Abstract: According to the manipulator-type robot of the present invention, a manipulator base contains a connection case for making cable connection to an external device. In the connection case, a signal-line connecting section for external connection is disposed on a predetermined signal line of a cable that is routed through the inside of the manipulator. Besides, the connection case contains, other than the aforementioned signal-line connecting section for making connection to outside, an additional signal-line connecting section.

Abstract: Delivery items ordered over the Internet by a particular time in the early evening may be delivered by the next morning to a location within a 5-6 hour delivery radius of a warehouse, according to one specific aspect of the present invention. The order for the delivery items is filled at the warehouse, where the items are placed in a tote for delivery. The filled tote is placed on a movable rack, which is transferred to a vehicle. At the delivery destination, the driver removes the tote and secures it via a system of one or more chains and/or cables which are contained in a delivery box which is secured outside the delivery destination. Later, the customer can unlock the chains from the tote in order to bring the tote inside and/or to remove the delivery items from the tote.

Abstract: The present invention relates to a conformal gripping device. In an embodiment of the present invention a conformal gripper device may be disclosed comprising a frame that includes an array of movable pins. The device may also include a roller locking and unlocking system within the frame. The system may comprise a pair of locking rollers for each row of gripper pins to facilitate locking and unlocking the array of gripper pins on a column-by-column basis. The system may also include a striker element that may force the locking rollers to roll along an angled roll surface to facilitate unlocking of the array of pins on a column-by-column basis. The system may further include an electromagnetic actuator or solenoid and permanent magnets to facilitate movement of the striker element and the locking rollers.

Abstract: A log skidding apparatus to be attached to a vehicle, preferably, an all-terrain vehicle. The log skidding apparatus is attached to the vehicle using a rigid tongue and ball coupler. The ball coupler is attached to one end of the rigid tongue, while the other end of the rigid tongue is pivotally attached to the body of the log skidding apparatus. The body of the log skidding apparatus is preferably made of a rigid material and includes at least one cargo holder strategically located to minimize log, load or cargo movement. At least two eyelets are mounted on opposite sides of the top of the base of the log skidding apparatus such that at least one cargo tie-down strap can be used to further secure the log, load or cargo.

Abstract: A tribological system including: a tribological workpiece having a working surface adapted for moving relative to a counter-surface in a presence of a lubricant, in a load-bearing environment, the working surface for disposing generally opposite the counter-surface, the working surface having: (i) a metal surface layer; (ii) a plurality of organic particles incorporated in the metal surface layer, and (iii) a plurality of inorganic particles incorporated in the working surface, the inorganic particles having a Mohs hardness of at least 8.

Abstract: A wafer handling system includes providing a loadlock tray assembly having a plurality of vertically-stacked loadlock trays; and mounting nipples around each of the plurality of vertically-stacked loadlock trays for supporting a plurality of wafers, each of the nipples having a flat top.

Abstract: A telescoping support strut configured to support a conveyor assembly of a portable conveyor system includes a first strut section and a second strut section configured to telescopically receive and substantially surround beams of the first strut section. The first strut section includes a first beam, an opposing generally parallel second beam, and a plurality of braces coupled between the first and second beams. The second strut section includes a first channel beam, an opposing generally parallel second channel beam, and a plurality of braces coupled between the first and second channel beams. Each channel beam comprises a perimeter wall configured to telescopically receive and substantially surround a respective beam of the first strut section. Each channel beam further configured to define a slot in the perimeter wall adjacent to facing surfaces of the respective beams of the first strut section.

Abstract: A system for facilitating the handling and transporting of semiconductor packages includes a stock of trays in which semiconductor packages can be held, and a tray carrier by which a stack of the trays can be easily handled using automated equipment and without producing dust. The tray carrier includes a frame having an open bottom end through which a stack of trays can be inserted into the frame, belt drums mounted on both sides of the bottom end of the frame, fork blocks mounted to the frame under the belt drums, and a belt extending from the belt drums through the fork blocks and across the open bottom end of the frame. When the tray carrier is placed over a stack of the trays, the belt surrounds the top and sides of the stack of trays. The fork blocks include prongs that are movable into the space constituting the open bottom end of the frame so as to support the bottom of the stack of trays.

