Abstract: An ion pump with a housing enclosing an interior, a gas inlet having a through-hole extending into the interior of the ion pump, at least one cathode, at least one anode positioned in proximity to the at least one cathode, a magnet disposed on an opposite side of the at least one cathode from the anode, and a blocking shield disposed between the gas inlet and the at least one cathode. The blocking shield is electrically connected to the at least one anode. An associated method installs the blocking shield by inserting components of the blocking shield assembly through the gas inlet, and assembling (inside the interior of the ion pump) the inserted components to form the blocking shield.

Abstract: Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process.

Abstract: In a vacuum apparatus including an ultrahigh vacuum evacuation pump, the ultrahigh vacuum evacuation pump is provided with a rod-shaped cathode including a non-evaporable getter alloy, a cylindrical anode disposed so as to surround the cathode, and a coil or a ring-shaped permanent magnet disposed so as to sandwich upper and lower openings of the cylindrical anode and surround the rod-shaped cathode. As a result, it is possible to reduce the size and weight of the ultrahigh vacuum evacuation pump and to dispose the vacuum evacuation pump at a desired location in the vacuum apparatus.

Abstract: The present invention relates to a pumping method in a pumping system (SP, SPP) comprising: a main lubricated rotary vane vacuum pump (3) with a gas inlet port (2) connected to a vacuum chamber (1) and a gas outlet port (4) leading into a conduit (5) before coming out into the gas outlet (8) of the pumping system (SP, SPP), a non-return valve (6) positioned in the conduit (5) between the gas outlet port (4) and the gas outlet (8), and an auxiliary lubricated rotary vane vacuum pump (7) connected in parallel to the non-return valve (6).

Abstract: A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning trap within the ion pump. A current sensor measures the Penning-trap current across the Penning trap. The Penning trap is used as an indication of pressure within the ion pump or a vacuum chamber including or in fluid communication with the ion pump. The pressure information can be used to determine flow rates, e.g., due to a load, outgassing, and/or leakage from an ambient.

Abstract: An ion pump with a housing enclosing an interior, a gas inlet having a through-hole extending into the interior of the ion pump, at least one cathode, at least one anode positioned in proximity to the at least one cathode, a magnet disposed on an opposite side of the at least one cathode from the anode, and a blocking shield disposed between the gas inlet and the at least one cathode. The blocking shield is electrically connected to the at least one anode. An associated method installs the blocking shield by inserting components of the blocking shield assembly through the gas inlet, and assembling (inside the interior of the ion pump) the inserted components to form the blocking shield.

Abstract: An electric dust collector is disclosed. The electric dust collector includes a film for collecting electrified dust particles and a case for receiving the film. A conductor-receiving part defining an insertion space, into which a portion of the film is inserted, is provided in the case. The electric dust collector further includes an electrode connection part filling the insertion space in the state of being in contact with the film. The electrode connection part is electrically connected to a voltage source to apply voltage in order to the film.

Abstract: An ultra-high vacuum (UHV) system includes a UHV cell and an ion pump to maintain the UHV in the UHV cell. The ion pump has a GCC (glass, ceramic, or crystalline) housing. An interior wall of the ion-pump housing serves as an anode or bears a coating that serves as an anode. At least one cathode is disposed with respect to the housing so that it can cooperate with the anode to form an electric field for establishing a Penning trap. The GCC housing defines a flow channel that extends radially through the anode so that a molecule can flow directly into the most ionizing region of a Penning trap.

Abstract: Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).

Abstract: An ion pump and a charged particle beam device each includes two opposite flat-plate cathodes, an anode with a cylindrical shape having openings that face the respective flat-plate cathodes, a voltage application unit configured to apply a potential higher than potentials of the flat-plate cathodes to the anode, a magnetic field application unit configured to apply a magnetic field along an axial direction of the cylindrical shape of the anode, and a cathode bar arranged within the anode. The surface of the cathode bar is formed with a material that forms a non-evaporative getter alloy film on the anode or the flat-plate cathodes.

Abstract: An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.

Abstract: A vacuum pump may comprise a grating, and a sublimation element. The grating may have a grating opening and a grating interior that may be bounded by at least one grating surface. The sublimation element may be located within the grating interior and may be configured to sublimate and form a reactive film on the grating interior upon heating of the sublimation element above the sublimation temperature. The reactive film may be effective to capture gas molecules entering the grating interior through the grating opening and contacting the reactive film.

