Avalanche Diode Manufacture (e.g., Impatt, Trappat, Etc.) Patents (Class 438/380)
-
Patent number: 8143701Abstract: In one embodiment, high doped semiconductor channels are formed in a semiconductor region of an opposite conductivity type to increase the capacitance of the device.Type: GrantFiled: December 3, 2009Date of Patent: March 27, 2012Assignee: Semiconductor Components Industries, LLCInventors: David D. Marreiro, Sudhama C. Shastri, Gordon M. Grivna, Earl D. Fuchs
-
Publication number: 20120061803Abstract: An asymmetrical bidirectional protection component formed in a semiconductor substrate of a first conductivity type, including: a first implanted area of the first conductivity type; a first epitaxial layer of the second conductivity type on the substrate and the first implanted area; a second epitaxial layer of the second conductivity type on the first epitaxial layer, the second layer having a doping level different from that of the first layer; a second area of the first conductivity type on the outer surface of the epitaxial layer, opposite to the first to area; a first metallization covering the entire lower surface of the substrate; and a second metallization covering the second area.Type: ApplicationFiled: August 16, 2011Publication date: March 15, 2012Applicant: STMicroelectronics (Tours) SASInventor: Benjamin Morillon
-
Patent number: 8133755Abstract: Avalanche photodiodes and methods for forming them are disclosed. The breakdown voltage of an avalanche photodiode is controlled through the inclusion of a diffusion sink that is formed at the same time as the device region of the photodiode. The device region and diffusion sink are formed by diffusing a dopant into a semiconductor to form a p-n junction in the device region. The dopant is diffused through a first diffusion window to form the device region and a second diffusion window to form the diffusion sink. The depth of the p-n junction is based on an attribute of the second diffusion window.Type: GrantFiled: September 20, 2011Date of Patent: March 13, 2012Assignee: Princeton Lightwave, Inc.Inventor: Mark Allen Itzler
-
Patent number: 8093133Abstract: Transient voltage suppressor and method for manufacturing the transient voltage suppressor having a dopant or carrier concentration in a portion of a gate region near a Zener region that is different from a dopant concentration in a portion of a gate region that is away from the Zener region.Type: GrantFiled: April 4, 2008Date of Patent: January 10, 2012Assignee: Semiconductor Components Industries, LLCInventors: Emmanuel Saucedo-Flores, Mingjiao Liu, Francine Y. Robb, Ali Salih
-
Publication number: 20110309476Abstract: In a semiconductor device including a protection diode for preventing electrostatic breakdown employing a low capacitance protection diode, an occupation area of a Zener diode as a voltage limiting element is not needed on a front surface of a semiconductor substrate. A P+ type embedded diffusion layer is formed in a P+ type semiconductor substrate. This is then covered by a non-doped first epitaxial layer. A high resistivity N type second epitaxial layer is then formed on the first epitaxial layer. The second epitaxial layer is divided by a P+ isolation layer into a first protection diode forming region and a second protection diode forming region. An N+ type embedded layer extending from the front surface of the first epitaxial layer of the first protection diode forming region to the first epitaxial layer and the second epitaxial layer, and so on are then formed. A Zener diode is formed by a P+ type upward diffusion layer extending from the P+ type embedded diffusion layer and the N+ type embedded layer.Type: ApplicationFiled: June 14, 2011Publication date: December 22, 2011Applicant: ON Semiconductor Trading, Ltd.Inventors: Keiji MITA, Kentaro Ooka
-
Patent number: 8076173Abstract: A semiconductor substrate and a method of its manufacture has a semiconductor substrate having a carbon concentration in a range of 6.0×1015 to 2.0×1017 atoms/cm3, both inclusively. One principal surface of the substrate is irradiated with protons and then heat-treated to thereby form a broad buffer structure, namely a region in a first semiconductor layer where a net impurity doping concentration is locally maximized. Due to the broad buffer structure, lifetime values are substantially equalized in a region extending from an interface between the first semiconductor layer and a second semiconductor layer formed on the first semiconductor layer to the region where the net impurity doping concentration is locally maximized. In addition, the local minimum of lifetime values of the first semiconductor layer becomes high.Type: GrantFiled: January 31, 2011Date of Patent: December 13, 2011Assignee: Fuji Electric Co., Ltd.Inventor: Michio Nemoto
-
