With Programmed Control Or Using Mechanized Nozzle Or Projector (e.g., Robotic Sprayer, Etc.) Patents (Class 427/427.2)
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Patent number: 7670643Abstract: An apparatus and method for dispensing a solution on a substrate is described in which the solution is dispensed through a solution nozzle assembly while the substrate is rotated. As the solution is dispensed, the solution on the substrate forms a wave front that radially spreads from the substrate center to the substrate edge. The dispensing of the solution is performed in such a way that the solution is dispensed at a radial location substantially equivalent to or less than the radial location of the wave front at any instant in time.Type: GrantFiled: July 1, 2004Date of Patent: March 2, 2010Assignee: Tokyo Electron LimitedInventors: Thomas Winter, Minoru Kubota
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Patent number: 7651724Abstract: An apparatus and a method for manufacturing semiconductor devices implemented with improved steps of forming a sealant resin layer on the surface of a wafer substrate provided thereon with protruded electrodes. Through process steps of sending driving signals to a stage unit and discharging head based on the comparison with stage position information from stage position detector, and controlling the position of a substrate holding unit with the suction held semiconductor wafer substrate and the scanning movements of discharging mechanism such that minute liquid droplets of raw sealant resin are suitably discharged from discharging head, a raw sealant resin layer is formed on the surface the wafer substrate except the area for forming bump electrodes. The raw sealant resin layer is subsequently hardened to form a sealant resin layer. The reduction of manufacturing costs, and more precise control of location and thickness of the sealant resin become feasible by the method disclosed herein.Type: GrantFiled: April 7, 2006Date of Patent: January 26, 2010Assignee: Ricoh Comapny, Ltd.Inventor: Kazunari Kimino
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Publication number: 20090317554Abstract: A spray coating apparatus for spraying material on a substrate includes a frame and a gantry coupled to the frame. The gantry may be configured to provide x-axis, y-axis and z-axis movement. A device is coupled to the gantry. The device may be configured to rotate about the z-axis and pivot about a point on the z-axis. A spray head is coupled to the device. A controller is coupled to the gantry and the spray head. The controller may be configured to control the automated movement of the gantry to provide x-axis, y-axis and z-axis movement and rotational and pivoting movement of the spray head. Other embodiments of the spray coating device and related methods are further disclosed.Type: ApplicationFiled: June 24, 2008Publication date: December 24, 2009Applicant: SPECIALTY COATING SYSTEMS, INC.Inventors: Dennis R. Christensen, Imran Ahmad, Joseph Wayne Brickell
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Publication number: 20090304940Abstract: Paint booths for applying paint to an object, as well as methods for degrading coating operations associated with a paint booth, are disclosed. Paint booth may generally include one or more robot rails positioned parallel to the path of the conveyor, and one or more robots positioned on at least one of the rails. Robots may be configured to simultaneously apply a first paint layer to the interior and exterior surfaces of the object. Paint booths may further include one or more additional robots positioned on at least one of the rails and configured to simultaneously apply a second paint layer to the interior and exterior surfaces of the object.Type: ApplicationFiled: June 4, 2009Publication date: December 10, 2009Applicant: Durr Systems, GmbHInventors: Robert Heldt, Jan Grigoleit, Vassilios Sougioltzis, Thomas A. Bucknell
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Patent number: 7622158Abstract: A system for painting an article, such as an automotive vehicle body, includes a painting booth, a conveyor for transporting articles through the painting booth, a first rail located beside and extending along the conveyor, a second rail located beside and extending along the conveyor at a lower elevation than an elevation of the first rail, a paint robot including an articulating arm mounted on the first rail for displacement along the first rail, a panel opener robot mounted on the second rail for displacement along the second rail such that the paint robot and the panel opener robot can move past each other on the rails without interference.Type: GrantFiled: May 4, 2006Date of Patent: November 24, 2009Assignee: Fanuc Robotics America, Inc.Inventors: Scott J. Clifford, James M. Kowalski, Martin D. Rola, Donald S. Bartlett, Paul D. Copioli, James B. Gerds, II, Marcin Gora, Stan H. McCloskey
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Patent number: 7611753Abstract: A process is provided for impregnating porous mineral substrates by a spray technique in which use is made of a gas-supported spraying assembly to apply liquid impregnating agent in a controlled manner to the substrate surface, the amount consumed being markedly less than the amount consumed in a conventional method of application by a flow-coating process.Type: GrantFiled: April 25, 2003Date of Patent: November 3, 2009Assignee: Degussa AGInventors: Bernd Bartkowiak, Kerstin Weissenbach, Nadja Kempkes, Burkhard Standke
