Abstract: [Solving Means] A force-sense presenting apparatus includes a casing structure, a weight, and a drive unit. The weight is provided in the casing structure or incorporated in the casing structure. The drive unit includes a first supporting portion constituted of a pair of supporting structures that support a first side of the weight and a second side opposed to the first side, at least one of the pair of supporting structures being configured to include an actuator capable of providing the weight with biased acceleration.

Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: Method for detecting failure including possible under or over delivery of a micropump having at least an inlet valve, a pumping chamber with an inner pressure sensor and an outlet valve, said method comprising the determination of the pump tightness via the measurement of the pressure by said inner pressure sensor in said pumping chamber at least at certain intervals when the pump is inactive and the comparison with a value of reference.

Abstract: A piezoelectric blower includes a housing, a vibrating body, and a piezoelectric element. The vibrating body includes a vibration plate, a reinforcing plate, and a restraining plate. The vibrating body forms a columnar blower chamber with the housing while holding the blower chamber therebetween from a thickness direction of the vibration plate. The vibrating body includes an outer peripheral region in contact with an area from the outermost node of pressure vibration in the blower chamber, of nodes of the pressure vibration formed by the bending vibration of the vibrating body, to an outer periphery of the blower chamber, and a center region located in an inner side portion of the outer peripheral region. The restraining plate that restrains the bending vibration of the outer peripheral region is provided in the outer peripheral region.

Abstract: A piezoelectric blower (100) includes a housing (17), a vibrating plate (41), and a piezoelectric element (42). The vibrating plate (41) forms a column-shaped blower chamber (31) together with the housing (17). The vibrating plate (41) and the housing (17) are formed so that the blower chamber (31) has a radius a. The piezoelectric element (42) causes the vibrating plate (41) to concentrically bend and vibrate at a resonance frequency f. A recessed portion (26) is formed in the housing (17) on the side facing the vibrating plate (41). The recessed portion (26) defines a cavity (25), which constitutes the blower chamber (31) and communicates with the vent hole (24). The radius a of the blower chamber (31) and the resonance frequency f of the vibrating plate (41) satisfy a relationship of 0.8×(k0c)/(2?)?af?1.2×(k0c)/(2?).

Abstract: A piezoelectric blower includes an outer casing and a blower main body. The outer casing houses the blower main body. The blower main body includes a top plate, side plate, first vibrating plate, piezoelectric element, intermediate plate, second vibrating plate, side plate, and bottom plate and has a structure in which they are laminated in sequence. The top plate, side plate, and first vibrating plate define a columnar first blower space. The second vibrating plate, side plate, bottom plate define a columnar second blower space. The distance from a neutral plane of the piezoelectric element in the thickness direction to a surface of the second vibrating plate, the surface being near the piezoelectric element, is longer than the distance from the neutral plane to a surface of the first vibrating plate, the surface being near the piezoelectric element.

Abstract: A micro pump is formed on a substrate having a common inlet channel and a common outlet channel by a plurality of pumping elements, each pumping element having an inlet coupled to the common inlet channel and an outlet coupled to the common outlet channel, the inlet and outlet connected by a microfluidic channel, the microfluidic channel comprising a valvular conduit having low fluid flow resistance in a direction from the inlet to the outlet and high fluid flow resistance in a direction from the outlet to the inlet, and an actuating element arranged to cause fluid to be pumped through the microfluidic channel from the inlet to the outlet, wherein the actuating element is based on one or more of piezoelectric, thermal, electrostatic or electromagnetic transduction. A controller is coupled to actuate the actuating elements at mutually staggered relative timing so as to produce a substantially continuous steady flow.

Abstract: A piezoelectric pump includes a piezoelectric element, an intermediate plate, and a vibrating plate. The piezoelectric element has a substantially flat plate shape. The intermediate plate is bonded to a principal surface of the piezoelectric element and applies a residual stress in a compressive direction to the piezoelectric element. The vibrating plate is bonded to the intermediate plate such that the vibrating plate faces a principal surface of the piezoelectric element and receives a residual stress in a compressive direction from the intermediate plate. In addition, the vibrating plate defines a portion of a wall surface of a pump chamber having an open hole. A fluid passage is provided in the piezoelectric pump. The fluid passage communicates with the outside of the chamber at one end thereof, and communicates with the pump chamber through the open hole at the other end.

