, and a movable mover. The mover is at a bottom of the container; the grabber is on the container; and both of the grabber and the mover are electrically coupled with the controller. The controller is configured to, control the mover to drive the smart grabbing device to move to a target position, and control the grabber to grab a target article and place the target article in the container.Type: GrantFiled: March 19, 2019Date of Patent: May 17, 2022Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventor: Zhanquan Yu
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Patent number: 11268913Abstract: A method for inspecting a wafer includes: transferring the wafer from a transfer chamber to an annealing station by a robot arm; and monitoring at least one portion of an edge bevel removal area of the wafer over the robot arm when the wafer is transferred from the transfer chamber to the annealing station. The at least one portion of the edge bevel removal area includes a first portion and a second portion different from the first portion. When the wafer is passing through a predetermined location between the transfer chamber and the annealing station, a first charge-coupled device sensor located over the first portion of the edge bevel removal area is used to capture an image of the first portion, and a second charge-coupled device sensor located over the second portion of the edge bevel removal area is used to capture an image of the second portion.Type: GrantFiled: May 6, 2020Date of Patent: March 8, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chao-Tung Wu, Kuo-Chung Yu, Chung-Hao Hu, Sheng-Ping Weng
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Patent number: 11111085Abstract: The invention relates to a manipulator (10) for pivoting an object of manipulation, the manipulator (10) having a frame comprising a pivot base which can be pivoted in a horizontal plane about a vertical pivot axis (11) relative to the frame by means of a drive (26), the pivot base having a boom (20) comprising a load carrier (15) which is disposed at a free end of the boom (20) and serves to be connected to the object of manipulation, the load carrier (15) having a pivot device for pivoting the object of manipulation in the horizontal plane, wherein, in order to produce a pivoting four-bar linkage formed in the horizontal plane and comprising the boom (20), a control bar (24) extending from the frame to the pivot device is provided, one end of the control bar (24) being articulated to the pivot device of the load carrier (15) and the other end being articulated to the frame via a control gear mechanism in such a manner that in the event of a base pivoting movement of the pivot base, a load carrier pivoting mType: GrantFiled: December 6, 2016Date of Patent: September 7, 2021Assignee: TMT TAPPING-MEASURING-TECHNOLOGY SARLInventor: Philippe Malivoir
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Patent number: 10675751Abstract: A multi-motion-platform parallel robot, comprising an original parallel mechanism; and a plurality of N1 derivative parallel mechanisms, wherein: each of the parallel mechanisms possesses N2 degrees-of-freedom (DOFs) and shares an identical set of DOF properties; N1 is an integer greater than 1; N2 is one of 2, 3, 4, 5 and 6; the original parallel mechanism includes an original base platform, an original movable platform and a plurality of N2 original chains; the plurality of original chains connect the original base platform and the original movable platform; each of the original chains includes a plurality of generalized kinematic pairs interconnected in series; the derivative parallel mechanism includes a derivative base platform, a derivative movable platform and a plurality of (N2×N1) derivative chains; and the plurality of derivative chains connect the derivative base platform and the derivative movable platform.Type: GrantFiled: May 7, 2019Date of Patent: June 9, 2020Assignees: BEIJING FINE WAY TECHNOLOGY CO., LTD.Inventor: Fangyuan Han
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Patent number: 9972523Abstract: A robot includes robot arm including lower arm, upper arm and hand attached to tip end portion of upper arm such that the hand is rotatable around rotational axis thereof; lower arm drive unit which drive the lower arm to move the hand, upper arm drive unit which drives the upper arm to move the hand; hand drive unit which rotates the hand; hand angular position detecting section which detects angular position of the hand around the rotational axis; and control unit which controls upper arm drive unit, lower arm drive unit, and hand drive unit, wherein the hand includes a blade having a first contact/slide surface and second contact/slide surface which extend in a first direction, contact a teaching target and slide thereon, and first contact/slide surface and second contact/slide surface include a first characterizing portion and a second characterizing portion having bent points in the first direction, respectively.Type: GrantFiled: September 30, 2014Date of Patent: May 15, 2018Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHAInventor: Yasuhiko Hashimoto
