Abstract: A method includes the step of receiving a first weight value from a sensor associated with a feed mixer. A first rotation speed associated with the first weight value is monitored. A second weight value is received from the sensor associated with the feed mixer and a second rotation speed associated with the second weight value is monitored. A mixing profile is generated based on the first weight value, the second weight value, the first rotation speed, and the second rotation speed. In one embodiment, a first feed ingredient is associated with the first weight value and a second feed ingredient is associated with the second weight value.

Abstract: A porous glass base material manufacturing apparatus for an optical fiber includes: a liquid mass flow controller for controlling a flow rate of raw material liquid of an organic siloxane; a vaporizer for mixing raw material liquid and carrier gas to vaporize raw material liquid to form mixed gas; a raw material liquid nozzle for ejecting raw material liquid into the vaporizer; a carrier gas supply pipe for supplying carrier gas into the vaporizer; a raw material liquid pipe for introducing raw material liquid into the nozzle; a burner for combusting mixed gas with combustible gas and combustion supporting gas to produce SiO2 particles; a mixed gas pipe for supplying mixed gas to the burner; an open/close valve on a flow path of the raw material liquid pipe; and a purge gas supply pipe that joins the raw material liquid pipe between the valve and the raw material liquid nozzle.

Abstract: Methods of depositing a molybdenum sulfide film with increased sulfur:molybdenum ratio are described. The methods include pre-cleaning a dielectric material with oxygen radicals prior to formation of a molybdenum sulfide film that has a lower oxygen content than would be formed without the pre-cleaning.

Abstract: A protective tape including a polymer film and an adhesive layer disposed on the polymer film. The adhesive layer has a storage modulus at ?20° C. of 30 KPa to 100 KPa, and a creep value of 100% to 800% when a load of 3 N is maintained for 2 hours at room temperature. Thus, the protective tape is capable of maintaining a high adhesion value with respect to a display device while minimizing damage to the adhesive layer.

Abstract: A processing liquid ejection nozzle ejects a processing liquid used for a substrate processing. The processing liquid ejection nozzle includes a nozzle main body and an angle changing mechanism. The nozzle main body includes a first main body formed with a first flow path therein which communicates with a processing liquid supply path, and a second main body bent from the first main body and formed with a second flow path therein which communicates with the first flow path. The angle changing mechanism changes an angle of the nozzle main body in a horizontal direction with respect to a fixing member to which the nozzle main body is fixed.

Abstract: Systems (100) and methods (600) for providing a product with a radiation mitigation feature. The methods comprise: obtaining a composite base layer formed of a fiber-reinforced material; and performing a deposition process to dispose a first coating layer on the composite base layer so as to form the product with a radiation barrier, the first coating layer comprising 35% by mass or less of a metal constituent, at least 65% by mass of a germanium constituent, a zero or substantially zero coating stress, and/or an overall thickness between 2 microns and 8 microns.

Abstract: Wafers including a diamond layer and a semiconductor layer having III-Nitride compounds and methods for fabricating the wafers are provided. A nucleation layer, at least one semiconductor layer having III-Nitride compound and a protection layer are formed on a silicon substrate. Then, a silicon carrier wafer is glass bonded to the protection layer. Subsequently the silicon substrate, nucleation layer and a portion of the semiconductor layer are removed. Then, an intermediate layer, a seed layer and a first diamond layer are sequentially deposited on the III-Nitride layer. Next, the silicon carrier wafer and the protection layer are removed. Then, a silicon substrate wafer that includes a protection layer, silicon substrate and a diamond layer is prepared and glass bonded to the first diamond layer.

Abstract: An electronic device includes a housing including a first plate, a second plate facing away from the first plate, and a lateral member surrounding a space between the first plate and the second plate; a display visible through at least part of the first plate; and a glass construction constructing at least part of the second plate. The glass construction includes a glass plate including a first face outwardly facing the housing and a second face facing away from the first face, an inorganic layer including a first roughness and constructed on the first face, a first polymer layer disposed between the first plate and the second face, an Optically Clear Adhesive (OCA) layer disposed between the second face and the first polymer layer, and a second polymer layer disposed between the first plate and the first polymer layer and including a third face and a fourth face.