Abstract: The present invention relates to pump systems having graphene or other atomically thin electrically conductive materials supported by trough-shaped cavities.

Abstract: An apparatus and method of identifying objects includes: a microfluidic chip in which are disposed a plurality of channels, the microfluidic chip including: a main fluid channel into which a sample fluid mixture of objects to be identified is introduced; a plurality of sheath fluid channels into which sheath fluids are introduced, the sheath fluids which orient the objects in the main fluid channel in a predetermined direction while still maintaining laminar flow in the main fluid channel; an interrogation apparatus which detects and interrogates the oriented objects in the main fluid channel; and a focused energy apparatus which performs an action on the objects.

Abstract: A dual-cavity pump having a pump body with a substantially elliptical shape including a cylindrical wall closed at each end by end plates is disclosed. The pump further comprises a pair of disc-shaped interior plates supported within the pump by a ring-shaped isolator affixed to the cylindrical wall of the pump body. The internal surfaces of the cylindrical wall, one of the end plates, one of the interior plates, and the ring-shaped isolator form a first cavity within the pump. The internal surfaces of the cylindrical wall, the other end plate, the other interior plate, and the ring-shaped isolator form a second cavity within the pump. The interior plates together form an actuator that is operatively associated with the central portion of the interior plates. The illustrative embodiments of the dual-cavity pump have three valves including one located within a common end wall between the cavities of the pump. Methods for fabricating the pump are also disclosed.

Abstract: Methods of affecting a material's properties through the implantation of ions, such as by using a plasma processing apparatus with a plasma sheath modifier. In this way, properties such as resistance to chemicals, adhesiveness, hydrophobicity, and hydrophilicity, may be affected. These methods can be applied to a variety of technologies. In some cases, ion implantation is used in the manufacture of printer heads to reduce clogging by increasing the materials hydrophobicity. In other embodiments, MEMS and NEMS devices are produced using ion implantation to change the properties of fluid channels and other structures. In addition, ion implantation can be used to affect a material's resistance to chemicals, such as acids.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate including a first main surface and a second main surface, and a frame plate surrounding the surroundings of the vibrating plate. The driver is provided on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate has a hole formed thereon. Furthermore, the flexible plate faces the second main surface of the vibrating plate, and adheres to the frame plate by the adhesive agent that contains a plurality of particles arranged such that the plurality of particles are interposed between the flexible plate and the vibrating plate.

Abstract: A disc pump system includes a pump body having a substantially cylindrical shape defining a cavity for containing a fluid, and an actuator operatively associated with the central portion of a driven end wall to cause an oscillatory motion of the driven end wall thereby generating displacement oscillations with an annular node between the center of the driven end wall and the side wall when in use. A heating element is thermally coupled to the actuator to maintain the actuator at a target temperature.

Abstract: A fluid control device includes a vibrating plate unit, a driver, a flexible plate, and a base plate. The vibrating plate unit includes a vibrating plate including first and second main surfaces, and a frame plate surrounding the surrounding of the vibrating plate. The driver is bonded to the first or the second main surface of the vibrating plate and vibrates the vibrating plate. The flexible plate includes a hole provided therein, and is bonded to the frame plate so as to face the vibrating plate. The base plate is bonded to the main surface of the flexible plate on a side opposite to the vibrating plate. A size relationship between the coefficients of linear expansion of the material of the base plate and the frame plate is equal to a size relationship between the coefficients of linear expansion of the material of the vibrating plate and the driver.

Abstract: A device for generating a flow of air, particularly for cooling electronic components, with an annular piezo element and an emitter element, wherein the annular piezo element can be vibrated radially by applying an alternating voltage, the emitter element is coupled radially to the annular piezo element, and wherein the radial vibration of the annular piezo element is configured so as to set the emitter element into axial vibration to generate the air flow which thereby permits a device of small dimensions for generating the an air flow to be created that is simultaneously characterized by low energy consumption and a long service life.