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Patent number: 9592924Abstract: An aseptic filling machine of envelope-type bags provided with a filling mouth closed by a removable cap, comprising an empty bag supply device, a discharge device configured to discharge full bags, a carousel device on which at least two filling stations are located; each filling station comprising a sterile chamber; a raising device configured to raise the mouth of the empty bag internally of the sterile chamber; an overpressure device configured to place the chamber in slight overpressure; a removal device configured to remove the cap and positioning it by a side of the mouth; and a dispenser-batcher device that is vertically slidable and configured to engage with the mouth.Type: GrantFiled: December 19, 2012Date of Patent: March 14, 2017Assignee: ALFA LAVAL CORPORATE ABInventor: Pierluigi Decio
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Patent number: 9079316Abstract: A length-adjustable mechanical arm includes: a base; a first arm unit having one end formed with a first pivot portion pivoted to the base, and another end formed with a second pivot portion, a second arm unit pivoted to the first arm unit includes a pivot member, an inner sleeve, an outer sleeve and an accessory mounting seat. The length of the second arm unit of the mechanical arm is adjustable by adjusting the inner and outer sleeves, and the second arm unit is switchable between an extended position and a retracted position. Therefore, the mechanical arm can be used for two distance operation.Type: GrantFiled: January 4, 2014Date of Patent: July 14, 2015Assignee: HIWIN TECHNOLOGIES CORP.Inventors: Yueh-Ling Chiu, Wu-Teng Hsieh
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Publication number: 20150139770Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.Type: ApplicationFiled: November 13, 2014Publication date: May 21, 2015Inventors: Jairo T. MOURA, Ulysses GILCHRIST, Robert T. CAVENEY
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Patent number: 9033645Abstract: Source support arm of a liquid crystal panel transportation device is provided, which includes a primary arm section. The primary arm section includes a plurality of ancillary arm sections that are rotatable to open mounted thereon. A liquid crystal panel transportation device is also disclosed, which includes a support arm having a primary arm section and ancillary arm sections that are mounted to the primary arm section and are rotatable to open.Type: GrantFiled: August 6, 2012Date of Patent: May 19, 2015Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.Inventors: Zenghong Chen, Chunhao Wu, Kunhsien Lin, Minghu Qi, Zhenhua Guo, Yunshao Jiang
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Publication number: 20150071738Abstract: Disclosed herein is a manipulator apparatus. The manipulator apparatus includes a jig unit provided with a manipulator. The jig unit includes a first member provided with the manipulator, a second member configured to move the first member, and a third member configured to move the second member.Type: ApplicationFiled: September 11, 2014Publication date: March 12, 2015Applicant: ALLIED TECHFINDERS CO., LTD.Inventor: Kee Won SUH
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Patent number: 8950998Abstract: A substrate-handling vacuum robot includes a first robotic arm with a single-substrate end effector and a second robotic arm with a batch end effector. The single-substrate end effector permits single-substrate pick-and-place operations while the batch end effector permits batch handling of substrates within a vacuum environment.Type: GrantFiled: April 21, 2008Date of Patent: February 10, 2015Assignee: Brooks Automation, Inc.Inventor: Peter van der Meulen