Abstract: Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape to a central axis. A rotation rack may be operable to rotate about the central axis of the vacuum chamber. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber in a substantially symmetrical manner from the outer perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a polymeric multi-layer coating on surfaces of the one or more devices. Each layer may have a different composition of atoms to enhance the water resistance, corrosion resistance, and fiction resistance of the polymeric multi-layer coating.

Abstract: An absorber coating is provided for solar heat power generation that has excellent thermal oxidation resistance and a high spectral absorptance and manufacturing method thereof. The absorber coating for solar heat power generation has a network structure of composite particles comprising: particles of metal oxide containing mainly two or more metals selected from Mn, Cr, Cu, Zr, Mo, Fe, Co and Bi, and titanium oxide partly or entirely coating on the surface of the particle of the metal oxide. The arithmetic mean estimation of the surface of the coating is 1.0 ?m or more, and a ratio of a network area of the composite particle to a plane area of the coating is 7 or more.

Abstract: Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape to a central axis. A rotation rack may be operable to rotate about the central axis of the vacuum chamber. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber in a substantially symmetrical manner from the outer perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a polymeric multi-layer coating on surfaces of the one or more devices. Each layer may have a different composition of atoms to enhance the water resistance, corrosion resistance, and fiction resistance of the polymeric multi-layer coating.

Abstract: Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape to a central axis. A rotation rack may be operable to rotate about the central axis of the vacuum chamber. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber in a substantially symmetrical manner from the outer perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a polymeric multi-layer coating on surfaces of the one or more devices. Each layer may have a different composition of atoms to enhance the water resistance, corrosion resistance, and fiction resistance of the polymeric multi-layer coating.

Abstract: Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape to a central axis. A rotation rack may be operable to rotate about the central axis of the vacuum chamber. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber in a substantially symmetrical manner from the outer perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a polymeric multi-layer coating on surfaces of the one or more devices. Each layer may have a different composition of atoms to enhance the water resistance, corrosion resistance, and fiction resistance of the polymeric multi-layer coating.

Abstract: An optical article including a substrate with two main surfaces, at least one of which is covered by a polymer coating having an outer surface, said coating including a first superficial layer beneath the outer surface having a first refractive index n1 and a second layer beneath the first superficial layer having a second refractive index n2, with n2<n1 and having the lowest refractive index of said polymer coating, and said coating exhibiting antireflective properties due to the difference between refractive indexes n1 and n2, said refractive index difference within the coating resulting from a plasma, corona, and/or an ion beam treatment of an initial polymer coating, through the outer surface. Also, a method for manufacturing this optical article.

Abstract: The implementations described herein generally relate to steps for the dynamic, real-time control of the process spacing between a substrate support and a gas distribution medium during a deposition process. Multiple dimensional degrees of freedom are utilized to change the angle and spacing of a substrate plane with respect to the gas distributing medium at any time during the deposition process. As such, the substrate and/or substrate support may be leveled, tilted, swiveled, wobbled, and/or moved during the deposition process to achieve improved film uniformity. Furthermore, the independent tuning of each layer may be had due to continuous variations in the leveling of the substrate plane with respect to the showerhead to average effective deposition on the substrate, thus improving overall stack deposition performance.

Abstract: The invention relates to a substrate (10), especially a transparent glass substrate, provided with a thin-film multilayer comprising a functional layer (40) having reflection properties in the infrared and/or in solar radiation, especially a metallic functional layer based on silver or on a metal alloy containing silver, and two coatings (20, 60), said coatings being composed of a plurality of dielectric layers (24, 26; 64), so that the functional layer (40) is placed between the two coatings (20, 60), the functional layer (40) being deposited on a wetting layer (30) itself deposited directly onto a subjacent coating (20), characterized in that the subjacent coating (20) comprises at least one dielectric layer (24) based on nitride, especially on silicon nitride and/or aluminum nitride, and at least one noncrystalline smoothing layer (26) made from a mixed oxide, said smoothing layer (26) being in contact with said superjacent wetting layer (30).

