Abstract: An apparatus includes a suction cup, a fitting, and a filter. The suction cup defines an interior cavity with a first opening and a second opening. The fitting is coupled to the suction cup. The fitting includes a first portion and a second portion. The first portion of the fitting defines a chamber. The second portion of the fitting is positioned within the interior cavity and is coupled to the first portion of the fitting to secure the first portion of the fitting to the suction cup. The filter is positioned within the chamber such that the suction cup and the fitting define a passage from the second opening, through the interior cavity, and through the chamber and the filter.

Abstract: A gripper arm for a gripping device for gripping, holding and guiding in particular bottle-like containers includes a base body, a gripping section as well as at least one actuating roller arranged on the base body and rotatably mounted for interacting with a control cam of the gripping device. The at least one actuating roller is arranged on the base body so as to be replaceable.

Abstract: The disclosure provides an apparatus, system and method for a moveable bearing stage that allows for highly refined alignment and placement, and particularly planar alignment and placement, of component or devices through the use of robotics.

Abstract: A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distal most link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing.

Abstract: A transfer device and a stacker crane can stabilize the posture of a conveyed object on a placement portion in a horizontal direction even when the conveyed object is conveyed at high speed. The transfer device transfers the storage container by advancing and retreating the hand on which the storage container is placed. The transfer device is provided with a gripper that grips the storage container placed on a hand in the X direction that is the horizontal direction.

Abstract: An arm assembly of a robot includes a servo coupled to the chest of the robot, an upper arm driven by the servo, a forearm rotatably coupled to the upper arm, a hand connected to an end of the forearm and rotatable about a first axis extending along a lengthwise direction of the forearm; and a hand transmission mechanism configured to transmit motion from the servo to the hand so as to drive the hand to rotate about the first axis.

Abstract: An arm assembly includes a servo coupled to the chest of the robot, an upper arm driven by the servo, a forearm rotatably coupled to the upper arm, and a forearm transmission member comprising a first end rotatable with respect to the chest and a second end coupled to the forearm. The upper arm, the forearm and the forearm transmission member are arranged in such a way that the forearm rotates when the upper arm rotates with respect to the chest.

Abstract: Substrate transport systems and robot apparatus are provided. The systems are adapted to pick or place a substrate at a destination by independently rotating an upper arm, a forearm, and dual wrist members relative to each other and a base. Methods of operating the robot apparatus are provided, as are numerous other aspects.

Abstract: Source support arm of a liquid crystal panel transportation device is provided, which includes a primary arm section. The primary arm section includes a plurality of ancillary arm sections that are rotatable to open mounted thereon. A liquid crystal panel transportation device is also disclosed, which includes a support arm having a primary arm section and ancillary arm sections that are mounted to the primary arm section and are rotatable to open.

Abstract: An item with fibers may be picked up and placed using a tool head with hooks that engage the fibers. The tool head may comprise at least one hook portion and at least one contact surface adjacent to the hook portion. The hooks that engage the fibers may extend from the hook portion. The tool head may be actuatable between at least a first configuration that permits the hooks to engage the fibers and a second configuration that does not permit the hooks to engage the fibers. An item may be picked up at a starting location with a tool head in the first configuration and placed at a placement location by moving the tool head and then actuating the tool head to the second configuration.

Abstract: According to one embodiment, a gripping device grips a rim of a workpiece by opening and closing gripping plates. The device includes a gripping unit, a hoisting and lowering unit and a motion control unit. The gripping unit includes a first and a second gripping plate. The first gripping plate has a first gripper to contact the rim. The second gripping plate has a second gripper to contact the rim. At least one of the first and second gripping plates is moved and the first and second gripper are spaced from each other. The hoisting and lowering unit is configured to hoist and lower the gripping unit. The motion control unit is configured to control open/close operations and hoisting and lowering operations. The motion control unit mechanically controls first first hoisting and lowering operations, controls second the open/close operations, and controls third second hoisting and lowering operations.

Abstract: A camera is used to take an image of an end surface of a honeycomb structure gripped by a hand. Based on the image, an initial rotation angle of the honeycomb structure around a vertical axis at a reference position where the image has been taken is recognized. An arm turning section is driven to convey the honeycomb structure gripped by the hand from the reference position to above a plugging mask. A rotation angle required to adjust the rotation angle of the honeycomb structure on the plugging mask to a desired final rotation angle is acquired based on the initial rotation angle recognized at the reference position and a rotation angle of the honeycomb structure around the vertical axis associated with the driving of the arm turning section from the reference position to above the plugging mask. The honeycomb structure is rotated based on the required rotation angle.