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Patent number: 8855817Abstract: A method for operating a system including at least two robots for handling parts and a robot control unit arranged for control of said at least two robots. Each of the robots is arranged with a parts handler device including a rigid arm with one end connected to the end element of an arm of the robot by a first swivel arranged for radial movement of the rigid arm in relation to the end element. Each of the robots is also arranged with a gripper connected to the rigid arm by a second swivel arranged for free, passive rotation of the gripper in relation to the rigid arm. The method includes generating instructions for the at least two robots to pick and/or move and/or place a part and sending the instructions to each robot simultaneously.Type: GrantFiled: December 19, 2007Date of Patent: October 7, 2014Assignee: ABB Research Ltd.Inventors: Ramon Casanelles, Francisco Cortés Grau
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Publication number: 20140250678Abstract: A substrate transport apparatus comprises a substrate holder capable of holding a substrate, a link unit which extends/retracts the substrate holder, a driving unit which generates a driving force to operate the link unit, a guide bar provided to one of the substrate holder and the link unit; and a support unit which is provided to the other of the substrate holder and the link unit, and slidably supports the guide bar when the substrate holder moves by the operation of the link unit.Type: ApplicationFiled: May 22, 2014Publication date: September 11, 2014Applicant: CANON ANELVA CORPORATIONInventor: Kazuhito WATANABE
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Publication number: 20140205416Abstract: A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.Type: ApplicationFiled: March 15, 2013Publication date: July 24, 2014Applicant: Persimmon Technologies Corp.Inventors: Martin Hosek, Christopher Hofmeister
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Patent number: 8755935Abstract: A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder included in a substrate carrying mechanism; carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; measuring a second position of the substrate transferred from the substrate rotating unit to the substrate holder; determining the position of the center of rotation of the substrate rotating unit on the basis of the first and the second position; and positioning the substrate holder on the basis of the position of the center of rotation.Type: GrantFiled: February 27, 2012Date of Patent: June 17, 2014Assignee: Tokyo Electron LimitedInventors: Yuichi Douki, Tokutarou Hayashi, Naruaki Iida, Suguru Enokida
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Publication number: 20140161576Abstract: A workpiece transfer device includes a base, a rotating portion rotatably mounted on the base, and a transfer mechanism mounted on the rotating portion. The transfer mechanism includes a rotational housing, at least one bearing table, and a driving device. The bearing table is received in the rotational housing. The bearing table is configured to support a workpiece. The driving device is operable to drive the bearing table to slide in the rotational housing.Type: ApplicationFiled: November 22, 2013Publication date: June 12, 2014Applicant: HON HAI PRECISION INDUSTRY CO., LTD.Inventor: Ming-Lung Guo
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Publication number: 20140140801Abstract: A substrate transfer robot includes an extensible/retractable arm unit, a robot hand and a sensor unit. The extensible/retractable arm unit is configured to extend and retract in a horizontal direction. The robot hand is provided with prongs for holding a substrate. The robot hand includes a base end portion rotatably connected to a tip end portion of the extensible/retractable arm unit. The sensor unit is arranged to be rotated by a rotating force of the robot hand. The sensor unit is configured to, when rotated, intersect a lateral end portion of the substrate held by the prongs when seen in a plan view and to detect a lateral end position of the substrate.Type: ApplicationFiled: October 10, 2013Publication date: May 22, 2014Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Satoshi SUEYOSHI, Makoto TARUNO
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Publication number: 20140126987Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.Type: ApplicationFiled: November 4, 2013Publication date: May 8, 2014Applicant: Brooks Automation Inc.Inventors: Ulysses Gilchrist, Christopher Hofmeister
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Publication number: 20140056678Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.Type: ApplicationFiled: February 15, 2013Publication date: February 27, 2014Applicant: BROOKS AUTOMATION, INC.Inventor: Brooks Automation, Inc.
