Zener Diodes Patents (Class 438/983)
  • Patent number: 11699696
    Abstract: A silicon-controlled rectifier includes a substrate of a first conductivity type; a deep well region of a second conductivity type; a well regions of the first conductivity type and the second conductivity type; a first, second and third heavily doped active regions of the first conductivity type; a first, second and third heavily doped active regions of the second conductivity type; and a first, second and third shallow trench isolation structures. A reverse diode formed in the third heavily doped active region of the second conductivity type and the well region of the first conductivity type is embedded, and a forward diode is formed in the heavily doped active region of the first conductivity type and the well region of the second conductivity type. By sharing the third heavily doped active region of the second conductivity type across the well regions of different conductivity types, two back-to-back diodes are formed.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: July 11, 2023
    Assignee: Powerchip Semiconductor Manufacturing Corporation
    Inventors: Juin Jei Liou, Wenqiang Song, Ching-Sung Ho
  • Patent number: 8975661
    Abstract: An asymmetrical bidirectional protection component formed in a semiconductor substrate of a first conductivity type, including: a first implanted area of the first conductivity type; a first epitaxial layer of the second conductivity type on the substrate and the first implanted area; a second epitaxial layer of the second conductivity type on the first epitaxial layer, the second layer having a doping level different from that of the first layer; a second area of the first conductivity type on the outer surface of the epitaxial layer, opposite to the first area; a first metallization covering the entire lower surface of the substrate; and a second metallization covering the second area.
    Type: Grant
    Filed: August 16, 2011
    Date of Patent: March 10, 2015
    Assignee: STMicroelectronics (Tours) SAS
    Inventor: Benjamin Morillon
  • Patent number: 8723264
    Abstract: In one embodiment, electrostatic discharge (ESD) devices are disclosed.
    Type: Grant
    Filed: October 17, 2012
    Date of Patent: May 13, 2014
    Assignee: Semicondutor Components Industries, LLC
    Inventors: David D. Marreiro, Steven M. Etter, Sudhama C. Shastri
  • Patent number: 8415765
    Abstract: A semiconductor device including a semiconductor substrate having a first conductive type layer; a first diffusion region which has the first conductive type and is formed in the first conductive type layer; a second diffusion region which has a second conductive type and an area larger than an area of the first diffusion region and overlaps the first diffusion region; and a PN junction formed at an interface between the first and the second diffusion regions. The second diffusion region includes a ring shaped structure or a guard ring includes an inverted region which has the second conductive type. According to such a configuration, it is possible to provide a semiconductor device having the required Zener characteristics with good controllability.
    Type: Grant
    Filed: February 17, 2010
    Date of Patent: April 9, 2013
    Assignee: Panasonic Corporation
    Inventors: Atsuya Masada, Mitsuo Horie
  • Patent number: 8354316
    Abstract: A semiconductor power device supported on a semiconductor substrate includes an electrostatic discharge (ESD) protection circuit disposed on a first portion of patterned ESD polysilicon layer on top of the semiconductor substrate. The semiconductor power device further includes a second portion of the patterned ESD polysilicon layer constituting a body implant ion block layer for blocking implanting body ions to enter into the semiconductor substrate below the body implant ion block layer. In an exemplary embodiment, the electrostatic discharge (ESD) polysilicon layer on top of the semiconductor substrate further covering a scribe line on an edge of the semiconductor device whereby a passivation layer is no longer required manufacturing the semiconductor device for reducing a mask required for patterning the passivation layer.
    Type: Grant
    Filed: October 29, 2010
    Date of Patent: January 15, 2013
    Inventors: Anup Bhalla, Xiaobin Wang, Wei Wang, Yi Su, Daniel Ng
  • Patent number: 8323995
    Abstract: Some embodiments include methods of forming diodes. The methods may include oxidation of an upper surface of a conductive electrode to form an oxide layer over the conductive electrode. In some embodiments, the methods may include formation of an oxidizable material over a conductive electrode, and subsequent oxidation of the oxidizable material to form an oxide layer over the conductive electrode. In some embodiments, the methods may include formation of a metal halide layer over a conductive electrode. Some embodiments include diodes that contain a metal halide layer between a pair of diode electrodes.
