Abstract: Electronic device processing systems including an equipment front end module (EFEM) with at least one side storage pod are described. The side storage pod has a chamber including a storage container. The storage container includes at least a top substrate holder and a bottom substrate holder. In some embodiments, an exhaust port is located at a midpoint between the top substrate holder and the bottom substrate holder. A gas flow component is configured to provide a gas flow between the EFEM body and the storage container. A gas flow temperature component is configured to modify the temperature of the gas flow to a particular temperature.

Abstract: A biosafety cabinet includes an operation, an operation space, a front plate, an operation opening, a vibration damping mechanism and an exhaust. The vibration damping mechanism is a mechanism that floats an operation object, which is disposed in the operation space, from the operation stage. The vibration damping mechanism includes a table which supports the operation object, and a magnet which is disposed in the operation stage. The vibration damping mechanism is a mechanism that floats the operation object from the operation stage by using a magnetic force.

Abstract: Electronic device processing systems including an equipment front end module with at least one side storage pod are described. The side storage pod has a chamber including a top substrate holder and a bottom substrate holder. In some embodiments, an exhaust port is located at a midpoint between the top substrate holder and the bottom substrate holder. Methods and systems in accordance with these and other embodiments are also disclosed.

Abstract: An enclosure for using a tile saw is described. The enclosure comprises a rectangular tray having a front, a rear, and two side walls and a bottom surface wherein the bottom surface is inclined from a first height adjacent to the front wall to a second height adjacent to the rear wall wherein the second height is lower with respect to top surfaces of the front, rear, and side walls than the first height wherein the tray is configured to have a tile saw used therein. Two side panels, a rear panel, and a top panel are configured to be joined together to form a waterproof box on three sides and top of the tray so that water used to cool a tile saw blade is not sprayed outside of the waterproof box.

Abstract: A component extraction system utilized a base unit that produces a positive pressure air stream and that draws a negative pressure air stream into the base unit. To enhance performance, and reduce head requirements and power consumption, a number of bends in the flow paths is minimized in the base unit.

Abstract: A method and apparatus for applying an atomized liquid solution upon a person, comprising a spray enclosure booth; an exhaust vent located below an anticipated user's facial area zone, the exhaust vent disposed within the bottom tray or a lower area of at least one wall or a lower area of a door and configured for exhausting ambient atomized liquid solution from the spray enclosure booth; a rigid conduit support defining a central air flow conduit connected to a bottom tray and pneumatically connected to an exhaust vent and providing structural integrity to the enclosure booth; an atomizing spray head assembly movably connected to the rigid conduit support and physically supported by the rigid conduit support; and an exhaust system configured to exhaust ambient atomized liquid solution from the spray enclosure booth by drawing atomized solution into the exhaust vent then through and out of the rigid conduit.

Abstract: A substantially cubic work space extends from an upper opening to the interior of a housing. A substantially cubic lower space extends from a lower opening to the interior of the housing. A front cover covering the upper opening is provided on the front of the work space. The front cover is, for example, a transparent resin sheet bent and protruding from the upper opening to the interior of the work space, and is held, by a horizontal rod, in the form of the letter L in cross-section. A clean bench having a simple structure, easily installed, and being capable of achieving a high level of cleanliness even if installed in a relatively unclean environment can thus be provided.

Abstract: Low-cost, potentially disposable, hazardous material handling and anti-contamination hoods are described, that provide a very high level of protection of either personnel, in the case of a hazardous material handling hood, or the process contained in the hood in the case of an anti-contamination hood. Once contaminated these hoods can be hermetically sealed to contain the contamination so that the hood can be moved or shipped for disposal or analysis of the contaminants prior to disposal.

Abstract: A compact, portable, lightweight, low power consuming, convenient, versatile and sterile laminar airflow device, useful in obtaining a workspace substantially devoid of airborne particulate contaminants, said device having a body (C) divided into an upper and lower chambers; the upper chamber housing one or more pre-filtration members (B), a motor (T) driving a fan (S), and one or more filters (U) located below the motor; and the lower chamber provided with a slideable front panel (M), a removable platform (X) located at the lower portion of the chamber and a perforated plane (N) placed on the removable platform.

Abstract: Methods and apparatus for reducing contamination in a local work or dispensing station area. Whereby air flows through the operator's localized breathing area constantly, and therefore reduces or eliminates local eddying and pooling of contaminants.

Abstract: A laboratory workbench includes a housing bounding a working space. The working space communicates with the exterior through a window bordering the working space on one of its sides thereof. A fan produces a flow of air in the working space and out the window. A protective screen is arranged on the housing in such a way that it can be moved. Specifically, the protective screen is mounted on the housing in the top area of the working space window in such a way that the protective screen can be moved between a hanging position at least partially covering the window, and a folded-up position. In the folded-up position, the protective screen projects into the housing in a substantially horizontal position plane. In one embodiment, an expansion screen is movable attached to the protective screen and has reach through openings formed therethrough.

Abstract: A flowhood work station has an inspection chamber having a perforated inspection surface. An air filtration housing is in fluid communication with the perforated inspection surface. A blower is capable of directing air downwardly through the perforated inspection surface. A return air plenum is in fluid communication with the perforated inspection surface and with the air filtration housing. The return air plenum captures a substantial portion of the air passing through the perforated inspection surface and directs the air to the air filtration housing.

Abstract: An environmental enclosure apparatus is presented with air flow control and air balancing. The apparatus includes a housing having a work chamber, multiple adjustable fans for moving air into the work chamber, a filter for filtering particulate from the air moving into the chamber and a control mechanism for controlling each of the multiple adjustable fans. The control mechanism is responsive to a sensor which determines a change in position of at least one component within the work chamber. The at least one component could comprise a work product, a work tool or other product handling device. Air balancing is achieved through the provision of multiple chases within the enclosure, some of which have inlets at a bottom of the enclosure for drawing in external air and some of which have openings internal to the work chamber adjacent to a work surface for facilitating air flow balancing.

Abstract: A method for protecting an ultraclean surface of an object includes the step of forming, from an ultraclean fluid, a laminar flow moving over the surface. In order to enhance the reliability of protection, the velocity in the layer of the laminar flow from the ultraclean is varied according to the height thereof in a cross-section perpendicular with respect to the direction of the propagation of the flow.

Abstract: A method and device for maintaining a clean atmosphere at controlled temperature, at a workstation accessible from a contaminated room. A curtain of gas--in the form of a slow jet and of a fast jet--is generated at the level of the openings between the workstation and the contaminated zone. The fast jet is situated at the level of the opening on the workstation side; the jets are directed approximately in parallel to the opening so that at least the external face of the fast jet reaches up to the opening. Moreover, a stream of clean gas is generated, and sent in such a way as to create a uniform sweeping, inside the volume to be protected.

Abstract: The cabin is integral with a shield which separates it from the working environment and which can replace a perimetral part of the wall or the like which separates said environment from the outside. In correspondence with said shield the cabin comprises a sealed (by suitable seal gaskets), flameproof and explosion-proof door providing access from said environment and comprising an armoured viewing window. On the side opposite that comprising the door the cabin has a movable wall which is hinged and ejectable. In the walls perpendicular to the preceding there are apertures or passageways for the entry and exit of the can conveyor. Analogous apertures or passageways are provided in the shield, these being at least partly closable by guillotine plates when required. In the region in which the conveyor extends in the open between the shield and cabin, means are provided to direct air streams onto the cans.