Laser Evaporative (i.e., Ablative) Coating Patents (Class 505/474)
  • Patent number: 5508255
    Abstract: The present invention comprises a high quality, epitaxial thallium-based HTS thin film on MgO and other substrates and methods of providing the same. The present invention is achieved using a nucleation layer which provides a template for subsequent growth. Specifically, YBCO and/or YBCO analog films (films having growth characteristics and physical structures analogous to YBCO) are used as nucleation layer(s) on MgO and other substrates to enable the growth of epitaxial thallium-based HTS films.
    Type: Grant
    Filed: July 5, 1994
    Date of Patent: April 16, 1996
    Assignee: Superconductor Technologies, Inc.
    Inventor: Michael M. Eddy
  • Patent number: 5468806
    Abstract: Disclosed is a method of manufacturing a thin film of an oxide superconductor represented by formula Sr.sub.1-x Nd.sub.x CuO.sub.2 on a substrate. The oxide superconductor has a tetragonal crystal structure, the lattice constant in a-axis falling within a range of between 0.385 nm and 0.410 nm, and the lattice constant in c-axis being an integer number of times as much as a level falling within a range of between 0.310 nm and 0.350 nm. The method includes the steps of forming by epitaxial growth a film of a crystal having lattice constants close to those of the crystal of said oxide superconductor on a substrate, and forming a thin film of the oxide superconductor of a tetragonal crystal structure represented by general formula (I) by a thin film-forming technique.
    Type: Grant
    Filed: December 1, 1994
    Date of Patent: November 21, 1995
    Assignees: The Furukawa Electric Co., Ltd., Hitachi Ltd., Kabushiki Kaisha Toshiba, Central Research Institute of Electric Power Industry, International Superconductivity Technology Center
    Inventors: Kiyoshi Yamamoto, Nobuyuki Sugii, Koichi Kubo, Michiharu Ichikawa, Hisao Yamauchi
  • Patent number: 5462921
    Abstract: A method of fabricating a thin-film Hg-containing oxide superconductor is disclosed, which comprises forming a thin film on a substrate, said thin film containing mercury, an alkaline earth element, and copper as main components thereof; and subjecting said substrate with the thin film to a heat treatment in an oxygen-containing atmosphere at an oxygen partial pressure of 1/500 to 1/10 atm, to convert said thin film to the thin-film superconductor.
    Type: Grant
    Filed: May 9, 1994
    Date of Patent: October 31, 1995
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hideaki Adachi, Kentaro Setsune, Koichi Mizuno
  • Patent number: 5447910
    Abstract: An oxide superconducting film is formed using laser deposition of applying an excimer laser beam (1, 21) onto a target (3, 23) through a converging lens (2, 22) and depositing atoms and/or molecules scattered from the target (3, 23) on the base material (5). The converging lens (2) is prepared by a cylindrical lens, or the converging lens (22) is moved, so that a portion (4, 25) irradiated with the laser beam (1, 21) on the target (3, 23) is linearized. Thus, it is possible to form an oxide superconducting film which is homogeneous over a region having a relatively large area on the base material (5) not only in film thickness but also in property.
    Type: Grant
    Filed: October 4, 1993
    Date of Patent: September 5, 1995
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Noriki Hayashi, Noriyuki Yoshida
  • Patent number: 5432151
    Abstract: A process for depositing a biaxially aligned intermediate layer over a non-single crystal substrate is disclosed which permits the subsequent deposition thereon of a biaxially oriented superconducting film. The process comprises depositing on a substrate by laser ablation a material capable of being biaxially oriented and also capable of inhibiting the migration of substrate materials through the intermediate layer into such a superconducting film, while simultaneously bombarding the substrate with an ion beam. In a preferred embodiment, the deposition is carried out in the same chamber used to subsequently deposit a superconducting film over the intermediate layer. In a further aspect of the invention, the deposition of the superconducting layer over the biaxially oriented intermediate layer is also carried out by laser ablation with optional additional bombardment of the coated substrate with an ion beam during the deposition of the superconducting film.