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Publication number: 20130266405Abstract: A work piece transfer mechanism for use in a chamber has at least one port through which a work piece may be passed along a linear work piece transfer path between a retracted location inside the chamber and an extended location outside the chamber. The chamber has a predetermined internal dimension of given axial extent in the direction of the transfer path, and the transfer mechanism includes a work piece support movable with a linear stroke. The work piece support is driven along the linear stroke by a drive lever pivotally attached to the work piece support by a pivot, and the drive lever is drivable such that the pivot is driven along a linear path to move the work piece support along the linear work piece transfer path. The linear work piece transfer path includes a portion beyond the port of axial extent greater than predetermined internal dimension.Type: ApplicationFiled: December 19, 2011Publication date: October 10, 2013Applicant: UHV DESIGN LIMITEDInventor: Peter Coxon
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Patent number: 8528438Abstract: The invention provides a robotic arm for transporting a substrate in an ultrahigh vacuum including a carrier module and a drive module. The drive module includes a magnetic coupling, a first transmission module, a second transmission module, and a third transmission module. The magnetic coupling includes an inner shaft and an outer shaft. The first transmission module drives the first active unit of the magnetic coupling to turn a first passive unit of the inner shaft by magnetic force. The second transmission module drives the second active unit of the magnetic coupling to turn a second passive unit of the outer shaft by magnetic force. The third transmission module drives the magnetic coupling and the carrier module to perform vertical movement. The carrier module will achieve rotational motion or extending motion when the inner shaft and the outer shaft are driven by the first transmission module and the second transmission module of the drive module.Type: GrantFiled: November 25, 2009Date of Patent: September 10, 2013Assignee: Chung-Shan Institute of Science and Technology, Armaments Bureau, Ministry of National DefenseInventors: Hsien-Chung Chen, Kun-Feng Huang
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Publication number: 20130216335Abstract: A transfer device can control a posture of a holding table accurately and prevent the holding table from wobbling even when the holding table is moved at a high speed. A first posture holding link 56 and a second posture holding link 57 are provided at the transfer device. One end of the first posture holding link 56 and one end of the second posture holding link 57 are rotatably connected to a connecting shaft 53. Rails 51 and 52 are fastened to a base plate 27 of the holding table 21. Rollers 54 and 55 are connected to the connecting shaft 53 to be rotated about an axis line. The rollers 54 and 55 are in contact with roller driving portions 51a and 52a. When the holding table 21 is moved, the rollers 54 and 55 are rotated on the roller driving portions 51a and 52a.Type: ApplicationFiled: September 14, 2011Publication date: August 22, 2013Applicants: SANKYO SEISAKUSHO CORPORATION, TOKYO ELECTRON LIMITEDInventors: Tsutomu Hiroki, Toshinao Kato
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Publication number: 20130202398Abstract: A substrate transport apparatus including a first substrate holder and a second substrate holder capable of respectively holding substrates includes a first drive arm which has first and second end portions, and is rotatable with rotation of a first drive shaft, a second drive arm which has a third end portion spaced apart from the first end portion by a first distance, and a fourth end portion spaced apart from the second end portion by a second distance, and is rotatable with rotation of a second drive shaft coaxial with the first drive shaft, two first driven arms coupled to the first substrate holder, and two second driven arms coupled to the second substrate holder.Type: ApplicationFiled: January 29, 2013Publication date: August 8, 2013Applicant: CANON ANELVA CORPOREATIONInventor: CANON ANELVA CORPOREATION
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Publication number: 20130097975Abstract: A packaging system and associated method for use with a pharmaceutical dispenser provides a turnkey solution for packaging pharmaceutical products such as solid medications and nutritional supplements to be taken orally in health care settings, including but not limited to long term care (LTC) and assisted living settings. An overall pharmacy system and methodology begins with bulk medications and supplements introduced into the work flow, individually packaged and assembled into medpass orders per patient and delivered to the LTC facility or other institution for patient consumption. The process begins by converting bulk medications and supplements to packaged unit doses and ultimately individually packaged medpass bags for each patient on a 24-hour schedule. The design of the overall system and its individual components allows for physical control of each unit dose package from start to finish without any unit dose package “free fall” in the system.Type: ApplicationFiled: October 24, 2012Publication date: April 25, 2013Applicant: Remedi Technology Holdings, LLCInventor: Remedi Technology Holdings, LLC