Abstract: The invention relates to a process for depositing an anti-fouling top coat onto the outermost coating layer of a coated optical article, comprising the following steps: a) providing an optical article having two main faces, at least one of which being coated with an outermost layer; b) treating said outermost layer with energetic species resulting in surface physical attack and/or chemical modification; and c) vacuum evaporating a liquid coating material for an anti-fouling top coat by means of an evaporation device, resulting in the deposition of the evaporated coating material onto the treated outermost layer of the optical article, wherein prior to the vacuum evaporation step of the liquid coating material, said liquid coating material has been treated with energetic species.

Abstract: A CVD process for depositing a zinc oxide coating is provided. The CVD process includes providing a moving glass substrate. The CVD process also includes forming a gaseous mixture of an alkyl zinc compound and an inert gas as a first stream, providing a first gaseous inorganic oxygen-containing compound in a second stream and providing a second gaseous inorganic oxygen-containing compound in the second stream, a third stream or in both the second and third streams. Additionally, the CVD process includes mixing the streams at or near a surface of the moving glass substrate and a zinc oxide coating is formed thereon. A method for forming a coated glass article is also provided. Additionally, a coated glass article is provided.

Abstract: A dielectric layer 2 is formed on a region including grid-shaped convex portions 1a of a resin substrate 1 having the grid-shaped convex portions 1a with pitches of 80 nm to 120 nm on its surface, and metal wires 3 are formed on the dielectric layer 2. It is thereby possible to obtain a wire grid polarizer having a microstructural concavo-convex grid with pitches of the level of 120 nm or less that has not been implemented.

Abstract: Certain example embodiments relate to Ni-inclusive ternary alloy being provided as a barrier layer for protecting an IR reflecting layer comprising silver or the like. The provision of a barrier layer comprising nickel, chromium, and/or molybdenum and/or oxides thereof may improve corrosion resistance, as well as chemical and mechanical durability. In certain examples, more than one barrier layer may be used on at least one side of the layer comprising silver. In still further examples, a NixCryMoz-based layer may be used as the functional layer, rather than or in addition to as a barrier layer, in a coating.

Abstract: The invention provides a coater, and methods of using the coater, for depositing thin films onto generally-opposed major surfaces of a sheet-like substrate. The coater has a substrate transport system adapted for supporting the substrate in a vertical-offset configuration wherein the substrate is not in a perfectly vertical position but rather is offset from vertical by an acute angle. The transport system defines a path of substrate travel extending through the coater. The transport system is adapted for conveying the substrate along the path of substrate travel. Preferably, the transport system includes a side support for supporting a rear major surface of the substrate. The preferred side support bounds at least one passage through which coating material passes when such coating material is deposited onto the substrate's rear major surface. Preferably, the coater includes at least one coating apparatus (e.g.

Abstract: There is provided a method of coating a substrate with a zinc oxide film. The method includes (a) providing a substrate with at least one substantially flat surface, (b) subjecting the surface at least partially to a plasma-etching process, and (c) depositing on the etched surface, a layer that includes zinc oxide. The method is particularly suitable for manufacturing solar cells.

Abstract: An isothermal, low pressure-based process of depositing material within a substrate has been developed and results in creating an extremely narrow reaction zone within which a more uniform and efficient deposition will occur. Sets of isothermal plasma operating conditions have been found that create a narrow deposition zone, assuring that the deposited material is clear glass rather than soot particles. The chemical delivery system, in one arrangement, utilizes rods of solid phase source material (which may otherwise be difficult to obtain in gaseous form). The operating conditions are selected such that the hot plasma does not transfer a substantial amount of heat to the substrate tube, where the presence of such heat has been found to result in vaporizing the reactant material (creating soot) and developing hot spots.