Publication number: 20110266650Abstract: According to one embodiment, a semiconductor device includes a semiconductor substrate, a first conductivity type region, a device isolation insulating film, a second conductivity type region, and a low concentration region. The first conductivity type region is formed in part of the semiconductor substrate. The device isolation insulating film is formed in an upper surface of the semiconductor substrate and includes an opening formed in part of an immediately overlying region of the first conductivity type region. The second conductivity type region is formed in the opening and is in contact with the first conductivity type region. The low concentration region is formed along a side surface of the opening, has second conductivity type, has an effective impurity concentration lower than an effective impurity concentration of the second conductivity type region, and separates an interface of the first conductivity type region and the second conductivity type region from the device isolation insulating film.Type: ApplicationFiled: March 10, 2011Publication date: November 3, 2011Applicant: Kabushiki Kaisha ToshibaInventor: Kazuaki YAMAURA
-
Publication number: 20110220959Abstract: A high-frequency metal-insulator-metal (MIM) type diode is constructed as a bridge suspended above a substrate to significantly reduce parasitic capacitances affecting the operation frequency of the diode thereby permitting improved high-frequency rectification, demodulation, or the like.Type: ApplicationFiled: March 11, 2010Publication date: September 15, 2011Inventors: Robert H. Blick, Chulki Kim, Jonghoo Park
-
Patent number: 8003478Abstract: In one embodiment, a bi-directional diode structure is formed to have a substantially symmetrical current-voltage characteristic.Type: GrantFiled: June 6, 2008Date of Patent: August 23, 2011Assignee: Semiconductor Components Industries, LLCInventors: Mark Duskin, Suem Ping Loo, Ali Salih
-
Patent number: 7995636Abstract: A semiconductor laser apparatus has a Zener diode containing a first semiconductor region of a first conduction type and a second semiconductor region of a second conduction type joined with the first semiconductor region, and a vertical-cavity surface-emitting semiconductor laser diode stacked above the Zener diode and containing at least a first mirror layer of a first conduction type, a second mirror layer of a second conduction type and an active region sandwiched between the first and second mirror layers. The first semiconductor region and the second mirror layer are electrically connected and the second semiconductor region and the first mirror layer are electrically connected.Type: GrantFiled: November 18, 2004Date of Patent: August 9, 2011Assignee: Fuji Xerox Co., Ltd.Inventors: Akemi Murakami, Hideo Nakayama, Yasuaki Kuwata, Teiichi Suzuki, Ryoji Ishii
-
Publication number: 20110176247Abstract: A precision high-frequency capacitor includes a dielectric layer formed on the front side surface of a semiconductor substrate and a first electrode on top of the dielectric layer. The semiconductor substrate is heavily doped and therefore has a low resistivity. A second electrode, insulated from the first electrode, is also formed over the front side surface. In one embodiment, the second electrode is connected by a metal-filled via to a layer of conductive material on the back side of the substrate. In alternative embodiments, the via is omitted and the second electrode is either in electrical contact with the substrate or is formed on top of the dielectric layer, yielding a pair of series-connected capacitors. ESD protection for the capacitor can be provided by a pair of oppositely-directed diodes formed in the substrate and connected in parallel with the capacitor.Type: ApplicationFiled: March 30, 2011Publication date: July 21, 2011Applicant: VISHAY INTERTECHNOLOGY, INC.Inventors: Haim Goldberger, Sik Lui, Jacek Korec, Y. Mohammed Kasem, Harianto Wong, Jack Van Den Heuvel
-
Patent number: 7955941Abstract: In one embodiment, a plurality of ESD devices are used to form an integrated semiconductor filter circuit. Additional diodes are formed in parallel with the ESD structures in order to increase the input capacitance.Type: GrantFiled: September 11, 2008Date of Patent: June 7, 2011Assignee: Semiconductor Components Industries, LLCInventors: Steven M. Etter, Mingjiao Liu, Ali Salih, David D. Marreiro, Sudhama C. Shastri
-
Publication number: 20110121429Abstract: A vertical bidirectional protection diode including, on a heavily-doped substrate of a first conductivity type, first, second, and third regions of the first, second, and first conductivity types, these regions all having a doping level greater than from 2 to 5×1019 atoms/cm3 and being laterally delimited by an insulated trench, each of these regions having a thickness smaller than 4 ?m.Type: ApplicationFiled: November 16, 2010Publication date: May 26, 2011Applicant: STMicroelectronics (Tours) SASInventor: Benjamin Morillon
-
