Abstract: Provided is a casting sliding gate including a plurality of plates, and at least a portion of the plates includes carbon fibers and carbide and is capable of suppressing damage due to a thermal shock.

Abstract: Disclosed is a substrate treating apparatus with a baking unit for heating a substrate to which a treating liquid that generates sublimate through heating is applied to bake a surface of the substrate to form a coat film. The apparatus includes the following elements: a first bake group, a second bake group, a first exhaust pipe that forms a flow path of exhaust gases from the first bake group with its end being in fluid communication with an exhaust gas processor that processes the exhaust gases, a second exhaust pipe that forms a flow path of exhaust gases from the second bake group, and a junction provided at a midstream of the first exhaust pipe and in fluid communication with a downstream side of the second exhaust pipe.

Abstract: In a dental furnace or dental press furnace comprising a furnace base (14) which is provided with a supporting surface for at least one dental restoration part, a furnace head (12) is provided which is connected to the furnace base (14) via a joint device (16) attached to the furnace base (14) and which is pivotable relative to the furnace base (14) via said device. Pivoting takes place about a pivot axis (40) which extends substantially parallel to the supporting surface, as well as a motor (42) which acts on the joint device (16) for the pivotable movement of the furnace head (12). The pivot axis (40) extends outside of the furnace head (12) and outside of the joint device (16).

Abstract: The invention relates to a vessel lid in particular for a thermal plant, for example a smelting furnace or a waste incineration plant. In particular, the invention relates to a vessel lid for a thermal plant which is arranged within vessel wall elements of a vessel wall of the thermal plant and which is either vertically adjustable and/or tiltable as a whole or which consists of a plurality of lid parts of which at least one is vertically adjustable and/or tiltable. The vertical adjustment and/or the tilting of the lid or of the lid parts and also the lateral movement thereof make it possible to achieve improved thermal sealing of the lid with respect to the vessel. The invention provides that the vessel lid or one or more lid parts/lid elements can be removed and/or exchanged. Instead of the complete exchange of the lid or of a lid part/lid element, it is also possible for only a wear layer or a screen thereof to be replaced.

Abstract: Provided is a windowpane for a combustion apparatus in which a light-blocking layer containing an inorganic pigment powder and a glass powder is formed on a surface of a transparent crystallized glass plate and the light-blocking layer can sufficiently hide an adhesive, a gasket or the like used to fix the windowpane to the body of the combustion apparatus and which can reduce the occurrence of cracks due to heat in the light-blocking layer. A windowpane for a combustion apparatus in which a light-blocking layer containing an inorganic pigment powder and a glass powder is formed on a surface of a transparent crystallized glass plate, wherein the light-blocking layer contains 30 to 50% by mass of the inorganic pigment powder and 50 to 70% by mass of the glass powder and has a thickness of 1 to 10 ?m and the inorganic pigment powder has an average particle size of 0.8 ?m or less.

Abstract: The invention concerns a dental furnace, with a furnace base and with a furnace hood, wherein the furnace hood includes a firing chamber for the accommodation of dental restorations, with a temperature sensor that records the temperature of the dental restoration and which is connected to a control device which controls the dental furnace, and the dental furnace (10) includes a drive unit (18) for the furnace hood (16) and the control device (30) controls the drive unit (18) based on the temperature recorded by the temperature sensor (20), namely opens the furnace hood.

Abstract: Provided is a heat treatment apparatus, which includes: a cylindrical quartz reaction tube having a furnace opening and a bottom flange at a lower portion thereof; a flange holding part configured to hold the bottom flange of the reaction tube; and a lid including a metal lid and a quartz lid supported by the metal lid, the quartz lid being configured to close the furnace opening of the reaction tube. The quartz lid is fixed onto the metal lid by a support ring. The support ring is brought into contact with a bottom surface of the flange holding part so that a gap is defined between the quartz lid and the bottom flange. A sealing member is arranged outward from the gap in a radial direction.

Abstract: A closure device associable with the opening of the cooking chamber of an oven of the type with trolley is described, the oven including a closure door associated with the chamber, for the sealed closure of the cooking chamber in the absence of the trolley, the device includes a closure element capable of being placed to close a portion of the opening of the chamber that is not involved by the closure door, the portion of opening being capable of permitting the closure of the door when the trolley is inserted into the cooking chamber, the closure element co-operating in a sealed manner with respective sections of gaskets arranged at the opening, for the sealed closure of the cooking chamber when the trolley is not inserted in the chamber.