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Publication number: 20130062016Abstract: A transfer apparatus transfers an object to be transferred onto a case. The transfer apparatus includes a transfer arm, an arm shaft, a plurality of electromagnets, and a control unit. The transfer arm has a pick unit on a front end thereof and extends and retracts in a horizontal direction. The object to be transferred is held on the pick unit. The arm shaft supports the transfer arm. The plurality of electromagnets apply an force in upward direction to the transfer arm by generating a magnetic field in the case. The control unit controls the plurality of electromagnets in such a manner that when the transfer arm extends and retracts in the horizontal direction, the force in upward direction applied to the transfer arm increases as a length from the arm shaft to the front end of the transfer arm increases.Type: ApplicationFiled: September 12, 2012Publication date: March 14, 2013Applicant: TOKYO ELECTRON LIMITEDInventors: Shinji HIMORI, Takehiro KATO, Etsuji ITO
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Patent number: 8352074Abstract: A path planning apparatus and method of a robot, in which a path, along which the robot accesses an object to grasp the object, is planned. The path planning method includes judging whether or not a robot hand of a robot collides with an obstacle when the robot hand moves along one access path candidate selected from plural access path candidates along which the robot hand accesses an object to grasp the object, calculating an access score of the selected access path candidate when the robot hand does not collide with the obstacle, and determining an access path plan using the access score of the selected access path candidate.Type: GrantFiled: July 21, 2010Date of Patent: January 8, 2013Assignee: Samsung ElectronicsInventors: Guochunxu, Kyung Shik Roh, San Lim, Bok Man Lim, Myung Hee Kim
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Patent number: 8269447Abstract: A drive system is presented for controlling rotation of a sphere. The system facilitates holonomic motion of a drive with respect to a sphere such that a holonomic drive or drives may be maintained at a relative position with respect to a sphere. The motion of a sphere may be controlled by controlling the position of a drive with respect to the sphere. The drive may be controlled by way of a controller. A holonomic drive may be urged against a sphere by way magnetic interaction of the holonomic drive and a second structure. Also, a support structure is facilitated that allows a sphere to pass through a support column without breaks or interruptions in the sphere.Type: GrantFiled: March 17, 2010Date of Patent: September 18, 2012Assignee: Disney Enterprises, Inc.Inventors: Lanny Smoot, Dirk Ruiken
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Patent number: 8202034Abstract: A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end effector rotatably disposed at the distal end of the second arm. Of the four distal ends of the end effector, two distal ends include holding units which can hold substrates in one direction, and the remaining two distal ends include holding units which can hold substrates in the opposite direction.Type: GrantFiled: September 1, 2010Date of Patent: June 19, 2012Assignee: Canon Anelva CorporationInventors: Hiroshi Sone, Ryuji Higashisaka, Kazutoshi Yoshibayashi, Tatsunori Sato, Tatsuhiro Takahashi
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Patent number: 8099192Abstract: A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to the pedestal assembly, a transfer robot having an end effector, and a processing chamber containing the pedestal assembly and light sensor. The method includes the steps of producing light within the processing chamber, moving the end effector over the optical input such that amount of light reaching the light sensor varies in relation to the position of the end effector, and recording the signal gain as the end effector is moved over the optical input. The method also includes the step of establishing from the recorded signal gain a desired position of the end effector relative to the pedestal assembly.Type: GrantFiled: November 6, 2007Date of Patent: January 17, 2012Assignee: Novellus Systems, Inc.Inventors: Damon Genetti, Heinrich Von Bunau, Tarek Radwan, Karen Townsend
