Abstract: A tantalum or tungsten target-backing plate assembly which comprises a tantalum or tungsten target and a copper alloy backing plate that are subject to diffusion bonding via an aluminum- or aluminum alloy-sheet insert material at least 0.5 mm thick, and which is provided with diffusion bonded interfaces between the respective materials, wherein the assembly suffers only a small deformation after diffusion bonding and is free from separation between the target and the backing plate or from cracking even when the target material and the backing plate differ greatly in thermal expansion, and can survive high power sputtering; and a production method therefor.

Abstract: The design of a magnetic thin film disk, for use in a disk drive, with an amorphous or nanocrystalline pre-seed layer preferably followed by a ruthenium-aluminum (RuAl) seed layer is described. The pre-seed layer may be CrTa or AlTi. The pre-seed layer deposited over a glass substrate, for example, allows a more strongly oriented RuAl seed layer to be deposited and, thus, favorably influences the orientation and grain size in the subsequent layers which include preferably at least one Cr alloy underlayer and at least one magnetic layer.

Abstract: A method for metallizing integrated circuits is disclosed. In one aspect, an integrated circuit is metallized by depositing liner material on a substrate followed by one or more metal layers. The liner material is selected from the group of tantalum (Ta), tantalum nitride (TaN), niobium (Nb), niobium nitride (NbN), vanadium (V), vanadium nitride (VN), and combinations thereof. The liner material is preferably conformably deposited on the substrate using physical vapor deposition (PVD). The one or more metal layers are deposited on the barrier layer using chemical vapor deposition (CVD), physical vapor deposition (PVD), or a combination of both CVD and PVD.

Abstract: An object of the present invention is to provide a cladding material, which has high joining strength and excellent productivity, and a manufacturing method therefor; in order to attain this object, the present invention provides a cladding material comprising: a first material to be joined which is made of aluminum or an aluminum alloy; a second material to be joined which is made of a single metal or an alloy and which is join the first material to be joined; and an intermediate layer which is provided between the first and second materials to be joined.

Abstract: A magnetic recording medium is provided with a dual layer protective overcoat system comprising an AlN corrosion barrier layer and a protective carbon layer thereon. The AlN layer effectively prevents or significantly reduces Co diffuision to the medium surface. Embodiments include magnetic recording media comprising an AlN corrosion barrier layer over a magnetic layer and a layer of amorphous hydrogenated carbon, amorphous nitrogenated carbon, amorphous hydrogen-nitrogenated carbon, ion-beam deposited carbon or cathodic-arc-deposited carbon on the AlN corrosion barrier layer.

Abstract: A superconducting conductor and method for its production. The conductor is formed of least one superconducting core and an aluminum based cryogenic stabilizer which is a high purity Al—Fe—Ni aluminum alloy having a composition, in % by weight: 200 ppm≦Fe+Ni≦1500 ppm; 0.20≦Fe/(Fe+Ni)≦0.65; optionally, B<100 ppm; impurities other than Fe, Ni and B<0.01% total; and remainder aluminum.

Abstract: An electrical conductor for use in an electronic structure is disclosed which includes a conductor body that is formed of an alloy including between about 0.001 atomic % and about 2 atomic % of an element selected from the group consisting of Ti, Zr, In, Sn and Hf; and a liner abutting the conductor body which is formed of an alloy that includes Ta, W, Ti, Nb and V. The invention further discloses a liner for use in a semiconductor interconnect that is formed of a material selected from the group consisting of Ti, Hf, In, Sn, Zr and alloys thereof, TiCu3, Ta1−XTix, Ta1−X, Hfx, Ta1−X, Inxy, Ta1−XSnx, Ta1−XZrx.

Abstract: The invention provides a composite, laminated armor panel (10) for absorbing and dissipating kinetic energy from projectiles (12), the panel (10) comprising a first outwardly-positioned layer (14) made of a hard material selected from a ceramic material and a metal having a Rockwell-C hardness of at least 27, an intermediate layer (16) softer than the first layer (14), made of a material selected from aluminium and metals having a Rockwell-C hardness of less than 27 and a third backing layer (18) of tough woven textile material, wherein the three layers (14,16,18) are laminated together and wrapped on at least four sides in a further tough woven textile material (20) which is bonded to the outer surfaces of the composite, laminated armor panel (10).