    Type: Grant
    Filed: April 26, 2011
    Date of Patent: December 4, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Bhaskar Srinivasan
  • Patent number: 8252656
    Abstract: Electrostatic discharge (ESD) protection clamps (61, 95) for I/O terminals (22, 23) of integrated circuit (IC) cores (24) comprise a bipolar transistor (25) with an integrated Zener diode (30) coupled between the base (28) and collector (27) of the transistor (25). Prior art variations (311, 312, 313, 314) in clamp voltage in different parts of the same IC chip or wafer caused by prior art deep implant geometric mask shadowing are avoided by using shallow implants (781, 782) and forming the base (28, 68) coupled anode (301, 75) and collector (27, 70, 64) coupled cathode (302, 72) of the Zener (30) using opposed edges (713, 714) of a single relatively thin mask (71, 71?). The anode (301, 75) and cathode (302, 72) are self-aligned and the width (691) of the Zener space charge region (69) therebetween is defined by the opposed edges (713, 714) substantially independent of location and orientation of the ESD clamps (61, 95) on the die or wafer.
    Type: Grant
    Filed: March 31, 2009
    Date of Patent: August 28, 2012
    Assignee: Freescale Semiconductor, Inc.
    Inventors: James D. Whitfield, Changsoo Hong
  • Patent number: 8236625
    Abstract: In one embodiment, a two terminal multi-channel ESD device is configured to include a zener diode and a plurality of P-N diodes. In another embodiment, the ESD devices has an asymmetrical, characteristic.
    Type: Grant
    Filed: November 17, 2011
    Date of Patent: August 7, 2012
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Ali Salih, Mingjiao Liu
  • Patent number: 8222115
    Abstract: In one embodiment, high doped semiconductor channels are formed in a semiconductor region of an opposite conductivity type to increase the capacitance of the device.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: July 17, 2012
    Assignee: Semiconductor Components Industries, LLC
    Inventors: David D. Marreiro, Sudhama C. Shastri, Gordon M. Grivna, Earl D. Fuchs
  • Patent number: 8110448
    Abstract: In one embodiment, a two terminal multi-channel ESD device is configured to include a zener diode and a plurality of P-N diodes.
    Type: Grant
    Filed: August 17, 2010
    Date of Patent: February 7, 2012
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Ali Salih, Mingjiao Liu, Thomas Keena
  • Patent number: 8003478
    Abstract: In one embodiment, a bi-directional diode structure is formed to have a substantially symmetrical current-voltage characteristic.
    Type: Grant
    Filed: June 6, 2008
    Date of Patent: August 23, 2011
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Mark Duskin, Suem Ping Loo, Ali Salih
  • Patent number: 7995636
    Abstract: A semiconductor laser apparatus has a Zener diode containing a first semiconductor region of a first conduction type and a second semiconductor region of a second conduction type joined with the first semiconductor region, and a vertical-cavity surface-emitting semiconductor laser diode stacked above the Zener diode and containing at least a first mirror layer of a first conduction type, a second mirror layer of a second conduction type and an active region sandwiched between the first and second mirror layers. The first semiconductor region and the second mirror layer are electrically connected and the second semiconductor region and the first mirror layer are electrically connected.
    Type: Grant
    Filed: November 18, 2004
    Date of Patent: August 9, 2011
    Assignee: Fuji Xerox Co., Ltd.
    Inventors: Akemi Murakami, Hideo Nakayama, Yasuaki Kuwata, Teiichi Suzuki, Ryoji Ishii
  • Patent number: 7951619
    Abstract: Some embodiments include methods of forming diodes. The methods may include oxidation of an upper surface of a conductive electrode to form an oxide layer over the conductive electrode. In some embodiments, the methods may include formation of an oxidizable material over a conductive electrode, and subsequent oxidation of the oxidizable material to form an oxide layer over the conductive electrode. In some embodiments, the methods may include formation of a metal halide layer over a conductive electrode. Some embodiments include diodes that contain a metal halide layer between a pair of diode electrodes.
    Type: Grant
    Filed: September 2, 2010
    Date of Patent: May 31, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Bhaskar Srinivasan
  • Patent number: 7910411
    Abstract: A semiconductor device includes a semiconductor substrate, a cell region, an outer peripheral region, a field plate, an outermost peripheral ring, outer peripheral region layer, an insulator film, and a Zener diode. The semiconductor substrate has a superjunction structure. The outer peripheral region is disposed at an outer periphery of the cell region. The Zener diode is disposed on the insulator film for electrically connecting the field plate with the outermost peripheral ring. The Zener diode has a first conductivity type region and a second conductivity type region that are alternately arranged in a direction from the cell region to the outer peripheral region.