Publication number: 20110115055Abstract: To provide a technique that can decrease the leak current due to the photoelectric effect in a semiconductor device with a Zener diode. In a bidirectional Zener diode IZD having a trench structure in the invention, an upper electrode UE extends from an inside of an opening OP to cover a trench TR (isolation region). As shown in FIG. 8, in the bidirectional Zener diode IZD of the invention, the upper electrode UE is formed to cover the inner walls of the trenches TRs. Thus, even when light is applied to the bidirectional Zener diode IZD, the light can be prevented from entering the p-n junction formed at the boundary between the n-type semiconductor region NR and the p-type semiconductor region PR from the inner wall of the trench TR.Type: ApplicationFiled: November 18, 2010Publication date: May 19, 2011Inventors: Ryo NIIDE, Toshiya Nozawa
-
Patent number: 7919790Abstract: A semiconductor substrate and a method of its manufacture has a semiconductor substrate having a carbon concentration in a range of 6.0×1015 to 2.0×1017 atoms/cm3, both inclusively. One principal surface of the substrate is irradiated with protons and then heat-treated to thereby form a broad buffer structure, namely a region in a first semiconductor layer where a net impurity doping concentration is locally maximized. Due to the broad buffer structure, lifetime values are substantially equalized in a region extending from an interface between the first semiconductor layer and a second semiconductor layer formed on the first semiconductor layer to the region where the net impurity doping concentration is locally maximized. In addition, the local minimum of lifetime values of the first semiconductor layer becomes high.Type: GrantFiled: February 8, 2009Date of Patent: April 5, 2011Assignee: Fuji Electric Systems Co., Ltd.Inventor: Michio Nemoto
-
Patent number: 7898051Abstract: An imaging device is provided and includes: a photoelectric conversion layer that has a silicon crystal structure and generates signal charges upon incidence of light; a multiplication and accumulation layer that multiplies the signal charges by a phenomenon of avalanche electron multiplication; and a wiring substrate that reads the signal charges from the multiplication and accumulation layer and transmits the read signal charges.Type: GrantFiled: May 2, 2008Date of Patent: March 1, 2011Assignee: FUJIFILM CorporationInventor: Shinji Uya
-
Patent number: 7884395Abstract: A semiconductor apparatus includes, a first silicon layer of a first conductivity type; a second silicon layer provided on the first silicon layer and having a higher resistance than the first silicon layer, a third silicon layer of a second conductivity type provided on the second silicon layer, a first nitride semiconductor layer provided on the third silicon layer, a second nitride semiconductor layer provided on the first nitride semiconductor layer and having a larger bandgap than the first nitride semiconductor layer, a first main electrode being in contact with a surface of the second nitride semiconductor layer and connected to the third silicon layer, a second main electrode being in contact with the surface of the second nitride semiconductor layer and connected to the first silicon layer, and a control electrode provided between the first main electrode and the second main electrode on the second nitride semiconductor layer.Type: GrantFiled: June 25, 2008Date of Patent: February 8, 2011Assignee: Kabushiki Kaisha ToshibaInventor: Wataru Saito
-
Patent number: 7875965Abstract: A semiconductor chip package is disclosed. The semiconductor chip package comprises a lead frame having a chip carrier, wherein the chip carrier has a first surface and an opposite second surface. A semiconductor chip is mounted on the first surface, having a plurality of bonding pads thereon, wherein the semiconductor chip has an area larger than that of the chip carrier. A package substrate comprises a central region attached to the second surface, having an area larger than that of the semiconductor chip, wherein some of the bonding pads of the semiconductor chip are electrically connected to a marginal region of the package substrate.Type: GrantFiled: March 18, 2008Date of Patent: January 25, 2011Assignee: Mediatek Inc.Inventors: Nan-Jang Chen, Hong-Chin Lin
-
Publication number: 20100328830Abstract: A transient voltage suppressing (TVS) circuit with uni-directional blocking and symmetric bi-directional blocking capabilities integrated with an electromagnetic interference (EMI) filter supported on a semiconductor substrate of a first conductivity type. The TVS circuit integrated with the EMI filter further includes a ground terminal disposed on the surface for the symmetric bi-directional blocking structure and at the bottom of the semiconductor substrate for the uni-directional blocking structure and an input and an output terminal disposed on a top surface with at least a Zener diode and a plurality of capacitors disposed in the semiconductor substrate to couple the ground terminal to the input and output terminals with a direct capacitive coupling without an intermediate floating body region.Type: ApplicationFiled: September 7, 2010Publication date: December 30, 2010Inventor: Madhur Bobde
