Abstract: The invention relates to a reactor configuration comprising an electrically heated furnace, with at least one reactor tube placed within the furnace and said reactor tube having an exit and entrance outside of the reactor furnace, and wherein said furnace is further provided with at least one electrical radiative heating element suitable for heating to high temperatures located inside said furnace in such a way that the heating element is in no direct contact with the reactor tube; and; and a number of inspection ports in the furnace wall such to be able to visually inspect the condition of the reactor tube on each opposite side of said reactor tube during operation, the total number of inspection ports being sufficient to inspect all reactor tubes present in the furnace at their full length and circumference; and wherein the heating duty of the furnace is at least 3 MW.

Abstract: Provided is a solid vaporization/supply system of metal halide for thin film deposition that reduces particle contamination. The system includes a vaporizable source material container for storing and vaporizing a metal halide and buffer tank coupled with the vaporizable source material container. The vaporizable source material container includes a container main body with a container wall; a lid body; fastening members; and joint members, wherein the container wall is configured to have a double-wall structure composed of an inner wall member and outer wall member, which allows a carrier gas to be led into the container main body via its space. The container wall is fabricated of 99 to 99.9999% copper, 99 to 99.9996% aluminum, or 99 to 99.9996% titanium, and wherein the container main body, the lid body, the fastening members, and the joint members are treated by fluorocarbon polymer coating and/or by electrolytic polishing.

Abstract: A method of producing a catalyst comprises generating an aerosolized flow of catalyst support particles, heating a catalytically active compound precursor to produce a catalytically active compound precursor vapor, contacting the aerosolized flow of catalyst support particles with the catalytically active compound precursor vapor, and condensing the catalytically active compound precursor onto the catalyst support particles to produce the catalyst comprising catalytically active compound deposited on surfaces of the catalyst support particles.

Abstract: An apparatus for identifying transition points in a chemical reaction, the apparatus comprising: a property value receiver, configured to receive a plurality of values of a physical property of the chemical reaction, a linear function calculator, associated with the property value receiver, configured to calculate a linear function connecting two of the received values, the two values pertaining to a start and end of a time period, a difference calculator, associated with the linear function calculator, configured to calculate a difference between the linear function and a plurality of the received values pertaining to the time period, and a transition point identifier, associated with the difference calculator, configured to identify at least one transition point of the chemical reaction, using the calculated difference.

Abstract: A calibration device for calibrating a gas component analyzing apparatus for analyzing by detecting a component of a sample gas by a detector, which is separated as a single component through a separation unit, wherein the separation unit is connected to a supply tube providing a gas thereto, and a plurality of calibration gases that are adjusted to have different concentrations from each other through adjustment of a volume ratio of a calibration gas having one concentration are sequentially provided to the separation unit through the supply tube.

Abstract: The present invention relates to a reactor (201) for preparing hydrogen cyanide by the Andrussow process, to an equipment (200) comprising said reactor and to a process for preparing hydrogen cyanide by the Andrussow process. The reactor (201) comprising at least one gas inlet (I) for reactant gases mixture, a catalyst (203), a porous support for the catalyst (204), a porous sub support (205, 206) and at least one outlet (P8) for the reaction products. According to the invention, said reactor has a cone frustum shaped metallic casing (210) and comprises inside the metallic casing, a gas distributor (202) located between the gas inlet and the catalyst, said distributor comprising at least one cone frustum element (D1, . . . Dn) having an upper base directed towards the gas inlet (I).

Abstract: The present disclosure provides a reactor and a method for the production of high purity silicon granules. The reactor includes a reactor chamber; and the reaction chamber is equipped with a solid feeding port, auxiliary gas inlet, raw material gas inlet, and exhaust gas export. The reaction chamber is also equipped with an internal gas distributor; a preheating unit; and an external exhaust gas processing unit connected between the preheating unit and a gas inlet. The reaction chamber is further equipped with a surface finishing unit, a heating unit, and a dynamics-generating unit. The reaction occurs through decomposition of silicon-containing gas in a densely stacked, high purity granular silicon layer reaction bed in relative motion, and uses the exhaust gas for heating. The present invention achieves a large-scale, efficient, energy-saving, continuous, low-cost production of high purity silicon granules.

Abstract: A portable enclosure provides a means to protect a user while performing hazardous processes upon a work piece such as grinding, sanding, drilling, painting, chemical washing, and the like. The enclosure provides a portable box-like structure having transparent plastic panels, an open-bottom portion, and a pair of glove ports. The enclosure is intended to be placed over the work piece which is positioned upon a floor surface, thereby allowing performance of hazardous processing without having to move or lift the work piece.