Abstract: Embodiments of the invention comprise a preheater for preheating a ladle for use in steelmaking wherein less fuel is consumed in heating the ladle efficiently and accurately to a controlled temperature. A preheater temperature is varied by controlling a burner of the heating unit based on measurements of refractories of the ladle taken by a pyrometer. The heating unit of the preheater includes an emissive coating for reducing heat loss and efficient heating during the preheating process. The heating unit of the preheater also includes valve mechanisms for accurately varying a flame size of the burner by regulating the rate of fuel, air, and oxygen supplied to the heating unit.

Abstract: A reversible jamb block for a furnace, oven or kiln, having an attachment side adapted to removably attach to the first side of a doorway for the furnace, oven or kiln, and adapted to removably attach to the second side of the doorway, such that one face of the jamb block is directed away from the furnace when the attachment side of the jamb block is attached to the first side of the doorway, and a second face opposite the first face, is directed away from the furnace when the attachment side of the jamb block is attached to the second side of the doorway.

Abstract: A protective collar for a kiln that has a rigid body portion and a shape and size substantially corresponding to the shape and size of at least a portion of the peripheral edge surface of the kiln sidewall. Depending on the kiln, the protective collar can be round, oval, faceted, or otherwise shaped. The collar can be a complete ring or just a portion thereof. A plurality of stops, which can be fixed or pivoting, spaced along the body portion of the protective collar can prevent dislocation of the collar when applied to the kiln. The stops can be adjustable in location to avoid obstructions on the kiln. A properly selected protective collar can enable a method for protecting the firebrick in a kiln where the protective collar is applied with the shapes of the protective collar and the peripheral edge surface of the kiln sidewall substantially aligned.

Abstract: The subject innovation relates to a multi-deck chamber furnace for heating up workpieces comprising a furnace housing having at least two horizontal furnace chambers that are arranged vertically one above the other, whereby each furnace chamber has an opening in a furnace wall on one side, and said opening can be closed by a furnace door. The furnace is characterized in that the furnace doors are arranged in front of the openings of the appertaining furnace chambers in such a way that the transversal axes of the furnace doors enclose an angle ? with the furnace wall that is greater than 0° and smaller than 45°, whereby the transversal axis of a furnace door runs perpendicular to the horizontal axis of a furnace door. Furthermore, the furnace doors can be moved linearly along these transversal axes.

Abstract: The present invention relates to an anti-scald protection apparatus for an air heater having a grid anti-scald cover installed and fixed in front of a wind outlet net in front of a wind outlet of the air heater, and a distance is maintained between the anti-scald cover and the wind outlet net to protect users from being burned by touching the wind outlet net accidentally and achieve a safety protection effect.

Abstract: A pivoting, liquid cooled slag door for metallurgical furnaces is disclosed. The slag door can pivot from the top using one or more robust mechanisms that enable the door to be moved into and stopped in any position between a closed position and an open position. The slag door can also incorporate wing walls disposed in close proximity to the sides of the slag door. The wing walls can minimize air infiltration into the furnace when the slag door is in an open position. The slag door can be disposed in close proximity to the hearth of the furnace to eliminate problems associate with conventional slag door tunnels. The slag door can be fitted with a furnace apparatus such as a burner or a lance and can be used to provide access to the interior of the furnace and to control the flow of material out of the furnace.

Abstract: To provide a substrate processing apparatus, comprising: a reaction vessel having a processing chamber inside that processes a substrate; a heating device that heats said substrate from an outer peripheral side of the reaction vessel; a lid member that closes the processing chamber; an attachment/detachment jig placed on the lid member for attaching/detaching the reaction vessel from an inside of the heating device; and a support section provided in an upper side of a lower end of the reaction vessel on an inside wall of the reaction vessel, and abutted on an upper surface of the attachment/detachment jig for attaching/detaching the reaction vessel from the inside of the heating device.

Abstract: A rotary hearth furnace for treating metal oxide materials comprises a hearth mounted for rotary movement within an enclosure. One or more fuel burners are positioned above the hearth. The burners are operably fired to heat the furnace so that heat radiates toward the hearth. One or more oxygen nozzles are positioned between the hearth and the burners in a manner that avoids substantial contact between the oxygen and the briquettes, thereby creating a quiescent zone immediately above the briquettes, with the quiescent zone being sufficient to minimize reoxidation of the reduced briquettes, and minimize entrainment of particulate matter from the briquettes.