    Type: Grant
    Filed: January 3, 2008
    Date of Patent: March 22, 2011
    Assignee: DENSO CORPORATION
    Inventor: Takeshi Miyajima
  • Patent number: 7811840
    Abstract: Some embodiments include methods of forming diodes. The methods may include oxidation of an upper surface of a conductive electrode to form an oxide layer over the conductive electrode. In some embodiments, the methods may include formation of an oxidizable material over a conductive electrode, and subsequent oxidation of the oxidizable material to form an oxide layer over the conductive electrode. In some embodiments, the methods may include formation of a metal halide layer over a conductive electrode. Some embodiments include diodes that contain a metal halide layer between a pair of diode electrodes.
    Type: Grant
    Filed: May 28, 2008
    Date of Patent: October 12, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Bhaskar Srinivasan
  • Patent number: 7772600
    Abstract: Disclosed are a light emitting device having a zener diode therein and a method of fabricating the light emitting device. The light emitting device comprises a P-type silicon substrate having a zener diode region and a light emitting diode region. A first N-type compound semiconductor layer is contacted to the zener diode region of the P-type silicon substrate to exhibit characteristics of a zener diode together with the P-type silicon substrate. Further, a second N-type compound semiconductor layer is positioned on the light emitting diode region of the P-type silicon substrate. The second N-type compound semiconductor layer is spaced apart from the first N-type compound semiconductor layer. Meanwhile, a P-type compound semiconductor layer is positioned on the second N-type compound semiconductor layer, and an active layer is interposed between the second N-type compound semiconductor layer and the P-type compound semiconductor layer.
    Type: Grant
    Filed: March 20, 2007
    Date of Patent: August 10, 2010
    Assignee: Seoul Opto Device Co., Ltd.
    Inventors: Duck Hwan Oh, Sang Joon Lee, Kyung Hae Kim
  • Patent number: 7741172
    Abstract: A positive-intrinsic-negative (PIN)/negative-intrinsic-positive (NIP) diode includes a semiconductor substrate having first and second main surfaces opposite to each other. The semiconductor substrate is of a first conductivity. The PIN/NIP diode includes at least one trench formed in the first main surface which defines at least one mesa. The trench extends to a first depth position in the semiconductor substrate. The PIN/NIP diode includes a first anode/cathode layer proximate the first main surface and the sidewalls and the bottom of the trench. The first anode/cathode layer is of a second conductivity opposite to the first conductivity. The PIN/NIP diode includes a second anode/cathode layer proximate the second main surface, a first passivation material lining the trench and a second passivation material lining the mesa. The second anode/cathode layer is the first conductivity.
    Type: Grant
    Filed: August 10, 2006
    Date of Patent: June 22, 2010
    Assignee: Icemos Technology Ltd.
    Inventors: Robin Wilson, Conor Brogan, Hugh J. Griffin, Cormac MacNamara
  • Patent number: 7666751
    Abstract: In one embodiment, high doped semiconductor channels are formed in a semiconductor region of an opposite conductivity type to increase the capacitance of the device.
    Type: Grant
    Filed: September 21, 2007
    Date of Patent: February 23, 2010
    Assignee: Semiconductor Components Industries, LLC
    Inventors: David D. Marreiro, Sudhama C. Shastri, Gordon M. Grivna, Earl D. Fuchs
  • Patent number: 7579632
    Abstract: In one embodiment, an ESD device is configured to include a zener diode and a P-N diode.
    Type: Grant
    Filed: September 21, 2007
    Date of Patent: August 25, 2009
    Assignee: Semiconductor Components Industries, L.L.C.
    Inventors: Ali Salih, Mingjiao Liu, Sudhama C. Shastri, Thomas Keena, Gordon M. Grivna, John Michael Parsey, Jr., Francine Y. Robb, Ki Chang
  • Patent number: 7538395
    Abstract: In one embodiment, the ESD device uses highly doped P and N regions deep within the ESD device to form a zener diode that has a controlled breakdown voltage.
    Type: Grant
    Filed: September 21, 2007
    Date of Patent: May 26, 2009
    Assignee: Semiconductor Components Industries, L.L.C.
    Inventors: Thomas Keena, Ki Chang, Francine Y. Robb, Mingjiao Liu, Ali Salih, John Michael Parsey, Jr., George Chang
  • Patent number: 7309638
    Abstract: A semiconductor component comprises a first semiconductor region (110, 310), a second semiconductor region (120, 320) above the first semiconductor region, a third semiconductor region (130, 330) above the second semiconductor region, a fourth semiconductor region (140, 340) above the third semiconductor region, a fifth semiconductor region (150, 350) above the second semiconductor region and at least partially contiguous with the fourth semiconductor region, a sixth semiconductor region (160, 360) above and electrically shorted to the fifth semiconductor region, and an electrically insulating layer (180, 380) above the fourth semiconductor region and the fifth semiconductor region. A junction (145, 345) between the fourth semiconductor region and the fifth semiconductor region forms a zener diode junction, which is located only underneath the electrically insulating layer. In one embodiment, a seventh semiconductor region (170) circumscribes the third, fourth, fifth, and sixth semiconductor regions.
