Abstract: A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.

Abstract: Disclosed is a processing apparatus to restrain load of a common usage system shared by a plurality of liquid processing modules. A processing module group includes k sets of share groups comprising a plurality of processing modules to perform an identical processing for each substrate (where, k?2), each set of share groups includes n processing modules (where, n?2), and each processing module includes the common usage system shared by n processing modules in each set and having a maximum capacity capable of processing m processing modules (where m?n). A carrying mechanism repeatedly loads a substrate one by one to the processing module of each set in sequence.

Abstract: An operating method is disclosed for a processing system that comprises multiple process modules each adapted to perform substantially the same process upon a substrate. During process module conditioning as a preparatory step for executing a required process recipe, each time one process module completes conditioning, successive transfer of unprocessed substrates from a cassette to the process module is started on an associated substrate transfer route, and successive processes that use the process module are started for the unprocessed substrates. The processing system can be operated efficiently, even if the nonuniformity of the conditioning time required exists between process modules of the same specifications.

Abstract: Features described herein relate to concurrently processing multiple batches of job requests for one or more machines and/or components thereof, using a plurality of job planning queues. Each batch of job requests is allocated to a planning queue, and each planning queue comprises an unplanned subqueue that stores unplanned jobs, an unsent subqueue that stores planned jobs waiting to be executed, and a sent subqueue that stores planned jobs that have been output to the machine(s) for execution. A job planner and related components determine which unsent subqueue has the fewest planned jobs at a given point in time, and selects an unplanned job from the unplanned subqueue in the same planning queue as the identified unsent subqueue. The planner then generates a plan for the selected job and inserts the planned job into the unsent subqueue for eventual output to the machine(s) for execution.

Abstract: The present application a new and improved system and method of enhanced Lean Document Production (LDP), which applies cellular manufacturing to document printing operations. The LDP process incorporates process friendly cells and, a push model to order to improve efficiency, reduce work in progress and smooth out the “frictions” in production environments. The current application presents an earliest-completion-time strategy for assigning jobs to cells and a dynamic-priority-based-batch-scheduling algorithm.

Abstract: Tools and/or resources which newly become available to a re-entrant flow manufacturing line, data processing pipeline or the like are allocated in substantially real time to processing operations independent of and consistent with a scheduling segment previously generated by dispatching items such as workpieces or data to tools and/or resources of a manufacturing line until the newly available tool or resource can be conveniently included in a subsequently generated schedule segment in order to avoid productivity loss due to schedule latency. Items can be dispatched in a priority order to accelerate completion of processing. A schedule segment including the newly available tool or resource can be facilitated by merging allocations of a real time dispatch list with allocations of a dispatch list corresponding to a previously generated schedule segment.

Abstract: A method identifies time sensitive processing sequences within a production environment using a computerized device. The processing sequences perform operations utilizing one or more tools. The method also identifies non-committed work in process items that are grouped in non-committed lots for release into one or more of the time sensitive processing sequences, and identifies committed work in process items that are being processed in committed lots within the time sensitive processing sequences, using the computerized device. The method sorts the non-committed lots by a predetermined priority, again using the computerized device. Starting with the highest priority non-committed lot (and continuing with others of the non-committed lots in priority order) the method determines whether there is available tool capacity to process a non-committed lot through each corresponding time sensitive processing sequence using the computerized device.

Abstract: Disclosed are a substrate processing apparatus, a substrate processing method, and a storage medium, which can process a normal substrate according to a normal schedule in parallel with a substrate to be processed in preference to other substrates. Processing block performs the same types of processes for substrates, carried therein from FOUP placing unit, by using process arms. When a priority substrate having a priority over other substrates are carried, control unit carries and processes the priority substrate in priority processing unit that can receive a next substrate among priority processing units to which a plurality of processing units are partially or wholly assigned, in preference to other substrates.

Abstract: A dynamic maintenance planning apparatus including a maintenance planning device and a priority calculating device is provided. The maintenance planning device determines a maintenance date and time on and at which the throughput of a manufacturing system is maximum from among possible maintenance dates and times based on a simulation result in which a specific manufacturing apparatus on a manufacturing system is stopped at a specified maintenance date and time, and, for the maintenance at the determined maintenance date and time, specifies a lot whose completion is predicted to be delayed. The priority calculating device calculates a priority of the lot whose completion is predicted to be delayed so as to prevent waiting time of the lot during the maintenance.