Abstract: A Vacuum Fired and Brazed (“VFB”) anode array element for use in an ion pump is described. The VFB anode array element includes a first VFB conduit anode element and second VFB conduit anode element, wherein the second VFB conduit anode element is adjacent the first VFB conduit anode element. The first VFB conduit anode element is vacuum brazed together with second VFB conduit anode element.

Abstract: Methods for pumping a chamber to generate substantially adsorbate-free surfaces are described. Pumping systems for achieving a vacuum based on surface adsorption are also described.

Abstract: A membrane vacuum pump includes at least one membrane pump stage, at least one inlet valve for a process gas to be conveyed associated with the membrane pump stage, and at least one gas ballast valve for the supply of a ballast gas. The flow path for the ballast gas, leading through the gas ballast valve, opens into the flow path for the process gas behind the inlet valve in the direction of flow of the process gas.

Abstract: By directly connecting, ballast to an emitter electrode of an ion generator (e.g., a corona-discharge device), a rapid and self-corrective reduction in emitter-to-collector voltage may be provided responsive to an increase in current characteristic of incipient sparking discharge. Voltage levels in the emitter-to-collector gap can be rapidly reduced based on voltage drop across the ballast that, while negligible under nominal ion current conditions, transiently increases in the event of a sparking discharge. As a result, the portion of supply voltage (typically multi-KV supply voltage) across the emitter-to-collector gap is transiently reduced to levels below a current breakdown voltage and, indeed, field intensity proximate to the emitter is transiently reduced below levels otherwise necessary to sustain ion generation.

Abstract: Surfaces for electromagnetic shielding, retaining electrostatic charge and indeed collecting ion current in EHD fluid mover designs may be formed as or on surfaces of other components and/or structures in an electronic device. In this way, dimensions may be reduced and packing densities increased. In some cases, electrostatically operative portions of an EHD fluid mover are formed as or on surfaces of an enclosure, an EMI shield, a circuit board and/or a heat pipe or spreader. Depending on the role of these electrostatically operative portions, dielectric, resistive and/or ozone robust or catalytic coatings or conditioning may be applied.

Abstract: The present invention provides a fluid delivery system having a first chamber, a second chamber and a third chamber; a flow-through pump element separating the first chamber from the second chamber; a moveable pump element separating the second chamber from the third chamber; a first outlet in communication with the third chamber; and second outlet in communication with the second chamber. Additionally, the present invention provides methods of operating a fluid delivery system having a first chamber, a second chamber and a delivery chamber by reducing the volume of the second chamber while increasing the volume of the delivery chamber without operation of a flow-through pump element that separates the second chamber from the first chamber.

Abstract: It is an object of the present invention to provide an ion pump system etc. having a high air-exhausting capacity and vacuum-maintaining capacity and capable of adjusting drive modes suitable for the uses thereof. The subject problem is solved by an ion pump system (7) comprising a casing (1), a first electrode group (2a,2b) provided in the casing (1), a second electrode group (3a,3b) provided on the outer periphery of the first electrode group (2a,2b), and outer magnets (4) for providing a magnetic field in the casing, wherein the first electrode group (2a,2b) and the second electrode group (3a,3b) are constituted as a plurality of layers alternately disposed around the center axis (11) of the casing (1).

Abstract: The invention provides an element (12), comprising: a nanoporous insulating film (20) (such as a thin nanoporous diamond film) and first and second conducting layers (18a, 18b) on first and second opposed sides respectively of the film (20). Also provided are a vacuum pump (10), an ion source (80) and an ion trap (98), each comprising such an element (12).

Abstract: A sputter ion pump including an evacuateable envelope having a chamber, first and second cathodes and an anode disposed in the chamber. The anode can have an outer layer of a non-evaporable getter (NEG) material so as to permit NEG pumping of gases by the anode. In another aspect of the invention, the anode can be formed with spaced-apart first and second sheet portions disposed in juxtaposition to each other and having a plurality of holes extending through the sheets for forming a plurality of anode cells.