Abstract: Microwave chemical processing system having a microwave plasma reactor, and a multi-stage gas-solid separation system are disclosed. The microwave energy source has a waveguide, a reaction zone, and an inlet configured to receive the input material, and the input material is converted into separated components. The separated components include hydrogen gas and carbon particles. The multi-stage gas-solid separation system has a first cyclone separator to filter the carbon particles from the separated components, and a back-pulse filter system coupled to the output of the first cycle separator to filter the carbon particles from the output from the first cyclone separator.

Abstract: An apparatus is provided which comprises a barrel having a substantially cylindrical configuration. The barrel comprises an exterior surface and defines an interior volume. A base unit comprises a drive motor being configured to rotate the barrel by interfacing with the exterior surface of the barrel. The barrel comprises a thermoelectric heat pump attached thereto and being controllable for at least one of transferring heat out of the interior volume and transferring heat into the interior volume.

Abstract: An apparatus and method are presented for removing container covers within a controlled environment enclosure without using gloves. The apparatus comprises an articulated arm apparatus and a gripping apparatus and can further comprise a controller. The articulated arm apparatus can be configurable for holding and moving a container in three dimensions; and the gripping apparatus can be configured for gripping a container cover sealing the container. The method comprises moving the container using the articulated arm apparatus while holding a gripping area of the container cover substantially stationary using the gripping apparatus. The apparatus can further comprise a sensor configured for supplying information to the controller for determining the location of the container cover gripping area and an orientation of the container cover. The method can further comprise inspecting the container cover using the sensor. The container can be moved along a path and within a space determined by the controller.

Abstract: An apparatus for producing trichlorosilane, including: a reaction vessel in which a supply gas containing silicon tetrachloride and hydrogen is supplied to an internal reaction passageway to produce a reaction product gas containing trichlorosilane and hydrogen chloride; a heating mechanism that heats the interior of the reaction vessel; a gas supply section that supplies the supply gas in the reaction vessel; and a gas discharge section that discharges the reaction product gas from the reaction vessel to the outside, wherein the reaction passageway includes: a supply side passageway which is connected to the gas supply section at a central portion of the reaction vessel and flows the supply gas toward the outside while meandering in the reaction vessel; a return passageway which is connected to a downstream end of the supply side passageway and extends to the central portion of the reaction vessel; and a discharge side passageway that is disposed so as to be connected to a downstream end of the return passag

Abstract: Raw material gas supply nozzles are arranged within a virtual concentric circle having its center at the center of a disk-like base plate (having an area half as large as an area of the base plate). Raw material gas is ejected at a flow velocity of 150 m/sec or more into a bell jar from the gas supply nozzles. In addition to one gas supply nozzle provided in a center portion of the base plate, three gas supply nozzles can be arranged at the vertex positions of a regular triangle inscribed in a circumscribed circle having its center at the gas supply nozzle in the center portion. With the gas supply nozzles so arranged, a smooth circulating flow is formed within a reactor.

Abstract: A dual vessel reactor and a method of carrying out a reaction using a dual vessel reactor are provided using a non-condensable gas to substantially isolate the inner vessel from the outer vessel during the reaction and limit the heating of the outer vessel when steam from the inner vessel condenses on the interior surface of the outer vessel. By limiting the heating of the outer vessel through the condensation of the steam or other vapor from the inner vessel, the operating temperature of the outer vessel is kept below an upper threshold of the operating temperature of a seal used to seal the door in the outer vessel.

Abstract: Compounds, synthesis of, and methods for synthesizing metal alkoxide derivatives; and metal alkoxide derivatives for use as flame retardants are described. Group 13 metal alkoxides having flame retardant properties may be prepared by reacting the group 13 metal trihydroxide with an alcohol.

Abstract: Disclosed herein is a method of producing hydrogen, including selectively applying heat to a fuel within a canister thermally insulated and inside a cartridge, firing fuel to facilitate decomposition and release hydrogen, and, removing said hydrogen from said cartridge via a fluid communication means.