Abstract: A sealing apparatus for a slag door of a metallurgical furnace, having a mounting assembly for mounting the apparatus to the furnace, and at least one closure element, moveable from an open position that is exterior of the slag door opening, to a closed position that effectively seals against the slag door and extends into the slag door opening with the rear panel of the closure element(s) being proximally aligned with the interior wall of the furnace. The apparatus may also have at least one wiping component moveable so as to sweep across the lower surface of the slag door to remove obstructions.

Abstract: A safety door for covering openings in a rotary kiln during maintenance operations on the rotary kiln. The door is affixed to the exterior surface of the rotary kiln and includes a hatch pivotally secured at one side edge thereof by a pivot rod to a frame. A plurality of tension coil springs are disposed on the pivot rod and continuously bias the hatch toward the opening with a force of approximately 400 pounds.

Abstract: A fiber treatment oven having slots for the fibers to pass through and adjustable gates located proximate the slots. The gates may be connected via a linkage that allows movement of many gates at once and may be connected so that individual gates may be adjusted as well.

Abstract: A portico furnace includes a number of porticos (1), which are arranged parallel to one another and which define the spans of the furnace, and supports (2, 6) that are attached to the porticos (1), between which are positioned interjoists (3) that constitute the walls of the furnace. At least some of the interjoists (3) consist of a chimney block (4) with an axis that is parallel to the supports (2, 6).

Abstract: A thermal processing apparatus for thermally processing a substrate in a processing chamber includes a heating plate for mounting and thermally processing the substrate thereon, and a lid body covering the heating plate from above to constitute a portion of the processing chamber. The lid body has a ceiling plate and a peripheral side portion vertically provided at a peripheral end portion of the ceiling plate. The ceiling plate is provided with a supply port for supplying a gas into the processing chamber, and a side portion of the ceiling plate is provided with a plurality of exhaust ports for exhausting the gas in the processing chamber. An exhaust pipe communicating with the exhaust ports and having an outlet at a point at equal distances from the exhaust ports is provided to be attachable and detachable to/from the lid body.

Abstract: A kiln having a body with an internal chamber accessible via an opening which normally is closed by a closure that is movable. Lift apparatus effects movements of the closure between its closed and opened positions. The lift apparatus includes an arm which overlies the closure and is pivoted to a support independently of the kiln body for rotation about a second axis that is spaced a selected distance from the axis about which the closure rocks. The lift arm is connected to the closure by a pivot coupling which maintains the lift arm and the closure substantially parallel and uniformly spaced apart throughout the movements of the closure. The pivotal connection of the lift arm to the closure enables relative movement of the lift arm and the closure during movements thereof to avoid imposing appreciable stress on either the arm or the closure.

Abstract: A sealing apparatus for a slag door of a metallurgical furnace, having a mounting assembly for mounting the apparatus to the furnace, and at least one closure element, moveable from an open position that is exterior of the slag door opening, to a closed position that effectively seals against the slag door and extends into the slag door opening with the rear panel of the closure element(s) being proximally aligned with the interior wall of the furnace. The apparatus may also have at least one wiping component moveable so as to sweep across the lower surface of the slag door to remove obstructions.

Abstract: This invention is directed to a gas curtain assembly which comprises at least one structure of substantially vertical tubes on both sides of and supporting a vertical tube, forming an interconnected frame comprising at least one row of apertures for gas or fluid to pass through and forming a curtain of gas or fluid under the vertical portion of the assembly.

Abstract: A PIT FURNACE CLOSING SYSTEM is provided having two beams laid across the border of the furnace and square iron bars supported over the beams, and pieces of cloth wrap for high temperature are used for closing the furnace or a box in a stainless steel screen, folded and having a ring, and filled in with remains of wraps, or a bipartite lid in a thin plate with wraps fixed to it and a cut for the upper part of the supporting device of the parts to pass, which is “cage”-like, and suspended inside the furnace and supported on the two beams, not resting on the floor of the furnace, and the furnace has thermopairs, and their heating ends are located in the central direction of each heating zone.

Abstract: A system used in a vertical furnace is provided that includes a tube. The tube includes a tube flange at its lower end. The tube flange provides a first sealing surface at its lower end. Further, there is a structural member at the lower surface of the tube flange. This structural member extends vertically away from the lower surface of the tube flange at a position that is displaced inwardly from the first sealing surface. The system also includes a removable door plate that provides a second sealing surface at its upper surface. The second sealing surface of the removable door plate is sealed with the first sealing surface of the tube flange.