Abstract: A clamping device comprising: a distal end side stationary blocks which are provided on a side of a distal end of a workpiece retaining base, and in which stationary tilt faces tilting downwardly to a central direction of the workpiece are formed; a proximal end side stationary blocks which are provided on a side of a proximal end of the workpiece retaining base, and in which upward stationary tilt faces tilting downward toward the central direction of the workpiece are formed; and a movable block which is arranged at a position proximal to the proximal end side stationary blocks, and is capable of advancing to or retracting from a side of the distal end side stationary blocks with the workpiece being held between the blocks, and in which a downward movable tilt face tilting upwardly toward the central direction of the workpiece is formed.

Abstract: A robot hand and a robot according to an embodiment include supporting units. The supporting units are arranged on a base and contact the peripheral border of a board to grip the board. At least one of the supporting units rotates while abutting on the peripheral border of the board.

Abstract: An electronic apparatus for replacing materials for a device is mounted on a base. The electronic apparatus comprises an installing mechanism and a controlling mechanism for controlling the operations of the installing mechanism. The controlling mechanism can position materials on the device and can remove the materials from the device.

Abstract: A robot includes an arm member, a rotary actuator that swings the arm member, a hand member provided at an end of the arm member, a joint member that connects the arm member and the hand member to each other such that the arm member and the hand member are rotatable with respect to each other, a linear actuator that supports and linearly moves the rotary actuator, and a controller that operates the rotary actuator and the linear actuator in association with each other to linearly move the hand member in a forward-backward direction.

Abstract: The present invention provides a technology for holding an object to be reliably conveyed for the sake of high speed conveyance not only in a low temperature environment but also in a high temperature environment, and for reducing dust while conveying the object to be conveyed. A conveying device includes a link mechanism, which can expand and contract, has a plurality of arms to which power from a drive source is transmitted, and a mounting section which is connected to an operating tip section of the link mechanism through a drive link section and on which a substrate is mounted. The mounting section has latch sections for making contact with and latching side portions of the substrate.

Abstract: A manipulation system for microscope applications comprises a micromanipulation tool (1) and a protective device (2) protecting the tool, wherein the tool (1) and the protective device (2) are movable relative to one another between a position protecting the tool in a contactless manner and a position releasing the tool for the manipulation.

Abstract: A gripper grasps irregular and deformable work pieces so as to lift and hold packaged, processed, or raw, and manipulate the work pieces for the purpose of material handling, assembly, packaging, and other robotic and automated manipulative functions. A vacuum is induced at multiple points through a flexible gripping hood to provide lifting force to, and facilitate rapid movement of, work pieces. An array of lighting devices and a double ring array of segmented mirrors provide uniform illumination to ensure accurate positioning of the gripping hood with respect to the work piece to be manipulated.

Abstract: A parallel gripper for handling multiwell plates in an automated analysis system, moves individual multiwell plates between a plate storage array unit (i.e., plate hotel) and an imaging station. More particularly, the gripper has two parallel plate-gripping arms that move in equal, but opposite linear directions and are controlled using a stepper motor. Each of the arms has a shelf that provides support for the corresponding side edge of a multiwell plate.

Abstract: A semiconductor material handling system including a frame mounting a wafer cassette and a plurality of load ports thereon, and a wafer moving robot including a robot body which has a lifting member mounted in the frame and vertically moving along a predetermined lifting shaft, an articulated arm which has a driving link mounted in the lifting member and a plurality of driven links whose end part transversely moving along the frame having the load ports, a swing unit which is mounted in the end part of the driven links and rotates along a vertical rotation shaft, and a crossing arm which comprises a base mounted in the swing unit, a plurality of sliding units mounted in the base and reciprocating transversely, and a wafer hand mounted in the sliding units and picking up a wafer from the wafer cassette and storing the wafer back in the wafer cassette.

Abstract: A grappler for use in grasping and manipulating pipe segments for large diameter pipeline tie-ins has a first frame and a second frame movably secured thereto. A pair of grapple arms is pivotally mounted to each frame and is actuated between a open position and a closed position to engage and grasp the pipe segments. An actuator displaces the second frame relative to the first frame in a first degree of movement to displace one pair of grapple arms relative to the other pair of arms, and a support frame provides the grappler with two additional degrees of movement. When mounted to a backhoe or like device, the grappler facilitates safe retrieval of pipe from hazardous trenches, and provides handling and alignment of the pipe segments for easier and safer welding of the pipe joints.