Abstract: A method for producing a spallation-resistant aluminum oxide layer on the surface of a superalloy article is described. An aluminum oxide layer is produced, typically under tensile stress, by chemical vapor deposition at low temperatures on a metal aluminide layer that has been deposited on the surface of the article. The aluminum oxide layer is then heated to induce cracking therein, which imparts spallation-resistance thereto. If desired, a thermal barrier layer may be deposited on the aluminum oxide layer.

Abstract: A friction welded joint structure includes friction welded dissimilar first and second metallic materials. The first metallic material has a rigidity greater than the second metallic material. The angle of the first metallic material to a free edge of the first metallic material, at an end portion of a joined surface between the first and second metallic materials, is greater than or equal to 120 degrees or in the range of from 55 degrees to 85 degrees. A reaction layer between the first and second metallic materials is more than zero and less than or equal to 20 &mgr;m. The first metallic material is copper. The second, which has the smaller rigidity, is aluminum.

Abstract: An object of the present invention is to provide a cladding material, which has high joining strength and excellent productivity, and a manufacturing method therefor; in order to attain this object, the present invention provides a cladding material comprising: a first material to be joined which is made of aluminum or an aluminum alloy; a second material to be joined which is made of a single metal or an alloy and which is join the first material to be joined; and an intermediate layer which is provided between the first and second materials to be joined.

Abstract: Described is a method for producing a diffusion bonded sputtering target assembly which is thermally treated to precipitation harden the backing plate without compromising the diffusion bond integrity. The method includes heat treating and quenching to alloy solution and artificially age the backing plate material after diffusion bonding to a target. Thermal treatment of the diffusion bonded sputtering target assembly includes quenching by partial-immersion in a quenchant and is performed after diffusion bonding and allows for various tempers in the backing plate.

Abstract: The invention relates to a security device having at least one plastic layer and one specularly reflecting metal layer. An inorganic auxiliary layer is disposed between the plastic layer and the metal layer.

Abstract: The present invention relates to articles, having an extended useful life, which are used in contact with high temperature molten aluminum or molten zinc baths. One aspect of the invention encompasses articles, such as bearings, bushings, couplings or rollers, used in contact with molten aluminum or molten zinc which is coated with a high density coating consisting of a metal selected from Groups Vb, VIb, or VIb metals (preferably molybdenum or tungsten), in pure or alloyed form. These coatings generally have a thickness of from about 0.06 to about 0.30 inch. Another aspect of the present invention encompasses a roll for guiding steel strip through a high temperature aluminizing bath, which utilizes a multi-layer structure, the first primer layer being a Group Vb, VIb or VIIb metal, preferably tungsten or molybdenum (in pure or alloyed form), the second layer comprising MCrAlY in which M is either nickel or cobalt, and the third layer comprising a refractory metal oxide of Al, Zr, Si or Cr.

Abstract: A thin film product having a nanostructured surface, a laminate product including the thin film and a temporary substrate opposite the nanostructured surface, a laminate product including the thin film and a final substrate attached to the nanostructured surface and a method of producing the thin film products. The thin film is particularly useful in the electronics industry for the production of integrated circuits, printed circuit boards and EMF shielding. The nanostructured surface includes surface features that are mostly smaller than one micron, while the dense portion of the thin film is between 10-1000 nm. The thin film is produced by coating a temporary substrate (such as aluminum foil) with a coating material (such as copper) using any process. One such method is concentrated heat deposition or a combustion, chemical vapor deposition process.

Abstract: IC fabrication employs the deposition of aluminum as a metallization layer. Frequently, the aluminum is doped with copper in small amounts to improve electric properties. Low temperature deposition of these layers is preferred to ensure the proper microstructure and surface roughness. Low temperature deposition (below about 300° C.) results in the formation of copper precipitates which can be difficult to remove. Annealing the layer formed, either prior to, or after formation of capping layers and additional layers thereon, drives the copper precipitate back into solution, permitting small dimension fabrication.

Abstract: A titanium layer is formed on a substrate with chemical vapor deposition (CVD). First, a seed layer is formed on the substrate by combining a first precursor with a reducing agent by CVD. Then, the titanium layer is formed on the substrate by combining a second precursor with the seed layer by CVD. The titanium layer is used to form contacts to active areas of substrate and for the formation of interlevel vias.

