Altering Electrical Characteristic Patents (Class 438/139)
  • Patent number: 7351614
    Abstract: A thyristor-based semiconductor device includes a filled trench separating and electrically insulating adjacent thyristor control ports. According to an example embodiment of the present invention, the filled trench is formed in a substrate adjacent to at least one thyristor body region. The filled trench includes a conductive filler material, an insulative material formed on the conductive filler material and at least two laterally-adjacent thyristor control ports separated from one another by the conductive filler material and the insulative material. One of the control ports is adapted for capacitively coupling to the thyristor body region for controlling current in the thyristor. With this approach, two or more control ports can be formed in a single filled trench and electrically isolated by the conductive filler material/insulative material combination.
    Type: Grant
    Filed: September 20, 2005
    Date of Patent: April 1, 2008
    Assignee: T-Ram Semiconductor, Inc.
    Inventor: Andrew Horch
  • Patent number: 7264986
    Abstract: According to one aspect of the present invention, a method is provided for forming a microelectronic assembly. The method comprises forming first and second trenches on a semiconductor substrate, filling the first and second trenches with an etch stop material, forming an inductor on the semiconductor substrate, forming an etch hole in at least one of the etch stop layer and the semiconductor substrate to expose the substrate between the first and second trenches, isotropically etching the substrate between the first and second trenches through the etch hole to create a cavity within the substrate, and forming a sealing layer over the etch hole to seal the cavity.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: September 4, 2007
    Assignee: Freescale Semiconductor, Inc.
    Inventor: Bishnu P. Gogoi
  • Patent number: 7195959
    Abstract: A thyristor-based semiconductor memory device may comprise at least a region thereof, e.g., a p-base region, having high ionization energy impurity, such as a dopant. This high ionization energy impurity within a base region may be operable to compensate for a gain-versus-temperature dependence of a constituent bipolar transistor of the thyristor element of a thyristor-based memory device. In particular embodiments, the high ionization energy impurity may include a donor and/or acceptor in silicon.
    Type: Grant
    Filed: October 4, 2004
    Date of Patent: March 27, 2007
    Assignee: T-Ram Semiconductor, Inc.
    Inventors: James D. Plummer, Zachary K. Lee, Kevin J. Yang, Farid Nemati
  • Patent number: 7186381
    Abstract: A hydrogen gas sensor and/or switch fabricated from arrays nanowires composed of metal or metal alloys that have stable metal hydride phases. The sensor and/or switch response times make it quite suitable for measuring the concentration of hydrogen in a flowing gas stream. The sensor and/or switch preferably operates by measuring the resistance of several metal nanowires arrayed in parallel in the presence of hydrogen gas. The nanowires preferably comprise gaps or break junctions that can function as a switch that closes in the presence of hydrogen gas.
    Type: Grant
    Filed: May 30, 2002
    Date of Patent: March 6, 2007
    Assignee: Regents of the University of California
    Inventors: Reginald Mark Penner, Erich C. Walter, Fred Favier
  • Patent number: 7118982
    Abstract: An emitter includes an electron source and a cathode. The cathode has an emissive surface. The emitter further includes a continuous anisotropic conductivity layer disposed between the electron source and the emissive surface of the cathode. The anisotropic conductivity layer has an anisotropic sheet resistivity profile and provides for substantially uniform emissions over the emissive surface of the emitter.
    Type: Grant
    Filed: September 7, 2004
    Date of Patent: October 10, 2006
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Alexander Govyadinov, Michael J. Regan
  • Patent number: 7037814
    Abstract: In an integrated circuit, dopant concentration levels are adjusted by making use of a perforated mask. Doping levels for different regions across an integrated circuit can be differently defined by making use of varying size and spacings to the perforations in the mask. The diffusion of dopant is completed by making use of an annealing stage.