    Type: Grant
    Filed: July 14, 2005
    Date of Patent: December 18, 2007
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Vishnu Khemka, Vijay Parthasarathy, Ronghua Zhu, Amitava Bose, Todd C. Roggenbauer
  • Patent number: 7272067
    Abstract: Integrated circuit antifuse circuitry is provided. A metal-oxide-semiconductor (MOS) antifuse transistor serves as an electrically-programmable antifuse. In its unprogrammed state, the antifuse transistor is off and has a relatively high resistance. During programming, the antifuse transistor is turned on which melts the underlying silicon and causes a permanent reduction in the transistor's resistance. A sensing circuit monitors the resistance of the antifuse transistor and supplies a high or low output signal accordingly. The antifuse transistor may be turned on during programming by raising the voltage at its substrate relative to its source. The substrate may be connected to ground through a resistor. The substrate may be biased by causing current to flow through the resistor. Current may be made to flow through the resistor by inducing avalanche breakdown of the drain-substrate junction or by producing Zener breakdown of external Zener diode circuitry connected to the resistor.
    Type: Grant
    Filed: February 18, 2005
    Date of Patent: September 18, 2007
    Assignee: Altera Corporation
    Inventors: Cheng H. Huang, Yowjuang Liu, Chih-Ching Shih, Hugh Sung-Ki O
  • Patent number: 7064090
    Abstract: A manufacturing technique for a zener diode which includes forming a first semiconductor region in a region such as a well region at a primary face of a semiconductor substrate and then forming a second semiconductor region of opposite conductivity type thereover. The second semiconductor region covers an area greater than the underlying first semiconductor region. The method further calls for forming an insulating film on the primary face of the substrate followed by the forming connection holes in the insulating film to expose an upper part of the second semiconductor region located outside the area covered by the junction affected between the first and second semiconductor regions. This is followed by the formation of a wire at the upper part of the insulating film in which an electrical connection is affected between the wire and the second semiconductor region through the plural connection holes which are distributively arranged.
    Type: Grant
    Filed: September 17, 2004
    Date of Patent: June 20, 2006
    Assignee: Hitachi, Ltd.
    Inventors: Shinichi Minami, Yoshiaki Kamigaki, Hideki Yasuoka, Fukuo Owada
  • Patent number: 7056761
    Abstract: In an avalanche structure, different breakdown voltages are achieved by making use of a polygate and forming a highly doped p-n junction beneath the polygate, and adjusting the gate length and optionally the bias voltage of the gate.
    Type: Grant
    Filed: March 14, 2003
    Date of Patent: June 6, 2006
    Assignee: National Semiconductor Corporation
    Inventors: Vladislav Vashchenko, Ann Concannon, Peter J. Hoppet, Marcel ter Beek
  • Patent number: 6900093
    Abstract: A process for fabricating Zener diodes that does not require the use of photomasks. An oxide layer is grown on a silicon substrate which is doped with an N-type dopant. The substrate is subsequently implanted with a P-type dopant, forming a PN junction. The substrate is then metallized for connecting the Zener diode to other circuit components. Advantageously, the substrate may be scribed after processing, before processing, or anytime during processing. Back-to-back Zener diodes formed in this manner are used as shunt circuits across individual lamp sockets in series-wired Christmas light strings to maintain current flow to each of the lamps of the light string when one or multiple lamps fail.
    Type: Grant
    Filed: August 5, 2003
    Date of Patent: May 31, 2005
    Assignee: JLJ, Inc.
    Inventor: John L. Janning
  • Patent number: 6897543
    Abstract: Integrated circuit antifuse circuitry is provided. A metal-oxide-semiconductor (MOS) antifuse transistor serves as an electrically-programmable antifuse. In its unprogrammed state, the antifuse transistor is off and has a relatively high resistance. During programming, the antifuse transistor is turned on which melts the underlying silicon and causes a permanent reduction in the transistor's resistance. A sensing circuit monitors the resistance of the antifuse transistor and supplies a high or low output signal accordingly. The antifuse transistor may be turned on during programming by raising the voltage at its substrate relative to its source. The substrate may be connected to ground through a resistor. The substrate may be biased by causing current to flow through the resistor. Current may be made to flow through the resistor by inducing avalanche breakdown of the drain-substrate junction or by producing Zener breakdown of external Zener diode circuitry connected to the resistor.
