Abstract: A silica glass member for use with a light having a specific wavelength of 250 nm or shorter, in which the difference in the maximum and the minimum values of hydroxyl group concentration as measured in a plurality of points within a plane vertical to an optical axis whose center is the crossing point of its optical axis with the optical axis of the silica glass member is 50 ppm or lower; and in which the plurality of signed birefringence values obtained based on the birefringence values measured on several points within a plane vertical to an optical axis whose center is the crossing point of its optical axis with the optical axis of the silica glass member and the direction of the fast axis fall within a range of from −2.0 to +2.0 nm/cm. Thus, a silica glass member having high optical transmittance and a high resistance against ultraviolet radiations is provided.

Abstract: Natural or synthetic silica is deposited on a preform set into rotation in front of a plasma torch which moves back and forth substantially parallel to a longitudinal direction of the preform, a first feed duct feeds the plasma with grains of natural or synthetic silica while a second feed duct feeds the plasma with a fluorine or chlorine compound, preferably a fluorine compound, mixed with a carrier gas. Any sodium or lithium contained in the grains of natural or synthetic silica react with the fluorine or chlorine of the fluorine or chlorine compound, thereby making it possible to improve the optical quality of fibers drawn from a preform built up with natural or synthetic silica, and to do so at reduced cost.

Abstract: A method for producing an optical quartz glass for use in excimer lasers, comprising a step of forming a porous silica preform by depositing silica in a soot-like form formed by flame hydrolysis of a high-purity volatile silicon compound, followed by a step of vitrifying said porous silica preform into transparent glass in an atmosphere containing water vapor and hydrogen, and a vertical type heating furnace for carrying out the production method therein.

Abstract: A method for fabricating fluorine doped, silica based glass and fiber by depositing a layer of high purity silica soot on a core rod while rotating the core rod places the rod of pure fused silica or doped fused silica and silica soot in a furnace having a lining of Al2O3, elevates the temperature in a fluorine rich atmosphere to establish the proper differential in the indices of refraction between the core start rod and the deposited layer, and heats the resulting rod at consolidation temperatures in an atmosphere of helium to form a preform. The apparatus includes a furnace having a lining of high purity alumina that is resistant to chemical etching and change normally due to the fluorine and chlorine.

Abstract: Embodiments of the invention include a method for making optical fiber having reduced aging or hydrogen aging loss over the life of the fiber and optical fiber systems including such optical fibers. Improved silicon-oxygen stoichiometry during one or more preform manufacturing steps reduces the amount of Si defects generated in the optical fiber preform. Also, deuterium exposure of optical fiber drawn from the preform reduces the likelihood of having atomic defects such as Si defects in the optical fiber that, over time, attract and bond with hydrogen atoms to form molecules that contribute to increased water absorption loss. The inventive method produces optical fibers with improved transmission characteristics, e.g., optical fibers made by methods according to embodiments of the invention have transmission loss at 1385 nanometers that is less than 0.33 dB/km and the aging loss increase thereafter is less than 0.04 dB/km.

Abstract: Natural or synthetic silica is deposited on a preform set into rotation in front of a plasma torch which moves back and forth substantially parallel to a longitudinal direction of the preform, a first feed duct feeds the plasma with grains of natural or synthetic silica while a second feed duct feeds the plasma with a fluorine or chlorine compound, preferably a fluorine compound, mixed with a carrier gas. Any sodium or lithium contained in the grains of natural or synthetic silica react with the fluorine or chlorine of the fluorine or chlorine compound, thereby making it possible to improve the optical quality of fibers drawn from a preform built up with natural or synthetic silica, and to do so at reduced cost.

Abstract: A cylindrical glass body having a low water content centerline region and method of manufacturing such a cylindrical glass body for use in the manufacture of optical waveguide fiber is disclosed. The centerline region of the cylindrical glass body has a water content sufficiently low such that an optical waveguide fiber made from the cylindrical glass body of the present invention exhibits an optical attenuation of less than about 0.35 dB/km, and preferably less than about 0.31 dB/km at a measured wavelength of 1380 nm. A low water content plug used in the manufacture of such a cylindrical glass body, an optical waveguide fiber having a low water peak, and an optical fiber communication system incorporating such an optical waveguide fiber is also disclosed.

Abstract: Disclosed is a method of making a hydrogen resistant optical waveguide fiber. The soot preform is heated and then immersed in a GeCl4 gas. A reduced metal species is thus incorporated into the glass soot prior to sintering or consolidation of the soot preform. A hydrogen absorption band around 1530 nm is substantially eliminated from waveguides made from a precursor gas treated preform.