Abstract: A cover plate that attaches to a hydraulic rotating connector on the side that faces towards the product being handled. A hydraulic rotating connector is mounted on the vertical boom of a lift truck when a rotating platform that extends forward from the boom has need to perform hydraulics functions. The purpose of the cover plate is to eliminate or greatly reduce hydraulic oil from coming in contact with product being handled.

Abstract: The invention provides an incubator 1 wherein a microplate transport device 5 is disposed inside a chamber 11 centrally thereof. The transport device 5 comprises a transport table 50 for placing a microplate thereon and is capable of driving the table 50 along the directions of three axes, i.e., X-axis, Y-axis and Z-axis. A plurality of stackers 3 are arranged in the direction of Y-axis at each of opposite sides of the transport device 5 along the direction of X-axis. Each of the stackers 3 has a plurality of microplate accommodating portions arranged in the direction of Z-axis. The microplate is movable into or out of the desired accommodating portion by the transport device 5.

Abstract: A lift system having a first pulley and a biasing member having a first portion operatively coupled to the first pulley. A first tension member can be operatively coupled to the first pulley. The lift system may be configured to provide a constant force to the first tension member during a defined angle of rotation of the first pulley. Such a constant force can be used to counterbalance the weight of a display supported by a stand.

Abstract: A safety interlock system including a rotatable lever operably connected to a lift component and to a load supporting component of a mechanical manipulator, where the rotatable lever is biased in a first rotational direction, and is configured to rotate in an opposite rotational direction in response to a lifting force applied by the lift component. The safety interlock system also includes a locking component configured to engage a support frame of the mechanical manipulator based on a rotational position of the rotatable lever.

Abstract: A configuration for accommodating and transferring and/or transporting at least one functional part, in particular a tool of a technical device such as a device for automatically sealing containers, has at least one chassis, which supports the functional part accommodating device. There is at least one stop element for the chassis, which is disposed on the technical device. There is at least one gripper element disposed on the chassis, which can be brought into engagement with the stop element.

Abstract: A telescoping support strut configured to support a conveyor assembly of a portable conveyor system includes a first strut section and a second strut section configured to telescopically receive and substantially surround beams of the first strut section. The first strut section includes a first beam, an opposing generally parallel second beam, and a plurality of braces coupled between the first and second beams. The second strut section includes a first channel beam, an opposing generally parallel second channel beam, and a plurality of braces coupled between the first and second channel beams. Each channel beam comprises a perimeter wall configured to telescopically receive and substantially surround a respective beam of the first strut section. Each channel beam further configured to define a slot in the perimeter wall adjacent to facing surfaces of the respective beams of the first strut section.

Abstract: A guard for use with a forklift including a carriage and at least one fork coupled to the carriage. The guard includes a first member configured to be coupled to the carriage, a second member configured to be coupled to the carriage opposite the first member, and a fork interface member extending between the first member and the second member. The fork interface member is adapted to adjustably secure the at least one fork relative to the carriage when the at least one fork is only partially coupled with the carriage. Fork racks and systems for removing, replacing, and/or storing forks provide additional advantages.

Abstract: An attachment for a skid steer loader, back hoe or powered excavator that can be used to quickly smooth out the walls of a swimming pool, ditch, etc. following the excavation and the process of using the attachment. The attachment includes a vertical flat surface perpendicular to the ground for smoothing the walls of a swimming pool. The process will reduce the need for workers to spend time and effort smoothing the walls manually and improving the safety of swimming pool construction. The cost of building a swimming pool will be reduced significantly by decreasing the number of workers required in the construction process. The process of smoothing walls reduces the amount of gunite required in the swimming pool construction process and thus improving the economics for the pool builder.

Abstract: Horizontal guide rails are mounted on a base and receive linear bearings mounted on the bottom of a tower which carries vertical guide rails receiving linear bearings mounted on a vertical carriage plate. Linear bearings are mounted on the carriage plate and support a horizontal guide rail secured to a horizontal lift arm having an outer end portion supporting a precision locating pin device for a part. Separate gear belts extend around corresponding adjustable idler gears and drive gears and are clamped to the corresponding tower, carriage plate and lift arm. The drive gears are driven by corresponding drive units each including a reversible servo-controlled electric motor, a planetary gear reducer, an absolute resolver unit and an electrically actuated spring set brake. A plurality of the above apparatus are located on opposite sides of a linear part conveyor with the lift arms projecting inwardly in generally opposing relation.