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Patent number: 7595094Abstract: A method for manufacturing a carpet material that typically includes applying a coating To a substrate where the coating includes the reaction product of a B-side that includes an esterified vegetable oil-based polyol and a catalyst and an A-side that includes an isocyanate and the reaction product of a B-side that includes a vegetable oil-based polyol and a catalyst and an A-side that includes an isocyanate. The polyols may optionally be blown, oxylated, and/or neutralized.Type: GrantFiled: January 25, 2005Date of Patent: September 29, 2009Assignee: Urethane Soy Systems, Co.Inventors: Thomas M. Kurth, Richard A. Kurth, Robert B. Turner, Les P. Kreifels
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Patent number: 7592033Abstract: A dispenser that dispenses fluid is controlled using a feedback control system. The control system uses a positional encoder to determine the precise position of a valve contained in an actuator in order to control the dispensing of the fluid. Various motion profiles may be used to control the position of the valve. The motion profiles of the valve enable controlled variation of the amount of fluid dispensed over time and enable several specific improvements to the dispensing of sealant in the manufacture of metal and composite cans.Type: GrantFiled: July 8, 2004Date of Patent: September 22, 2009Assignee: Computrol, IncInventors: Ian J. Buckley, William W. Weil, Scott J. Woolley
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Patent number: 7541068Abstract: A method and apparatus for dispensing precise quantities of reagents is disclosed including a positive displacement syringe pump in series with a dispenser, such as an aerosol dispenser or solenoid valve dispenser. The pump is controlled by a stepper motor or the like to provide an incremental quantity or continuous flow of reagent to the dispenser. The pump and dispenser are operated in cooperation with one another such that the quantity and/or flow rate of liquid dispensed by the dispenser can be precisely metered substantially independently of the particular operating parameters of said dispenser to attain a desired flow rate, droplet size or mist quality, droplet frequency and/or droplet velocity.Type: GrantFiled: June 6, 2006Date of Patent: June 2, 2009Assignee: BioDot, Inc.Inventor: Thomas C. Tisone
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Patent number: 7537796Abstract: A method and apparatus for simultaneously coating and measuring a part. The apparatus includes a part support, a sprayer and a part measurer positioned adjacent to the part support and a display device positioned adjacent to the part support. The sprayer applies a coating to a section of the part while the part measurer continuously measures a dimension of the section of the part being coated. In one embodiment, an initial amount of coating and a final amount of coating are applied to the section of the part based on the dimension measurements and desired dimension of the part. In another embodiment, the amount of coating applied to the part is based on the desired coating thickness. As a result, the apparatus and method of the present invention significantly reduces the margin of error related to the application of coatings to parts.Type: GrantFiled: November 8, 2005Date of Patent: May 26, 2009Assignee: Dimension Bond CorporationInventor: Bruce Nesbitt
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Patent number: 7537797Abstract: A method and apparatus for simultaneously coating and measuring a part. The apparatus includes a part support, a sprayer and a part measurer positioned adjacent to the part support and a display device positioned adjacent to the part support. The sprayer applies a coating to a section of the part while the part measurer continuously measures a dimension of the section of the part being coated. In one embodiment, an initial amount of coating and a final amount of coating are applied to the section of the part based on the dimension measurements and desired dimension of the part. In another embodiment, the amount of coating applied to the part is based on the desired coating thickness. As a result, the apparatus and method of the present invention significantly reduces the margin of error related to the application of coatings to parts.Type: GrantFiled: November 28, 2005Date of Patent: May 26, 2009Assignee: Dimension Bond CorporationInventor: Bruce Nesbitt
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Publication number: 20090110839Abstract: Control method and apparatus for a manual spray gun may include a second manually actuated trigger disposed on the spray gun handle, with the second trigger being operational to select or change one or more coating operation parameters.Type: ApplicationFiled: October 31, 2007Publication date: April 30, 2009Applicant: Nordson CorporationInventors: Brian Mather, Jeffrey A. Perkins