-
Patent number: 7851823Abstract: A transmitted light absorption/recombination layer, a barrier layer, a wavelength selection/absorption layer, and an InP window layer having a p-type region are supported by an n-type substrate and arranged in that order. Light with a wavelength of 1.3 ?m reaches the wavelength selection/absorption layer through the InP window layer. Then, the light is absorbed by the wavelength selection/absorption layer and drawn from the device as an electric current signal. Light with a wavelength of 1.55 ?m reaches the transmitted light absorption/recombination layer through the barrier layer. Then, the light is absorbed by the transmitted light absorption/recombination layer, generating electrons and holes. These electrons and holes recombine with each other and, hence, disappear.Type: GrantFiled: April 7, 2008Date of Patent: December 14, 2010Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Eitaro Ishimura
-
Patent number: 7834436Abstract: An image processing system including an image processing device and a service providing device is provided. The image processing device includes a first processor and a first memory storing instructions that cause the image processing device to obtain parameters for receiving the service from the service providing device, request the service providing device to provide the service and implement a first or second function of the image processing device based on the parameters obtained from the parameter specifying unit. The service providing device includes a second processor and a second memory storing instructions that cause the service providing device to execute a service function to provide the service to the image processing device after receiving a request for the service from the image processing device.Type: GrantFiled: November 7, 2008Date of Patent: November 16, 2010Assignee: Mediatek Inc.Inventor: Nan-Jang Chen
-
Publication number: 20100276779Abstract: A vertical transient voltage suppressing (TVS) device includes a semiconductor substrate of a first conductivity type where the substrate is heavily doped, an epitaxial layer of the first conductivity type formed on the substrate where the epitaxial layer has a first thickness, and a base region of a second conductivity type formed in the epitaxial layer where the base region is positioned in a middle region of the epitaxial layer. The base region and the epitaxial layer provide a substantially symmetrical vertical doping profile on both sides of the base region. In one embodiment, the base region is formed by high energy implantation. In another embodiment, the base region is formed as a buried layer. The doping concentrations of the epitaxial layer and the base region are selected to configure the TVS device as a punchthrough diode based TVS or an avalanche mode TVS.Type: ApplicationFiled: April 30, 2009Publication date: November 4, 2010Applicant: Alpha & Omega Semiconductor, Inc.Inventors: Lingpeng Guan, Madhur Bobde, Anup Bhalla
-
Publication number: 20100252912Abstract: A method of manufacturing a semiconductor device, comprising the steps of preparing a structure including a semiconductor substrate, an element formed therein, a through hole formed to penetrate the semiconductor substrate, and an insulating layer formed on both surface sides of the semiconductor substrate and an inner surface of the through hole, and covering the element, forming a penetrating electrode in the through hole, forming a first barrier metal pattern layer covering the penetrating electrode, forming a contact hole reaching a connection portion of the element in the insulating layer, removing a natural oxide film on the connection portion of the element in the contact hole, and forming a wiring layer connected to the first barrier metal pattern layer and connected to the element through the contact hole.Type: ApplicationFiled: April 1, 2010Publication date: October 7, 2010Applicant: Shinko Electric Industries Co., Ltd.Inventor: Kei MURAYAMA
-
Publication number: 20100244194Abstract: A semiconductor device comprising: a semiconductor substrate having a first conductive type layer; a first diffusion region which has the first conductive type and is formed in the first conductive type layer; a second diffusion region which has a second conductive type and an area larger than an area of the first diffusion region and overlaps the first diffusion region; and a PN junction formed at an interface between the first and the second diffusion regions.Type: ApplicationFiled: February 17, 2010Publication date: September 30, 2010Inventors: Atsuya MASADA, Mitsuo Horie
-