    Type: Grant
    Filed: July 12, 1993
    Date of Patent: July 11, 1995
    Assignee: Regents of the University of California
    Inventors: Richard E. Russo, Ronald P. Reade, Stephen M. Garrison, Paul Berdahl
  • Patent number: 5422338
    Abstract: A thin film device comprising a substrate and an oxide superconductor film formed thereon, wherein said oxide superconductor film comprises atomic monolayers each composed of at least one kind of element of the oxide superconductor, which are deposited substantially in a vertical direction to the substrate so that the pereodicy of the lattice structure of the oxide superconductor is substantially maintained, and at an intermediate portion of the oxide superconductor film, at least a part of the atoms of the oxide superconductor is substituted by other element in the lattice structure of the oxide superconductor to form a non-superconductor interlayer, and the pereodicy of the lattice structure of the oxide superconductor film is substantially maintained across the interface between the oxide superconductor and said non-superconductor interlayer.
    Type: Grant
    Filed: January 10, 1994
    Date of Patent: June 6, 1995
    Assignee: Mitsubishi Chemical Corporation
    Inventor: Yukio Watanabe
  • Patent number: 5418216
    Abstract: A structure having a silicon substrate with an epitaxially grown magnesium oxide layer on a surface onto which is epitaxially grown, either directly or on an intermediary layer, a layer of high temperature superconducting material.
    Type: Grant
    Filed: May 15, 1992
    Date of Patent: May 23, 1995
    Inventor: David K. Fork
  • Patent number: 5413988
    Abstract: An oxide superconductor thin film of Y.sub.1.+-..alpha. Ba.sub.2.+-..beta. Cu.sub.3.+-..gamma. O.sub.7-.delta. with a smooth surface having a low density of particles being generated without decreasing superconductivity is produced by the steps of applying a pulsed laser beam to the target formed of an oxide material having an apparent density of 95% or more, substantially composed of Y.sub.1.+-..alpha. Ba.sub.2.+-..beta. Cu.sub.3.+-..gamma. O.sub.7-.delta., which is obtained from a molded body of an amorphous powder by subjecting it to partial melting, followed by gradual cooling, depositing and accumulating an irradiated and evaporated oxide material of the target on a substrate.
    Type: Grant
    Filed: April 13, 1994
    Date of Patent: May 9, 1995
    Assignees: International Superconductivity Technology Center, Mitsubishi Materials Corporation
    Inventors: Kunihiko Hayashi, Shuichi Fujino, Youichi Enomoto, Shoji Tanaka
  • Patent number: 5403818
    Abstract: A Bi--Sr--Ca--Cu--O ceramic superconductor contains 0112 phases which are finely dispersed in a 2212-phase matrix with its c-axis oriented perpendicular to a growth direction.A method of preparing a Bi--Sr--Ca--Cu--O ceramic superconductor comprises the steps of growing crystals under conditions satisfying:G/R.gtoreq.1 and G.R.gtoreq.10000where G (K/cm) represents the temperature gradient at a solid-liquid interface and R (mm/h) represents the rate of crystal growth, and annealing the grown crystals in an atmosphere having oxygen partial pressure of at least 0.05 atm. within a temperature-range of 800.degree. to 860.degree. C. for at least 2 hours.
    Type: Grant
    Filed: March 19, 1993
    Date of Patent: April 4, 1995
    Assignee: Engineering Research Association For Superconductive Generation Equipment and Materials
    Inventor: Kazuhiko Hayashi
  • Patent number: 5389606
    Abstract: An in-situ process for preparing thin films which contain relatively volatile and involatile oxides is disclosed, in particular, crystalline thin films of oxides of conductors, superconductors or ferroelectric materials, wherein separate sources of the relatively volatile and involatile oxides during depositon of the thin film are employed.
    Type: Grant
    Filed: November 12, 1993
    Date of Patent: February 14, 1995
    Assignee: E. I. du Pont de Nemours and Company
    Inventor: Dean W. Face
  • Patent number: 5372089
    Abstract: Disclosed herein is a method of forming a single-crystalline thin film having excellent crystallinity on a base material without depending on the material for and crystallinity of the base material. In this method, a base material is provided thereon with a mask which can prevent chemical species contained in a vapor phase from adhering to the base material. The base material is continuously moved along arrow A, to deliver a portion covered with the mask into the vapor phase for crystal growth. Thus, a thin film is successively deposited on the portion of the base material, which is delivered from under the mask, from the vapor phase. A crystal growth end is formed on a boundary region between a portion of the base material which is covered with the mask and that which is exposed to the vapor phase, so that a crystal having the same orientation as the growth end is grown on a portion of the base material newly exposed by the movement.