Abstract: The disclosed invention includes an inventive drying agent. The drying agent includes at least one halide and at least one reducing agent. Preferably, the reducing agent includes a compound that will react with an oxygen by-product of the reaction of the halide and water, or the reaction of the halide and an impurity in the preform. The invention also includes a method of drying a soot preform. The method includes disposing the soot preform in a furnace. The furnace is charged with the drying agent which includes the halide and the reducing agent. Heat is then supplied to the furnace. Suitable drying agents for use in the disclosed invention include a mixture of Cl2 and CO; a mixture of Cl2, CO and CO2; and POCl3.

Abstract: Fused silica created by pyrolysis of SiCl4 are introduced in a powder state into a vacuum chamber. Pluralities of jet streams of fused silica are directed towards a plurality of heated substrates. The particles attach on the substrates and form shaped bodies of fused silica called preforms. For uniformity the substrates are rotated. Dopant is be added in order to alter the index of refraction of the fused silica. Prepared soot preforms are vitrified in situ. The material is processed into quartz tubes for fiber optics and other applications, quartz rods for fused silica wafers for semiconductors and various optical applications and quartz plates for wafer processing and optical windows.

Abstract: A method an apparatus for continuously producing optical waveguide fiber and preforms. A continuous supply of core cane is provided to a walled deposition chamber upon which glass soot is deposited to form a soot preform. The preform is passed through an aligned drying, consolidation and draw chambers from which an optical fiber may be drawn. In one embodiment, a plurality of burners are positioned at different radial distances from a longitudinal axis of the cane in the deposition chamber. One or more environmental seal(s) are provided to prevent process gasses or contaminants from flowing into or between the chambers.

Abstract: Methods of fabricating an optical fiber preform and a method of fabricating an optical fiber of the invention realize the fabrication of an optical fiber having desirable transmission characteristics in the entire wavelength rage of about 1.3 to 1.6 &mgr;m. The fabrication method comprisses a porous core rod producing step of depositing a first cladding (3) having an outer diameter D so as to surround a core (2) having an outer diameter d to produce a porous core rod (1) of D/d≧4.0 by VAD. Then, the porous core rod (1) is dehydrated to reduce the OH group concentration to 0.8 ppb or less by weight ratio. The porous core rod (1) is formed to be transparent for a vitrified core rod (4) and is heated and stretched. Thereafter, a second cladding is obtained by depositing a second porous cladding (5) around the vitrified core rod (4) by VAD to be dehydrated, transparent and vitrified.

Abstract: A method is provided for manufacturing a silica glass that is substantially free of chlorine. The method includes the step of separately expelling a silicon tetrafluoride gas, a combustion gas, and a combustible gas from a burner made of silica glass, the flow velocity of the silicon tetrafluoride gas being within the range of about 9 slm/cm2 to about 20 slm/cm2. The method further includes the steps of producing minute silica glass particles by reacting the silicon tetrafluoride gas with water produced by a reaction of the combustion gas with the combustible gas, depositing the minute silica glass particles on a target, and producing the silica glass by fusing and vitrifying the minute silica glass particles deposited on the target.

Abstract: Fused silica stepper lens for photolithographic application are disclosed which are resistant to laser-induced damage, specifically, compaction or densification which can lead to an increase in the optical path length of the lens. The figure compares the phase front distortions of a standard fused silica with the phase front distortions observed in two inventive stepper lens fused silica.

Abstract: There is disclosed a method for producing a porous optical fiber base material comprising depositing fine glass powder on a rotating member, wherein pore size of the deposited fine glass powder is controlled, and preferably, mode of the pore size is controlled to be 0.1 to 1 &mgr;m, or wherein a total amount of absorbed H2O amount and OH group amount on the fine glass powder per square meter of fine glass powder surface area is controlled to be 3.5×10−5 to 7.5×10−5 g. Such porous optical fiber base materials have an improved weight of fine glass powder deposited on the member per batch, or an improved fine glass powder deposit efficiency, which may greatly contribute to improvement of production ability and reduction of production cost.

Abstract: The present invention relates to a single-mode optical fiber having a configuration which enables lowering of dispersion slope while securing a sufficient MFD. This single-mode optical fiber has a refractive index profile in which an indent with a sufficient width is provided at the center of its core region. In particular, this indent satisfies the following relationship: a·(&Dgr;n2−&Dgr;n1)/(b·&Dgr;n2)≧0.04 when the first core portion in the single-mode optical fiber has a mean relative refractive index difference of &Dgr;n1 with respect to the cladding portion and an outer diameter of a while the second core portion has a mean relative refractive index difference of &Dgr;n2 with respect to the cladding portion and an outer diameter of b.