Abstract: In thermal management systems that employ EHD devices to motivate flow of air between ventilated boundary portions of an enclosure, it can be desirable to have some heat transfer surfaces participate in electrohydrodynamic acceleration of fluid flow while providing additional heat transfer surfaces that may not. In some embodiments, both collector electrodes and additional heat transfer surfaces are thermally coupled into a heat transfer path. Collector electrodes then contribute both to flow of cooling air and to heat transfer to the air flow so motivated. The collector electrodes and additional heat transfer surfaces may be parts of a unitary, or thermally coupled, structure that is introduced into a flow path at multiple positions therealong. In some embodiments, the collector electrodes and additional heat transfer surfaces may be proximate each other along the flow path. In some embodiments, the collector electrodes and additional heat transfer surfaces may be separate structures.

Abstract: A method for pumping through an orifice of a first substrate, a first volume of liquid in contact with a first hydrophobic surface of said substrate, wherein a pressure variation between the first volume of liquid and a second volume of liquid, located in contact with said orifice and a second hydrophobic surface of said substrate, is achieved by electrowetting.

Abstract: A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber.

Abstract: A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.

Abstract: A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.

Abstract: A method for pumping through an orifice of a first substrate, a first volume of liquid in contact with a first hydrophobic surface of said substrate, wherein a pressure variation between the first volume of liquid and a second volume of liquid, located in contact with said orifice and a second hydrophobic surface of said substrate, is achieved by electrowetting.

Abstract: Airflow in a computer chassis may be enhanced or reduced to affect cooling of heat generating devices using an ionic air moving device. A plurality of ionic air moving devices enhance or reduce airflow through a plurality of fluidically parallel airflow zones of the computer chassis in an airflow direction established by a nonionic air moving device. Each ionic air moving device comprises an ion emitter electrode disposed a spaced distance from a collector electrode, wherein a controller independently controls an electrical potential between the emitter and collector electrodes of each ionic air moving device for affecting the rate of airflow through one or more of the plurality of airflow zones.

Abstract: A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.

Abstract: Controlled electrokinetic transport of constituents of liquid media can be achieved by connecting at least two volumes containing liquid media with at least one dielectric medium with opposing dielectric surfaces in direct contact with said liquid media, and establishing at least one conduit across said dielectric medium, with a conduit inner surface surrounding a conduit volume and at least a first opening and a second opening opposite to the first opening. The conduit is arranged to connect two volumes containing liquid media and includes a set of at least three electrodes positioned in proximity of the inner conduit surface. A power supply is arranged to deliver energy to the electrodes such that time-varying potentials inside the conduit volume are established, where the superposition of said potentials represents at least one controllable traveling potential well that can travel between the opposing conduit openings.

Abstract: A membrane-based electroosmotic pump, having catalyst regions on electrodes, can pump a fluid without applying an external voltage. Chemical reactions of fluid components on the catalyst regions on the electrodes can induce an electric field that generates an electroosmotic flow through channels of the membrane. In one embodiment, a pump comprising platinum and gold electrodes can generate the flow of the fluid containing hydrogen peroxide through channels of the membrane. In another embodiment, a pump comprising gold electrodes, on which glucose oxidase and laccase are deposited, can generate the flow of the fluid containing glucose.

Abstract: A display apparatus having a front substrate that is a display panel, a rear substrate disposed at a predetermined distance apart from the front substrate and facing the front substrate, the rear substrate comprising a back light unit, and a cooling device to remove heat generated by the rear substrate. The cooling device includes an actuator disposed between the front substrate and the rear substrate, the actuator to generate an ion wind using a voltage, a transparent electrode installed to face the actuator and which is grounded, a plurality of supports to support ends of the actuator, and a high-voltage power source to apply a voltage to the actuator.

Abstract: A differentially pumped mass spectrometer system comprises a mass spectrometer having first and second pressure chambers through which, during use, ions are conveyed along a path. A pump assembly for differentially evacuating the chambers is attached to the mass spectrometer. The pump assembly comprises a housing attached to the mass spectrometer and a cartridge inserted into the housing. The cartridge has a plurality of inlets each for receiving fluid from a respective pressure chamber and a pumping mechanism for differentially pumping fluid from the chambers. The cartridge is inserted into the housing such that the pumping mechanism is inclined relative to the ion path, but with the cartridge protruding into the mass spectrometer to such an extent that at least one of the inlets at least partially protrudes into its respective chamber without crossing the ion path.