    Type: Grant
    Filed: July 26, 1993
    Date of Patent: December 13, 1994
    Assignees: Sumitomo Electric Industries, Ltd., The Tokyo Electric Power Company Incorporated
    Inventors: Noriyuki Yoshida, Satoshi Takano, Kousou Fujino, Shigeru Okuda, Tsukushi Hara, Hideo Ishii
  • Patent number: 5360785
    Abstract: In a method of preparing an oxide superconducting thin film having a composition of Y-Ba-Cu-O, for example, using laser ablation, which comprises the steps of applying a laser beam to a target containing components of an oxide superconductive material and depositing particles, being thereby scattered from the target, on a substrate, the oxygen gas flow rate during film deposition is set to be at least 50 SCCM, the oxygen gas pressure during film deposition is set to be 10 to 1000 mTorr, the distance between a target 9 and a substrate 10 is set to be 40 to 100 mm, the temperature of the substrate 10 is set to be 600.degree. to 800.degree. C., the energy density of a laser beam 7 on the surface of the target 9 is set to be at least 1 J/cm.sup.2, and the laser pulse energy is set to be at least 10 mJ.
    Type: Grant
    Filed: May 7, 1993
    Date of Patent: November 1, 1994
    Assignees: Sumitomo Electric Industries, Ltd., The Toyko Electric Power Company, Incorporated
    Inventors: Noriyuki Yoshida, Satoshi Takano, Shigeru Okuda, Noriki Hayashi, Tsukushi Hara, Kiyoshi Okaniwa, Takahiko Yamamoto
  • Patent number: 5356872
    Abstract: An evaporation method of producing a new high Tc superconducting material using fullerene molecules as artificial pinning sites for any magnetic flux that may enter the material.
    Type: Grant
    Filed: March 17, 1994
    Date of Patent: October 18, 1994
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Walter Eidelloth, deceased, James T. Busch, legal representative, Richard J. Gambino, Rodney Ruoff, Claudia D. Tesche
  • Patent number: 5334579
    Abstract: A process for producing a superconducting material comprising a compound oxide represented by the general formula:(Ba, Ca).sub.x (.alpha., Dy).sub.1-x Tl.sub.y Cu.sub.1-y O.sub.3-zwherein ".alpha." represents Y or La; the atomic ratio of Ca to Ba is between 1% and 90%; the atomic ratio of Dy to .alpha. is between 1% and 90%; x, y and z are within the ranges of 0.ltoreq.x.ltoreq.1, 0.ltoreq.y.ltoreq.1, and 0.ltoreq.z<1 respectively; and the expression of (Ba, Ca) and (.alpha., Dy) means that the respective elements occupy predetermined sites in a crystal in a predetermined proportion. The process comprises preparing a material powder, compacting the material powder and then subjecting the resulting compact to a final sintering operation and is characterized in that the material powder is(A) a powder mixture composed of powders selected from a group comprising (i) powders of elemental Ba, Cu, Ca, .alpha., Dy and Tl and (ii) powders of compounds each containing at least one of said elements Ba, Cu, Ca, .
    Type: Grant
    Filed: December 31, 1992
    Date of Patent: August 2, 1994
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Hideo Itozaki, Saburo Tanaka, Nobuhiko Fujita, Shuji Yazu, Tetsuji Jodai
  • Patent number: 5334252
    Abstract: In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plasma 6, which is generated by the application of the laser beam 2.
    Type: Grant
    Filed: September 25, 1992
    Date of Patent: August 2, 1994
    Assignee: Sumimoto Electric Industries, Ltd.