Abstract: Abradable coatings for turbine engine shrouds are formed from biscuits formed of silicon-diffused powdered alloy compositions which are processed with an HF precursor to strip oxides from the coating during processing, the alloy blends comprising MCrAl(Y)n alloys in which n is 0, 1 or more.

Abstract: This invention relates to a method for the heat treatment of a ZnSe crystal substrate to dope it with Al as a donor impurity, a ZnSe crystal substrate prepared by this heat treatment and a light-emitting device using the ZnSe crystal substrate, in particular, the method for the heat treatment of a ZnSe crystal substrate comprising previously forming an Al film on the substrate, first subjecting the substrate to a heat treatment in a Se atmosphere and then subjecting to a heat treatment in a Zn atmosphere.

Abstract: One embodiment of the invention involves a refractory layer formed over a substrate during rapid thermal processing in which ambient hydrogen is used in a thermal processing chamber. Rapid thermal processing may occur at a temperature approximately in the range of 350° C. to approximately 550° C.

Abstract: A coating for use on a superalloy substrate comprising a diffusion barrier as an intermediate layer overlying the substrate and underlying a protective coating having a high aluminum content. The diffusion barrier layer is characterized by having low solubility for aluminum from either the substrate or the protective coating. Further, the diffusion barrier layer has low interdiffusivity for elements from the substrate and the coating, a minimal impact on the mechanical properties of the article which is coated, a minimal thermal expansion mismatch with both the substrate and the high aluminum content protective coating, and can be applied readily using existing coating application techniques. The diffusion barrier is preferably a single phase alloy or intermetallic compound.

Abstract: For machine parts, cutting tools and molds used under extremely high contact pressures, an amorphous carbon film is provided which has a sufficient adhesion to a substrate. The amorphous carbon covered member has an interlayer comprising at least one element selected from the group consisting of elements in the IVa, Va, VIa and IIIb groups and the IVb group except carbon in the periodic table, or a carbide of at least one element selected from the group, and an amorphous carbon film formed on the interlayer. The interlayer has a thickness of 0.5 nm or over and less than 10 nm.

Abstract: Composite materials are composed of a primary metallic base material, such as a titanium metallic material, metallurgically bonded to one or more secondary materials having desirable thermal conductivity properties and having a coefficient of thermal expansion (“CTE”) that generally matches the CTE of the primary metallic material. An exemplary composite material is composed of a titanium primary material metallurgically bonded to a secondary metal matrix composite material having a high thermal conductivity, such as aluminum silicon carbide. Methods for manufacturing such composite materials are disclosed.

Abstract: Described is a method for producing a diffusion bonded sputtering assembly which is thermally treated to precipitation harden the backing plate without compromising the diffusion bond integrity. The method includes heat treating and quenching to alloy solution and artificially age the backing plate material after diffusion bonding to a target. Thermal treatment of the diffusion bonded sputtering target assembly includes quenching by partial-immersion in a quenchant and is performed after diffusion bonding and allows for various tempers in the backing plate.

Abstract: The invention provides a method of surface hardening a titanium material wherein titanium-aluminum alloy powders or aluminum oxide powders are brought into contact with the surface of the titanium material, and a heat treatment is applied thereto, causing aluminum contained in the powders to be diffused in the surface of the titanium material so that intermetallic compounds such as Ti3Al, TiAl, and the like are formed inmediately underneath the surface of the titanium material, thereby enhancing surface hardness without causing surface exfoliation. The invention also provides a surface-hardened titanium-base material, and decorative articles and watchcases, composed of the surface-hardened titanium-base material, which are substantially impervious to scratches, and not prone to cause metallic allergy.

Abstract: Disclosed is a method for in situ formation of titanium aluminide. The disclosed method is directed to overcoming voiding problems which result in conventional titanium and aluminum metal interconnect stacks. The steps of the method comprise first providing a silicon substrate, which typically comprises an in-process integrated circuit wafer. Next, an insulating passivation layer is provided on the silicon substrate. The next step is the sputtering of a titanium layer of a given thickness over the passivation. Subsequently, an aluminum film of three times the thickness of the titanium layer is sputtered over the titanium layer. The next step comprises annealing the titanium layer and the aluminum film in situ in a metal anneal chamber to form titanium aluminide. Following the in situ anneal, the remainder of the needed aluminum is sputtered over the titanium aluminide and a further passivation layer of titanium nitride is then sputtered over the aluminum.