Abstract: A micropump and a disposable pump body thereof are disclosed. The micropump includes the pump body and an actuator device. The pump body includes a chamber, an inlet communicating with the chamber, an outlet communicating with the chamber and a covering membrane on top of the chamber. The actuator device includes an actuator and a transmitting post. One of the two ends of the transmitting post connects to the actuator. The other end of the transmitting post abuts against the membrane. Since the pump body is separated from the actuator device, the pump body is disposable and can be replaced after use to avoid cross-infection of disease, particularly useful for medical liquid delivery.

Abstract: A micropump includes: a fluid suction tube for suctioning fluid; a pumping tube connected to the fluid suction tube and providing a suction force and a discharge force to surroundings while repeatedly being expanded and contracted by an external signal; a deform tube connected to the pumping tube and having an aperture that is deformed by the suction force and the discharge force of the pumping tube; and a fluid discharge tube connected to the deform tube and discharging fluid.

Abstract: A fluid delivery system includes a first chamber, a second chamber, and a third chamber, a pair of electrodes, a porous dielectric material, an electrokinetic fluid, and a flexible member including a gel between two diaphragms. The pair of electrodes is between the first chamber and the second chamber. The porous dielectric material is between the electrodes. The electrokinetic fluid is configured to flow through the porous dielectric material between the first and second chambers when a voltage is applied across the pair of electrodes. The flexible member fluidically separates the second chamber from the third chamber and is configured to deform into the third chamber when the electrokinetic fluid flows form the first chamber into the second chamber.

Abstract: A piezoelectric blower includes a housing, top plate, side plate, vibrating plate, piezoelectric element, and cap. The top plate, side plate, and vibrating plate define a blower chamber. The top plate includes a vent hole. The vibrating plate and piezoelectric element constitutes a piezoelectric actuator. The cap includes a wall portion facing the piezoelectric actuator and has a disc-shaped suction port. Here, a central axis of the suction port extending along a thickness direction of the wall portion and a central axis of the piezoelectric element extending along the thickness direction of the wall portion do not coincide with each other. An air channel is provided among the housing, the cap, and a joined structure of the top plate, side plate, and piezoelectric actuator.

Abstract: A motor-less pump includes: (a) a housing having an inlet provided to allow fluid flow into the housing and an outlet provided to allow fluid flow out of the housing; (b) an elastic diaphragm positioned in the housing such that motion in the elastic diaphragm drives the fluid flows at the inlet and the outlet of the housing; and (c) one or more electromechanical polymer (EMP) actuators each being provided on a surface of the elastic diaphragm, wherein the mechanical responses to electrical stimuli applied on the EMP actuators cause the motion in the diaphragm. The EMP actuators may include one or more bimorphs.

Abstract: A sensor for a contactless electrocardiographic measurement on a person includes a carrier for fastening the sensor on an object, such as a vehicle seat, and at least one electrically flat electrode mounted to the carrier by an elastic element. An inflatable bellows is disposed between the carrier and the electrode, inflation of the bellows deflecting the elastic element and increasing a distance between the electrode and the carrier to thereby urge the electrode toward a person seated on the seat.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.

Abstract: A microfluidic chip orients and isolates components in a sample fluid mixture by two-step focusing, where sheath fluids compress the sample fluid mixture in a sample input channel in one direction, such that the sample fluid mixture becomes a narrower stream bounded by the sheath fluids, and by having the sheath fluids compress the sample fluid mixture in a second direction further downstream, such that the components are compressed and oriented in a selected direction to pass through an interrogation chamber in single file formation for identification and separation by various methods. The isolation mechanism utilizes external, stacked piezoelectric actuator assemblies disposed on a microfluidic chip holder, or piezoelectric actuator assemblies on-chip, so that the actuator assemblies are triggered by an electronic signal to actuate jet chambers on either side of the sample input channel, to jet selected components in the sample input channel into one of the output channels.