Abstract: A transport apparatus transports objects from one location to another, and in particular between a check station and a conveyor system. The apparatus has an arm that is structured and arranged to be located in a bagwell near the check station. The arm is telescoping and is contained in a base unit. A platform for receiving baggage is coupled to a free end of the arm and extends over the base unit when the apparatus is retracted. The platform has a roller that bears on the floor. As the arm extends and retracts, the platform rolls on the floor. Internal roller bearings allow the arm to telescope. The arm and the platform can be adjusted in height and the widths of the base unit and platform can be adjusted to the bagwell.

Abstract: A system is disclosed for allowing quick and easy installation, maintenance and removal of components within a piece of equipment which may be attached to a front end of processing tool or stand alone unit in a semiconductor processing fab. In a first embodiment, the system includes a translation assembly and a pair of tracks fixedly mounted in frame of the equipment. The translation assembly in this embodiment includes a trolley having four wheels which ride on a portion of each of the tracks. When a component is to be assembled into the piece of equipment, the component is first bolted to the trolley. The trolley and attached component may then be inserted into the frame. The wheels riding on the tracks allow the robot to be quickly and easily moved to its proper position within the equipment. Once properly located, jackscrews threaded through the trolley are rotated to raise the trolley wheels off of the tracks, and to level the trolley and component.

Abstract: A process for the commercialization of waste product disposal is provided including providing a waste receptacle at a commercial establishment. Consumers are allowed to pay to dispose of their waste products in the waste receptacle. According to one aspect of the invention, a credit voucher or coupon is issued to the consumer for a portion of the amount charged for use of the waste receptacle. The system of the present invention affords a commercial establishment with the ability to substantially increase consumer traffic at their location.

Abstract: In a lift for mooring a boat stern-on, a pair of horizontally spaced guide members is fixed to the sea wall. A frame is fixed to a pair of substantially parallel hydro-pneumatic buoyancy tanks to provide a flotation platform for supporting the hull of the boat. The stern end of each of the tanks is connected to the guide members. The guide members limit movement of the platform away from the sea wall and along the sea wall but permit vertical reciprocation of the stern ends of the lift tanks in unison and restrict the lift from listing during operation.

Abstract: A palletizing system includes a reusable pallet and a reusable anchoring device for securing a load. The anchoring device comprises a strap and clamping mechanism for selectively receiving and clamping to the strap and, alternatively, releasing the strap. The pallet includes a base and one or more housings fixed to the base for receiving the clamping mechanism. Each housing has an opening for receiving the clamping mechanism and providing access to the clamping mechanism so that the clamping mechanism can be manipulated in the housing, and an aperture for receiving the strap, the aperture being sized to prevent the clamping mechanism from passing through the aperture.

Abstract: A teaching tool for a robot arm for wafer reaction ovens is provided to anchor the robot arm with respect to a tray located inside a reaction oven. The teaching tool provides an upper flange for maintaining a spacing between a handle of the robot arm and a door of the oven, a position width for keeping the teaching tool aligning with a center line of the tray, and a lower tunnel aligning with the center line for allowing a blade of the robot arm to contact closely and horizontally from a lower position and thus for maintaining a position height between the blade and a floor of the reaction oven. By providing the teaching tool, easy blind calibration with multiple contact points between the robot arm and the oven can be performed so that possible efficiency down and cost up from an ill-calibration can be reduced to a minimum.

Abstract: An object-carrying system for facilitating object transportation over various ground or floor surfaces includes a transport frame and a hoist means, which transport frame is adapted to be carried by a user such that articles loaded onto such frame may be easily transported. In a particular embodiment, the transport frame may be removably attachable to an object-carrying means for improved transportation of such object-carrying means over various ground or floor surfaces.

Abstract: The processing status of a plurality of semiconductor wafers undergoing processing is positively identified by the use of indicator flags associated with cassettes containing the wafers. The flags are moved between at least two processing state indicating positions during processing of the wafers by a robotic arm that also transfers the wafers between the cassettes and a wafer processing station.