Abstract: Provided are a substrate with a zinc oxide layer, in which at least a zinc oxide layer is provided on a support substrate, wherein the zinc oxide layer comprises a zinc oxide layer having the c axis perpendicular to the support substrate and a zinc oxide layer having the c axis slantindicular to the support substrate in the order from the side of the support substrate; and a photovoltaic device in which a semiconductor layer is formed on the substrate with the zinc oxide layer. Thus provided is the inexpensive photovoltaic device with excellent reflective performance and optical confinement effect and with high photoelectric conversion efficiency.

Abstract: This invention provides a covered member which possesses a high bond strength of a base material and a covering film, and has a smooth surface. The covered member comprises a base material and a covering film and the surface of the base material to be covered with the covering film is characterized by an uneven surface having projections with an average height in the range from 10 to 100 nm and an average width of not more than 300 nm. The uneven surface can be formed by ion impacting. A surface of a covering film formed on that is smooth since the unevenness of the surface is extremely fine.

Abstract: An R—Fe—B permanent magnet body is cleaned by ion sputtering, after which a Ti coating film is formed on the surface of the magnet body by a thin film forming method such as ion plating, after which an Al coating film is formed as an intermediate layer, after which an AlN coating film, TiN coating film, or Ti1−xAlxN coating film is formed by a thin film forming method such as ion reactive plating in N2 gas. By having the Al coating film layer present as an intermediate layer, it acts as a sacrificial coating film for the permanent magnet body and the foundation layer Ti coating film, whereupon adhesion with the Ti coating film is sharply improved, and the time until corrosion develops is lengthened, even in such severe corrosion resistance tests as salt water spray tests. Thus R—Fe—B permanent magnets are obtained which exhibit outstanding salt water spray resistance and wear resistance and which have stable magnetic characteristics.

Abstract: A corrosion resistant, multi-layer structure on a substrate including an adhesion metallic layer on the substrate, a cushion metallic layer on the adhesion layer, a diffusion barrier layer on the cushion layer, and an impermeable gold layer that encapsulates all the layers, is substantially even on all sides of the layers, and contacts a region on the substrate adjacent the layers to prevent oxidation and corrosion.

Abstract: A chromium-free water-based surface treatment liquid which contains from 0.01 to 50 g/l of a total of dissolved manganic acid, permanganic acid, and salt(s) thereof and from 0.01 to 20 g/l of a total of dissolved titanium compounds and has a pH of from 1.0 to 6.0 reacts rapidly with aluminum and aluminum alloy surfaces to deposit thereon a protective coating that does not contain hexavalent chromium and has excellent corrosion resistance and paint film holding properties.

Abstract: An article comprising a metal circuit and/or a heat-radiating metal plate formed on a ceramic substrate, wherein the metal circuit and/or the heat-radiating metal plate comprise either (1) the following first metal-second metal bonded product, wherein the first metal and the second metal are different, or (2) the following first metal-third metal-second metal bonded product, and wherein in (1) and (2), the first metal is bonded to the ceramic substrate; first metal: a metal selected from the group consisting of aluminum (Al), lead (Pb), platinum (Pt) and an alloy containing at least one of these metal components; second metal: a metal selected from the group consisting of copper (Cu), silver (Ag), gold (Au), aluminum (Al) and an alloy containing at least one of these metal components; and third metal: a metal selected from the group consisting of titanium (Ti), nickel (Ni), zirconium (Zr), molybdenum (Mo), tungsten (W) and an alloy containing at least one of these metal components.

Abstract: A composite structure including a substrate and a heat protection element on the substrate, wherein the heat protection element includes a quasicrystalline aluminium alloy of one or a number of quasicrystalline phases which are either quasicrystalline phases in the strict sense, or approximating phases, wherein the quasicrystalline phases exhibit a thermal diffusivity, measured at ambient temperature, lower than 2.5×10−6 m2/s, and a thermal diffusivity measured in the temperature range 650-750° C.

Abstract: An electrode substrate comprises a backing substrate carrying thereon a metal electrode layer and/or a recording layer, the layer or layers having a smooth surface area with a surface roughness of less than 1 nm by more than 1 &mgr;m2. The smooth surface of the metal electrode layer and/or the recording layer is formed by firstly forming the layer on another substrate having a corresponding smooth surface and then peeling another substrate off the layer after the layer is bonded to the surface of the backing substrate, whereby the smooth surface profile of another substrate is transferred to the surface of the layer formed on the backing substrate.