    Type: Grant
    Filed: October 10, 2003
    Date of Patent: May 2, 2006
    Assignee: National Semiconductor Corporation
    Inventors: Vladislav Vashchenko, Andy Strachan, Peter J. Hopper, Philipp Lindorfer
  • Patent number: 6943406
    Abstract: According to the present invention, there is provided a semiconductor device having, a semiconductor substrate having a surface on which an insulating layer is formed, a first-conductivity-type first semiconductor layer formed on the insulating layer and having a first impurity concentration, a first-conductivity-type second semiconductor region formed in the first semiconductor layer from a surface of the first semiconductor layer to a surface of the insulating layer, and having a concentration higher than the first impurity concentration, a second-conductivity-type third semiconductor region formed in the first semiconductor layer from the surface of the first semiconductor layer to the surface of the insulating layer with a predetermined distance between the second and third semiconductor regions, and having a second impurity concentration, a second-conductivity-type fourth semiconductor region formed in a surface portion of the second semiconductor region, and having a concentration higher than the second
    Type: Grant
    Filed: October 30, 2003
    Date of Patent: September 13, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takeshi Uchihara, Yasunori Usui, Hideyuki Ura, Takuma Hara
  • Patent number: 6927101
    Abstract: A method for fabricating a field-effect-controllable semiconductor component includes providing a configuration having a semiconductor body with a front side, a rear side, a first terminal zone of a first conduction type, a channel zone of a second conduction type formed above the first terminal zone, and at least one control electrode adjacent the channel zone. The control electrode is insulated from the semiconductor body. A second terminal zone of the first conduction type is fabricated in the channel zone near the front side of the semiconductor body by: doping the channel zone near the front side with a first dopant concentration to fabricate a first zone of the first conduction type, and doping a section of the first zone with a second dopant concentration higher than the first dopant concentration to form a second zone of the first conduction type.
    Type: Grant
    Filed: March 28, 2003
    Date of Patent: August 9, 2005
    Assignee: Infineon Technologies AG
    Inventors: Ralf Henninger, Franz Hirler, Martin Pƶlzl, Walter Rieger
  • Patent number: 6924177
    Abstract: A thyristor having a first zone, a second zone, a third zone, and a fourth zone. At least one control electrode is connected to the second and/or third zone. In order to reduce the static and dynamic power loss in a symmetrical thyristor, it is proposed that a field stop zone of the second conductivity type be disposed approximately in the center of the second zone, with the result that it subdivides the second zone into two sections of essentially the same size. To that end, the field stop layer is produced on an inner surface of a first wafer or of a second wafer, and the first wafer is connected to the second wafer, such that the two inner surfaces of the two wafers lie one on top of the other.
    Type: Grant
    Filed: December 22, 2003
    Date of Patent: August 2, 2005
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Daniel Reznik
  • Patent number: 6864540
    Abstract: The invention includes a field effect transistor (FET) on an insulator layer, and integrated circuit (IC) on SOI chip including the FETs and a method of forming the IC. The FETs include a thin channel with raised source/drain (RSD) regions at each end on an insulator layer, e.g., on an ultra-thin silicon on insulator (SOI) chip. Isolation trenches at each end of the FETs, i.e., at the end of the RSD regions, isolate and define FET islands. Insulating sidewalls at each RSD region sandwich the FET gate between the RSD regions. The gate dielectric may be a high K dielectric. Salicide on the RSD regions and, optionally, on the gates reduce device resistances.
    Type: Grant
    Filed: May 21, 2004
    Date of Patent: March 8, 2005
    Assignee: International Business Machines Corp.
    Inventors: Rama Divakaruni, Louis C. Hsu, Rajiv V. Joshi, Carl J. Radens
  • Patent number: 6838300
    Abstract: A method of forming an integrated circuit including an organosilicate low dielectric constant insulating layer (40) formed of a substitution group depleted silicon oxide, such as an organosilicate glass, is disclosed. Subsequent plasma processing has been observed to break bonds in such an insulating layer (40), resulting in molecules at the surface of the film with dangling bonds. Eventually, the damaged insulating layer (40) includes silanol molecules, which results in a degraded film. The disclosed method exposes the damaged insulating layer (40) to a thermally or plasma activated fluorine, hydrogen, or nitrogen, which reacts with the damaged molecules to form a passivated surface for the insulating layer (40).
    Type: Grant
    Filed: February 4, 2003
    Date of Patent: January 4, 2005
    Assignee: Texas Instruments Incorporated
    Inventors: Changming Jin, Phillip D. Matz, Heungsoo Park, Patricia B. Smith, Andrew J. McKerrow
  • Patent number: 6828177
    Abstract: A method for manufacturing a gate pad protection structure applied in a power semiconductor device is provided. The method includes steps of (a) forming a gate oxide layer on a substrate, (b) forming a polysilicon layer on the gate oxide layer, (c) forming a polysilicon window and a polysilicon window array on the polysilicon layer, and (d) performing an ion implantation via the polysilicon window and the polysilicon window array.
    Type: Grant
    Filed: December 30, 2002
    Date of Patent: December 7, 2004
    Assignee: Pyramis Corporation
    Inventors: Jun Zeng, Ming-Jiang Zhou, Tzong-Shiann Wu
  • Patent number: 6773968
    Abstract: Area efficient static memory cells and arrays containing p-n-p-n or n-p-n-p transistors which can be latched-up in a bistable on state. Each transistor memory cell includes a gate which is pulse biased during the write operation to latch-up the cell. Also provided are linked memory cells in which the transistors share common regions.