Publication number: 20100193895Abstract: An integrated circuit device comprising a diode and a method of making an integrated circuit device comprising a diode are provided. The diode can comprise an island of a first conductivity type, a first region of a second conductivity type formed in the island, and a cathode diffusion contact region doped to the second conductivity type disposed in the first region. The diode can also comprise a cathode contact electrically contacting the cathode diffusion contact region, an anode disposed in the island, an anode contact electrically contacting the anode, and a first extension region doped to the first conductivity type disposed at a surface junction between the first region and the island.Type: ApplicationFiled: April 6, 2010Publication date: August 5, 2010Inventor: James Douglas Beasom
-
Patent number: 7741172Abstract: A positive-intrinsic-negative (PIN)/negative-intrinsic-positive (NIP) diode includes a semiconductor substrate having first and second main surfaces opposite to each other. The semiconductor substrate is of a first conductivity. The PIN/NIP diode includes at least one trench formed in the first main surface which defines at least one mesa. The trench extends to a first depth position in the semiconductor substrate. The PIN/NIP diode includes a first anode/cathode layer proximate the first main surface and the sidewalls and the bottom of the trench. The first anode/cathode layer is of a second conductivity opposite to the first conductivity. The PIN/NIP diode includes a second anode/cathode layer proximate the second main surface, a first passivation material lining the trench and a second passivation material lining the mesa. The second anode/cathode layer is the first conductivity.Type: GrantFiled: August 10, 2006Date of Patent: June 22, 2010Assignee: Icemos Technology Ltd.Inventors: Robin Wilson, Conor Brogan, Hugh J. Griffin, Cormac MacNamara
-
Publication number: 20100117048Abstract: A memory device includes a driver comprising a pn-junction in the form of a multilayer stack including a first doped semiconductor region having a first conductivity type, and a second doped semiconductor region having a second conductivity type opposite the first conductivity type, the first and second doped semiconductors defining a pn-junction therebetween, in which the first doped semiconductor region is formed in a single-crystalline semiconductor, and the second doped semiconductor region includes a polycrystalline semiconductor. Also, a method for making a memory device includes forming a first doped semiconductor region of a first conductivity type in a single-crystal semiconductor, such as on a semiconductor wafer; and forming a second doped polycrystalline semiconductor region of a second conductivity type opposite the first conductivity type, defining a pn-junction between the first and second regions.Type: ApplicationFiled: November 7, 2008Publication date: May 13, 2010Applicant: Macronix International Co., Ltd.Inventors: Hsiang-Lan Lung, Erh-Kun Lai, Yen-Hao Shih, Yi-Chou Chen, Shih-Hung Chen
-
Publication number: 20100090306Abstract: In one embodiment, a two terminal multi-channel ESD device is configured to include a zener diode and a plurality of P-N diodes.Type: ApplicationFiled: October 15, 2008Publication date: April 15, 2010Inventors: Ali Salih, Mingjiao Liu, Thomas Keena
-
Publication number: 20100060349Abstract: In one embodiment, a plurality of ESD devices are used to form an integrated semiconductor filter circuit. Additional diodes are formed in parallel with the ESD structures in order to increase the input capacitance.Type: ApplicationFiled: September 11, 2008Publication date: March 11, 2010Inventors: Steven M. Etter, Mingjiao Liu, Ali Salih, David D. Marreiro, Sudhama C. Shastri
-
Patent number: 7666751Abstract: In one embodiment, high doped semiconductor channels are formed in a semiconductor region of an opposite conductivity type to increase the capacitance of the device.Type: GrantFiled: September 21, 2007Date of Patent: February 23, 2010Assignee: Semiconductor Components Industries, LLCInventors: David D. Marreiro, Sudhama C. Shastri, Gordon M. Grivna, Earl D. Fuchs
-
Publication number: 20100032686Abstract: Bipolar semiconductor devices have a Zener voltage controlled very precisely in a wide range of Zener voltages (for example, from 10 to 500 V). A bipolar semiconductor device has a mesa structure and includes a silicon carbide single crystal substrate of a first conductivity type, a silicon carbide conductive layer of a first conductivity type, a highly doped layer of a second conductivity type and a silicon carbide conductive layer of a second conductivity type which substrate and conductive layers are laminated in the order named.Type: ApplicationFiled: January 31, 2008Publication date: February 11, 2010Applicants: THE KANSAI ELECTRIC POWER CO., INC., CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRYInventors: Ryosuke Ishii, Koji Nakayama, Yoshitaka Sugawara, Hidekazu Tsuchida
-
Publication number: 20100006889Abstract: In one embodiment, an ESD device is configured to include a zener diode and a P-N diode and to have a conductor that provides a current path between the zener diode and the P-N diode.Type: ApplicationFiled: July 10, 2008Publication date: January 14, 2010Inventors: David D. Marreiro, Sudhama C. Shastri, Ali Salih, Mingjiao Liu, John Michael Parsey, JR.