Abstract: The invention relates to a device for continuously carrying out chemical reactions. The device comprises a microwave generator, a microwave applicator accommodating a microwave-transparent tube, and an isothermal reaction section which is arranged such that the material to be reacted is guided inside the microwave-transparent tube through a microwave applicator which is used as the heating zone and in which it is heated to reaction temperature by means of microwaves that are emitted from the microwave generator into the microwave applicator. The material to be reacted, which is heated and optionally under pressure, is transferred from the microwave applicator to an isothermal reaction zone once it has left the heating zone, said reaction zone being arranged downstream of the heating zone, and is cooled once it has left the isothermal reaction zone.

Abstract: A method of thermal energy recovery from production of at least one solid carbon material comprises reacting at least one carbon oxide material and at least one gaseous reducing material at a temperature of greater than or equal to about 400° C., at a pressure greater than or equal to about 1×105 pascal, and in the presence of at least one catalyst material to produce at least one solid carbon material and a gaseous effluent stream comprising water vapor. Thermal energy is extracted from the gaseous effluent stream comprising water vapor. Other methods of generating recoverable thermal energy are disclosed, as is a solid carbon production system having thermal energy recovery.

Abstract: Disclosed herein is a method of producing hydrogen, including selectively applying heat to a fuel within a canister thermally insulated and inside a cartridge, firing fuel with heating elements to facilitate decomposition and release hydrogen, and, removing said hydrogen from said cartridge via a fluid communication means.

Abstract: In aspects of the disclosure, a fuel cartridge wherein the fuel is in a powdered form is admixed with inert materials such as alumina or other ceramics to improve thermal conductivity. Said cartridge having fuel zones, heating zones, and controllers to selectively heat fuel zones and thereby generate hydrogen via decomposition of fuel is disclosed.

Abstract: In one aspect, a method to convert a fuel into energy and specialized fuel includes, in a reactor, dissociating a fuel to produce hot carbon and hydrogen, the hot carbon having a temperature state in a range of 700 to 1500° C., in which the dissociating includes providing heat and/or electric energy to produce the hot carbon and the hydrogen; and removing the hot carbon and the hydrogen from the reactor, the removing including depositing the hot carbon to a chamber, in which the hot carbon includes an increased chemical potential energy and is capable of storing energy from an external source. In some implementations, the method can further include supplying an oxygen- and hydrogen-containing reactant to contact the hot carbon to produce carbon monoxide (CO) and hydrogen (H2); and obtaining the produced CO and H2, which, after the supplying, remaining deposited carbon forms a durable carbon-based good or product.

Abstract: A hydrogen generator including an initiator assembly having one or more contact members within a compressible member, and a removable fuel unit adjacent a surface of the compressible member. The fuel unit contains a hydrogen containing material that can release hydrogen gas when heated and an exothermic mixture that can react exothermically upon initiation by the initiator assembly. When no fuel unit is in the hydrogen generator, the compressible member is uncompressed and the contact members are at or below its surface, and when a fuel unit is disposed in the hydrogen generator, the compressible member is compressed so the contact members extend beyond the surface to make thermal contact with the fuel unit. Energy from the initiator assembly is conducted by the contact members to corresponding quantities of the exothermic mixture to initiate an exothermic reaction, providing heat for the release of hydrogen gas from the hydrogen containing material.

Abstract: Mechanically fluidized systems and processes allow for efficient, cost-effective production of silicon. Particulate may be provided to a heated tray or pan, which is oscillated or vibrated to provide a reaction surface. The particulate migrates downward in the tray or pan and the reactant product migrates upward in the tray or pan as the reactant product reaches a desired state. Exhausted gases may be recycled.

Abstract: A reactor for gas-phase dehydrogenation of a hydrocarbon-comprising stream with an oxygen-comprising stream over a monolithic heterogeneous catalyst. Catalytically active zone(s) comprising monoliths packed next to one another and/or above one another and a mixing zone having fixed internals upstream of each catalytically active zone. Feed line(s) for the hydrocarbon-comprising gas stream to be dehydrogenated at the lower end of the reactor. Independently regulable feed line(s), which supply distributor(s), for the oxygen-comprising gas stream into each of the mixing zones and discharge line(s) for the reaction gas mixture of the autothermal gas-phase dehydrogenation at the upper end of the reactor. The interior wall of the reactor is provided with insulation. The catalytically active zone(s) is accessible from the outside of the reactor via manhole(s).