Abstract: A fluid pump comprising one or two cavities which, in use, contains a fluid to be pumped, the chamber or chambers having a substantially cylindrical shape bounded by first and second end walls and a side wall; an actuator which, in use, causes oscillatory motion of the first end wall(s) in a direction substantially perpendicular to the plane of the first end wall(s); and whereby, in use, these axial oscillations of the end walls drive radial oscillations of the fluid pressure in the main cavity; and wherein an isolator forms at least a portion of the first end wall between the actuator and the side wall and includes conductive tracks, wherein electrical connection is made to the actuator via the conductive tracks included within the isolator.

Abstract: A micro-gas pressure driving apparatus includes a miniature gas transportation module and a miniature valve module. The miniature gas transportation module includes a gas inlet plate, a fluid channel plate, a resonance membrane and a piezoelectric actuator. A first chamber is defined between the resonance membrane and the piezoelectric actuator. After the piezoelectric actuator is activated to feed a gas through the gas inlet plate, the gas is transferred to the first chamber through the fluid channel plate and the resonance membrane and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve module includes a gas collecting plate, a valve membrane and a gas outlet plate. After the gas is transferred from the miniature gas transportation module to the gas-collecting chamber, the gas is transferred in one direction, so that a pressure-collecting operation or a pressure-releasing operation is selectively performed.

Abstract: There is provided a micro pump device including a micro pump, and a housing receiving the micro pump and provided with a pipe connection port.

Abstract: In a piezoelectric micro-blower, a vibration plate assembly includes a piezoelectric element attached to a diaphragm, with an intermediate plate interposed there between. A blower chamber plate includes a circular opening in a center thereof. A blower chamber defined by the diaphragm, a flow path plate, and the opening of the blower chamber plate is sized to allow internal pressure to be substantially uniformly changed by vibration of the diaphragm. The blower chamber plate and the flow path plate are provided with a first outlet and a second outlet, respectively. Compressive fluid pressurized in the blower chamber is blown out through the first and second outlets.

Abstract: A heat dissipating system including a casing body, a heat source and a piezoelectric fan is provided. The casing body includes an upper casing and a bottom case, wherein at least one of the upper casing and the bottom casing includes at least one air inlet. The heat source and the piezoelectric fan are both disposed in the casing body. The piezoelectric fan has an opening facing the heat source while the air inlet is adjacent to the opening. Air is adsorbed into the opening through the air inlet and is exhausted out towards a direction of the heat source by the piezoelectric fan.

Abstract: A liquid feed pump includes a pump housing, a diaphragm forming a pump chamber together with the recessed portion surface and partitioning the pump chamber from the hole, a reciprocating member reciprocatably inserted into the hole and reciprocating to press the diaphragm to deform, a driving member displacing the reciprocating member periodically in a direction of reciprocation, a seal portion sandwiching the diaphragm to seal the diaphragm in a position around an outer peripheral side of the recessed portion surface, a diaphragm receiving surface provided between the seal portion and the opening portion, and its contact area contacting the diaphragm decreases in response to an increase in the displacement of the reciprocating member to the recessed portion surface side and increases in response to an increase in the internal pressure of the pump chamber.

Abstract: An electrostatic spraying device comprises a capillary spray electrode having a spraying end, a reference electrode, and a reservoir in fluid communication with the spray electrode. In use, the electrodes are connected across a generator in order to establish an electric field between the electrodes and cause fluid in the reservoir to be sprayed from the spray electrode. The spray electrode has a focus that defines a point at which the electric field is focused on the spraying end.

Abstract: There is provided a micro pump including a bottom substrate, a channel forming substrate coupled to the bottom substrate and provided with an inlet into which a fluid is introduced and an outlet through which the fluid is discharged, and a valve integrally formed with the channel forming substrate.

Abstract: A synthetic jet apparatus including a series of generally parallel spaced-apart bimorph piezoelectric plates defining first and second sets of fluid chambers. The chambers of the second set of fluid chambers are interleaved with the chambers of the first set of fluid chambers. The first and second sets of fluid chambers are in fluid communication with sources of first and second fluids, respectively, the source of the first fluid being separate from the source of the second fluid. The bimorph plates are operable to alternately draw the first fluid from its source into the first set of fluid chambers while expelling the second fluid from the second set of fluid chambers, and then expel the first fluid from the first set of fluid chambers back into its source while drawing the second fluid from its source into the second set of fluid chambers.

