Abstract: Provided is a method for producing and a soft-rubbery matrix material composed of 0.3-70 micron particles of a 50,000-300,000 molecular weight cross-linkable polymer dispersed in a fluxable elastomer where the polymer's softening point temperature exceeds the elastomer's fluxing temperature and the polymer and elastomer are combined and mixed at a temperature maintained above the fluxing temperature of the elastomer but below the softening point temperature of the polymer.
Abstract: Polymers of fluorene containing compounds which form crosslinked networks are found to provide useful negative photoresists which are sensitive in the ultraviolet wavelength range of between about 200 nm to 300 nm. When used in negative photoresist compositions, these fluorene compounds produce a high resolution and thus higher information density in microcircuits manufactured using these photoresists.