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Publication number: 20090074979Abstract: A method for controlling a painting system including an industrial robot or manipulator arm arranged with a wrist section and carrying a paint applicator arranged on the robot wrist is described. Paint is applied by the applicator to a substantially circular or elliptical area on the surface, the center of the area being defined as a Tool Center Point. The wrist section is arranged capable of moving and orienting the paint applicator. In the method, the paint applicator is moved by the manipulator arm so that the Tool Center Point moves along a planned path so coating a part of the surface. The planned path may include one or more bends. The path taken by the robot wrist may be controlled to follow a different path from the path taken by the Tool Center Point. A system and a computer program for carrying out the method are also described.Type: ApplicationFiled: November 18, 2008Publication date: March 19, 2009Inventors: Arnulf Krogedal, Jan Inge Tjolsen
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Patent number: 7485346Abstract: Methods and apparatus for controllably dispensing photoresist solutions and other fluids in semiconductor manufacturing equipment from an array of syringe-based fluid dispensers. A multi-syringe fluid dispensing system is provided for photoresist coating within a wafer track coating module. The coating module may contain a spin chuck that is positioned within a catch cup. A robotic dispense arm and gripper assembly may be positioned within the coating module for gripping and positioning a fluid syringe. An array of syringes may be stored on a solution tray within the wafer track coating module for holding a plurality of fluid syringes containing photoresist solutions.Type: GrantFiled: January 30, 2006Date of Patent: February 3, 2009Assignee: ASML Netherlands B.V.Inventors: Branko Bem, Dikran Babiklan
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Patent number: 7470447Abstract: Fluid discharge device and method for intermittently discharging and feeding fluid in a constant amount with high speed and high precision, the fluid exemplified by various kinds of liquids such as adhesives, solder paste, fluorescent materials, electrode materials, greases, paints, hot melts, chemicals, foods and the like in production processes in the fields of electronic components, household electrical appliances, displays, and the like. By providing a fluid supply device for supplying the fluid to two surfaces that are moved relative to each other along a direction of a gap, a continuous flow supplied from the fluid supply device is converted into an intermittent flow by utilizing a pressure change due to a change in the gap of the relatively moving surfaces, while the intermittent discharge amount per dot is controlled by the rotational speed of the fluid supply device.Type: GrantFiled: February 12, 2004Date of Patent: December 30, 2008Assignee: Panasonic CorporationInventors: Teruo Maruyama, Takashi Inoue, Ryoji Hyuga
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Patent number: 7462377Abstract: Methods for operating a material dispensing system. The method includes measuring numerical values of an operating parameter, such as line velocity, material pressure, or material temperature, of the dispensing system to predict a future numerical value of the operating parameter. The predicted numerical value of the operating parameter is used to accurately define a start time, which is measured from the detection of the presence of a workpiece being transported past an applicator of the dispensing system, at which to initiate dispensing of the material from the applicator. A calibration procedure is provided for deriving a mathematical relationship used to determine the predicted numerical value of the operating parameter.Type: GrantFiled: April 11, 2005Date of Patent: December 9, 2008Assignee: Nordson CorporationInventors: Martin Gaon, Steven Julian
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Patent number: 7455878Abstract: An apparatus and method for simultaneously coating and measuring a part including a part support, a sprayer, a part measurer including a digital camera and a display device, all of which are positioned adjacent to the part support. The sprayer applies a coating to a section of the part while the part measurer continuously measures at least two dimensions of the section. The digital camera takes at least one picture of the entire section of the part while the part is being coated and enables a user to accurately determine the cross section of the part to the optimum finished part configuration and size and also detect defects, blemishes or coating irregularities formed on the section. The apparatus and method of the present invention significantly reduces the margin of error related to the application of coatings to parts, the number of defective parts and increases the overall efficiency.Type: GrantFiled: December 15, 2004Date of Patent: November 25, 2008Assignee: Dimension Bond CorporationInventor: Bruce M. Nesbitt
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Patent number: 7449070Abstract: A microdeposition system (20) and method includes a head with a plurality of nozzles (230). A controller (22) generates nozzle firing commands that selectively fire the nozzles to create a desired feature pattern. Configuration memory stores voltage waveform parameters that define a voltage waveform (280) for each of the nozzles. A digital to analog converter (DAC) sequencer communicates with the configuration memory and the controller and outputs a first voltage waveform for a first nozzle when a nozzle firing command for the first nozzle is received from the controller (22). A resistive ladder DAC receives the voltage waveforms from the DAC sequencer. An operational amplifier (opamp) communicates with the resistive ladder DAC and amplifies the voltage waveforms. The nozzles fire droplets when the voltage waveforms received from the opamp exceed a firing threshold of the nozzle (230).Type: GrantFiled: May 31, 2002Date of Patent: November 11, 2008Assignee: ULVAC, Inc.Inventors: Charles O. Edwards, David Albertalli, James Middleton, George Fellingham