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Patent number: 8011874Abstract: A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the rotary base about a vertical rotation axis, a linear moving mechanism supported by the rotary base, and a work hand supported by the linear moving mechanism. The lifting mechanism includes a slide guide mechanism for vertical movement of the lift base, and first and second screw-feeding mechanisms. Each screw-feeding mechanism includes a rotatable vertical screw shaft, and a nut member provided on the lift base and screwed onto the screw shaft. The first and the second screw-feeding mechanisms are spaced from each other, with the rotation axis of the rotary base being located between the first and the second screw-feeding mechanisms.Type: GrantFiled: July 25, 2008Date of Patent: September 6, 2011Assignee: Daihen CorporationInventors: Takafumi Uratani, Daisuke Sado, Hideki Matsuo
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Patent number: 7918639Abstract: An automation apparatus and method includes a first unit rotationally moving objects from one area to another, and a second unit connected to the first unit and holding the objects, moving through or offset from the body of the first unit from a first side of the first unit to the other side the first unit in a direction other than the rotational movement by the first unit. Moreover, the apparatus and method provides moving the objects through a vertical axis of the body of the first unit.Type: GrantFiled: May 14, 2008Date of Patent: April 5, 2011Assignee: Thermo CRS Ltd.Inventors: John Fink, Jonathan David Wittchen, Michael P. Riff, Gary Darnel
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Patent number: 7736118Abstract: A transfer apparatus includes a stationary base, a swivel supported by the stationary base to be rotatable about a vertical axis, a guide member mounted on the swivel, a linear movement mechanism supported by the swivel or the guide member, a hand supported by the linear movement mechanism and moved by the linear movement mechanism for carrying a work along a straight and horizontal travel stroke, a drive source disposed inside the stationary base, and a transmission shaft disposed along the vertical axis to transmit drive power from the drive source to the linear movement mechanism. The swivel includes an upper section and a lower section detachably connected with each other. The upper section has a connecting member supported by the upper section to be rotatable about the vertical axis. The connecting member has a detachable engagement member for engagement with the transmission shaft from the above.Type: GrantFiled: April 16, 2008Date of Patent: June 15, 2010Assignee: DAIHEN CorporationInventors: Takafumi Uratani, Daisuke Sado, Hideki Matsuo
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Publication number: 20100040447Abstract: A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus.Type: ApplicationFiled: September 22, 2009Publication date: February 18, 2010Applicant: ULVAC, Inc.Inventors: Kazuhiro MUSHA, Hirofumi Minami, Kenji Ago, Takashi Asaishi, Toshio Koike
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Patent number: 7648327Abstract: The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.Type: GrantFiled: December 16, 2005Date of Patent: January 19, 2010Assignee: Crossing Automation, Inc.Inventors: Anthony C. Bonora, Richard H. Gould, Roger G. Hine, Michael Krolak, Jerry A. Speasl
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Patent number: 7578649Abstract: A substrate transport apparatus comprising a drive section, an upper arm, a first forearm, and a second forearm. The upper arm is rotatably connected to the drive section at a first end of the upper arm. The upper arm is rotatably connected to the drive section for rotating the upper arm about an axis of rotation of the drive section. The first forearm is pivotably connected to the upper arm for pivoting relative to the upper arm. The first forearm has a first end effector depending therefrom. The second forearm is pivotably connected to the upper arm for pivoting relative to the upper arm. The second forearm has a second end effector depending therefrom.Type: GrantFiled: May 29, 2002Date of Patent: August 25, 2009Assignee: Brooks Automation, Inc.Inventors: Robert T. Caveney, Todd Solomon
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Patent number: 7453160Abstract: The present invention is directed to aligning wafers within semiconductor fabrication tools. More particularly, one or more aspects of the present invention pertain to quickly and efficiently finding an alignment marking, such as an alignment notch, on a wafer to allow the wafer to be appropriately oriented within an alignment tool. Unlike conventional systems, the notch is located without firmly holding and spinning or rotating the wafer. Exposure to considerable backside contaminants is thereby mitigated and the complexity and/or cost associated with aligning the wafer is thereby reduced.Type: GrantFiled: April 23, 2004Date of Patent: November 18, 2008Assignee: Axcelis Technologies, Inc.Inventor: Andrew M. Ray