Abstract: An articulated robot includes a first arm which is horizontally angularly movable, a sectorial support plate coaxial with a center about which the first arm is angularly movable, an auxiliary arm parallel to the first arm, and a joint member connected to respective distal ends of the first arm and the auxiliary arm. An arcuate rail is mounted on the support plate. The first arm, the auxiliary arm, and the joint member make up a parallel link mechanism. The arcuate rail engages an engaging assembly mounted on an upper surface of the first arm. A second arm is angularly movably connected to the joint member, and a third arm is angularly movably connected to the distal end of the second arm. An end effector for attracting a workpiece is connected to the distal end of the third arm.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks.

Abstract: End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.

Abstract: When mounting semiconductor chips, the semiconductor chips are presented on a wafer table where they are picked one after the other by a pick and place system, transported and placed onto a substrate that rests on a supporting surface of a substrate table. The wafer table is aligned diagonally to the supporting surface of the substrate table whereby part of the wafer table is located under the substrate table. The pick and place system comprises a shuttle with a swivel arm carrying a bondhead. The swivel arm is swivelled back and forth between two predetermined swivel positions whereby in the first swivel position a longitudinal axis of the swivel arm embraces the angle ? with the perpendicular to the supporting surface of the substrate table and whereby in the second swivel position the longitudinal axis of the swivel arm runs orthogonally to the supporting surface of the substrate table.

Abstract: A conveyor system able to safety convey a workpiece having a thickness of less than 100 ?m and easily position the workpiece, provided with a plate-shaped member provided movably and swivelably and a moving and swiveling means moving and swiveling the plate-shaped member, the plate-shaped member being provided together with a lifting means for uniformly lifting in its entirety a workpiece carried at the carrying location and a holding means for holding a workpiece lifted by the lifting means by chucking its entirety on a workpiece chucking surface of the plate-shaped member, and a plurality of Verneuil nozzles serving as the lifting means and a plurality of vacuum chucking nozzles serving as the holding means being formed in the workpiece chucking surface near an outer periphery of the plate-shaped member along the outer periphery.

Abstract: A tool (7) for handling a semiconductor material wafer (100) is designed to be used in an epitaxial growth station; the tool (7) comprises a disk (20) having an upper side (21) and a lower side (22), the lower side (22) being so shaped as to get in contact with the wafer (100) only along its edge (103); the disk (20) is provided internally with a suction chamber (24) that is in communication with the outside of the disk (20) through one or more suction holes (25) and in communication with a suction duct of an arm of a robot through a suction port (26); the disk (20) entirely covers the wafer (100) and the suction holes (25) open to the lower side (22)of the disk (20), whereby, when the wafer (100) is in contact with the lower side (22) of the disk (20), it can be held by the tool (7) through suction.

Abstract: A conveying device for a plate-like workpiece, comprising a suction-holding device for suction-holding the plate-like workpiece and a moving device for moving the suction-holding device between a first predetermined position and a second predetermined position, wherein the suction-holding device comprises a plate-like workpiece holding member, non-contact suction-holders disposed on the under surface of the center area of the plate-like workpiece holding member, a restricting device which is mounted on the under surface of the peripheral area of the plate-like workpiece holding member and restricts the movement in the horizontal direction of the plate-like workpiece, and a plurality of falling prevention devices which are mounted in the peripheral area of the plate-like workpiece holding member at predetermined intervals in the circumferential direction and prevent the falling of the plate-like workpiece adsorbed by the non-contact suction-holders.

Abstract: The invention relates to a holding device for wafers in an arrangement for wafer inspection, comprising two grippers (11, 12), each of which, in the closed state of the holding device (8), encloses a subsection of the wafer circumference and which are connected to a drive device (27) and, when the latter is driven, the grippers (11, 12) move away from each other for the purpose of opening the holding device (9) and move toward each other for the purpose of closing the holding device (8), and a holding arm (13), on which the two grippers (11, 12) are pivotably mounted. In this case the holding arm (13) is mounted such that it can rotate about an axis (A) which lies substantially in the plane covered by the wafer (W), so that after a rotation through 180° about the axis (A), a wafer (W) held between the grippers (11, 12) has been turned.