Abstract: A drive mechanism for providing reciprocating, liner motion for a movable work piece relative to a stationary work piece is provided. The drive system includes a motor rotating a drum in forward and reverse directions about a first axis. The motor and drum are fixedly mounted with respect to the stationary work piece, such as to a housing or other structure. The system further includes an elongate, substantially non-flexible cable having a first and second ends fixed with respect to the stationary work piece. The cable further includes an intermediate portion extending between the first and second ends, with the intermediate portion being wound around the drum. First and second bearings are provided which are mounted to the movable work piece. The first bearing is positioned relative to the cable such that the intermediate portion of the cable is wound over the first bearing, and with the first bearing being positioned between the first end of the cable and the drum.

Abstract: An adaptive Reed-Solomon(RS) decoder (207) and analogous methods arranged and constructed to decode a RS(n,k) encoded symbol stream, including; a code register (211), coupled to the symbol stream, for storing a received code word including code symbols, an index register (213) for storing a location information corresponding to each of a portion of the code symbols, a processor (215), coupled to the code register (211) and the index register (213), for performing soft decision decoding using an error parameter (217) and an erasure parameter (219) to provide corrected data (215) when the decoding is successful and to provide a failure indication (221) when decoding is unsuccessful, and a controller (223), coupled to the processor (215), for providing the error parameter and the erasure parameter and for adjusting the error parameter and the erasure parameter when the processor provides the failure indication.

Abstract: A material distribution system for stick-like objects such as railroad spikes includes a rake for peeling the stick-like objects from the top of a pile, and transferring them to another location, for example, where they might be reached by a human operator. Use of the rake to peel the object from the top of the pile, with minimized downward pressure applied by the rake, minimizes the tendency of the objects to entangle with each other.

Abstract: This involves a device for the random arrangement of vessels open at the top in a rectangular grid, whereby the grid of vessels is bounded at two opposite-lying sides by static side walls (B), between which it can be moved as a whole with the other two side walls (A) perpendicular thereto, and there is at least one position, at which the static side walls are perforated at opposite-lying places and at least one other vessel can be moved into the grid with a guide element (C), which simultaneously retracts on the opposite-lying side, in order to take up the vessel that has been moved out of the grid, and to move it again into the grid at another place, if necessary, and thus to successively permutate the vessels.

Abstract: A palletizing system includes a reusable pallet and a reusable anchoring device for securing a load. The anchoring device comprises a strap and clamping mechanism for selectively receiving and clamping to the strap and, alternatively, releasing the strap. The pallet includes a base and one or more housings fixed to the base for receiving the clamping mechanism. Each housing has an opening for receiving the clamping mechanism and providing access to the clamping mechanism so that the clamping mechanism can be manipulated in the housing, and an aperture for receiving the strap, the aperture being sized to prevent the clamping mechanism from passing through the aperture.

Abstract: This invention generally relates to the remote removal of pelletized samples from cylindrical containment capsules. V-blocks are used to receive the samples and provide guidance to push out rods. Stainless steel liners fit into the v-channels on the v-blocks which permits them to be remotely removed and replaced or cleaned to prevent cross contamination between capsules and samples. A capsule holder securely holds the capsule while allowing manual up/down and in/out movement to align each sample hole with the v-blocks. Both end sections contain identical v-blocks; one that guides the drive out screw and rods or manual push out rods and the other to receive the samples as they are driven out of the capsule.

Abstract: A transfer apparatus for an article or group of articles includes a carriage assembly (6) for moving an article substantially horizontally from a first location to a second location. The carriage assembly (6) includes an elongate transfer member (19) and a conveyor (20) which is movable relative to the elongate transfer member (19). A support (1) engages and supports the carriage assembly (6) so that the elongate transfer member (19) is movable substantially vertically on the support (1).

Abstract: There is provided an apparatus and method for reduced impact loading of impact sensitive materials, such as agriculture seed material, into a bin from above. The loading apparatus includes a door selectively movable between a lower position and an upper position. A guide mounts the door at the bin and provides a predetermined path between the lower and upper positions for the door. A drive is used to selectively vary the position of the door along the path in response to accumulation of material loaded from above. The door is first moved to the lower position for initial loading. A material dispenser having a discharge end is extended through an access opening in the bin at the door for initial loading of material therein. As material accumulates in the bin during loading, the discharge end is selectively raised in the access opening to maintain it within a predetermined distance range above such material.

Abstract: A drawbar device that facilitates engagement to, maneuvering of, and disegement from a loaded slipsheet includes a top plate, base plate, and roller for frictionally engaging a slipsheet tab, a means for disengaging the roller therefrom, and a connecting means for transmitting to the base plate the force necessary for maneuvering the loaded slipsheet. The present invention advantageously facilitates the movement of heavy supplies and material in the absence of conventional mechanized material handling equipment.