Abstract: A method and system of specifying a device that is the root cause of impeding productivity of a production line in consideration of even mutual influence among processes of production fluctuation with respect to the subject of specifying a device in which productive capacity is reduced due to a problem that the productive capacity of the device is changed due to production that one machine works for multiple process and a problem that the productive capacity of device is changed due to high product mix and low product volume production. A measure for changing productive capacity of devices intentionally and simulating influence to the whole production system, a measure for measuring mutual influence among processes of production fluctuation produced by the simulation and a measure for specifying a device that is the root cause of impeding the productivity on the basis of the measured result are provided.

Abstract: A method includes generating a reticle transport job using a computing device. The reticle job identifies a selected reticle. A reticle pod available for transporting the reticle is autonomously identified using the computing device. The reticle transport job is updated suing the computing device with an identifier of the reticle pod.

Abstract: A glass production line comprises a style of lean manufacturing to solve many of the inefficiencies in the scheduling of orders through a glass plant. The main goal of the global scheduler of the present invention will be to dynamically adjust the flow of glass through a glass plant for maximum efficiency.

Abstract: Arbitrating access to industrial resources as a function of controller identify is provided herein. For example, a unique identifier can be associated with a control module that can distinguish the module from other components of a system. Upon receiving a request to control a resource, the identifier of the requesting module can be associated with that resource. In a case of multiple requests, an arbitrated ID can be chosen and added to an owner queue. The chosen ID is then published and, if the published identifier matches the module identifier, the module can assume control of the resource; if not, the module's request is placed into a request queue for further arbitration. The subject innovation provides for generally applicable arbitration that can reduce redundant code crafted for each module of a system, greatly reducing overhead costs associated with such redundancy.

Abstract: Preparation of a wafer processing or measuring tool for a job can be initiated prior to assigning a wafer carrier to deliver wafers to the tool. The automated process may include transfer of wafers from a container, such as a bare wafer stocker, or between two tools.

Abstract: A computerized system and method for managing parts shortages is disclosed. The computerized system and method analyzes inventory and production demand data over a period of time to whether the parts in inventory are sufficient to meet production demand. The projections allow a logistics provider to determine when parts shortages are likely to occur and the nature of the potential shortages. Information about the type and time of potential parts shortages allow the logistics provider to take action to prevent shortages entirely or minimize their impact on production. Some shortages may be covered by requesting delivery of parts from various locations within the site inventory or by locating parts within the site inventory. Other shortages may be covered by ordering more parts from suppliers. The ability to detect various types of shortages and take mitigating actions allow a logistics provider to maintain a flow of parts to production.

Abstract: A computerized automated demand-based parts delivery management system and method is disclosed. Parts for use in a production facility are received at a warehouse and housed in storage inventory areas such as trailers parked in a yard. Data about the parts in storage inventory areas and their locations as well as an inventory of parts in the warehouse are stored in a database. A “demand pegging” operation is performed by viewing current delivery inventory levels within the warehouse and applying them to production demand data to determine when parts will be depleted from delivery inventory areas. The operation further identifies storage inventory areas that have the needed parts. Process times for transporting parts between locations are considered in determining task times for transporting parts from storage inventory areas to delivery inventory areas so parts are replenished in advance of the deplete time determined by the demand pegging operation.

Abstract: A method and an apparatus are provided for the use of resource scheduling and adaptive control software to optimize the operations of a manufacturing floor environment, particularly the operations of fabric cutting operations.

Abstract: A method for selecting equipment resources in a manufacturing process creates an execution equipment list by retrieving out of a database execution equipment required for starting a process segment. A list of available sub-equipments of the execution equipment is retrieved out of the database. Within the list of sub-equipments a check is performed on the availability of a totality of required equipments for each of a totality of work segments of the process segment respectively. The execution equipment is selected for the starting of the process segment. Each of the required equipments for execution of each of the work segments is selected respectively, in the case where the required equipment for the work segment is available. An output list is created and contains information about assignments of each of the required equipments to each of the work segments respectively in the case where all of the required equipments are available.

Abstract: A computer-implemented method includes polishing substrates simultaneously in a polishing apparatus. Each substrate has a polishing rate independently controllable by an independently variable polishing parameter. Measurement data that varies with the thickness of each of the substrates is acquired from each of the substrates during polishing with an in-situ monitoring system. A projected thickness that each substrate will have at a target time is determined based on the measurement data. The polishing parameter for at least one substrate is adjusted to adjust the polishing rate of the at least one substrate such that the substrates have closer to the same thickness at the target time than without the adjustment.