    Inventors: Noriyuki Yoshida, Satoshi Takano, Shigeru Okuda, Noriki Hayashi, Tsukushi Hara, Kiyoshi Okaniwa, Takahiko Yamamoto
  • Patent number: 5330968
    Abstract: A laser ablation process for preparing an oxide superconducting thin film characterized in that an electrode is arranged between a substrate and a target. While the film is formed by laser ablation, a bias voltage of 75-100 V is applied between the electrode and the target.
    Type: Grant
    Filed: June 12, 1992
    Date of Patent: July 19, 1994
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Tatsuoki Nagaishi, Nobuhiro Ota, Naoji Fujimori
  • Patent number: 5330966
    Abstract: An oxide superconducting layer is formed on a base material of silver, whose single side is coated with MgO, or single-crystalline MgO for depositing a Bi.sub.2 Sr.sub.2 Ca.sub.2 Cu.sub.3 phase in a crystallographically oriented state by sputtering, CVD or laser ablation. Metal lead or lead oxide is then laid thereon by sputtering to obtain a two-layer structure, and the two-layer structure is heat treated in the atmospheric air. Thus, a bismuth oxide superconducting film, which is excellent in crystal orientation as well as denseness and thereby having high critical current density, is formed on the base material.
    Type: Grant
    Filed: June 26, 1992
    Date of Patent: July 19, 1994
    Assignees: Sumitomo Electric Industries, Inc., The Kansai Electric Power Co., Inc.
    Inventors: Noriki Hayashi, Satoshi Takano
  • Patent number: 5322817
    Abstract: In situ vapor phase growth of thallium containing superconductors is achieved by controlling thallium volatility. Thallium volatility is controlled by providing active oxygen at the surface of the growing material and by avoiding collisions of energetic species with the growing material. In the preferred embodiment, a thallium containing superconductor is grown by laser ablation of a target, and by provision of oxygen during growth. More specifically, a source of thallium, calcium, barium, copper and oxygen is created by laser ablation of a thallium rich target, generating an ablation plume that is directed onto a heated substrate through the oxygen, with the plume passing through oxygen having a pressure from 10.sup.-2 to ten torr. Epitaxial superconducting thin films of thallium, calcium, barium, copper and oxygen have been grown by this technique. Various superconducting phases may be engineered through use of this method.
    Type: Grant
    Filed: December 16, 1991
    Date of Patent: June 21, 1994
    Assignee: Superconductor Technologies, Inc.
    Inventors: Timothy W. James, Boo J. L. Nilsson
  • Patent number: 5321004
    Abstract: A Josephson break junction device suitable for highly sensitive electronic detecting systems. A superconductor film such as YBa.sub.2 Cu.sub.3 O.sub.7 is deposited on a substrate such as a simple-crystal MgO. The film is fractured across a narrow strip by at least one indentation in the substrate juxtaposed from the strip to form a break junction. A transducer is affixed to the substrate for applying a bending movement to the substrate to regulate the distance across the gap formed at the fracture to produce a Josephson turned junction effect. Alternatively, or in addition to the transducer, a bridge of a novel metal is applied across the gap to produce a weak-link junction.
    Type: Grant
    Filed: September 17, 1992
    Date of Patent: June 14, 1994
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Ignacio M. Perez, William R. Scott
  • Patent number: 5314867
    Abstract: A process of making high temperature Tl-based superconductors. The process includes the steps of reacting solid Ba--Ca--Cu-oxides with Tl.sub.2 O.sub.3 vapor. The process allows high quality Tl-based superconductors to be easily fabricated.
    Type: Grant
    Filed: July 25, 1991
    Date of Patent: May 24, 1994
    Assignee: University of Arkansas
    Inventors: Allen M. Hermann, Zhengzhi Sheng
  • Patent number: 5300485
    Abstract: In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plume 6, which is generated by the application of the laser beam 2, and to a portion of the target irradiated with said laser.
    Type: Grant
    Filed: September 25, 1992
    Date of Patent: April 5, 1994
    Assignee: Samitomo Electric Industries, Ltd.
    Inventors: Noriyuki Yoshida, Satoshi Takano, Shigeru Okuda, Noriki Hayashi, Tsukushi Hara, Kiyoshi Okaniwa, Takahiko Yamamoto