Abstract: A method of ageing a catalyst material includes at least the steps of: (a) heating a gaseous stream; (b) adding a least one pure hydrocarbon gas and an oxygen-containing gas to the heated gaseous stream to provide a combined stream; and (c) passing the combined stream through the catalyst material. The use of at least one pure hydrocarbon gas and an oxygen-containing gas allows maximum re-circulation of the exit stream from the catalyst material for reuse, while maintaining the correct C, H and O proportions being provided in the combined stream to replicate realistic use of the catalyst material.

Abstract: In the production of phthalic anhydride by the oxidation of ortho-xylene with air, the ortho-xylene loading is increased without increasing the likelihood of explosion by insulating the system to avoid cold spots to keep the ortho-xylene at a temperature above its dew point; in addition the system may be electrically interconnected and grounded to reduce the risk of spark initiated explosions or deflagrations.

Abstract: Methods and devices for generating gas from nitrous oxide are provided as well as downstream uses for the product gas. Reactor devices of the invention are compact and incorporate a novel heat-exchange/regenerative cooling system to optimize N2O decomposition and reactor durability.

Abstract: Systems and methods for synthesizing molecules on a substrate surface are disclosed. In one aspect, a molecule synthesizing system includes a crossbar array with a planar arrangement of crossbar junctions. Each crossbar junction is independently switchable between a high-resistance state and a low-resistance state. The system also includes a slab with a first surface and a second surface parallel to the first surface. The second surface is disposed on the crossbar array. A current applied to a crossbar junction in a high-resistance state creates an adjacent heated site on the first surface for attaching thermally reactive molecules for molecular synthesis.

Abstract: A method of treating a diamond, the method comprising: (i) providing a liquid metal saturated with carbon with respect to graphite precipitation; (ii) lowering the temperature of the liquid metal such that the liquid metal is saturated with carbon with respect to diamond precipitation; (iii) immersing a diamond in the liquid metal; and (iv) removing the diamond from the metal.

Abstract: An apparatus for producing trichlorosilane, including: a reaction vessel that has a substantially cylindrical wall body, a top plate, and a bottom plate, where a reaction product gas is produced from a raw gas supplied to the reaction vessel through a gas introducing passage provided to the lower section of the cylindrical wall body; and a plurality of heaters that are disposed inside the reaction vessel to heat the raw gas, wherein each of the heaters has a heating element that is elongated in a vertical direction and generates heat by electrification, and a mount that is fixed to the bottom plate and supports the heating element; a flange is provided to intermediate height of the heating element such that the flange is arranged upper than the gas introducing passage and is elongated in horizontal direction; and a passage of the raw gas formed between adjacent heaters is narrowed by the flange.

Abstract: The present invention provides a reactor and a method for the production of high purity silicon granules. The reactor includes a reactor chamber; and the reaction chamber is equipped with a solid feeding port, auxiliary gas inlet, raw material gas inlet, and exhaust gas export. The reaction chamber is also equipped with an internal gas distributor; a heating unit; an external exhaust gas processing unit connected between a preheating unit and a gas inlet. The reaction chamber is further equipped with a surface finishing unit, a heating unit and a dynamics generating unit. The reaction is through decomposition of silicon containing gas in densely stacked high purity granular silicon layer reaction bed in relative motion, and to use remaining heat of exhaust gas for reheating. The present invention is to achieve a large scale, efficient, energy saving, continuous, low cost production of high purity silicon granules.

Abstract: A system includes a gasifier. The gasifier includes a refractory disposed about a gasification chamber and an enclosure disposed about the refractory. The system also includes an ignition device configured to extend into the gasification chamber and to initiate a gasification reaction within the gasification chamber with a refractory temperature of less than approximately 982° C.

Abstract: A power supply arrangement (MF) with an inverter (12) for generating N-phase AC current and at least one N-phase AC current transformer (2) having primary windings (211, 212, 213) and secondary windings (221, 222, 223), wherein the primary windings (211, 212, 213) are connected in a polygon and a sum vector of the voltages present at the N secondary windings (221, 222, 223) becomes zero when the transformer is idling, wherein each vertex of the polygon formed by the primary windings (211, 212, 213) is connected via a corresponding capacitor (C11, C12, C13) with a corresponding phase conductor terminal of the inverter (12).

Abstract: Power supply arrangement with inverter (3) generating single-phase AC current and transformer (4) having primary winding (41) and first secondary winding (421) and second secondary winding (422). The secondary windings (421, 422) have same number of turns and are arranged to be permeated by same magnetic flux during operation of transformer (4), so that identical voltages are tapped at secondary windings (421, 422) during operation of the transformer (4). A respective terminal of first secondary winding (421) and a respective terminal of second secondary winding (422) are connected to one another at first point (K1), that two-phase system whose phases are shifted by 180° relative to each other is produced between first point (K1), additional terminal of first secondary winding (421) and additional terminal of second secondary winding 422). First point (K1) is connected to neutral conductor terminal (N) of output of power supply arrangement via capacitor.