Abstract: The invention relates to a method for producing an optical article having antireflection or reflective properties and comprising a substrate having at least one main surface, comprising the step of depositing an sub-layer onto a substrate's main surface, the step of treating the sub-layer by ionic bombardment and the step of depositing onto said sub-layer a multilayered stack comprising at least one high refractive index layer and at least one low refractive index layer. According to a preferred embodiment, the deposition of the sub-layer is conducted in a vacuum chamber in which a gas is supplied during the deposition step.

Abstract: Embodiments provided herein describe low-e panels and methods for forming low-e panels. A transparent substrate is provided. A reflective layer is formed above the transparent substrate. A barrier layer is formed above the reflective layer. A nitride-containing layer is formed above the barrier layer. The nitride-containing layer has a thickness that is 1 nm or less. A over-coating layer is formed above the nitride-containing layer. The over-coating layer includes a different material than that of the nitride-containing layer.

Abstract: A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.

Abstract: Polymer-based optically-variable devices (OVDs) for security applications and methods for producing the same. The uniformity of thickness of the structure of such devices is optimized by controlling previously neglected process parameters such as the temperature distribution of the deposition nozzle, the substrate and the deposition drum, their emissivities, the micro-roughness of the substrate, and the rate of monomer re-evaporation. Re-evaporation is minimized by initiating radiation-curing within two seconds of monomer deposition. A method includes equipment reducing all sources of emissivity non-homogeneities, such as surface blemishes in the surface areas exposed to the substrate to preferentially fabricate substrates with haziness less than 5% and gloss greater than 90%. Controlling, a maximum variation of thickness of the transmissive layer of an OVD ensures that no appreciable color-shift variation is visible to the naked eye.

Abstract: A method for increasing the durability of glass by a coating, according to the present invention comprises the step of coating glass with a coating comprising at least one layer whose thickness is below 5 nanometers, wherein the coating comprises a compound of at least one element.

Abstract: Apparatus, systems and methods for characteristics of glass components through use of one or more coatings are disclosed. The coatings are typically thin coatings, such as thin film coatings. The coatings can serve to increase strength of the glass components and/or provide durable user interfacing surfaces. Accordingly, glass articles that have received coatings are able to be not only thin but also sufficiently strong so as to resist damage from impact events. The coated glass articles are well suited for use in consumer products, such as consumer electronic devices (e.g., electronic devices).

Abstract: There is provided a method of forming a regular array of rows of subpixels on a workpiece. The subpixels have c different colors, where a colors are formed by printing. The subpixel pitch is s.

Abstract: A method of continuously forming a thin film includes the step of: moving a glass substrate with a thin strip shape having a constant db/2(d+b), where d is a thickness thereof and b is a width thereof in a cross section thereof, within a range from 0.015 to 0.15 through a film depositing region in which a reaction gas is supplied and a temperature is controlled to be high so that the glass substrate is rapidly heated; and moving continuously the glass substrate, immediately after the film depositing region, to pass through a cooling region in which a temperature is lower than that of the film depositing region, so that the glass substrate is rapidly cooled and the thin film formed of a component of the reaction gas is formed on the glass substrate.

Abstract: The present invention relates to an optical element comprising: a optical glass made of a phosphate glass or a fluorophosphate glass; and an optically functional film formed on a surface of the optical glass, wherein the optically functional film comprises two or more layers made of different materials, and the outermost surface layer thereof is made of a material(s) having low reactivity with phosphoric acid.

Abstract: A method for production of a substrate having a patterned optical coating on a curved surface is provided. The method includes applying a masking to a sub-area of the curved surface applying an optical coating using a vacuum deposition method, and removing the masking. A coated substrate, which can be produced in particular by the method described above, is also provided. The coated substrate includes a curved surface that is provided with at least one patterned optical coating. The at least one patterned optical coating is provided on at least one sub-area of the curved surface and is missing on at least one adjacent sub-area.

Abstract: A coating process for coating a surface of a glass substrate in normal air pressure, in which coating process at least one liquid starting material is atomized into droplets and the formed droplets are guided towards the surface to be coated. The formed droplets are vaporized substantially close to the surface to be coated before the droplets contact the surface to be coated by bringing to the coating process the thermal energy needed for vaporizing the droplets with the glass substrate.