Abstract: A fluorescent lamp is configured so that a glass bulb has a phosphor film formed on its internal face, and a rare gas and an amalgam pellet are enclosed therein. The amalgam pellet contains zinc, tin, and mercury as principal components, one amalgam pellet is enclosed in the glass bulb, and the amalgam pellet has a weight of not more than 20 mg. The fluorescent lamp satisfies the relationship expressed as: 45×(1?A)?x?55×(1?A), 75A?y?85A, 45?30A?z?55?30A, and x+y+z?100, where x represents a content of zinc contained in the amalgam pellet in percent by weight, y represents a content of tin therein in percent by weight, and z represents a content of mercury therein in percent by weight. This configuration allows the fluorescent lamp to be characterized in that an amount of released mercury that is necessary for the first lighting of the fluorescent lamp is secured, and that the phosphor film is less prone to being peeled due to the amalgam.

Abstract: A sputter ion pump including an evacuateable envelope having a chamber, first and second cathodes and an anode disposed in the chamber. The anode can have an outer layer of a non-evaporable getter (NEG) material so as to permit NEG pumping of gases by the anode. In another aspect of the invention, the anode can be formed with spaced-apart first and second sheet portions disposed in juxtaposition to each other and having a plurality of holes extending through the sheets for forming a plurality of anode cells.

Abstract: A combined pumping system (10) comprises a getter pump (12) and an ion pump (13). The getter and ion pumps (12, 13) are mounted on a same flange (11) and are arranged on the same side of said flange (11) at two different points thereof.

Abstract: A sputter ion pump includes one vacuum chamber, two parallel anode poles and one cold cathode electron emitter. The vacuum chamber includes at least one aperture located in an outer wall thereof. The two parallel anode poles are positioned in the vacuum chamber and arranged in a symmetrical configuration about a center axis of the vacuum chamber. The cold cathode electron emission device is located on or proximate the outer wall of the vacuum chamber and faces a corresponding aperture. The cold cathode electron emission device is thus configured for injecting electrons through the corresponding aperture and into the vacuum chamber. The sputter ion pump produces a saddle-shaped electrostatic field and is free of a magnetic field. The sputter ion pump has a simplified structure and a low power consumption.

Abstract: A sputter ion pump includes one vacuum chamber, two parallel anode poles and one cold cathode electron emitter. The vacuum chamber includes at least one aperture located in an outer wall thereof. The two parallel anode poles are positioned in the vacuum chamber and arranged in a symmetrical configuration about a center axis of the vacuum chamber. The cold cathode electron emission device is located on or proximate the outer wall of the vacuum chamber and faces a corresponding aperture. The cold cathode electron emission device is thus configured for injecting electrons through the corresponding aperture and into the vacuum chamber. The sputter ion pump produces a saddle-shaped electrostatic field and is free of a magnetic field. The sputter ion pump has a simplified structure and a low power consumption.

Abstract: The above-mentioned problem is solved by an ion pump (6) comprising a casing (1), a first electrode (2), a second electrode (3), a plurality of cylindrical magnets (4), and a connection part (5). The first electrode (2) is arranged inside the casing (1). The second electrode (3) is arranged on the outer circumference of the first electrode (2). The first electrode and the second electrode have different polarities. The cylindrical magnets (4) are arranged so as to surround the circumference of the second electrode (3). The plurality of cylindrical magnets (4) are arranged so as to surround the circumference of the second electrode (3). The plurality of cylindrical magnets (4) are arranged at intervals in the center axis direction of the casing (1).

Abstract: It is an object of the present invention to provide a portable vacuum carrying system. The above-mentioned problem is solved by a vacuum carrying system comprising an ion pump (6) comprising a casing (1), a positive electrode (2) provided in the casing (1), a negative electrode (3) fixed to the inner wall of the casing (1) and located on the circumference of the positive electrode (2), magnets (4) placed so as to surround the circumference of the negative electrode (3), and a connection part (5) for connecting the casing (1) to other device.

Abstract: In a vacuum pumping system with a plurality of sputter ion pumps the considerable reduction in its overall axial size and weight is achieved by utilizing a plurality of axially superimposed sputter ion pumps and a common magnetic circuit, which comprises a pair of external magnets located at opposite axial ends of the pumping system, one or more intermediate magnets arranged alternated with the sputter ion pumps and a ferromagnetic yoke, internally enclosing the external magnets and the one or more intermediate magnets.