Abstract: The invention relates to a reactor for gasifying and/or purifying, in particular depolymerizing, plastic material (12), comprising a reactor vessel (14) for holding the plastic material (12) and a heater (18) for heating the plastic material (12) in the reactor vessel (14), the reactor vessel being at least partially filled with a metal bath (26). According to the invention, a deceleration device (24, 32) is provided in an interior (22) of the reactor vessel (14) to decelerate a flow of liquefied plastic material (12) in the reactor vessel (14), said deceleration device (24, 32) having a plurality of elements (25) that are movably arranged in the interior (22).

Abstract: A composite synthesis method and apparatus, a vaporizer for the composite synthesis apparatus, a vaporizer heater and a composite. In the composite synthesis apparatus using simultaneous vaporization, two or more vaporizers are heated by heaters such that samples vaporized by the vaporizers are supplied into a reactor to synthesize a composite. The apparatus and method may prepare multiple-metal or metal-carbon heterogeneous composites, and may be applied to various metal- and carbon-based adsorbents, absorbents, gas/liquid separation membranes and various catalyst processes. Further, the composite may be applied to various industrial fields through change in metal components or carbon structures.

Abstract: Induction for thermochemical processes, and associated systems and methods. A method in accordance with a particular embodiment includes placing first and second substrates in a reactor, with each substrate having a surface facing toward the other. Method can further include directing a precursor gas into the reactor and activating an induction coil proximate to the facing surfaces of the substrates to dissociate the precursor gas. A constituent of the precursor gas is deposited on both the first and second surfaces, and heat radiated from each surface and/or a constituent deposited on the surface is received at the other surface and/or the constituent deposited on the other surface.

Abstract: According to one embodiment, a nanocarbon producing apparatus includes a heating vessel which provides a reducing atmosphere therein, a heating source disposed on an outer circumference of the heating vessel, a hydrocarbon injection nozzle disposed on an upstream side of the heating vessel for spraying hydrocarbon into the heating vessel, and a nanocarbon product discharge nozzle disposed on a downstream side of the heating vessel, wherein a metallic substrate is disposed on an inside surface of the heating vessel and the hydrocarbon is continuously sprayed from the hydrocarbon injection nozzle, effecting a reaction to grow nanocarbon on the metallic substrate, and the grown nanocarbon product is peeled off from the metallic substrate and discharged through the discharge nozzle.

Abstract: A hydrogen system (10) comprising a reformer (12), in which a vaporized hydrocarbon fuel (50) is reformed to yield a reformate gas (62) comprising hydrogen, and a hydrogen consumer (40), the reformer and the hydrogen consumer being arranged in fluid communication such that the reformate gas can be fed to the hydrogen consumer, the hydrogen consumer, when in use, consuming at least a part of the hydrogen produced by the reformer wherein the hydrogen system further comprises:—an off gas burner (35) which is arranged such that it is in fluid communication with the hydrogen consumer and a first heat exchanger (21), in which offgas burner, when in use, remaining reformate gas in offgas from the hydrogen consumer is combusted, producing exhaust gas (53) which is passed through the first heat exchanger;—at least one air pump (30) which is arranged such that it is in fluid communication with the reformer and the offgas burner, the at least one air pump, when in use, supplying air to said reformer and offgas burner,—a

Abstract: The present invention provides a reactor and a method for the production of high purity silicon granules. The reactor includes a reactor chamber; and the reaction chamber is equipped with a solid feeding port, auxiliary gas inlet, raw material gas inlet, and exhaust gas export. The reaction chamber is also equipped with an internal gas distributor; a heating unit; an external exhaust gas processing unit connected between a preheating unit and a gas inlet. The reaction chamber is further equipped with a surface finishing unit, a heating unit and a dynamics generating unit. The reaction is through decomposition of silicon containing gas in densely stacked high purity granular silicon layer reaction bed in relative motion, and to use remaining hear of exhaust gas for reheating. The present invention is to achieve a large scale, efficient, energy saving, continuous, low cost production of high purity silicon granules.