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Patent number: 7435447Abstract: In a high pressure processing system configured to treat a substrate, a flow measurement device is utilized to determine a flow condition in the high pressure processing system. The flow measurement device can, for example, comprise a turbidity meter. The flow parameter can, for example, include a volume flow rate or a time to achieve mixing of a process chemistry within a high pressure fluid used to treat the substrate.Type: GrantFiled: February 15, 2005Date of Patent: October 14, 2008Assignee: Tokyo Electron LimitedInventor: Wayne M. Parent
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Publication number: 20080220174Abstract: A system measures a location of a drop delivered by, for example, an ink-jet type applicator. An image of the drop is captured from two directions, resulting in two drop images. Only one image capturing apparatus is needed to capture the drop images. The location in three-dimensional space is determined by using the two images but only one image capturing device. The position or location information can then be used to calibrate a coating apparatus.Type: ApplicationFiled: March 10, 2008Publication date: September 11, 2008Applicant: Labcoat, Ltd.Inventor: Eyal Teichman
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Patent number: 7422773Abstract: A cover for a robot which includes an electrostatic spray gun with a nozzle which sprays charged material. The cover includes an insulating layer adapted to generally surround the robot except at an aperture where the nozzle extends from the cover. The cover also includes a conductor on the insulating layer near the aperture and spaced apart from the robot. A charge source provides an electric charge to the conductor.Type: GrantFiled: April 27, 2005Date of Patent: September 9, 2008Assignee: TD Industrial Coverings, Inc.Inventor: Mark D'Andreta
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Patent number: 7404860Abstract: The invention relates to a device and method for controlling the operation of a thermal spray torch (12). The inventive device and method are characterized in that an on-board camera (54) and pyrometer (70) are used to measure the properties of the jet (16) and the temperature of the deposit (24) on the part (22) and in that the correction to be made to supply parameters of the torch (12) is deduced. Furthermore, the invention is characterized in that the corrected parameters are sent to the cabinet (30) that controls the torch (12).Type: GrantFiled: February 28, 2003Date of Patent: July 29, 2008Assignee: Snecma ServicesInventors: Michel Vardelle, Thierry Renault, Cédric Bossoutrot, Frédéric Braillard, Hakim Hoffmann
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Patent number: 7364775Abstract: An apparatus and method use closed loop control processes to automatically adjust a command signal used to change an operating state of a fluid dispensing gun. Proportional, integral and/or derivative control processes are used to determine an operating parameter comprising on time compensation, off time compensation and/or a fluid pressure compensation. An adjustment is made to the operating parameter if a number of consecutive measurements of an adhesive bead characteristic are outside of a predetermined tolerance range. A sensor for producing a feedback signal is used to communicate a measurable difference between an actual and a desired bead characteristic. The feedback signal applied in real time is used when determining the operating parameter, reducing substrate waste and increasing efficiency.Type: GrantFiled: November 9, 2004Date of Patent: April 29, 2008Assignee: Nordson CorporationInventor: Richard G. Klein
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Patent number: 7332036Abstract: The invention relates to a device and a method for control of the operation of a thermal projection torch (12), characterized in that the characteristics of the jet (16) and the temperature of the deposit (24) on the piece (22) are measured by means of a camera (54) and a combined pyrometer (70). The correction to be made to the supply parameters of the torch (12) are deduced therefrom and the corrected parameters are transmitted to the unit (30) controlling the torch (12).Type: GrantFiled: February 28, 2003Date of Patent: February 19, 2008Assignee: Snecma ServicesInventors: Michel Vardelle, Thierry Renault, Cédric Bossoutrot, Frédéric Braillard, Hakim Hoffmann
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Patent number: 7323061Abstract: The invention relates to a device and method for controlling the operation of a thermal spray torch (12). The inventive device and method are characterised in that an on-board camera (54) and pyrometer (70) are used to measure the properties of the jet (16) and the temperature of the deposit (24) on the part (22) and in that the correction to be made to the supply parameters of the torch (12) is deduced. Furthermore, the invention is characterised in that the corrected parameters are sent to the cabinet (30) that controls the torch (12).Type: GrantFiled: February 28, 2003Date of Patent: January 29, 2008Assignee: SNECMA ServicesInventors: Michel Vardelle, Thierry Renault, Cédric Bossoutrot, Frédéric Braillard, Hakim Hoffmann