Abstract: An approach is provided for implementing locked printing on a printing device with remote unlock. The printing device includes a locked print process that is configured to examine print data received by the printing device and determine whether locked printing is to be used for the print data. Print data designated for locked printing is stored on the printing device. The printing device also includes a Web application configured to generate Web pages that define a Web-based graphical user interface. When processed at a client device, the Web pages allow a user to enter authorization data that is transmitted to the Web application on the printing device. The locked print process verifies the authorization data and if the authorization data is successfully verified, allows the user access to locked print data on the printing device. The approach may also be implemented using a common repository to store print data.

Abstract: Tools and/or resources which newly become available to a re-entrant flow manufacturing line, data processing pipeline or the like are allocated in substantially real time to processing operations independent of and consistent with a scheduling segment previously generated by dispatching items such as workpieces or data to tools and/or resources of a manufacturing line until the newly available tool or resource can be conveniently included in a subsequently generated schedule segment in order to avoid productivity loss due to schedule latency. Items can be dispatched in a priority order to accelerate completion of processing. A schedule segment including the newly available tool or resource can be facilitated by merging allocations of a real time dispatch list with allocations of a dispatch list corresponding to a previously generated schedule segment.

Abstract: A system and method for efficiently transcribing verbal messages transmitted over the Internet (or other network) into text. The verbal messages are initially checked to ensure that they are in a valid format and include a return network address, and if so, are processed either as whole verbal messages or split into segments. These whole verbal messages and segments are processed by an automated speech recognition (ASR) program, which produces automatically recognized text. The automatically recognized text messages or segments are assigned to selected workbenches for manual editing and transcription, producing edited text. The segments of edited text are reassembled to produce whole edited text messages, undergo post processing to correct minor errors and output as an email, an SMS message, a file, or an input to a program. The automatically recognized text and manual edits thereof are returned as feedback to the ASR program to improve its accuracy.

Abstract: The invention controls a carrier moving and mounting device such that at normal time, the device moves and mounts carriers in sequence to a delivery mounting units according to a carry-in order, and when a priority carrier is carried into the carry-in mounting unit and if all of the delivery mounting units are occupied by the carriers, the device moves and mounts one of the carriers on the retreat mounting unit, and mounts the priority carrier on the delivery mounting unit which has become vacant by the movement; and controls a delivery device such that at normal time, the delivery device carries the substrates out of the carriers according to the carry-in order of the carriers mounted on the delivery mounting units, and when the priority carrier is mounted, the delivery device carries out the substrates in the priority carrier before the substrates in the other carriers.

Abstract: A method and a system control just in time item production via kanban cards. The items are transformed according to a flow shop containing a raw material buffer followed by a sequence of production pairs containing one workstation and an assigned buffer. A local buffer threshold parameter is provided and denotes the desired safety stock of the items of the specific type in the buffer. A global demand threshold parameter is provided and denotes the quantity of items of the specific item type required along the downstream process to satisfy the estimated demand. Whenever a kanban card is associated to an item of a specific type switches status, it is assigned one of four priority levels indicating the priority level of the production request. At each production pair, an item is produced of a type whose priority level is the highest according to a given priority model.

Abstract: Priority can be calculated for works-in-process which are not in demand. A priority calculation device (110) comprises a priority calculation unit (124) which specifies a queue of lots in each production stage, a product category wherein the lot is to be used, and the number of components included in the lot, on the basis of information stored in a queue information storage area (115), and allocates priority for each lot so that when the specified lot is supplied to the production stage, a lot, by which a ratio of a component, in each product category, contained in a lot which is in a process subsequent to the process of the production stage is made closer to the ratio of demand in each product category specified by the information stored in a demand information storage area (113), is supplied into the production stage with higher priority.

Abstract: By defining a section-related WIP limit or a throughput-related WIP limit, an efficient “look ahead” characteristic may be established to efficiently control the WIP in a complex manufacturing environment, such as a semiconductor facility. The respective critical WIP values may enable efficient reduction of priority of products moving towards an increased WIP queue, thereby reducing or substantially avoiding the release of products that are expected to run into the WIP queue. In this way, the efficiency of shared tools may be increased, since process capacity no longer required for the processing products running into WIP queues may be allocated for other operations.