    Type: Grant
    Filed: August 22, 2003
    Date of Patent: May 24, 2005
    Assignee: Altera Corporation
    Inventors: Cheng H. Huang, Yowjuang Liu, Chih-Ching Shih, Hugh Sung-Ki O
  • Patent number: 6894318
    Abstract: The present invention provides a diode 200 that includes a substrate 215 doped with a first type dopant and a double implanted guard ring 245 located within the substrate and doped with a second type dopant opposite the first type dopant and having a first doped profile region 245a and a second doped profile region 245b. The present invention also includes a method of manufacturing this diode and an integrated circuit that utilizes this diode 200 within a CMOS and bipolar transistor integrated circuit 600.
    Type: Grant
    Filed: August 20, 2003
    Date of Patent: May 17, 2005
    Assignee: Texas Instruments Incorporated
    Inventors: Ming-Yeh Chuang, William C. Loftin, Scott K. Montgomery
  • Publication number: 20040229439
    Abstract: A process for fabricating Zener diodes that does not require the use of photomasks. An oxide layer is grown on a silicon substrate which is doped with an N-type dopant. The substrate is subsequently implanted with a P-type dopant, forming a PN junction. The substrate is then metallized for connecting the Zener diode to other circuit components. Advantageously, the substrate may be scribed after processing, before processing, or anytime during processing. Back-to-back Zener diodes formed in this manner are used as shunt circuits across individual lamp sockets in series-wired Christmas light strings to maintain current flow to each of the lamps of the light string when one or multiple lamps fail.
    Type: Application
    Filed: August 5, 2003
    Publication date: November 18, 2004
    Inventor: John L. Janning
  • Publication number: 20040201079
    Abstract: A single-electrode, push-pull semiconductor PIN Mach-Zehnder modulator (10) that includes first and second PIN devices (12, 14) on a substrate (16). Intrinsic layers (22, 28) of the devices (12, 14) are the active regions of two arms (50, 52) of a Mach-Zehnder interferometer. An outer electrode (38) is connected to the N layer (24) of the first PIN device (12) and a center electrode (40) is connected to the P layer (20) of the first PIN device (12). An outer electrode (42) is connected to the P layer (26) of the second PIN device (14) and the center electrode (40) is connected to the N layer (30) of the second PIN device (14). An RF modulation signal biases the PIN devices (12, 14) in opposite directions and causes the index refraction of the intrinsic layers (22, 28) to change in opposite directions to give a push-pull modulation effect.
    Type: Application
    Filed: April 10, 2003
    Publication date: October 14, 2004
    Inventors: David C. Scott, Timothy A. Vang, Wenshen Wang, Elizabeth T. Kunkee
  • Patent number: 6803598
    Abstract: Interband tunnel diodes which are compatible with Si-based processes such as, but not limited to, CMOS and SiGe HBT fabrication. Interband tunnel diodes are disclosed (i) with spacer layers surrounding a tunnel barrier; (ii) with a quantum well adjacent to, but not necessarily in contact with, one of the injectors, and (iii) with a first quantum well adjacent to, but not necessarily in contact with, the bottom injector and a second quantum well adjacent to, but not necessarily in contact with, the top injector. Process parameters include temperature process for growth, deposition or conversion of the tunnel diode and subsequent thermal cycling which to improve device benchmarks such as peak current density and the peak-to-valley current ratio.
    Type: Grant
    Filed: May 5, 2000
    Date of Patent: October 12, 2004
    Assignee: University of Delaware
    Inventors: Paul R. Berger, Phillip E. Thompson, Roger Lake, Karl Hobart, Sean L. Rommel
  • Patent number: 6645820
    Abstract: An ESD protection circuit protects integrated circuits having multiple power supply voltage sources from damage when an ESD event causes excessive differential voltages between the multiple separate power supply voltage sources. The ESD protection circuit has a string of serially connected lateral polycrystalline silicon diodes characterized by consistent turn-on threshold voltage level such that as the number of stage of the ESD protection circuit increase, the turn-on voltage threshold of the ESD protection circuit increase linearly.