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Patent number: 7323062Abstract: The invention relates to a device and a method for control of the operation of a thermal projection torch (12), characterized in that the characteristics of the jet (16) and the temperature of the deposit (24) on the piece (22) are measured by means of a camera (54) and a combined pyrometer (70). The correction to be made to the supply parameters of the torch (12) are deduced therefrom and the corrected parameters are transmitted to the unit (30) controlling the torch (12).Type: GrantFiled: February 28, 2003Date of Patent: January 29, 2008Assignee: Snecma ServicesInventors: Michel Vardelle, Thierry Renault, Cédric Bossoutrot, Frédéric Braillard, Hakim Hoffmann
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Patent number: 7320814Abstract: A method of spraying patterns on a web that includes directing at least one intermittent spray of liquid onto the web to form a pattern on the web; sensing a position of a leading edge of at least one of the spray and the pattern relative to one or more references on the web; generating a first correction signal when the leading edge is out of position; and adjusting the spray of liquid in response to the first correction signal to correctly position a leading edge of a subsequent pattern. The method further includes sensing a position of a trailing edge of at least one of the spray and the pattern relative to one or more references on the web; generating a second correction signal when the trailing edge is out of position; and adjusting the spray of liquid in response to the second correction signal to correctly position a trailing edge of subsequent patterns.Type: GrantFiled: December 19, 2003Date of Patent: January 22, 2008Assignee: Kimberly-Clark Worldwide, Inc.Inventors: Gregory M. Blincoe, Kent A. Franklin, Scott Delzer, Arch Morgan
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Patent number: 7291364Abstract: The present invention is directed to an automated system that includes a hi-resolution three-dimensional imaging apparatus for topographic modeling that is electronically coupled with a computer. The system incorporates one or more algorithms for converting the complex and randomly-occurring contours found in natural terrain into an efficient series of adjacent and parallel coloring-agent imaging paths or swaths (comprised of inks, dyes, paints, and/or pigments). The swaths are defined in simplified 2-axis surface contour-following printer-head movements by the system's CPU, printer driver software, driver circuitry and/or logic circuitry. This multi-axis control of the system assures that each of the swaths are seamlessly rendered next to one another while also maintaining an optimal proximity between the upper surface of the 3D model and the nozzle end of one or more hi-resolution printer.Type: GrantFiled: April 6, 2001Date of Patent: November 6, 2007Assignee: Solid Terrain ModelingInventors: Lawrence Q. Faulkner, Mark E. Fisher, Justin Luton
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Patent number: 7189434Abstract: A photoresist supply apparatus of semiconductor coating equipment fills a supply pipe with new photoresist when a used photoresist bottle is replaced. The photoresist supply apparatus includes first and second photoresist bottles, first and second gas supply pipes connected to the bottles, first and second solenoid valves disposed along the gas supply pipes, first and second purge start buttons, first and second photoresist supply pipes, first and second trap tanks to which the supply pipes are connected, a third photoresist supply pipe connected to the trap tanks, a nozzle connected to the third photoresist supply pipe, first and second level sensors disposed at an upper level of the trap tanks, third and fourth level sensors disposed at a lower level of the trap tank, first and second discharge pipes connected to the trap tanks, third and fourth solenoid valves disposed along the discharge pipes, first and second drain sensors associated with the discharge pipes, and a controller.Type: GrantFiled: January 10, 2006Date of Patent: March 13, 2007Assignee: Samsung Electronics Co., Ltd.Inventor: Yong-Kyung Kim
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Patent number: 7125584Abstract: A liquid film forming method of dropping a liquid adjusted to be spread into a give amount on a substrate to be processed from a dropping nozzle or dropping nozzles of a dropping unit onto the substrate, and then moving the dropping unit and the substrate relatively while keeping the dropped liquid on the substrate, so as to form a liquid film on the substrate, wherein the relative movement of the dropping unit and the substrate is composed of straight movement along a file direction in which the dropping unit passes from one end side of the substrate through an upper space of the substrate to the other end side of the substrate, and movement along a rank direction outside the substrate, movement distance along the file direction is the sum of dropping length (L) over the substrate and distance of an acceleration/deceleration section, and movement speed (v) along the file direction over the substrate is defined dependently on the square root of the product of the dropping length (L) and the absolute value ofType: GrantFiled: October 31, 2003Date of Patent: October 24, 2006Assignee: Kabushiki Kaisha ToshibaInventor: Shinichi Ito