Abstract: A system and method for lowering resonant frequency in a synthetic jet device for less noise, as well as lowering vibration, is disclosed. A synthetic jet device includes a first plate, a second plate spaced apart from the first plate, a spacing component coupled to and positioned between the first and second plates to form a chamber and including an orifice therein, and an actuator element coupled to at least one of the first or second plates to selectively cause deflection thereof, wherein the first and second plates are formed at least in part of a non-metallic material.

Abstract: A pump having a substantially cylindrical shape and defining a cavity formed by a side wall closed at both ends by end walls wherein the cavity contains a fluid is disclosed. The pump further comprises an actuator operatively associated with at least one of the end walls to cause an oscillatory motion of the driven end wall to generate displacement oscillations of the driven end wall within the cavity. The pump further comprises an isolator operatively associated with a peripheral portion of the driven end wall to reduce dampening of the displacement oscillations.

Abstract: This invention discloses a hydraulic power unit, which is capable of strongly jetting a working fluid, may be used to implement a new hydraulic engine. The hydraulic engine generates rotational power by using environmentally friendly electric energy, and has improved performance and a long life span. The hydraulic power unit includes: an inner tube comprising a hollow portion, wherein a fluid inlet and a fluid outlet are formed in the inner tube; a vibration tube comprising a hollow portion, an elastic tube layer and a metal tube layer, and the hollow portion of the vibration tube is connected in line to the hollow portion of the inner tube; an oscillator that is disposed to contact a back end of the vibration tube; an outer check member that is disposed to contact the fluid outlet; and an inner check ring that is disposed to contact the fluid inlet.

Abstract: A device for moving air comprising a piezoelectric element attached to a planar body. The planar body is configured to oscillate at a movable end generating an airflow in response to applying alternating electric current to said piezoelectric element. The device further comprises a partial cavity defined by a base plate, a first wall and a second wall which surrounds the movable end of the planar body. The base plate further comprises an opening located proximate to said movable end of the planar body. In operation the air flow generated by the planar body is forced out of the device through the opening.

Abstract: A piezoelectric micro-blower includes an inner case to which a peripheral portion of a vibrating plate including a piezoelectric element is fixed such that a blower chamber is defined between the inner case and the vibrating plate and an outer case arranged to cover an outer periphery of the inner case with a gap therebetween. The inner case is elastically retained in the outer case by a plurality of connecting portions. A first opening is provided in a top plate portion of the inner case that faces a central portion of the vibrating plate, and a second opening is provided in a top plate portion of the outer case that faces the first opening. A central space is provided between the top plate portions, and fluid introduced from the outside is guided to the central space through the gap between the inner and outer cases.

Abstract: A diaphragm pump includes a pump chamber having an inlet opening and an outlet opening. A passive silicon check valve is provided at the inlet opening, and a passive silicon check valve is provided at the outlet opening. The diaphragm pump further includes a metallic pump diaphragm that adjoins the pump chamber.

Abstract: An apparatus system for controlling liquid in a fluid channel in a micro-fluid device has an ultrasonic oscillator for conveying liquid. The ultrasonic oscillator oscillates with amplitude modulation. The apparatus system has a holding section for holding the micro-fluid device on the ultrasonic oscillator to allow a micro-fluid device to be removably fitted to it. A liquid conveying method and a liquid conveying unit showing an improved liquid conveying efficiency are provided.

Abstract: A small-sized, low-profile fluid pump having high pumping capabilities includes an actuator and a planar section including a metal plate. The actuator includes a disk-shaped piezoelectric element attached to a disk-shaped diaphragm. As a result of application of a square-wave or sine-wave drive voltage, the actuator performs a bending vibration from the central portion to the peripheral portion. The peripheral portion of the actuator is not restrained. The actuator performs a bending vibration in the state in which it is in proximity to the planar section while facing the planar section. A center vent is provided at or in an area adjacent to the center of an actuator facing area of the planar section that faces the actuator.