Abstract: A thermoelectric system is provided which includes at least one tubular conduit configured to be in thermal communication with at least one first fluid flowing through the at least one tubular coolant conduit in a first direction. A plurality of thermoelectric elements can be in thermal communication with the at least one tubular conduit. A heat exchanger in thermal communication with the plurality of thermoelectric elements is configured to be in thermal communication with at least one second fluid and to surround at least a portion of the tubular conduit and plurality of thermoelectric elements. The heat exchanger can include at least one coating configured to catalyze reactions of at least one portion of the second fluid.

Abstract: Methods and devices for generating gas from nitrous oxide are provided as well as downstream uses for the product gas. Reactor devices of the invention are compact and incorporate a novel heat-exchange/regenerative cooling system to optimize N2O decomposition and reactor durability.

Abstract: Electricity is suppressed from flowing through a case of an electrically heated catalyst.

Abstract: A structure for mounting a novel reaction tube is capable of following up the thermal expansion of the reaction tube without the need of hanging down the reaction tube in the apparatus for producing silicon. In a reaction unit in a reaction vessel body of the apparatus for producing silicon, there are provided a gas feed pipe for feeding chlorosilanes and hydrogen, a reaction tube for precipitating silicon, a high-frequency coil arranged on the outer circumferential side of the reaction tube to melt the precipitated silicon, a heat insulating material provided between the reaction tube and the high-frequency coil, and an intermediate wall provided at the lower portion of the reaction unit to support the heat insulating material. The reaction tube is supported on the upper surface of the intermediate wall.

Abstract: Electricity is suppressed from flowing to a case (4) of an electrically heated catalyst (1).

Abstract: A system and method for producing natural gas is provided. a gas dynamic laser is powered by a gas, such as carbon dioxide, while the same gas is converted by a catalytic converter heated by the beam of the laser. Other gases can be formed simultaneously in other catalytic converters heated by the laser beam. The resulting converted gases can be used to produce a fuel gas. Excess heat and/or by-products of the process can be used to produce electricity.

Abstract: A heater liner assembly suitable for covering the interior of a plasma processing chamber is provided. In some embodiments, a liner assembly for a processing chamber can include a heating element embedded in a body. A flange extending outward from an outer diameter of the body includes an upper surface having a sealing surface and at least one pad that extends from the upper surface of the flange to an elevation beyond the sealing surface. The pad contributes to control of the temperature of the liner assembly by maintaining the liner assembly spaced apart from the processing chamber.

Abstract: A hydrogen generator and a fuel cell system including a fuel cell battery and the hydrogen generator. The hydrogen generator includes a cartridge including a plurality of pellets stacked within a casing, each pellet containing a hydrogen containing material capable of releasing hydrogen gas when heated; a compartment including a hydrogen outlet through a housing and as cavity within the housing within which the cartridge can be removably disposed; and an induction heating system. The induction heating system includes a plurality of secondary coils within the cartridge casing, with each secondary coil in contact with one or more of the pellets. The induction heating system also includes at least one primary coil within the compartment housing. The induction heating system provides an electromagnetic field from a flow of the current in the primary coil, induces an electric current in the secondary coil, and producing heat to heat the pellets.

Abstract: Reactors and methods for solar thermochemical reactions are disclosed. Embodiments of reactors include at least two distinct reactor chambers between which there is at least a pressure differential. In embodiments, reactive particles are exchanged between chambers during a reaction cycle to thermally reduce the particles at first conditions and oxidize the particles at second conditions to produce chemical work from heat. In embodiments, chambers of a reactor are coupled to a heat exchanger to pre-heat the reactive particles prior to direct exposure to thermal energy with heat transferred from reduced reactive particles as the particles are oppositely conveyed between the thermal reduction chamber and the fuel production chamber. In an embodiment, particle conveyance is in part provided by an elevator which may further function as a heat exchanger.

Abstract: In an apparatus for producing trichlorosilane, an internal space of a reaction chamber is partitioned in a radial direction by first walls running along a circumferential direction, and is partitioned into multiple spaces by second walls which extend in a direction crossing the circumferential direction. Upper portions or lower portions of the first walls and the second walls are formed with a communicating portion which circulates a raw material gas to be introduced, toward a central portion of a reaction chamber while the raw material gas goes through the small spaces sequentially and is turned up and down, heaters are installed in the small spaces, one of small spaces on both sides of the second walls is used as a small space for a upward flow passage, and the other is used as a small space for a downward flow passage, and the small spaces communicate with each other via the communication portion of the second walls.