Abstract: An image display apparatus is provided with a vacuum chamber consisting of an electron source substrate and an image display substrate, and an ion pump which is attached to an electron-emitting substrate or the image display substrate and exhausts air from the vacuum chamber by the action of a magnet, wherein the magnet is attached and fixed to the substrate to which the ion pump has been attached. Thereby, the image display apparatus prevents the magnet from applying an excessive force to the ion pump by its weight, and acquires a stable structure without causing a vacuum leak.

Abstract: A method, apparatus, and system are described for an ionic wind generator. The ionic wind generator may have a first electrode that is elevated off a surface of a device that the ionic wind generator is intended to cool. A first surface of the first electrode is in contact with a first surface of a first post that elevates the first electrode off the surface of the device that the ionic wind generator is intended to cool. The ionic wind generator causes a generation of ions that are then drawn through an interstitial atmosphere from the first electrode to a second electrode to affect a velocity of local flow over the surface of the device between the first electrode and the second electrode. The flow from a forced flow device also affects the velocity of local flow over the surface of the device between the first electrode and the second electrode.

Abstract: An ion pump having conductive electrodes on both sides of an insulator which may form a number of channels. These electrodes may provide electrical discharges which have a corona or cold cathode emission for ionization. The electrodes and the insulator may be layers having openings that form the channels. The openings in one electrode layer may have a sharp-like configuration and the openings in the other electrode layer may have a non-sharp-like configuration. Ions may be predominately in-situ generated proximate to the sharp-like openings and have the polarity of these openings. These ions may induce a fluid flow through the channels of neutral molecules as a result of a force and viscous drag of the ions. The sharp-like openings may have nanotube whiskers or a thin film structure for facilitating an electrical discharge.

Abstract: To improve the configuration of electrodes disposed in the fluid channel of EHD pumps, and to reduce of the fluid channel of EHD pumps, as well as to reduce the cost of producing EHD pumps, and to increase the pumping pressure of EHD pumps.

Abstract: An ion pump having emissions containment. The ion pump includes an anode constructed from a plurality of tubes and a cathode constructed from plates positioned on opposite sides of the anode and positioned apart from the anode. The anode and cathode are positioned within a gastight housing having a gas inlet. A blocking shield assembly is provided within the line of sight between the gas inlet and the cathode. The blocking shield assembly is also provided within the line of sight between the gas inlet and any surface within the ion pump that itself is within the line of sight of the cathode. The blocking shield assembly prevents photons and neutral particles from being emitted from the ion pump.

Abstract: A method is disclosed for producing a vacuum and for separating condensable components present in vapor which accumulates during the production of a polymer by melt-phase polycondensation under vacuum. Vapor produced during the production of polymers by melt-phase polycondensation in at least one reaction step under vacuum is drawn of by at least one steam jet vacuum pump with a down stream injection condenser. The steam jet vacuum pump is driven with alkylene carbonate in vapor form and liquid alkylene carbonate is then supplied to the injection condenser as coolant.

Abstract: A vacuum ion-getter pump includes a vacuum chamber having a pumping port, an anode positioned in the vacuum chamber, a cathode positioned in the vacuum chamber in proximity to the anode, a voltage source coupled between the anode and the cathode, a magnet assembly to produce a magnetic field in the vacuum chamber, and a cooling device thermally coupled to the cathode. The cooling device may be a cryogenic cooling device.

Abstract: A sputter ion pump (1) has an improved magnet assembly comprising primary magnets (9a, 9b), disposed on opposite ends of the pump cells of an anode, and secondary magnets (11; 11?, 11?) disposed on one side only of the pump cells, whereby the assembly exhibits an asymmetrical configuration. The sputter ion pump with the improved magnet assembly allows for attaining high pumping speeds even at low pressures with reduced size, weight and manufacturing cost of the pump itself.

Abstract: Provided is an image display apparatus, including: a vacuum container which includes an electron source and an anode electrode opposed to the electron source; and an ion pump arranged so as to communicate through the vacuum container, in which: an ion pump container is composed of a non-electroconductive material; and an electroconductive film is formed on an external surface of the vacuum container on a side on which the ion pump container is mounted or on an internal surface of the ion pump container. The image display apparatus achieves: a reduction in weight of the ion pump; an improvement in compatibility to the vacuum container; and the prevention of an adverse effect of discharge inside the ion pump on image display.