Abstract: A chip peeling apparatus has a plurality of protrusions which include first protrusions and second protrusions lower than the first protrusions. A vacuum pump communicates through holes with grooves defined between adjacent ones of the protrusions. A UV sheet is attached to chips, and the chips are supported in the vicinity of their corners by the tops of the first protrusions. When the vacuum pump is actuated, the chips and streets disposed between the chips are lowered, and the chips are curved and supported in abutment against the tops of the second protrusions. Each of the chips is gradually peeled off the UV sheet under a force tending to recover the original shape of the curved sheet. The chip peeling apparatus is effective in preventing the chips from being damaged and positionally deviated when the chips are attracted and carried.

Abstract: The apparatus has a substantially planar base having a surface which defines a wafer cassette receiving station and a wafer receiving station. A transportable wafer cassette is removably coupled to the base in the wafer cassette receiving station. The transportable wafer cassette is provided for holding a plurality of wafers in an axially aligned manner, each of the wafers having identification indicia disposed on a surface thereof. A wafer receiving cassette is coupled to the base adjacent to the transportable wafer cassette in the wafer receiving station. A first reciprocally moveable wafer transfer member is attached to the base, and is operative for transferring the wafers held in the transportable wafer cassette to the wafer receiving cassette.

Abstract: A receival hopper for delicate and fragmentary particulate material such as fruit berries or bark pieces, in which the hopper (2) includes a support frame (5) with a receiving bin (3) pivotally secured to the frame (5) and an auger (4) which includes an auger screw (8), extending along a peripheral lip of the receiving bin at or adjacent the pivot, with a pair of adjacent but spaced hydraulic rams (6) secured between the bin and the support frame for moving the bin between lowered and raised positions relative to the support frame.

Abstract: An automated material handling process in production lines and an automated material storage and retrieval system for production line. Six material retrieval operating modes are disclosed and electronic label devices are used for instructing the operators how and where to implement the material retrieval or storage in each operating mode. Timely distribution of production materials can be achieved with optimized inventory status.

Abstract: A golf ball stacking and dispensing apparatus is disclosed herein comprising: a) a substantially rectangular base frame; b) a plurality of rails substantially parallel to one pair of opposing sides of the rectangular base frame and secured at each end to the other pair of opposing faces of the rectangular base frame; and c) a hopper having an open-bottomed pyramidal lower section. The top edges of the sides of the base frame may extend above the tops of the rails. The rails are substantially uniformly spaced apart, with spacing and transverse dimensions such that a golf ball may not pass between adjacent rails, but rather is constrained to lie on each of two adjacent rails and roll along their lengths in a groove formed therebetween. The spacing between centerlines of adjacent rails must be larger than a ball diameter and less than about 1.414 times the ball diameter.

Abstract: A method of moving a refuse collection vehicle from a first location to a second location, the refuse collection vehicle of a type having a towing vehicle, a semi-trailer and a hoist mechanism interconnecting the towing vehicle to the semi-trailer and operative for moving the semi-trailer between a normal lowered position and a hoisted position, the method including the steps of securing the towing vehicle in a first towing vehicle location, moving the semi-trailer from the normal lowered position to the hoisted position thereby moving the rear wheels of the semi-trailer from a first semi-trailer location to a second semi-trailer location, securing the semi-trailer in the second semi-trailer location, and moving the semi-trailer from the hoisted position to the normal lowered position thereby moving the towing vehicle in the forwardly direction from the first towing vehicle location to a second towing vehicle location thereby resulting in the movement of the refuse collection vehicle from the first location t

Abstract: A storage system for the storage and retrieval of material goods has a continuous track and a storage carousel movable along the track. The carousel carries a plurality of shelf arrays, each of which includes a plurality of vertically-spaced shelves removably attachable to the carousel at an adjustable vertical pitch. One or more inserter assemblies are disposed adjacent the carousel for transferring cartons onto the carousel. One or more removal assemblies are disposed adjacent the carousel for removing cartons from the carousel. A vertical transport unit has an upward reach disposed adjacent the inserter assemblies for transferring cartons to the inserter assemblies, and a downward reach disposed adjacent the removal assemblies for receiving cartons from the removal assemblies. The vertical transport unit has a plurality of platforms removably attachable to the vertical transport unit at an adjustable pitch.