    Type: Grant
    Filed: April 9, 2002
    Date of Patent: November 11, 2003
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Kuo Reay Peng, Jian-Hsing Lee, Shui-Hung Chen
  • Patent number: 6645802
    Abstract: An ESD protection circuit includes a bipolar transistor, a resistor, and a zener diode formed on and within a semiconductor substrate. The resistor extends between the base and emitter regions of the transistor so that voltage developed across the resistor can turn on the transistor. The zener diode is formed in series with the resistor and extends between the base and collector regions of the transistor. Thus configured, breakdown current through the zener diode, typically in response to an ESD event, turns on the transistor to provide a nondestructive discharge path for the ESD. The zener diode includes anode and cathode diffusions. The cathode diffusion extends down into the semiconductor substrate in a direction perpendicular to the substrate. The anode diffusion extends down through the cathode diffusion into the semiconductor substrate. The anode diffusion extends down further than the cathode diffusion so that the zener diode is arranged vertically with respect to the substrate.
    Type: Grant
    Filed: June 8, 2001
    Date of Patent: November 11, 2003
    Assignee: Xilinx, Inc.
    Inventors: Sheau-Suey Li, Shahin Toutounchi, Michael J. Hart, Xin X. Wu, Daniel Gitlin
  • Patent number: 6586317
    Abstract: A zener diode is formed in a bipolar or BiCMOS fabrication process by modifying the existing masks that are used in the bipolar or BiCMOS fabrication process, thereby eliminating the need for a separate doping step. In addition, the reverse breakdown voltage of the zener diode is set to a desired value within a range of values by modifying the area of a new opening in one of existing masks.
    Type: Grant
    Filed: May 8, 2001
    Date of Patent: July 1, 2003
    Assignee: National Semiconductor Corporation
    Inventors: Vladislav Vashchenko, Andy Strachan, Peter Hopper
  • Patent number: 6576506
    Abstract: The specification describes a DMOS transistor that is fully integrated with an electrostatic protection diode (ESD). The ESD diode is isolated from the DMOS device by a trench. The trench is metallized to tie the guard ring of the ESD to the substrate thereby increasing the current handling capabilities of the ESD. The trench also provides a convenient buried contact to the RF ground.
    Type: Grant
    Filed: June 29, 2001
    Date of Patent: June 10, 2003
    Assignee: Agere Systems Inc.
    Inventor: Muhammed Ayman Shibib
  • Patent number: 6555440
    Abstract: A method of fabricating a diode device, such as a PIN diode, includes forming top and bottom regions of opposite conductivity types and includes anisotropically etching into the top surface to form a pit having side walls that converge with approach to the bottom surface. However, the pit does not extend to the bottom surface. In the PIN diode embodiment, the pit terminates within an intrinsic region that separates a bottom surface diffusion region from a diffusion region along the walls of the anisotropically etched pit. The anisotropic etching approach provides a degree of self regulation with regard to the geometries of the pit. A process flow of steps is described, which allows thicker and larger diameter wafers to be used in the formation of an array of such diode device.
    Type: Grant
    Filed: June 5, 2000
    Date of Patent: April 29, 2003
    Assignee: Agilent Technologies, Inc.
    Inventor: Frank Sigming Geefay
  • Patent number: 6552413
    Abstract: Implemented is a diode which controls an energy loss produced during a reverse recovery operation and generates an oscillation of an applied voltage with difficulty even if a reverse bias voltage has a great value. An N layer 101 and a P layer 102 are formed in a semiconductor substrate such as silicon. Furthermore, a cathode side P layer 103 is also formed facing a cathode electrode 105 in a position on the N layer 101 that a depletion layer extended during application of a reverse bias voltage does not reach. By providing the cathode side P layer 103, a current density of a reverse current obtained during a reverse recovery operation can be increased, the sudden change of a resistance component of a diode can be prevented and the generation of a voltage oscillation can be suppressed. The cathode side P layer 103 has a diameter W of approximately 400 &mgr;m or less and a rate of an area of the cathode side P layer 103 occupying a cathode surface is kept at approximately ⅖ or less.
    Type: Grant
    Filed: July 14, 2000
    Date of Patent: April 22, 2003
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Noritoshi Hirano, Katsumi Satoh
  • Patent number: 6551892
    Abstract: A manufacturing process providing a zener diode formed in an N-type well housing a first N-type conductive region and having a doping level higher than the well, and a second P-type conductive region arranged contiguous to the first conductive region. The first conductive region is connected, through a third N-type conductive region having the same doping level as the first conductive region, to a conductive material layer overlying the gate oxide layer to be protected. The third conductive region, the well, and the substrate form an N+/N/P diode that protects the gate oxide layer during manufacture of the integrated device from the deposition of the polycrystalline silicon layer that forms the gate regions of the MOS elements.
    Type: Grant
    Filed: June 25, 2001
    Date of Patent: April 22, 2003
    Assignee: STMicroelectronics S.r.l.