Abstract: The present invention relates to a furnace (10), its method of operation and control. The invention overcomes problems associated with existing furnaces by improving the recovery rate of waste metal. In a preferred embodiment the furnace (10) comprises a cylindrical body of constant internal diameter. The furnace body (12) is mounted on a frame (15) pivoted to a ground members (16a and 16b), the furnace body (12) is adapted to be reclined or inclined or at various angles (? and ?); a burner (30) to heat the furnace, and a door (19a, 19b) for sealing an open end (14). As the internal walls of the furnace body (12) are of a constant diameter, it is no longer necessary to incline the furnace (10) to such a degree in order to pour molten metal, because there is no narrow neck (which previously acted like a weir). In a preferred embodiment combustion air is routed through the door hinge to the burner (30).

Abstract: A safety door for covering openings in a rotary kiln during maintenance operations on the rotary kiln. The door is affixed to the exterior surface of the rotary kiln and includes a hatch pivotally secured at one side edge thereof by a pivot rod to a frame. A plurality of tension coil springs are disposed on the pivot rod and continuously bias the hatch toward the opening with a force of approximately 400 pounds.

Abstract: A safety door for covering openings in a rotary kiln during maintenance operations on the rotary kiln. The door is affixed to the exterior surface of the rotary kiln and includes a hatch pivotally secured at one side edge thereof by a pivot rod to a frame. A plurality of tension coil springs are disposed on the pivot rod and continuously bias the hatch toward the opening with a force of approximately 400 pounds.

Abstract: A fused silica crucible having a nozzle is formed by first inserting a preformed silica glass tube into the lower portion of a graphite mold. The tube is aligned with a vertical axis about which the mold is rotated while silica grain is poured into the mold and shaped in the form of the crucible. A graphite plug inserted into the top of the tube keeps the grain out of the tube. Electrodes create a plasma gas ball that fuses the grain and forms it to the tube. Although the graphite plug is covered with grain, the molten silica recedes from the top of the plug during fusion thus forming the nozzle to the crucible.

Abstract: Each one of the side edges (4a, 4b) of a door (3) is arranged to run inside and along a respective tube (5a, 5b) that has a longitudinal slit (6a, 6b) and extends vertically, in that each tube is fixed in relation to the furnace, in that the tubes (5a, 5b) are designed to spring back towards a respective position in which the slit (6a, 6b) is closed, and arranged to enclose the side edge (4a, 4b) of the door (3) along essentially the whole length of the side edge (4a, 4b) when the door (3) is in its closed position, and in that a liquid coolant is arranged to stream through the tubes (5a, 5b) and essentially fill up the whole space defined by the combination of the inner surfaces of each tube (5a, 5b) and the outer surfaces of the respective side part of the door (3).

Abstract: A kiln for use in producing ceramic ware comprises an endless wall forming a firing chamber supported on a base and a lid for closing and opening the upper end of the chamber. The body is movable from a position in which the chamber is closed by the base to a position in which the base is exposed. The lid is mounted for movement between positions in which it closes the upper end of the top of the chamber to a position in which the top is open. The body and the lid are movable between their respective positions independently of the other.

Abstract: A portable kiln has a set of wheels, a handle and a platform base. The wheels and the handle are attached on a first side of the kiln so that the kiln can be tilted and rolled on the wheels using the handle. The platform base provides a spaced distance between the wheels and the floor when the kiln is sitting upright in an operational position. The kiln may also include a metal outer shell wrapped about an oven portion. The outer shell has a shell sidewall radially spaced from the oven portion sidewall, which forms an annular air channel between the outer shell sidewall and the oven portion. The outer shell has a C-shaped cross-section and it has upper and lower vent openings for the air channel. A hinge assembly allows a lid of the kiln to rest in an open position.

Abstract: A door system used in a doorway of a pressurizable compartment of a high temperature structure, having a screw for compressing the door and a thrust collar providing clearance between the thrust collar and a bearing member during decompression of the door such that in the event the pressurizable compartment is pressurized, the pressure is relieved through the doorway while the door remains in contact with the doorway. The screw includes a shoulder, and the thrust collar is carried on the screw between the shoulder and the bearing member. The collar is configured to bear against the bearing member and the shoulder upon compression of the door. A debris guard covers and protects the screw during advancement and retraction of the screw, and a door frame is provided having weld slots for facilitating welding of the door frame to the high temperature structure.