Abstract: A first linear combination of a local moving aggregated quantity derived from a WIP distribution and a global aggregated quantity derived from the WIP distribution is calculated for each range for a given product type in a manufacturing line. The first linear combination serves as a first throughput target for the range and product. A second linear combination of a standard deviation of the non-zero portion of the WIP distribution and the global aggregated quantity is calculated for the product type in the manufacturing line. The coefficients of this second linear combination are predetermined. This second linear combination serves as a second throughput target. A throughput target for each range is determined by determining the minimum of the first throughput target, which can be different for each range, and the second throughput target, which is common across all ranges.

Abstract: An exemplary method enables implementation of a universal circuit capable of emulating each gate of a circuit designed to calculate a function. A first selection module receives inputs associated with the function. It generates outputs that are an ordered series of the inputs. A universal module receives these outputs and generates another set of outputs. A second selection module receives the outputs from the universal module and generates final function outputs that are an ordered series inputs received from the universal module. The selection modules and universal module themselves are also aspects of the present invention.

Abstract: A system for lot based, multi-step wafer manufacturing processes is provided and includes a transfer apparatus, disposed among tools for performing respective process steps on each wafer of each lot of wafers transferred thereto, the transfer apparatus being configured to transfer each lot from a current tool to a next tool in accordance with a process step sequence, a dispatcher operably coupled to the transfer apparatus to modify the lot order in response to a modification condition detection, a measurement unit configured to receive each wafer of each fully processed lot and to collect measurements therefrom and a processor disposed in signal communication with the dispatcher and the measurement unit to analyze the measurements relative to the lot order for evidence that a process step of a corresponding tool is responsible for performance effects.

Abstract: A method and computer program product for scheduling product lots through operations of a manufacturing line. The method including: selecting a set of sequential operations required to manufacture the lots; partitioning the product lots into designated lots and non-designated lots; and generating a release schedule for each of the non-designated lots into one or more operations of the set of sequential operations; generating a release schedule for each of the designated lots into each operation of set of sequential operations such that for each designated lot a total amount of time measured from completion of a first operation of the set of sequential operations through start of a last operation of the set of sequential operations does not exceed a target amount of time for the designated lots.

Abstract: By providing a look-ahead functionality for a tool internal substrate handling system of process tools on the basis of a process history, the tool internal substrate sequencing may be significantly enhanced. The look-ahead functionality enables a prediction of process time of substrates currently being processed in a respective process module, thereby enabling the initiation of transport activity for substrate load operations in order to significantly reduce the overall idle time of process modules occurring during substrate exchange.

Abstract: A distributed process control equipment ownership arbitration system and method for arbitrating equipment ownership conflicts are disclosed. Individual control modules representing various process control entities within a process control system define a plurality of lists or queues for storing equipment arbitration information. Requests by one process control entity to acquire ownership over another process control entity are represented by an arbitration token that represents the ownership relationship sought by the acquiring process control entity. Copies of the arbitration token are communicated between the respective control modules and stored in the various arbitration queues defined by the control modules, depending on the status of the acquisition request.

Abstract: A method of electronically representing manufacturing flow is provided. The method allows a manufacturer to electronically track an infinite number of attributes related to components used in the production of a finished product. Using these attributes, the manufacturer can perform product recalls based upon information pertinent to a malfunctioning part, rather than a statistical recall. This allows a manufacturer to perform a recall without having to recall substantially more products than necessary.

Abstract: According to an aspect of the present invention, there is provided a dicing apparatus in which: in a case where a control device detects, during an image pickup of a workpiece set onto a second worktable by a first image pickup device and a second image pickup device, that an image of a workpiece set onto a first worktable also needs to be picked up by the first image pickup device and the second image pickup device, the control device determines a priority between an operation performed on the first worktable and an operation performed on the second worktable; and when it is determined that the operation performed on the first worktable has a higher priority, the image pickup of the workpiece set onto the second worktable is interrupted, and the first image pickup device and the second image pickup device are moved to perform an image pickup of the workpiece on the first worktable.

Abstract: Techniques are presented for rescheduling manufacturing releases. A plurality of release information elements are identified based on a first run of a first advanced planning system. The release information elements comprise dates of planned manufacturing release and quantity. The plurality of release information elements are sorted based on associated demand-likelihood factors and a plurality of sorting criteria. Swapping candidates are selected and swaps are performed based on the demand-likelihood factors and at least one swapping constraint. The plurality of release information elements are then fixed and output as results. A second run of an advanced planning system is optionally performed before output and may include stability features.