    Type: Grant
    Filed: July 3, 2000
    Date of Patent: August 10, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Wendell P. Noble, Jr.
  • Patent number: 6770910
    Abstract: A TFT array structure comprises a Thin-Film Transistor, a data line, a scanning line, a pixel electrode and an auxiliary electrode. The data line is connected to the drain of the Thin-Film Transistor, and the scanning line is connected to the gate of the Thin-Film Transistor. The scanning line is oriented substantially orthogonally with respect to the data line to form a plurality of rectangular pixels in matrix. A predetermined electrode (source electrode or auxiliary electrode) is formed at the place where the pixel electrode is close to the edge of the data line, and that predetermined electrode is coupled to the pixel electrode and located at a mask on which the data line is located. It is also characterized that the capacitance-coupling effect generated between the pixel electrode and the data line is the same as that generated between the predetermined electrode and the data line. The performances of all pixels are uniform despite errors occurred during the aligning process on the pixel electrode.
    Type: Grant
    Filed: February 7, 2002
    Date of Patent: August 3, 2004
    Assignee: AU Optronics Corp.
    Inventors: Jian-Shen Yu, Wei-Chih Chang
  • Patent number: 6762080
    Abstract: In a method of manufacturing a semiconductor element (6) having a cathode (3) and an anode (5), the starting material used is a relatively thick wafer (1) to which, as a first step, a barrier region (21) is added on the anode side. It is then treated on the cathode side, and the thickness of the wafer (1) is then reduced on the side opposite to the cathode (3), and an anode (5) is produced on this side in a further step. The result is a relatively thin semiconductor element which can be produced economically and without epitaxial layers.
    Type: Grant
    Filed: August 21, 2002
    Date of Patent: July 13, 2004
    Assignee: ABB Schweiz Holding AG
    Inventor: Stefan Linder
  • Publication number: 20030157753
    Abstract: A method for manufacturing a gate pad protection structure applied in a power semiconductor device is provided. The method includes steps of (a) forming a gate oxide layer on a substrate, (b) forming a polysilicon layer on the gate oxide layer, (c) forming a polysilicon window and a polysilicon window array on the polysilicon layer, and (d) performing an ion implantation via the polysilicon window and the polysilicon window array.
    Type: Application
    Filed: December 30, 2002
    Publication date: August 21, 2003
    Inventors: Jun Zeng, Ming-Jiang Zhou, Tzong-Shiann Wu
  • Patent number: 6552360
    Abstract: A method and a circuit layout on a substrate of a semiconductor wafer, suitable for reducing defects during a chemical mechanical polishing process. On the substrate, the circuit layout comprises a plurality of strips of first circuit structure and at least two strips of second circuit structure located on the substrate. Each of the strips of second circuit structure respectively links the front end and the rear end of the plurality of strips of the first circuit structure for the purpose of averaging polishing pressure performed upon the front end and the rear end of the plurality of strips of the first circuit structure during the chemical mechanical polishing process for reducing defects.
    Type: Grant
    Filed: January 25, 2002
    Date of Patent: April 22, 2003
    Assignee: Macronix International Co., Ltd.
    Inventors: Chun-Lien Su, Chi-Yuan Chin, Ming-Shang Chen, Tsung-Hsien Wu, Yih-Shi Lin
  • Patent number: 6534380
    Abstract: Before a semiconductor substrate and a base substrate is directly bonded to one another, in a protective film removing step, a contamination protective film formed on the semiconductor substrate to protect it from contamination during an ion implanting step is removed. Consequently, even when flatness of the contamination protective film is degraded during the ion implanting step or even when contaminants remain in a segregated state in the vicinity of the surface of the contamination protective film, the state of the bonding between the semiconductor substrate and the base substrate after the bonding step can be made uniform over the entire area of the bonding. As a result, a high-quality semiconductor substrate can be manufactured at low cost.
    Type: Grant
    Filed: July 17, 1998
    Date of Patent: March 18, 2003
    Assignee: Denso Corporation
    Inventors: Shoichi Yamauchi, Hisayoshi Ohshima, Masaki Matsui, Kunihiro Onoda, Tadao Ooka, Akitoshi Yamanaka, Toshifumi Izumi
  • Patent number: 6489187
    Abstract: The effective doping profile of a finished thyristor is altered with helium ions radiated into a region provided for triggering the thyristor in such a way that the breakover voltage for overhead ignition is increased or reduced. Doping profile changes made in the cathode side half of the anode side base provide effective results, e.g. in the vicinity of the pn junction between the anode side and the cathode side base. The helium ions generate acceptor-type states that lower the effective n doping.