Abstract: An edge gripping device grips and ungrips a substrate, such as a semiconductor wafer. A blade extends in a distal direction from a base of the device. At least one distal contact member is provided at the tip of the blade. Two proximal lever arms are pivotally coupled for synchronized, oppositely directed rotation to the base. Each lever arm has at least one proximal contact member at an outer end. A biasing member is coupled to the two proximal lever arms and to an actuator to effect pivoting movement of the lever arms. The pivoting motion moves the ends of the arms generally radially toward and away from the center of the substrate to be gripped or ungripped, thereby minimizing sliding of the substrate. The biasing member is biased to retain the lever arms in a closed position in the event of a power failure. Ramps are provided next to each contact member. The contact members and ramps are profiled to minimize the zone of the substrate edge that is contacted.

Abstract: A transfer apparatus has a transfer robot for transferring wafers between a process chamber and a pre-pressurizing chamber. The process chamber and pre-pressurizing chamber are arranged in a circle. The transfer robot has multiple arms, arranged hierarchically, for transferring the wafers. The arms are rotatable along the circle and vertically movable.

Abstract: A substrate processing apparatus comprising a frame, a drive section, an articulated arm, and at least one pair of end effectors. The drive section is connected to the frame. The articulated arm is connected to the drive section. The articulated arm has a shoulder and a wrist. The arm is pivotally mounted to the drive section at the shoulder. The drive section is adapted to rotate the articulated arm relative to the frame about an axis of rotation at the shoulder, and to displace the wrist relative the shoulder. The pair of end effectors is connected to the articulated arm. The pair of end effectors is pivotally jointed to the wrist of the articulated arm to rotate relative to the articulated arm about a common axis of rotation at the wrist. Each end effector is independently pivotable relative to each other about the common axis of rotation at the wrist. At least one end effector is independently pivotable about the common axis of rotation of the wrist relative to the articulated arm.

Abstract: An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber 1 into which wafers are loaded through a pair of loadlocks 3, 4 which are spaced one above the other. A robot within the vacuum chamber 1 has a pair of gripper arms 22, 29 which are moveable along and rotatable about a vertical axis 23 so as to be moveable between the loadlocks 3, 4 and a wafer processing position. Each of the loadlocks 3, 4 has a vertically moveable portion 8, 26 which is moveable away from the remainder of the loadlock to provide access in a horizontal plane for one of the gripper arms 22, 29.

Abstract: An edge gripping device for a robot arm grips and ungrips substrates, such as semiconductor wafers. A base is fixed to an end of the robot arm. A blade, having a distal contact location thereon, and a pusher bar, having preferably two proximal contact locations thereon, are movably mounted to the base via a linkage mechanism. The linkage mechanism includes two four-bar linkages. The first four-bar linkage has a stationary link and three movable links connected in a parallelogram configuration. The pusher bar is fixed to one of the movable links of the first linkage for movement therewith. The second four-bar linkage has a stationary link and three movable links connected in a trapezoidal configuration. The blade is fixed to one of the movable links of the second linkage for movement therewith. The two linkages share a stationary pivot point.

Abstract: A substrate transport apparatus comprising a drive section, an articulated arm, and a gripper. The articulated arm is connected to the drive section. The articulated arm has an end effector for transporting a substrate. The gripper is connected to the end effector for holding the substrate on the end effector. The gripper has at least two actuated contact pads for gripping the substrate. The two actuated contact pads are disposed on the end effector so that when actuated the contact pads are translated inwards relative to the end effector to grip the substrate and position a center of the substrate to a predetermined location on the end effector irrespective of a dimensional variance of the substrate.

Abstract: Disclosed is a workpiece conveyor and delivery device for a vacuum processing plant. Workpieces are delivered from one device to another, both devices being located opposite each other and moving in relation to each other. A controllable magnet arrangement is provided on one of the devices. A moveable armature element acts as a holding device for the workpiece on one of the two devices which move in relation to each other, namely the device provided with the magnet arrangement. Magnet arrangement is driven to activate the holding device which can be deactivated for delivery of workpiece.

Abstract: An improved conveyor system for transporting a microelectronic workpiece within a processing tool is set forth. The conveyor system includes a transport unit slidably guided on a conveyor rail for transporting and manipulating the workpieces. The transport unit includes a vertical member which is connected to a base end of a two section robot arm. The robot arm includes an end effector at a distal end thereof which is actuated to grip a surrounding edge of a workpiece. A first rotary actuator is arranged to rotate the vertical member about its axis to rotate the entire robot arm. A second rotary actuator is positioned to rotate the second section of the robot arm, via a belt, with respect to the first section of the robot arm. A third rotary actuator is arranged to rotate the end effector about its horizontal axis. The third rotary actuator permits the end effector to flip the microelectronic workpiece between a face up and a face down orientation.