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Patent number: 7383751Abstract: An articulated robot is provided with first, second and third arms respectively having effective lengths substantially equal to each other and capable of turning respectively about first, second and third pivotal axes. The second and the third arm are interlocked by an interlocking mechanism such that the third arm turns about a third pivotal axis relative to the second arm in one of opposite directions through an angle twice as large as an angle through which the second arm turns about a second pivotal axis relative to the first arm in the other direction. The second arm 25 and the third arm 26 are moved in either of first and second working areas respectively extending on the opposite sides of an imaginary plane including a reference line and the first pivotal axis to move hand units along the reference line. Since the second and the third arm are necessarily only in one of the first and the second working region, the articulated robot is capable of operating in a narrow working area.Type: GrantFiled: July 13, 2004Date of Patent: June 10, 2008Assignee: Kawasaki Jukogyo Kabushiki KaishaInventors: Yasuhiko Hashimoto, Eiichi Yamaki
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Publication number: 20080075572Abstract: The invention relates to a service module for factories producing aluminium by fusion electrolysis. The turret (9) of the inventive service module (7) is provided with a determined tool set, wherein each tool (101, 102, 103) is mounted on a telescopic arm (111, 112, 113) which is fixed to the turret (9) by a hinge support (121, 122, 123) which enables said telescopic arm to be perpendicularly movable with respect to a determined hinge point without rotating around the main axis thereof. Said telescopic arms are interconnected by a mechanical connection device (200) which maintains the relative angular deviation between the perpendicular movements thereof within a given tolerance range. Said invention makes it possible to bring the tools closer without striking each other during the use thereof.Type: ApplicationFiled: June 22, 2005Publication date: March 27, 2008Inventors: Alain Van Acker, Stephane David
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Patent number: 7313462Abstract: An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.Type: GrantFiled: June 3, 2004Date of Patent: December 25, 2007Assignee: Semitool, Inc.Inventors: Daniel J. Woodruff, David P. Mattson, James J. Erickson, Matthew C. Egloff
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Publication number: 20070217896Abstract: A substrate treatment apparatus is provided. The substrate treatment apparatus includes a process room, a load port in which a container receiving wafers is disposed, and a wafer transfer module disposed between the load port and the process room to transfer the wafers between the load port and the process room. The wafer transfer module includes a first barrier, a second barrier extending from a first end of the first barrier or from a portion near the first end of the first barrier at a predetermined inclined angle with respect to the first barrier, and a third barrier extending from a second end of the first barrier or from a portion near the second end of the first barrier at a predetermined inclined angle. The load portion is provided along the first barrier. The process room includes a plurality of chambers arranged along the second and third barriers.Type: ApplicationFiled: February 27, 2007Publication date: September 20, 2007Inventors: Ki-Sang Kim, Kyue-Sang Choi, Byong-Kyu Seo, Soon-Chon Park
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Patent number: 7258237Abstract: A method for weighing and portioning items utilizing a robot device. The robot device includes a grip, e.g., a suction cup, to remove an item from a delivery station to a receiving area for placement into a particular batch. The method involves placing the items at delivery station according their weight and the weight of items already moved to a receiving area, selecting the items for a batch from the combination of items available for movement to the batch, and selective batching of the items in weight-determined and, optionally, type-determined groups.Type: GrantFiled: January 13, 2005Date of Patent: August 21, 2007Assignee: Scanvaegt International A/SInventor: Ulrich Carlin Nielsen
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Patent number: 7233842Abstract: A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector coupled to a robot arm and having a controllable supination angle. A condition in which two locations of the effective center of the specimen measured at 180° displaced supination angles do not lie on the supination axis indicates that the centroid is offset from the actual effective center of the specimen.Type: GrantFiled: May 23, 2005Date of Patent: June 19, 2007Assignee: Brooks Automation, Inc.Inventors: Paul Bacchi, Paul S. Filipski