    Type: Grant
    Filed: August 22, 2001
    Date of Patent: December 3, 2002
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Franz Josef Niedernostheide
  • Patent number: 6436788
    Abstract: An emitter substructure and methods for manufacturing the substructure are described. A substrate has a p-region formed at a surface of the substrate. A n-tank is formed such that the p-region surrounds a periphery of the n-tank. An emitter is formed on and electrically coupled to the n-tank. A dielectric layer is formed on the substrate that includes an opening surrounding the emitter. An extraction grid is formed on the dielectric layer. The extraction grid includes an opening surrounding and in close proximity to a tip of the emitter. An insulating region is formed at a lower boundary of the n-tank. The insulating region electrically isolates the emitter and the n-tank along at least a portion of the lower boundary beneath the opening. The insulating region thus functions to displace a depletion region associated with a boundary between the p-region and the n-tank from an area that can be illuminated by photons traveling through the extraction grid or openings in the extraction grid.
    Type: Grant
    Filed: July 30, 1998
    Date of Patent: August 20, 2002
    Assignee: Micron Technology, Inc.
    Inventors: John K. Lee, Behnam Moradi
  • Publication number: 20020102773
    Abstract: A thin film transistor (TFT) and method of fabricating the same. A planarization layer of polymer is formed on the interlayer to reduce short-circuit. The planarization layer further reduces the capacitance of the crossover capacitor and the delay time of the LCD panel using the TFT is therefor minimized. A gate thereof can be design under the data line to increase aperture ratio.
    Type: Application
    Filed: March 26, 2002
    Publication date: August 1, 2002
    Inventors: I-Min Lu, Jr-Hong Chen
  • Patent number: 6306690
    Abstract: The invention comprises an integrated circuit including integral high and low-voltage peripheral transistors and a method for making the integrated circuit. In one aspect of the invention, a method of integrating high and low voltage transistors into a floating gate memory array comprises the steps of forming a tunnel oxide layer outwardly from a semiconductor substrate, forming a floating gate layer disposed outwardly from the tunnel oxide layer and forming an insulator layer disposed outwardly from the floating gate layer to create a first intermediate structure. The method further includes the steps of masking a first region and a second region of the first intermediate structure leaving a third region unmasked, removing at least a portion of the insulator layer, the floating gate layer and the tunnel oxide layer from the third region and forming a first dielectric layer disposed outwardly from the substrate in a region approximately coextensive with the third region.
    Type: Grant
    Filed: September 2, 1999
    Date of Patent: October 23, 2001
    Assignee: Texas Instruments Incorporated
    Inventors: Cetin Kaya, Stanton P. Ashburn
  • Patent number: 5994171
    Abstract: A method for adjusting the gain or the sensitivity of a lateral component formed in the front surface of a semiconductor wafer, having a first conductivity type, includes not doping or overdoping, according to the first conductivity type, the back surface when it is desired to reduce the gain or sensitivity of the lateral component, and doping according to the second conductivity type, the back surface, when the gain or the sensitivity of the lateral component is to be increased.
    Type: Grant
    Filed: January 24, 1997
    Date of Patent: November 30, 1999
    Assignee: SGS-Thomson Microelectronics S.A.
    Inventors: Eric Bernier, Jean-Michel Simonnet
  • Patent number: 5970324
    Abstract: Methods for making semiconductor switching devices are disclosed. The switching device is designed and constructed to include, for example, a highly interdigitated cathode/gate structure on both sides of the chip. The semiconductor switching device can be four leaded which provides a great deal of flexibility in operation.
    Type: Grant
    Filed: April 28, 1997
    Date of Patent: October 19, 1999
    Inventor: John Cuervo Driscoll
  • Patent number: 5940699
    Abstract: A process of fabricating a semiconductor device, includes the steps of: forming a side wall insulating film on a side portion of a gate electrode formed on a silicon substrate; forming a source/drain region in the silicon substrate, and subjecting the source/drain region to an activating heat treatment; forming a metal film on the surface of the source/drain region, and making the metal film react with the silicon substrate by a heat treatment thereby forming a silicide layer; wherein a first furnace heat treatment is performed after formation of the side wall insulating film and before formation the source/drain region; and an oxide film formed on the surface of the silicon substrate is removed before formation of the metal film, a surface side of the silicon substrate is made amorphous by doping ions of arsenic into the silicon substrate, and the metal film is formed.
    Type: Grant
    Filed: February 24, 1997
    Date of Patent: August 17, 1999
    Assignee: Sony Corporation
    Inventors: Hirofumi Sumi, Jun Suenaga, Kazuhiro Tajima, Yutaka Okamoto, Atsushi Horiuchi