Abstract: This invention relates to a multi-layer material that comprises a substrate made of aluminum, magnesium or their alloys, having possibly been subjected to a surface treatment, this substrate being provided with a coating comprising a tungsten based deposit and an under-layer--inserted between said substrate and said deposit--of a material having mechanical and thermo-mechanical properties intermediate to those of said substrate and said deposit. This under-layer is made up of at least one layer of a material chosen from among chromium, molybdenum, niobium, titanium, zirconium, their nitrides and carbides, solid solutions of carbon and of nitrogen in said metals, and steels and greatly improves the adherence of said coating to said substrate.The invention also relates to the anti-erosion, anti-abrasion, anti-wear coating comprising said tungsten based deposit and said under-layer.

Abstract: A magnetic device uses laminated ferromagnetic layers containing antiferromagnetically coupled ferromagnetic films coupled together with improved antiferromagnetically coupling (AFC) films. The AFC films are formed of the binary and ternary alloys comprising combinations of Ru, Os and Re. The ferromagnetic film thicknesses, the AFC film thicknesses and the compositions of the films in the laminated layer can be varied to engineer the magnetic properties of the device. The magnetic devices whose properties are improved with the improved laminated layers include spin valve magnetoresistive read heads and magnetic tunnel junction (MTJ) devices for use as magnetic memory cells and magnetoresistive read heads.

Abstract: A reproducing layer, an intermediate layer, and a recording layer are successively stacked. The reproducing layer is made of a perpendicularly magnetized film whose domain wall coercivity is relatively smaller and whose domain wall mobility is relatively larger as compared with the recording layer around a reproducing temperature. When the reproducing layer, the intermediate layer, and the recording layer have Curie temperatures of Tc1, Tc2, and Tc3, Tc1, Tc2, and Tc3 satisfy a relationship of Tc2<Tc1<Tc3. Upon reproducing information, the reproducing layer is partially heated to more than the Curie temperature by irradiating with a light beam. This arrangement makes it possible to expand and reproduce a domain without causing a repetition of reproduction and to reproduce a signal having a period which is not more than an optical diffraction limit without reducing an amplitude of the reproduced signal, thereby dramatically improving a recording density.

Abstract: A light weight softball bat having a hitting surface made of a titanium material is provided. The bat according to the invention has improved strength and durability, and a lively hitting surface.

Abstract: An intermetallic bond between a ferrous metal and a non-ferrous metal wherein an intermetallic bond layer that is substantially free of graphic inclusions joins the two. The graphite is effectively eliminated from the bond layer by either removing it from the ferrous metal or by sealing it off from the bond layer. Graphite removal may be accomplished in a variety of ways, including electrochemical cleaning and laser surface treatment. Alternatively, the graphite may be prevented from incursing into the bond region by sealing it off with a layer of metal, such as a chromium plating, that prevents it from penetrating through the bond layer and into the non-ferrous metal.

Abstract: A dual-layer DVD disc that does not require a stamping step (typically, as part of the 2P prior art manufacturing process) during its manufacture. A polycarbonate substrate is molded and coated with a semireflective data layer in the usual way. A PMMA substrate is molded and coated with a fully reflective data layer. Adhesive is placed on the semireflective data layer, and the fully reflective data layer is transferred from its PMMA substrate to the polycarbonate substrate. The polycarbonate substrate thus ends up with two data layers in conformance with the DVD specifications, and the PMMA substrate can even be recycled for another use.

Abstract: The present invention generally describes multilayer thermal barrier coating systems and methods of making the multilayer thermal barrier coating systems. The thermal barrier coating systems comprise a first ceramic layer, a second ceramic layer, a thermally grown oxide layer, a metallic bond coating layer and a substrate. The thermal barrier coating systems have improved high temperature thermal and chemical stability for use in gas turbine applications.

Abstract: A coated metal-substrate disk for magnetic-recording applications is disclosed having a first coating selected from the group consisting of nitrides, carbides, or borides of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, or tungsten, or the group consisting of aluminum nitride, silicon nitride, or silicon carbide on the metal substrate and a magnetic-recording material coating on the first coating. The first coatings are applied by evaporative reactive ion plating or by reactive sputtering.