    Inventors: Matteo Patelmo, Federico Pio
  • Publication number: 20030062584
    Abstract: This invention relates to a technique of improving reverse recovery characteristic of a semiconductor device, and an object of the invention is to solve a technical problem of breakdown voltage reduction which has conventionally caused in enhancing soft recover.
    Type: Application
    Filed: February 14, 2000
    Publication date: April 3, 2003
    Inventor: Hideki Takahashi
  • Publication number: 20020171110
    Abstract: A structure of an ESD protection circuit device located under a pad, protecting an internal circuit and a method of manufacturing the same are disclosed. The ESD protection circuit device having a pad window, located under a pad, includes a semiconductor substrate having a P-well and an N well. The P-well and the N-well have an interface. A predetermined area, pad window is selected in the substrate. A first STI structure, a second STI structure and a third STI structure are formed in the substrate within the pad window. N-type doped regions are formed P-well and in the N-well. First p-type doped regions are formed in the P-well and in the N-well and second p-type doped regions are formed in the P-well and in the N-well. A first zener diode is formed in the N-well and a second zener diode is formed in the P-well.
    Type: Application
    Filed: May 18, 2001
    Publication date: November 21, 2002
    Inventors: Tien-Hao Tang, Shiao-Shien Chen
  • Publication number: 20020127765
    Abstract: A diode for use in an under-the-hood automotive application has a TO 220 outline and consists of a diode die on a two piece lead frame which has a thick section to which the bottom of the die is soldered, and a thinner section which extends through a plastic housing as a connection tab and which has a forked end for easy connection to a node of a three phase bridge. The bottom of the thickened section is exposed through the insulation housing for easy connection to a d-c heat sink rail. The diode is particularly useful in applications greater than 2 KW.
    Type: Application
    Filed: July 19, 2001
    Publication date: September 12, 2002
    Inventors: Hugh Richard, Alberto Guerra
  • Publication number: 20020127890
    Abstract: The present invention provides a semiconductor device embracing (a) a first semiconductor region defined by a first end surface, a second end surface opposing to the first end surface and a side boundary surface connecting the first and second end surfaces; (b) a second semiconductor region connected with the first semiconductor region at the second end surface; (c) a third semiconductor region connected with the first semiconductor region at the first end surface; and (d) a fourth semiconductor region having inner surface in contact with the side boundary surface and an impurity concentration lower than the first semiconductor region. The fourth semiconductor region surrounds the first semiconductor region, and is disposed between the second and third semiconductor regions. The first, second and fourth semiconductor regions are first conductivity-type, but the third semiconductor region is a second conductivity type.
    Type: Application
    Filed: December 7, 2001
    Publication date: September 12, 2002
    Inventor: Hideyuki Andoh
  • Patent number: 6417061
    Abstract: An improved semiconductor device and method which includes a zener diode and RC network combination that share common semiconductor mask steps during the fabrication process. A common N+ layer serves to provide both the separate N+ cathode regions of the zener diode and the separate bottom electrode N+ region of the capacitor. A common metal layer serves to provide separate electrical contacts to the N+ cathode regions of the zener diode and also provides a separate top metal electrode for the capacitor. The capacitor dielectric is comprised of silicon nitride. A silicon dioxide/silicon nitride insulation layer is formed between the top metal electrode of the capacitor and a resistive layer typically made from tantalum nitride.
    Type: Grant
    Filed: March 15, 2001
    Date of Patent: July 9, 2002
    Assignee: Digital Devices, Inc.
    Inventors: Dmitri G. Kravtchenko, Anatoly U. Paderin
  • Publication number: 20020031887
    Abstract: A cost-competitive, dense, CMOS compatible ZPROM memory array design and method of manufacture is disclosed. The method of manufacture includes a novel method for forming extremely thin diodes and thin strips of other materials such as conductors by using oxide spacers as an etching mask.
    Type: Application
    Filed: June 5, 2001
    Publication date: March 14, 2002
    Inventor: Steven T. Harshfield
  • Patent number: 6284603
    Abstract: A new method of fabricating a Flash EEPROM memory cell is achieved. Ions are optionally implanted into said semiconductor substrate to form threshold enhancement regions of the same type as the semiconductor substrate. A tunneling oxide is formed. A first conductive layer is deposited. An interpoly oxide layer is deposited. A second conductive layer is deposited. The second conductive layer, the interpoly oxide layer, the first conductive layer, and the tunneling oxide layer are patterned to form control gates and floating gates. Ions are implanted to form drain junctions. A mask protects the planned source junctions. The drain junctions are opposite type to the semiconductor substrate. Ions are implanted to form source junctions. A mask protects the drain junctions. The source junctions are opposite type to the semiconductor substrate. Ions are implanted to form channel stop junctions to complete the Flash EEPROM memory cells.
