Abstract: A method and an apparatus capable of stripping resist efficiently in a short amount of time. A stripping solution under high pressure is jetted from a nozzle to a rotating wafer. The resist layer on the wafer is applied with the jetted stripping solution, and the resist layer can be efficiently stripped in a short amount of time by the multiplied effect by the physical effect caused by the impact of the jetted stripping solution and the chemical effect of the stripping solution.

Abstract: A method of dyeing a fabric connected in an endless form while repeatedly circulating said fabric through a dyeing tank is improved by providing a residence vessel made of a perforated plate within said dyeing tank and either rocking or vertically reciprocating said residence vessel as immersed in a dyeing liquor while said fabric is being stagnated within said residence vessel. Owing to the rocking or vertical reciprocating motion of the residence vessel, the dyeing liquor is made to flow into and out of said residence vessel, penetrating therethrough, and thereby the necessary amount of the dyeing liquor can be reduced and the dyeing time can be shortened. A desirable apparatus for practicing said improved method is also provided.

Abstract: A continuous tunnel batch washer of modular construction with the number of modules varying depending upon installational requirements and each module including a drum rotatably supported and driven to oscillate in a predetermined manner during the washing cycle and to rotate unidirectionally during transfer of the load from one module to a succeeding module with a unique chute or trough arrangement extending between the modules for transferring the wash load from one module to a next successive module. The drum in each module is roller supported and chain driven from a common shaft with a plurality of independent motors driving the shaft by a belt drive with each module including a reduction gear driven from the shaft and having an output driving the sprocket chain for the oscillatable and rotatable drum. A programmed control device provides continuous control of each batch of articles being laundered as they progress to the successive modules in the machine.