-
Publication number: 20090302327Abstract: A wide bandgap silicon carbide device has an avalanche control structure formed in an epitaxial layer of a first conductivity type above a substrate that is connected to a first electrode of the device. A first region of a second conductivity type is in the upper surface of the epitaxial layer with a connection to a second electrode of the device. A second region of the first conductivity type lies below the first region and has a dopant concentration greater than the dopant concentration in the epitaxial layer.Type: ApplicationFiled: June 10, 2008Publication date: December 10, 2009Inventors: Christopher L. Rexer, Gary M. Dolny, Richard L. Woodin, Carl Anthony Witt, Joseph Shovlin
-
Publication number: 20090302424Abstract: In one embodiment, a bi-directional diode structure is formed to have a substantially symmetrical current-voltage characteristic.Type: ApplicationFiled: June 6, 2008Publication date: December 10, 2009Inventors: Mark Duskin, Suem Ping Loo, Ali Salih
-
Publication number: 20090250720Abstract: Transient voltage suppressor and method for manufacturing the transient voltage suppressor having a dopant or carrier concentration in a portion of a gate region near a Zener region that is different from a dopant concentration in a portion of a gate region that is away from the Zener region.Type: ApplicationFiled: April 4, 2008Publication date: October 8, 2009Inventors: Emmanuel Saucedo-Flores, Mingjiao Liu, Francine Y. Robb, Ali Salih
-
Patent number: 7582515Abstract: Embodiments of the present invention generally relate to solar cells and methods and apparatuses for forming the same. More particularly, embodiments of the present invention relate to thin film multi-junction solar cells and methods and apparatuses for forming the same.Type: GrantFiled: February 6, 2007Date of Patent: September 1, 2009Assignee: Applied Materials, Inc.Inventors: Soo-Young Choi, Yong-Kee Chae, Shuran Sheng
-
Patent number: 7582537Abstract: A zener diode and methods for fabricating and packaging same are disclosed, whereby contact hole forming process exposing a diffusion layer is removed to enable to simplify the fabricating process, and the diffusion length not contacting the electrode line is determined by the crosswise length toward which the impurity is diffused to enable to reduce the zener impedance value. Furthermore, wet etching is used following the diffusion to remove the diffusion masks such that no damage is given to the diffusion layers to thereby enable to improve the zener diode characteristics.Type: GrantFiled: December 7, 2005Date of Patent: September 1, 2009Assignee: LG Electronics Inc.Inventors: Ki Chang Song, Geun Ho Kim
-
Publication number: 20090185316Abstract: The invention relates to an avalanche diode that can be employed as an ESD protection device. An avalanche ignition region is formed at the p-n junction of the diode and includes an enhanced defect concentration level to provide rapid onset of avalanche current. The avalanche ignition region is preferably formed wider than the diode depletion zone, and is preferably created by placement, preferably by ion implantation, of an atomic specie different from that of the principal device structure. The doping concentration of the placed atomic specie should be sufficiently high to ensure substantially immediate onset of avalanche current when the diode breakdown voltage is exceeded. The new atomic specie preferably comprises argon or nitrogen, but other atomic species can be employed. However, other means of increasing a defect concentration level in the diode depletion zone, such as an altered annealing program, are also contemplated.Type: ApplicationFiled: January 21, 2008Publication date: July 23, 2009Inventors: Jens Schneider, Kai Esmark, Martin Wendel
-
Patent number: 7553734Abstract: Methods for fabricating an avalanche photodiode (APD), wherein the APD provides both high optical coupling efficiency and low dark count rate. The APD is formed such that it provides an active region of sufficient width to enable high optical coupling efficiency and a low dark count rate. Some APDs fabricated using these methods have a device area with an active region and an edge region, wherein the size of the active region is substantially matched to the mode-field diameter of an optical beam, and wherein the size of the edge region is substantially minimized and further wherein the device region maintains a substantially uniform gain and breakdown voltage.Type: GrantFiled: October 17, 2005Date of Patent: June 30, 2009Assignee: Princeton Lightwave, Inc.Inventors: Rafael Ben-Michael, Mark Allen Itzler
-