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Patent number: 7039498Abstract: A robot arm positioning error is corrected by employing a specimen gripping end effector in which a light source and a light receiver form a light transmission pathway that senses proximity to the specimen. A robot arm old position is sensed and recorded. The robot arm retrieves the specimen from the old position and employs old position information to replace the specimen at a new position that is ideally the same as the old position. A robot arm new position is sensed and recorded. A difference between the new and old positions represents a position error. A correct position is obtained by processing the position error and the old position information.Type: GrantFiled: July 23, 2003Date of Patent: May 2, 2006Assignee: Newport CorporationInventors: Paul Bacchi, Paul S. Filipski
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Patent number: 6969227Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.Type: GrantFiled: September 16, 2003Date of Patent: November 29, 2005Assignee: Axcolis Technologies, Inc.Inventors: David William Kinnard, Daniel Richardson
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Patent number: 6960057Abstract: A substrate transport apparatus comprising a drive section and a robot transport arm. The robot transport arm is mounted to the drive section. The robot transport arm has a wrist and an end effector to hold the substrate thereon. The end effector is rotatably mounted to the wrist to rotate about the wrist. The rotation of the end effector about the wrist is slaved to the robot transport arm. The robot transport arm is adapted to transport substrates into and out of two general side-by-side orientated substrate holding areas with the drive section being located in only one location relative to the two holding areas.Type: GrantFiled: September 30, 1998Date of Patent: November 1, 2005Assignee: Brooks Automation, Inc.Inventor: Christopher A. Hofmeister
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Patent number: 6832885Abstract: There is provided an apparatus for handling a structural member. The apparatus includes a beam that extends from a first end to a second end and a shuttle in translational communication with the beam in a direction extending between the first and second ends. A fork actuator is connected to the shuttle and capable of hydraulically raising and lowering a fork. The fork can include a cooling system to maintain a temperature of the fork, even when used in a heated environment.Type: GrantFiled: September 4, 2002Date of Patent: December 21, 2004Assignee: The Boeing CompanyInventors: Daniel G. Sanders, Mark T. Schergen
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Patent number: 6811108Abstract: A recording tape cartridge which can be loaded in a drive device by a robot hand which grips the recording tape cartridge from above and below. A pair of ribs along a loading direction of a recording tape cartridge are formed at an angled surface portion of a lower case. A separation distance between these ribs is substantially the same as a width of a lower hand portion of a robot hand. The robot hand grips the recording tape cartridge such that the lower hand portion of the robot hand is disposed between the two ribs. When the recording tape cartridge is being loaded into the drive device, the ribs abut against lateral direction end surfaces of the lower hand portion. Thus, positioning of the recording tape cartridge in the lateral direction relative to the lower hand portion is achieved through the ribs.Type: GrantFiled: November 14, 2002Date of Patent: November 2, 2004Assignee: Fuji Photo Film Co., Ltd.Inventor: Wataru Iino
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Patent number: 6773382Abstract: An automatic tool-exchanging apparatus is provided which extends/contracts an arm with a rational and simple structure and can realize a high-speed operation essentially obtainable by making the arm's turning radius small. The apparatus comprises: an arm-driving shaft for being driven to rotate; an arm provided on the shaft and capable of being rotated, the arm capable of being moved to extend/contract and comprising a grip arm for attaching/detaching a tool, and an arm support movably supporting the grip arm; a clutch between the arm support and the shaft, the clutch for connecting the arm support and the shaft to make them rotate integrally, and disconnecting the arm support and the shaft to generate a relative rotation therebetween; and a link between the grip arm and the shaft, the link for transmitting the relative rotation of the shaft in respect to the arm support to make the grip arm move.Type: GrantFiled: December 5, 2002Date of Patent: August 10, 2004Assignee: Sankyo Manufacturing Co., Ltd.Inventor: Heizaburo Kato