Abstract: A piezoelectric micro-blower includes a blower chamber located between a blower body and a vibrating plate, a first wall portion of the blower body arranged to face the vibrating plate across the blower chamber so as to vibrate with vibrations of the vibrating plate, a first opening in the first wall portion, a second wall portion on the opposite side of the first wall portion with respect to the blower chamber, a second opening in a portion of the second wall portion which faces the first opening, and an inflow passage located between the first wall portion and the second wall portion. Each of the first and second openings includes a plurality of holes, and each hole of the first opening and each hole of the second opening are arranged to face each other. Thus, noise is significantly reduced while the flow characteristic is maintained.

Abstract: An oscillating diaphragm fan having a plurality of subunits which each have an oscillating diaphragm that is excited by a magnetic system in an actuator chamber, wherein the air pulsation generated by oscillating diaphragm is discharged outwardly, the actuator chambers of the subunits are connected via means for compensating pressure and are encapsulated outwardly, and the magnetic systems of the subunits are excited out of phase with each other.

Abstract: A piezoelectric microblower includes a vibrating plate including a piezoelectric element and arranged to be driven in a bending mode by applying a voltage of a predetermined frequency to the piezoelectric element, and a blower body arranged to fix both ends or a periphery of the vibrating plate and to define a blower chamber between the blower body and the vibrating plate, an opening being provided in a portion of the blower body facing a central portion of the vibrating plate. In a portion of the blower chamber corresponding to the central portion of the vibrating plate, a partition is provided around the opening and a resonance space is defined inside of the partition. A size of the resonance space is set such that a driving frequency of the vibrating plate and a Helmholtz resonance frequency of the resonance space correspond to each other.

Abstract: A piezoelectric micro-blower capable of efficiently conveying compressive fluid without use of a check valve and ensuring a sufficient flow rate. The micro-blower has a blower body with a first wall and a second wall. Openings are formed in the respective walls and face a center of a diaphragm. An inflow path allowing the openings to communicate with the outside is formed between the walls. By applying a voltage to a piezoelectric element to cause the diaphragm to vibrate, a part of the first wall close to the first opening vibrates. Thus, gas can be drawn from the inflow path and discharged from the opening in the second wall.

Abstract: A vibration case includes a first side portion and a second side portion provided on the both sides of a vibrator in a bending direction and a coupling portion configured to couple the first side portion and the second side portion. In this configuration, stiffness of the vibrator in the bending direction is increased, and the deformation of the vibration case may be suppressed. This structure contributes to reduction in size of the vibration case as long as the same stiffness is secured, and hence the size of the vibration case may be reduced while securing high stiffness. Therefore, a piezoelectric motor having a driving accuracy secured sufficiently may be realized while suppressing increase in size of the piezoelectric motor.

Abstract: An electro-active, valveless pump having a pumping chamber with at least one chamber wall. There is at least one opening in the at least one chamber wall. An electro-active actuator is located over each of the openings for inducing fluid flow.

Abstract: A pump comprising a side wall closed at each end by an end wall forming a cavity for, in use, containing a fluid, one or more actuators each operatively associated with one or more of the end walls to cause an oscillatory motion of the associated end wall(s) whereby, in use, these axial oscillations of the end wall(s) drive substantially radial oscillations of the fluid pressure in the cavity, two or more apertures in the cavity, a valve disposed in at least one of the apertures, wherein the actuator(s) is arranged to be non-axisymmetric in use such that, in use, a pressure oscillation with at least one nodal diameter is generated within the cavity.

Abstract: In one embodiment, a cooling system is disclosed. The cooling system comprises: a cooling channel for receiving a cooling media, a substrate disposed near the cooling channel, and a fluidic jet disposed within the substrate and in fluid communication with the cooling channel. The cooling channel is for thermal communication with a component to be cooled. The cooling channel has a height of less than or equal to about 3 mm and a width of less than or equal to 2 mm. The fluidic jet comprises a cavity defined by a well and a membrane. In one embodiment, a method of cooling an electrical component comprises: passing a cooling media through a cooling channel, drawing the cooling media into one or more of the fluidic jets, expelling the cooling media from the one or more fluidic jets into the cooling channel, and removing thermal energy from the electrical component.