Patent number: 7544557Abstract: A Schottky diode exhibiting low series resistance is efficiently fabricated using a substantially standard CMOS process flow by forming the Schottky diode using substantially the same structures and processes that are used to form a field effect transistor (FET) of a CMOS IC device. Polycrystalline silicon, which is used to form the gate structure of the FET, is utilized to form an isolation structure between the Schottky barrier and backside structure of the Schottky diode. Silicide (e.g., cobalt silicide (CoSi2)) structures, which are utilized to form source and drain metal-to-silicon contacts in the FET, are used to form the Schottky barrier and backside Ohmic contact of the Schottky diode. Heavily doped drain (HDD) diffusions and lightly doped drain (LDD) diffusions, which are used to form source and drain diffusions of the FET, are utilized to form a suitable contact diffusion under the backside contact silicide.Type: GrantFiled: October 21, 2005Date of Patent: June 9, 2009Assignee: Tower Semiconductor Ltd.Inventors: Sharon Levin, Shye Shapira, Ira Naot, Robert J. Strain, Yossi Netzer
-
Publication number: 20090140333Abstract: A method and device structure are disclosed for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop the trench MOSFET. The ESD protection module has a low temperature oxide (LTO) bottom layer whose patterning process is found to cause the gate oxide damage. The method includes: a) Fabricate numerous trench MOSFETs on a wafer. b) Add a Si3N4 isolation layer, capable of preventing the LTO patterning process from damaging the gate oxide, atop the wafer. c) Add numerous ESD protection modules atop the Si3N4 isolation layer. d) Remove those portions of the Si3N4 isolation layer that are not beneath the ESD protection modules. In one embodiment, hydrofluoric acid is used as a first etchant for patterning the LTO while hot phosphoric acid is used as a second etchant for removing portions of the Si3N4 isolation layer.Type: ApplicationFiled: November 29, 2007Publication date: June 4, 2009Inventors: Mengyu Pan, Zengyi He, Kaiyu Chen
-
Publication number: 20090115018Abstract: A transient voltage-suppressing (TVS) device supported on a semiconductor substrate is applied to protect an electronic device from a transient voltage. The TVS device includes a clamp diode functions with a high-side and a low side diodes for clamping a transient voltage disposed on a top layer of the semiconductor substrate insulated by a insulation layer constituting a TVS on silicon-on-insulator (SOI) device. In an exemplary embodiment, the insulator layer further includes a thick body oxide (BOX) layer having a thickness in the range of 250 Angstroms to 1 micrometer to sustain an application with a breakdown voltage higher than 25 volts. In another exemplary embodiment, the clamp diode further surrounded by a P-well and the P-well is formed on top of a P?/P+ substrate layer disposed above the insulator layer.Type: ApplicationFiled: November 1, 2007Publication date: May 7, 2009Inventor: Shekar Mallikarjunaswamy
-
Publication number: 20090085154Abstract: In a first aspect, a method for forming a non-volatile memory cell is provided. The method includes (1) forming a metal-insulator-metal (MIM) antifuse stack including (a) a first metal layer; (b) a silicon dioxide, oxynitride or silicon nitride antifuse layer formed above the first metal layer; and (c) a second metal layer formed above the antifuse layer. The method also includes (2) forming a contiguous p-i-n diode above the MIM stack, the contiguous p-i-n diode comprising deposited semiconductor material; (3) forming a layer of a silicide, silicide-germanide, or germanide in contact with the deposited semiconductor material; and (4) crystallizing the deposited semiconductor material in contact with the layer of silicide, silicide-germanide, or germanide. The memory cell comprises the contiguous p-i-n diode and the MIM stack. Other aspects are provided.Type: ApplicationFiled: September 28, 2007Publication date: April 2, 2009Inventors: S. Brad Herner, Tanmay Kumar
-
Patent number: 7510903Abstract: A bi-directional transient voltage suppression (“TVS”) device (101) includes a semiconductor die (201) that has a first avalanche diode (103) in series with a first rectifier diode (104) connected cathode to cathode, electrically coupled in an anti-parallel configuration with a second avalanche diode (105) in series with a second rectifier diode (106) also connected cathode to cathode. All the diodes of the TVS device are on a single semiconductor substrate (301). The die has a low resistivity buried diffused layer (303) having a first conductivity type disposed between a semiconductor substrate (301) having the opposite conductivity type and a high resistivity epitaxial layer (305) having the first conductivity type. The buried diffused layer shunts most of a transient current away from a portion of the epitaxial layer between the first avalanche diode and the first rectifier diode, thereby reducing the clamping voltage relative to the breakdown voltage.Type: GrantFiled: March 5, 2008Date of Patent: March 31, 2009Assignee: Protek Devices LPInventors: Fred Matteson, Venkatesh P. Pai, Donald K. Cartmell
-