Abstract: Disclosed is process of forming a regular array of rows of subpixels on a workpiece. The subpixels having four different colors, and a subpixel pitch s. Of the four colors, q colors are formed by printing and r colors are formed by a non-printing method.

Abstract: A method of making a heat treated coated article includes forming at least one layer comprising diamond-like carbon (DLC) on a glass substrate, and forming a removable protective film on the glass substrate over at least the layer comprising DLC. The removable protective film includes first and second inorganic layers, the first inorganic layer comprising zinc oxide and nitrogen and being located between the layer comprising DLC and the second inorganic layer. The glass substrate may be heat treated so that during the heat treating the protective film prevents significant burnoff of the layer comprising DLC.

Abstract: Certain example embodiments relate to a burner for use in combustion deposition depositing a coating on a substrate. An infrared (IR) burner generates radiant energy in an area between the burner and the substrate. A delivery device (1) provides a stream comprising a substantially vaporized precursor and a carrier gas from a location remote from the radiant energy generated by the IR burner, and (2) causes the stream to flow between the substrate and the IR burner. The stream is substantially laminar when exiting the delivery device. The radiant energy is sufficient to cause the precursor in the stream to be combusted and to heat the substrate to allow at least a portion of the combusted precursor to form the coating, directly or indirectly, on the substrate. The burners of certain example embodiments may be used, for example, to combustion deposition deposit metal oxide coatings onto glass substrates.

Abstract: In certain example embodiments, a coated article includes respective layers including hydrogenated diamond-like carbon (DLC) and zirconium nitride before heat treatment (HT). During HT, the hydrogenated DLC acts as a fuel which upon combustion with oxygen produces carbon dioxide and/or water. The high temperature developed during this combustion heats the zirconium nitride to a temperature(s) well above the heat treating temperature, thereby causing the zirconium nitride to be transformed into a new post-HT layer including zirconium oxide that is very scratch resistant and durable.

Abstract: Certain example embodiments of this invention relate to a method of forming a coating on a glass substrate using combustion deposition. A glass substrate having at least one surface to be coated is provided. A reagent is selected. A precursor to be combusted with the reagent is introduced. Using at least one infrared burner, at least a portion of the reagent and the precursor are combusted to form a combusted material, with the combusted material including non-vaporized material. The glass substrate is provided in an area so that the glass substrate is heated sufficiently to allow the combusted material to form the coating, directly or indirectly, on the glass substrate. The coating may be substantially uniform. In certain example embodiments, a silicon oxide coating may be deposited, which increases visible transmission of the glass substrate by at least about 1.7%.

Abstract: A method for interlaminating a transparent embossed hologram, the transparent embossed hologram comprising a support having two sides, at least one of the two sides either itself being embossed or having a layer thereon which is embossed and a layer of a HRI-material contiguous with the embossed side or embossed layer, comprising the steps of: a) conditioning the outermost surface of the layer of inorganic HRI-material with at least one organic liquid; b) drying the outermost surface of the layer of the inorganic HRI-material thereby providing a conditioned outermost surface of the layer of inorganic HRI-material; c) applying an adhesive layer to the conditioned outermost surface; and d) laminating the outermost surface of inorganic HRI-material to an optionally transparent film, wherein the at least one organic liquid is selected from the group consisting of ketones, ethers, heterocyclic ethers, lactams, amides, halo-aliphatic compounds, nitriles and esters; wherein at least one of the support and the film i

Abstract: Certain example embodiments relate to a method of forming a coating on a glass substrate using combustion deposition. A glass substrate having at least one surface to be coated is provided. An organosiloxane inclusive precursor having a ring- or cage-like structure to be combusted is introduced. Using at least one flame, at least a portion of the precursor is combusted to form a combusted material, the combusted material including non-vaporized material. The glass substrate is provided in an area so that the glass substrate is heated sufficiently to allow the combusted material to form the coating, directly or indirectly, on the glass substrate. In certain example embodiments, the precursor is a cyclic siloxane based and/or polyhedral silsesquioxane (POSS) based precursor, which advantageously may affect the coating's transmission and/or reflection properties compared to conventionally used silicon precursors.