Abstract: A continuous casting installation includes a furnace (2) for heating metal to a first liquid metal temperature, a degassing unit (4), a filter (6), a heating unit (8) and a casting machine (10). The casting machine (10) includes a pair of casting rollers and a nozzle arranged to deliver liquid metal into a nip between the casting rollers, such that the metal solidifies as it passes through the nip. The heating unit (8) is located between the furnace and the casting machine, and is thermostatically controlled to heat the liquid metal to a second liquid metal temperature.

Abstract: Disclosed is a heat treatment apparatus which includes a processing vessel having a furnace throat at its bottom and adapted to accommodate process objects therein to perform a heat treatment to the process objects under reduced pressure, the processing vessel having a vessel main body made of quartz, a metallic lid adapted to support thereon a holder for holding a plurality of process objects so as to load and unload the holder into and from the processing vessel and to close and open the furnace throat, and an annular sealing member disposed on the lid to seal a gap between the lid and the furnace throat. A contact-preventing member is disposed between the lid and the furnace throat to prevent contact of the lid with the furnace throat due to squashing of the sealing member that would otherwise occur when an internal pressure of the processing vessel is reduced.

Abstract: The process chamber of a vertical furnace is provided with a closure, or door, comprising an upper and a lower door plate. The upper door plate has a gas exhaust opening proximate its center, thereby allowing for a symmetrical flow of process gases through the process chamber and into the gas exhaust opening. The upper door plate is spaced from the lower door plate to form a sealing chamber, which is purged with inert gas. Optionally, both the gas exhaust opening and the sealing chamber empty into a gas exhaust channel formed inside the upper door plate. The gas exhaust channel leads to an exhaust which exhausts gases from the furnace and separates the flow path of corrosive process gases from surfaces of the lower door plate, which may be formed of relatively easily-corroded metal.

Abstract: The invention relates to a horizontal atmospheric furnace for heat treating, in particular, metallic workpieces at high temperatures. In order to crate a furnace that, while having a simple design and being easy to operate at the same time, enables a transfer of heat-treated workpieces into a quenching device while concluding the atmosphere surrounding the furnace, the invention provides that a horizontal atmospheric furnace for heat treating, in particular, metallic work pieces at high temperatures with a preferably cylindrical furnace chamber and with a furnace door that closes the furnace chamber in a gas-tight manner. Said furnace door is mounted in a manner that enables it to be displaced inside a door case. Which forms a lock that can be closed in a gas-tight manner.

Abstract: A flange (1) for optical flame observation in a gas turbine includes at least one bore for optical observation, in which bore there is arranged at least one pane (9, 10) for separating the flame-side space, which is in substantially direct communication with a combustion chamber in which the at least one flame that is to be monitored is arranged, from the outside space, from which the observation of the at least one flame can take place. In a flange (1) of this type, fogging of the at least one pane (9, 10) is made possible in a simple manner which can be guaranteed over a prolonged period of time by virtue of the fact that two panes (9, 10), which delimit a sealed intermediate space (22) in the bore for optical observation, are arranged one behind the other with respect to the optical axis (8), and that a device (24) for dehumidifying the sealed intermediate space (22) is includes.

Abstract: A cover for the opening of a process tube of a furnace used in semiconductor manufacturing is comprised of a substantially continuous sheet of metal so that it may be rolled opened and closed while being against the opening of the process tube by a guide frame. The roller on which the cover is rolled is driven by a bidirectional DC motor. The process tube cover can be operated by a computer or controller that operates the furnace.

Abstract: The single substrate thermal processing apparatus (2) includes a process chamber (5) arranged to accommodate a target substrate (W) and provided with a showerhead (10) disposed on its ceiling. A support member (28) is disposed to support the target substrate (W) so as for it to face the showerhead (10), when the target substrate (W) is subjected to a semiconductor process. A heating lamp (30) is disposed below the support member (28), for radiating light to heat the target substrate (W). The support member (28) and heating lamp (30) are moved up and down together relative to the showerhead (10) by an elevator mechanism (20). The elevator mechanism (20) sets different distances between the showerhead (30) and heating lamp (10), in accordance with the different process temperatures, thereby causing temperature change of the bottom surface of the showerhead (10) to fall in a predetermined range.

Abstract: A shutter structure of an oven apparatus used in semiconductor or liquid crystal display (LCD) processes includes a hollow housing and an open device, wherein the housing has a front face, a first face, a second face and a rear face whose edges of two sides are respectively connected with one respective side edge of the first face and the second face, and the front face is opposite to the rear face and is structurally separable at least with the first face and with the second face, and the open device includes a rotating shaft which is disposed at one side of the front face and a driver which is disposed at one end of the rotating shaft and used to drive the front face of the shutter to open rotatedly so as to have a substrate placed into the housing and taken out from the housing.

