Etch Masking Compositions Patents (Class 524/905)
  • Patent number: 8748081
    Abstract: Disclosed is an organic antireflective film composition which includes a monomer containing two or more thiol groups and a monomer containing two or more vinyl groups, as crosslinking agents. When the organic antireflective film composition is used, an antireflective film formed from the composition can be rapidly etched in an ultrafine pattern forming process, and the curing rate can be increased, while the etching rate is increased, without using an acid generator and a curing agent or by using the agents only in small amounts.
    Type: Grant
    Filed: October 15, 2012
    Date of Patent: June 10, 2014
    Assignee: Korea Kumho Petrochemical Co., Ltd.
    Inventors: Jin Han Lee, Shin Hyo Bae, Seung Hee Hong, Eun Hee Han
  • Patent number: 6177231
    Abstract: A resist material having a resist and particles mixed into the resist, a major component of the particles being a cluster of carbon atoms, is provided. A method for fabricating a resist material is also provided, the method repeatedly performing: a first step of coating a substrate with a resist film; and a second step of depositing particles whose major component is a cluster of carbon atoms on the resist film. Accordingly, a resist film with high etching resistance can be obtained, and it is possible to realize a reduction in the thickness of the resist film, improvements of contrast of resist patterns; resist sensitivity; heat resistance of resist films; mechanical strength of resist patterns; and further, stabilization of resist sensitivity. Therefore, highly precise fine pattern fabrication can be realized.
    Type: Grant
    Filed: June 6, 1997
    Date of Patent: January 23, 2001
    Assignee: Nippon Telegraph and Telephone Corporation
    Inventors: Tetsuyoshi Ishii, Toshiaki Tamamura, Hiroshi Nozawa, Kenji Kurihara
  • Patent number: 4948838
    Abstract: The invention concerns thermoplastic molding materials comprising a polyphenylene ether, a graft polymer with a hydrocarbon resin as the principal chain and polyphenylene ether side chains, a functionalized polyethylene, a polyamide and optionally other polymers. Molded parts made from these polymer mixtures have improved impact strengths and dimensional stabilities at elevated temperatures.
    Type: Grant
    Filed: May 4, 1988
    Date of Patent: August 14, 1990
    Assignee: Huls Aktiengesellschaft
    Inventors: Hans Jadamus, Martin Bartmann
  • Patent number: 4548967
    Abstract: A paint spray booth masking composition comprising:______________________________________ Ingredients % by weight ______________________________________ Water 30-50 Polyvinylpyrrolidone 2-30 Saccharide 16-60 Water-soluble surfactant 0.07-0.13 Preservative 0.05-0.
    Type: Grant
    Filed: June 15, 1984
    Date of Patent: October 22, 1985
    Assignee: Nalco Chemical Company
    Inventors: William B. Brown, Cynthia E. Davis
  • Patent number: 4438227
    Abstract: A composition and method of application of the composition to produce masks of the type particularly useful in the manufacture of varnished electronic terminals and components is specified. The composition consists of mixing acetone, nitrocellulose, methyl isobutyl ketone (MIBK), arylsulfonamide formaldehyde resin, and tri (b-chloroethyl) phosphate, a fire retardant, under carefully controlled conditions. This masking product is applied, prior to the varnish, on an electronic part and is subjected to heating in the varnish curing oven to about 200.degree. F. whereupon the masking product will carbonize. The resulting carbonized coating is easily removed by brushing to produce a varnish mask where the masking product was applied.
    Type: Grant
    Filed: October 4, 1982
    Date of Patent: March 20, 1984
    Assignee: Ronald Jay Brahams
    Inventors: James B. Nall, Jeffery J. King