Abstract: A gaming machine includes a cabinet frame, a display, and an emotive lighting area. The cabinet frame has a cabinet surface visible to and facing a player position in front of the gaming machine. The display is mounted to the cabinet frame and is configured to display a randomly selected outcome from a wagering game. The emotive lighting area is integrated with the cabinet frame on the cabinet surface, proximate the display, and is separate from the display. The emotive lighting area includes a light source and a reflective surface, each of the light source and the reflective surface being concealed within the cabinet frame such that they are not viewable from the player position, the reflective surface configured to receive light directly from the light source and to reflect the light to a viewable area.

Abstract: A mirror having a first substrate and a reflective film formed on the first substrate, the reflective film made of mercury and at least one metal, wherein the mirror is operative such that light incident upon the first substrate and having an intensity that falls below a fluence threshold is reflected by the reflective film, and light incident upon the first substrate and having an intensity that exceeds the fluence threshold passes through the reflective film.

Abstract: The invention relates to a method for producing an optical article having antireflection or reflective properties and comprising a substrate having at least one main surface, comprising the step of depositing an sub-layer onto a substrate's main surface, the step of treating the sub-layer by ionic bombardment and the step of depositing onto said sub-layer a multilayered stack comprising at least one high refractive index layer and at least one low refractive index layer. According to a preferred embodiment, the deposition of the sub-layer is conducted in a vacuum chamber in which a gas is supplied during the deposition step.

Abstract: An image sensor includes a color filter, an over-coating layer formed on the color filter, and a medium layer formed on the over-coating layer, wherein the medium layer is configured with at least two medium layers of which refractive indices are different from each other.

Abstract: An isothermal, low pressure-based process of depositing material within a substrate has been developed, and is particularly useful in forming an optical fiber preform results in creating an extremely narrow reaction zone within which a more uniform and efficient deposition will occur. Sets of isothermal plasma operating conditions have been found that create a narrow deposition zone, assuring that the deposited material is clear glass rather than soot particles. The exhaust end of the tube is connected to a vacuum system which is in turn connected to a scrubber apparatus for removal and neutralization of reaction by-products. The operating conditions are selected such that the hot plasma does not transfer a substantial amount of heat to the substrate tube, where the presence of such heat has been found to result in vaporizing the reactant material (creating soot) and developing hot spots.

Abstract: A method of making a cathode structure for an OLED provided over organic layers includes evaporating a first layer over the organic layers, such layer including a metal or metal alloy whose work function is less that 4.0 eV, or a material including an electron-injecting dopant and a reactive metal; depositing at least one second layer of an inorganic material over the first layer to form a buffer structure with the first layer; and sputtering a protective layer of a metal or metal alloy provided over the buffer structure.

Abstract: A method of making a heat treated (HT) coated article to be used in shower door applications, window applications, or any other suitable applications where transparent coated articles are desired. For example, certain embodiments of this invention relate to a method of making a coated article including a step of heat treating a glass substrate coated with at least a layer of or including carbon and an overlying protective film including a zinc oxide inclusive layer. Following and/or during heat treatment (e.g., thermal tempering, or the like) the protective film may be removed. Other embodiments of this invention relate to the pre-HT coated article, or the post-HT coated article.

Abstract: A method for manufacturing a preform for optical fibers by a vapor deposition process wherein an intermediate step is carried out between one deposition phase and the next deposition phase(s), wherein the intermediate step includes supplying an etching gas to the supply side of the hollow substrate tube.

Abstract: Optical thin-film-forming methods are disclosed that form optical thin film on a base plate arranged in a vacuum chamber. An exemplary method includes the steps of retaining the base plates on a plurality of retaining frames of a base-plate retainer, heating the base plate, and emitting a deposition material from a deposition source. The retaining frames are configured to make the entire base plate uniformly heated.