Publication number: 20090079022Abstract: In one embodiment, the ESD device uses highly doped P and N regions deep within the ESD device to form a zener diode that has a controlled breakdown voltage.Type: ApplicationFiled: September 21, 2007Publication date: March 26, 2009Inventors: Thomas Keena, Ki Chang, Francine Y. Robb, Mingjiao Liu, Ali Salih, John Michael Parsey, JR., George Chang
-
Publication number: 20090056102Abstract: A method for fabricating a semiconductor device includes (a) depositing an insulating film on a semiconductor substrate; (b) forming a recess in the insulating film; (c) depositing a conductive film on the insulating film while filling the recess with the conductive film; and (d) polishing the conductive film. Step (d) includes a first polishing substep of using a first polisher pad conditioned with a first dresser and a second polishing substep of using a second polisher pad conditioned with a second dresser different from the first dresser.Type: ApplicationFiled: August 28, 2008Publication date: March 5, 2009Applicant: FUJITSU MICROELECTRONICS LIMITEDInventors: Manabu SAKAMOTO, Tetsuya SHIRASU, Naoki IDANI
-
Publication number: 20090039384Abstract: In one embodiment the present invention includes a semiconductor rectifier device comprising a first, second, and third semiconductor regions and a gate. The first semiconductor region is of a first conductivity type. The second semiconductor region is adjacent to the first semiconductor region which has a second conductivity type. The third semiconductor region is adjacent to the second semiconductor region which has the second conductivity type. The gate is proximate to but insulated from the second semiconductor region and electrically coupled to the third semiconductor region. When the first semiconductor region is biased in a first direction, an inversion region forms in the second semiconductor region. The inversion region forms a forward-biased tunnel diode junction with the third semiconductor region. When the first semiconductor region is biased a second direction, the semiconductor rectifier device functions as a reverse-biased PIN diode.Type: ApplicationFiled: September 10, 2008Publication date: February 12, 2009Applicant: Diodes, Inc.Inventors: Roman Jan Hamerski, Jonathan Moult, Timothy S. Eastman
-
Patent number: 7485947Abstract: A zener diode circuit includes a semiconductor substrate having an N-doped region and a P-doped region that form a PN junction. The N-doped region and the P-doped region have areas with widths that decrease as the N-doped region and the P-doped region approach the PN junction. The zener diode circuit also includes a transistor that provides current to the zener diode, and circuitry that detects a state of the zener diode.Type: GrantFiled: December 12, 2002Date of Patent: February 3, 2009Assignee: Austriamicrosystems AGInventor: Franz Unterleitner
-
Publication number: 20090026579Abstract: A rectenna capable of power conversion from electromagnetic (EM) waves of high frequencies is provided. In one embodiment, a rectenna element generates currents from two sources—based upon the power of the incident EM wave and from an n-type semiconductor, or another electron source attached to a maximum voltage point of an antenna element. The combined current from both sources increases the power output of the antenna, thereby increasing the detection sensitivity of the antenna of a low power signal. Full wave rectification is achieved using a novel diode connected to a gap in the antenna element of a rectenna element. The diode is conductive at forward bias voltage or reverse bias voltage, and rectifies the antenna signal generated by the desired EM wave received by antenna raise from The rectenna element of the present invention may be used as a building block to create large rectenna arrays.Type: ApplicationFiled: October 7, 2005Publication date: January 29, 2009Inventors: Guy Silver, Juinerong Wu
-
Publication number: 20090026491Abstract: In one embodiment, a mandrel and an outer dummy spacer may be employed to form a first conductivity type region. The mandrel is removed to form a recessed region wherein a second conductivity type region is formed. In another embodiment, a mandrel is removed from within shallow trench isolation to form a recessed region, in which an inner dummy spacer is formed. A first conductivity type region and a second conductivity region are formed within the remainder of the recessed region. An anneal is performed so that the first conductivity type region and the second conductivity type region abut each other by diffusion. A gate electrode is formed in self-alignment to the p-n junction between the first and second conductivity regions. The p-n junction controlled by the gate electrode, which may be sublithographic, constitutes an inventive tunneling effect transistor.Type: ApplicationFiled: July 26, 2007Publication date: January 29, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Roger A. Booth, JR., Kangguo Cheng, Jack A. Mandelman