Abstract: A vertical heat-processing apparatus (1) includes a vertical heat-processing furnace (2) having a furnace port (3), a lid (5) movable up and down to open and close the furnace port, and a rotation mechanism (15) disposed on the lid to rotate a holder (13) that holds a number of target substrates (W). The rotation mechanism (15) includes a rotary shaft (16), and a support unit (19) that supports the rotary shaft (16) rotatably through a bearing (17) and sealing member (18). The rotary shaft (16) has a hollow structure with a thin wall, and is supplied with a cooling gas to flow inside and outside the rotary shaft. The support unit (19) has a cooling passage (32) surrounding an upper portion of the rotary shaft (16), and is supplied with a coolant to flow through the cooling passage.

Abstract: Methods and apparatuses to improve the temperature uniformity of a workpiece being processed on a heated platen of a thermal processing station. A heated platen is enclosed in a housing incorporating an additional heat source that uniformly outputs thermal energy into the process chamber in which the heated platen is positioned. In preferred embodiments, this heat source is positioned in the lid of the housing. It is additionally preferred that the heated lid includes features that provide a gas flow path to introduce to and/or purge gas from the process chamber. In terms of photoresist performance, the improved thermal uniformity provided by using such an additional heat source in the housing, e.g., in the lid, offers improved line width control and line uniformity across a wafer.

Abstract: A wafer processing system which requires no isolation between the operational areas within the processing system. The system of the present invention includes operational areas, such as a loading area, a transport area, and a reactor or thermal processing area. Advantageously, since there are no isolation devices or gate valves separating the areas, the processing system effectively has each operational area combined into a “single” chamber. Preferably, the single chamber has a single slit valve, hinge door, or other vacuum sealable door disposed proximate to the loading area to allow for the removal/insertion of the wafers into the loading area. Once the door to the loading area has been closed the internal pressure within the chamber can be kept uniform throughout each operational area.

Abstract: An apparatus for treating molten metal includes a treatment vessel for holding molten metal and a removable cover or hood for the vessel. Sealing means are provided between the cover and the vessel to provide a gas tight treatment zone. The sealing means include mating peripheral flanges on the vessel and cover, with the cover flange having two spaced annular sealing strips for contacting the vessel flange and a metal annular splash protector. These sealing strips include a thermal barrier strip formed of a deformable fibrous refractory material to provide a gas tight, a thermal barrier between the interior of the vessel and the exterior and a metal annular strip upon which the cover is supported on the vessel with the cover flange at a fixed distance above the vessel flange and the thermal barrier strip is compressed therebetween to a controlled degree.

Abstract: An insulating curtain assembly for a continuous furnace, having an extremely durable woven metal-wire covering protecting a thermal insulating fabric which lacks durability. A plurality of horizontally oriented hinges enable the curtain to closely follow a top surface of products having varying thicknesses when those products are entering or exiting the furnace.

Abstract: A cover for the opening of a process tube of a furnace used in semiconductor manufacturing is comprised of a substantially continuous sheet of metal so that it may be rolled opened and closed while being against the opening of the process tube by a guide frame. The roller on which the cover is rolled is driven by a bidirectional DC motor. The process tube cover can be operated by a computer or controller that operates the furnace.

Abstract: A vertical type chemical vapor deposition apparatus includes a process chamber having a cylindrical inner tube and a cap shaped outer tube surrounding and apart from the inner tube. A manifold is coupled with lower portions of the inner and outer tubes, and has a lower portion tapered at an inclination angle. A heater is provided at an outer side of the outer tube for heating the process chamber. A boat is movable into and out of the process chamber through the manifold, as driven by an elevator. The boat is vertically loaded with wafers. A cap is fixed to the elevator at a lower portion of the boat, and has a portion contactable with the manifold that is tapered at a same inclination angle as the lower portion of the manifold. An O-ring is inserted into the portion of the cap contactable with the manifold.

Abstract: A rotary furnace includes a drum and a frame supporting the drum for rotation about a nominally horizontal rotational axis. The frame and the drum are supported for pivotal movement about a horizontal pivotal axis. A door supported on the frame normally closes the front end of the drum and is selectively pivotal to an open position to facilitate charging of the drum. The door includes a pouring door which is openable to facilitate discharge of molten material from the drum.