Abstract: A process for producing synthetic quartz glass using a burner composed of a plurality of concentric nozzles involves the steps of feeding a silica-forming raw material gas and a fluorine compound gas to a reaction zone from a center nozzle, feeding oxygen gas from a second nozzle outside the center nozzle, and feeding oxygen gas and/or hydrogen gas from a third nozzle. The silica-forming raw material gas is hydrolyzed to form fine particles of silica, which particles are deposited on a rotatable substrate so as to form a porous silica matrix, which is then fused to give the quartz glass. The flow rate of the oxygen gas fed from the second nozzle and the flow rate of the raw material gas are controlled so as to provide a 1.1- to 3.5-fold stoichiometric excess of oxygen. The excess oxygen suppresses Si—Si bond formation in the quartz glass, enabling the production of synthetic quartz glass having a high transmittance in the vacuum ultraviolet region.

Abstract: Natural or synthetic silica is deposited on a preform set into rotation in front of a plasma torch which moves back and forth substantially parallel to a longitudinal direction of the preform, a first feed duct feeds the plasma with grains of natural or synthetic silica while a second feed duct feeds the plasma with a fluorine or chlorine compound, preferably a fluorine compound, mixed with a carrier gas Any sodium or lithium contained in the grains of natural or synthetic silica react with the fluorine or chlorine of the fluorine or chlorine compound, thereby making it possible to improve the optical quality of fibers drawn from a preform built up with natural or synthetic silica, and to do so at reduced cost.

Abstract: A method of making a segmented core optical waveguide preform for making fiber that is resistant to attenuation increases due to hydrogen and heat aging. A first core region comprising a silica glass rod containing at least a first dopant is inserted into a central opening of a second core region comprising silica soot containing a second dopant. The first core region and second core region are consolidated together to form a segmented core region and cladding is deposited on the outer surface of the segmented core region.

Abstract: Disclosed is an optical waveguide fiber having a compressive outer layer that includes TiO2 in the SiO2 matrix glass. The compressive outer layer includes crystalline structures containing TiO2 that are predominately rutile. Also disclosed is a method for making an optical waveguide fiber having a compressive outer layer. The compressive outer layer can contain an additional metal oxide that is preferentially lost from the outer layer, instead of the TiO2, during the drying and consolidation step.

Abstract: Improved single-mode optical waveguide fibers having a central core region, surrounded by an inner cladding region through which light at a chosen signal wavelength will propagate to an appreciable degree along with propagation of same in the central core region, the inner core region further surrounded by an outer cladding region, the improvement comprising germanium dioxide in the inner cladding region at a concentration within the range of about 0.005 percent by weight to about 1 percent by weight of said inner cladding region, effective to significantly reduce the concentration of oxygen atoms in the inner cladding region which are available to form defects that cause hydrogen-induced attenuation. Also provided are core preforms, overclad preforms, and processes for making the fibers, core preforms and overclad preforms.

Abstract: Disclosed is a synthetic silica-glass fabricating method in which the doping of chlorine into silica glass made by using a flame hydrolysis or thermal oxidation is increased. The process comprises the steps of producing a porous deposit of silica-glass particles through treatment of gaseous silicon compounds by the flame hydrolysis or the thermal oxidation process; and consolidating the porous deposit by a heat treatment in an atmosphere including an inert gas and silicon tetrachloride (SiCl.sub.4) gas.

Abstract: A method for making an optical fiber preform comprises depositing fine particles of glass serving as a dad on the surfaces of a rod-shaped core over a given length of the rod-shaped core by use of a plurality of oxyhydrogen flame burner units, detecting an amount of the resultant deposit to check uniformity in the amount of the deposit along the lengthwise direction of the rod-shaped core during the course of the deposition, and further depositing fine particles of glass on any surface portion of the rod-shaped core within the given length from at least one burner unit other than the plurality of burner units to correct the amount of the deposit over the given length based on the results of the detection. The resultant deposit is dehydrated and fired by a usual manner to obtain a preform. An apparatus for carrying out the method is also described.

Abstract: The invention relates to a method of drying and sintering porous optical fiber preforms, especially those consisting of a solid glass core cane surrounded by a layer of cladding soot. After it is dried in a dehydrating atmosphere, the porous preform is heated to a presinter temperature just below that at which it would begin to rapidly densify. The various temperature holds and ramp rates are such that the preform is consolidated in a relatively short time without becoming cloudy or exhibiting other defects that would adversely affect the optical fiber drawn from the consolidated draw blank.

Abstract: During the gradual build-up of porous quartz glass by the combustion of a hydrolysis gas mixture and preferably for a certain period of time thereafter, a drying gas mixture is conducted under positive pressure through the porous tubular deposit from the inside to the outside as it is being built-up. This is accomplished by depositing the quartz on a tubular substrate in which a drying gas is introduced at positive pressure.