Abstract: A magnetic recording medium having sufficiently low noise and high coercive force suitable for use with a MR head. The magnetic recording medium comprises a non-magnetic substrate 1, a non-magnetic underlayer 2, a magnetic layer 3 and a protective layer 4. The magnetic layer comprises a Co alloy and the non-magnetic underlayer comprises a first underlayer 21 comprising an Al--Co--Ni alloy and a second underlayer 22 comprising Cr or a Cr alloy laminated on the first underlayer.

Abstract: A wear-resistant coated member comprising 26 to 80% by weight of silicon (Si), additional components if required and necessary, the remainder being aluminum (Al), and unavoidable impurities, wherein Si is in a fine particle, and has an average particle size in the range of 0.01 to less than 10 .mu.m, and Al matrix and 3% by weight or more of Si form solid solutions. The wear-resistant coated member has excellent wear resistance and machinability.

Abstract: A method for preparing and coating metal cookware having an interior cooking surface and for the application of a lubricative coating is disclosed. The method includes mechanically spraying the interior cooking surface with an aluminum oxide material to produce a roughened surface and applying by thermal spraying a metallic abrasion resistant layer of substantially pure titanium, titanium oxide and/or titanium nitride. Also disclosed is a cooking utensil having a substrate and an intermediate layer deposited on the substrate by thermally spraying the substrate with a mechanically durable material, said mechanically durable material being selected from the group consisting of chemically pure titanium, titanium-aluminum, nickel-titanium, and titanium 6-4.

Abstract: A permanent magnet useful in an ultra-high vacuum atmosphere, such as an undulator requiring the ultra-high vacuum atmosphere of less than 1.times.10.sup.-9 Pa and which, has excellent magnetic characteristics, includes an R-Fe-B system permanent magnet having a Ti undercoat layer on a surface thereof, an external layer selected from TiN, AlN and Ti.sub.1-x Al.sub.x N (x is 0.03 to 0.70), and an Al intermediate layer therebetween.

Abstract: An optical recording medium having at least one aluminum nitride and silicon nitride composite dielectric layer is provided. The amount of aluminum nitride in the dielectric layer, x, is more than zero and less than or equal to about 95 mol %. The amount of silicon nitride in the layer is represented as (100-x) and is equal to or greater than about 5 and less than 100 mol %. The refractive index of the composite dielectric layer is between about 1.70 and 2.15. The composite dielectric layer is sandwiched between a transparent support such as a plastic transparent support and an optical recording layer adapted to be irradiated by laser light in order to read, write or erase information in order to protect the recording layer.

Abstract: A photopolymerizable composition comprising(A) 100 parts by weight of a mixture of (meth)acrylic acid ester monomers,(B) from 0.1 to 5 parts by weight of a surfactant having a perfluoroalkyl group and represented by the general formula (1)CF.sub.3 (CF.sub.2).sub.n AM (1)wherein A represents --CO.sub.2 -- or --SO.sub.3 --, M represents an alkali metal, and n is an integer of 3 to 9, and(C) from 0.2 to 10 parts by weight of a photopolymerization initiator, and a plastic optical disk provided with a cured coating of the photopolymerizable composition on at least one side thereof.

Abstract: An optical memory material includes a two-photon storage component which can be written from a first to a second state in response to WRITE light, mixed with a signal component which fluoresces by one-photon absorption only at the written locations in response to READ light. The storage material may be a fulgide. The memory material may also include a frequency upconversion material to aid writing. Writing is performed by a spatial light modulator (SLM) with a dynamic focussing system, for concentrating sufficient power at WRITE locations for nonlinear two-photon absorption. Crosstalk is avoided during simultaneous writing in some embodiments, by spacing the individual WRITE beams apart by an integer number of inter-beam spacings, so that non-adjacent datels are written simultaneously in a "paragraph," and the non-written areas are written at a different time with different paragraphs.

Abstract: Layered structures (e.g., Al-Si/Ti/Al-Si . . . ) and homogeneous alloys of aluminum and aluminum/1 at. % silicon with titanium and tungsten and other refractory metals have been found to significantly reduce hillock densities in the films when small amounts of titanium or tungsten are homogeneously added. However, the resistivity of the films can become excessive. In addition, a new type of low density hillock can form. Layering of the films eliminates all hillocks and results in films of low resistivity. Such layered and homogeneous films made with Al-Si and Ti were found to be dry etchable. Electrical shorts in test structures with two levels of metal and LPCVD SiO2 as an interlayer dielectric have been characterized and layered films using Al-Si and Ti gave excellent results.