    Type: Grant
    Filed: July 12, 2000
    Date of Patent: September 4, 2001
    Assignee: Chartered Semiconductor Manufacturing Inc.
    Inventors: Chan Tze Ho Simon, Tyrone Philip Stodart, Sung Rae Kim, Yung-Tao Lin
  • Patent number: 6274909
    Abstract: In this invention a deep N-type wall is created surrounding an area that contains an ESD device, or circuit. The ESD device, or circuit, is connected to a chip pad and is first surrounded by a P+ guard ring. The P+ guard ring is then surrounded by the deep N-type wall to block excess current from an ESD event or voltage overshoot from reaching the internal circuitry. The deep N-type wall comprises an N+ diffusion within an N-well which is on top of a deep N-well. The height of the deep N-type wall is approximately 4 to 6 micrometers which provides a capability to absorb much of the current from an ESD event or voltage overshoot.
    Type: Grant
    Filed: November 12, 1999
    Date of Patent: August 14, 2001
    Assignee: Etron Technology, Inc.
    Inventors: Kun-Zen Chang, Deng-Shun Chang, Rong-Tai Kao
  • Patent number: 6214666
    Abstract: A method for manufacturing a non-volatile EEPROM memory cell, and a memory cell structure provided by the method. The method comprises the steps of: forming a gate stack on the surface of a substrate; forming a first and a second active regions in the substrate so that the first and second active regions extend to a depth below the surface of the substrate and have a first impurity type and an impurity concentration; and implanting a pocket region of an opposite conductivity type to that of the first or second active region into the surface of the substrate adjacent to the first active region. The step of implanting a pocket region may performed by implanting substantially at an angle non-normal to the surface of the substrate.
    Type: Grant
    Filed: December 18, 1998
    Date of Patent: April 10, 2001
    Assignee: Vantis Corporation
    Inventor: Sunil D. Mehta
  • Patent number: 6051457
    Abstract: An integrated circuit with a passive component and an ESD device in accordance with the present invention has: a P substrate; an N+ buried layer implanted in the P substrate; a cathode coupled to the N+ buried layer with an N area formed between the cathode and the N+ buried layer; an anode coupled to the N+ buried layer with a P area formed between the anode and the N+ buried layer; and a first P+ buried layer implanted in the N+ buried layer and below the P area to form a Zener diode. In an alternative embodiment, the ESD device may be incorporated in an integrated circuit with an active component.
    Type: Grant
    Filed: March 15, 1999
    Date of Patent: April 18, 2000
    Assignee: Intersil Corporation
    Inventor: Akira Ito
  • Patent number: 5856214
    Abstract: The method in accordance with the present invention is compatible with conventional CMOS fabrication processes to form a zener diode and a lateral silicon controlled rectifier constituting an on-chip ESD protection circuit in a semiconductor substrate. The zener diode is composed of a p-type doped region and an n-type doped region, wherein one of the doped regions, formed by deep diffusing impurities from a doped polysilicon layer, is arranged between two adjacent well regions. During an ESD event, the zener diode incurs breakdown to lower the trigger voltage of the lateral SCR device to within a range of about 5-7 Volts to thereby discharge the ESD current prior to damage of an internal circuit being protected.
    Type: Grant
    Filed: March 4, 1996
    Date of Patent: January 5, 1999
    Assignee: Winbond Electronics Corp.
    Inventor: Ta-Lee Yu
  • Patent number: 5851882
    Abstract: A cost-competitive, dense, CMOS compatible ZPROM memory array design and method of manufacture is disclosed. The method of manufacture includes a novel method for forming extremely thin diodes and thin strips of other materials such as conductors by using oxide spacers as an etching mask.
    Type: Grant
    Filed: May 6, 1996
    Date of Patent: December 22, 1998
    Assignee: Micron Technology, Inc.
    Inventor: Steven T. Harshfield
  • Patent number: 5756387
    Abstract: Zener diode with high stability in time and low noise for integrated circuits and provided in an epitaxial pocket insulated from the rest of a type N epitaxial layer grown on a substrate of type P semiconductor material.In said pocket are included a type N+ cathode region and a type P anode region enclosing it.The cathode region has a peripheral part surrounding a central part extending in the anode region less deeply than the peripheral part.
    Type: Grant
    Filed: December 29, 1995
    Date of Patent: May 26, 1998
    Assignee: SGS-Thomson Microelectronics S.r.l.
    Inventors: Flavio Villa, Paolo Ferrari