Abstract: A motor stator delaminator separates individual electrical laminations from a stack thereof. A stack is transferred from an infeed conveyor at a loading station onto an elevator. The elevator raises the stack inside a tower to a holding station. At the holding station, support for the stack is transferred from the elevator to a holding mechanism. The elevator descends to the loading station. A breaker plate extends into the interior of the tower between the holding station and the loading station. The stack is released by the holding mechanism to fall by gravity onto the breaker plate. That action separates the individual laminations. A door opens a discharge opening in the tower, and an eject mechanism pushes the individual laminations through the discharge opening and out of the tower.

Abstract: A system for continuous manufacture of apparel using continuous first-in-first-out work-in-process queues. The system is comprised of a dual queue where manufacture article components and article subassemblies can be performed simultaneously at a series of work centers all located around a center staging area.

Abstract: An autohandler for supplying a lot of feed trays carrying samples and for removing a lot of return trays loaded with tested samples. A loading mechanism has a feed tray elevator containing samples to be tested. An unloading mechanism has a return tray elevator for receiving return trays containing tested samples. An empty tray storage unit stores empty trays. A tray transfer hand transfers the trays. A sensor detects the feed tray elevator position. The sensor actuates an alarm when the feed tray elevator is almost empty.

Abstract: In an apparatus for introducing articles into and/or removing articles from a machine, in particular a mold cavity between two mold halves of an injection molding machine, a handling arrangement is connected to a slider by way of transmission elements. The slider forms a guide passage between two strip portions for an entrainment member which rotates eccentrically about an axis of rotation (A) and which in limit positions can move out of the guide passage, the slider being held in the limit positions by a locking unit. In that assembly the entrainment member is arranged eccentrically on a cam disk which actuates a rotary lever cooperating with one of the strip portions that form the guide passage.

Abstract: A frame apparatus is constructed to be mounted on and conformed to the trunk of a tree for use by arborists in handling loads involved in an arbor rigging procedure. The frame apparatus engages a curved surface of the trunk of the tree at three triangularly disposed locations. In one embodiment an angled spike structure at one lower end of the frame structure penetrates the trunk at an angle which utilizes circumferential shifting and inward pulling of the frame apparatus on the tree to secure the frame apparatus to the tree. In another embodiment resilient pads are mounted at each of the three triangularly disposed locations for resiliently gripping the opposed portion of the trunk to minimize damage to the tree.

Abstract: A multi-level cargo container storage rack. A container transport aisle extends through the rack from top to bottom and between opposed ends of the rack. A plurality of container storage positions are provided on each level and on each side of the aisle. A container elevator vertically displaces containers within the aisle to a selected level. A container transfer mechanism transfers containers between the elevator and a selected side of the selected level. The storage positions on each side of the aisle are displaceable toward or away from the aisle, along each of the levels. A programmed computer drives the system.

Abstract: In a reserve tank structure for supplying, to a collecting gutter mounted slantedly in a lower part of a pachinko island and communicating with a lower tank above which a polishing and lifting device is located, pachinko balls which have flowed over the polishing and lifting device, a reserve tank is divided into a plurality of tank parts arranged on a plane. These parts each have an inclined bottom surface and each includes, under a lower portion of the entire reserve tank, an inclined lower gutter communicating with the bottom surfaces of the individual tank parts and also communicating with the collecting gutter.

Abstract: A sample changer for precise positioning of a selected sample from a plurality of samples stored on a removable annular sample file. The samples comprising a rectangular dimensioned object is radially removed from the annular cassette and precisely positioned at a predetermined location for testing. Upon completion of the desired testing, the sample is replaced into the cassette which is repositioned and a subsequently selected sample is accordingly extracted and positioned for testing. Furthermore, the present invention includes a combination of elements which act together to detect and dislodge samples which may become temporarily stuck or jammed in the mechanism, reducing the need for operator intervention. Furthermore, the annular cassette is removable from the sample changing mechanism and includes a concentric locking ring which selectively retains all samples within the cassette or permits the removal of all samples.

Abstract: An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool-down chamber, each sealed from the other. The sealing of these individual chambers, each from the other, has the effect of minimizing processing delays associated with the cooling process and the loading and unloading process to thereby improve the productivity of the furnace.