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Patent number: 7112350Abstract: A system for sealing an air duct by coating the interior of the duct with a material similar to the coating used for spray-on truck bed liners. A spray device applies the liner material to the interior surface of the ducts and the spray device is held in the center of the duct by retractable sets of wheels. The spray device is removably attached to a supply hose that provides liner material to the spray device from a storage tank via a supply pump. The supply hose is first fed through the duct, the spray head is attached to the supply hose and the liner material is sprayed onto the duct as the spray head is retracted through the duct. The system can be either computer or manually controlled and can optionally employ an electrostatic unit to put opposite electrical charges on the duct and the liner material.Type: GrantFiled: July 14, 2003Date of Patent: September 26, 2006Assignee: Duct Seal Systems, Inc.Inventor: Gregory W. Roberts
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Patent number: 7105203Abstract: The intermittent coating apparatus which includes a nozzle 1 which applies a paint 6 to a base material, a feeding side two-way valve 10 which repeats feeding of the paint 6 to the nozzle 1 and stop of the feeding, a return side two-way valve which 11 repeats discharge of the paint 6 to a return side and stop of the discharge, a paint flow path 12, means to feed the paint 6 into the flow path 12, and paint returning means 5 which repeats suction and return of the paint 6 out of and into the nozzle 1, and is characterized in that switching of the feeding side two-way valve 10 is carried out earlier than that of the return side two-way valve 11 within a range not shorter than 5 msec and not longer than 100 msec at least at a coating start time.Type: GrantFiled: February 7, 2000Date of Patent: September 12, 2006Assignee: Mastsushita Electric Industrial Co., Ltd.Inventors: Noboru Masuda, Masaru Watanabe
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Patent number: 6998147Abstract: A method and apparatus for simultaneously coating and measuring a part. The apparatus includes a part support, a sprayer and a part measurer positioned adjacent to the part support and a display device positioned adjacent to the part support. The sprayer applies a coating to a section of the part while the part measurer continuously measures a dimension of the section of the part being coated. In one embodiment, an initial amount of coating and a final amount of coating are applied to the section of the part based on the dimension measurements and desired dimension of the part. In another embodiment, the amount of coating applied to the part is based on the desired coating thickness. As a result, the apparatus and method of the present invention significantly reduces the margin of error related to the application of coatings to parts.Type: GrantFiled: July 8, 2002Date of Patent: February 14, 2006Assignee: Dimension Bond CorporationInventor: Bruce Nesbitt
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Patent number: 6989176Abstract: This device for supplying coating products to the atomizers of an installation for spraying coating products on objects displaced by a conveyor, comprises at least one principal tank adapted to supply secondary tanks each intended for an atomizer, and means for displacing this principal tank up to the vicinity of the secondary tanks.Type: GrantFiled: October 19, 2001Date of Patent: January 24, 2006Assignee: Sames TechnologiesInventors: Jean Charles Congard, Philippe Foury, Eric Prus
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Patent number: 6958170Abstract: Process for using coating guns to apply a conductive layer to the inside of battery cans moving on a conveyor with intermittent move and dwell times. Pats are automatically inspected. If a layer is defective due to a disabled coating gun, the process includes firing another coating gun at twice its normal firing rate and/or shifting its position so that it does the job of two coating guns.Type: GrantFiled: November 10, 2003Date of Patent: October 25, 2005Assignee: Truelove & Maclean, Inc.Inventors: John A. Benaglio, Grant Demerchant, Volker Seefeldt
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Publication number: 20040261701Abstract: A coating solution is supplied to a substrate as an experimental substrate that is the same type as a product substrate while the experimental substrate is being scanned by a nozzle so as to form a line of the coating solution. The line of the coating solution is photographed by for example a CCD camera so as to obtain a contact angle of the coating solution. Using a geometric model according to the contact angle, relation data of a discharge flow amount of the coating solution nozzle at a scanning speed for a real coating process for the product substrate and an allowable range of a pitch is obtained. Relation data of the discharge flow amount of the coating solution nozzle and the pitch is pre-created for each of a plurality of targets of the film thickness. According to the relation data, the pitch is decided.Type: ApplicationFiled: August 19, 2004Publication date: December 30, 2004Inventors: Shinji Kobayashi, Takahiro Kitano, Masateru Morikawa, Norihisa Koga, Tomohide Minami, Shinichi Sugimoto, Jun Ookura, Hiroaki Kurishima