Abstract: A method of managing manufacturing production includes determining a plurality of products for manufacture using a production line is disclosed. Each product is specified by composition and production line steps and criteria. Production orders for products are analyzed to determine whether products should be grouped into product-types, and whether product (type) should be made-to-stock or made to order. Queuing theory based analytic methods and optimization based heuristics are used to determine the priority for each product in the production line, taking product substitution opportunities in batch-production into account. Preselected points along the production line are determined for gathering an amount of inventory for each product. This decision is made considering product-differentiation down the line.

Abstract: A production management system has processing devices A, B, C, D, E, and P. A kind of product ? is processed in the order of the processing devices A, P, B, P, and C, and a kind of product ? is processed in the order of the processing devices D, P, E, and P. To determine whether the processing device P is to be used to produce the product ? or the product ?, an input ratio of each kind of product is multiplied by the number of times of passing the processing device P for each kind of product, thereby calculating a core of each kind of product. Based on the calculated score, whether the processing device P is to be used to produce the product ? or the product ? is determined. Accordingly, the work-in-process balance of key processes between different kinds of products can be equalized.

Abstract: A system for handling a dependency between two product segments of a process modeling a production system within a manufacturing execution system (MES) includes a network and a production modeler. The network has data processing units running a MES software for controlling and/or monitoring a production process operating a production components. The production modeler within the MES software defines the dependency between the two product segments, and allows modeling the dependency in a graphical environment as a link between the two product segments. The link is selected from a tool box having link types, each defining one of predetermined dependencies, such as: the two product segments run in parallel, one of the product segments starts after end of the other product segment, one of the product segments starts with a predetermined delay after the other product segment has been started, both two product segments use an identical equipment.

Abstract: A method, apparatus, and a system for prioritizing processing of a workpiece is provided. At least one workpiece is processed. A tag associated with the workpiece is provided. The tag includes process priority data for determining an order relating to processing the workpiece.

Abstract: The embodiments of the present invention fill the need of properly controlling product inventory of semiconductor chips by providing methods and systems of dynamic inventory control. The methods and systems timely modify parameters affecting inventory. The parameters may include target inventory, cycle time, wafer start, future inventory and future shipment. In addition, the methods and systems gather real-time customer demand forecast to assist in production planning and adjustment. Further, the methods and systems identify inventory control turning points dynamically to adjust production activities to prevent overstock and to prevent stockout.

Abstract: A method includes determining production targets for devices of different types in a production line. A queue level of devices of a first type that have completed performance of a first operation configured in accordance with a first setup state in the production line and await performance of a second operation in the production line is determined. Based on the determined queue level, a second type of device is selected for subsequent processing in the first operation based on the production targets and a setup time associated with configuring the first operation from the first setup state to a second setup state associated with the second type of device. The first operation is configured in accordance with the second setup state for processing devices of the second type.

Abstract: A first linear combination of a local moving aggregated quantity derived from a WIP distribution and a global aggregated quantity derived from the WIP distribution is calculated for each range for a given product type in a manufacturing line. The first linear combination serves as a first throughput target for the range and product. A second linear combination of a standard deviation of the non-zero portion of the WIP distribution and the global aggregated quantity is calculated for the product type in the manufacturing line. The coefficients of this second linear combination are predetermined. This second linear combination serves as a second throughput target. A throughput target for each range is determined by determining the minimum of the first throughput target, which can be different for each range, and the second throughput target, which is common across all ranges.

Abstract: Techniques for providing a unified view of a domain model to a user are described herein. In one embodiment, in response to a first search query received from a client via a first search mechanism (e.g., outside of the relational DB) for a list of persistent objects representing data entries of a relational database, it is determined whether the persistent objects have been accessed via a second search query via a second search mechanism based on an object identifier of the persistent object. If the requested persistent object has been accessed via a second search query, an identical instance of the persistent object is returned to the client as a result of the first search query. Other methods and apparatuses are also described.

Abstract: Disclosed herein are embodiments of an automated manufacturing system that is used to process multiple jobs in a product fabrication environment, where such processing comprises performing the same multiple consecutive process steps for each job and where each process step can be accomplished using one or more different available processing tools. The manufacturing system incorporates a unique run-time dispatch system. This dispatch system schedules the order in which jobs will be processed and further randomly assigns a particular combination of process steps and tools to each job in such a way that the processing tools are evenly distributed across the jobs. Ensuring even distribution of processing tools allows a statistical process control system to not only detect, for a given process step, product variability outside desired specifications, but also to efficiently de-convolve such product variability.

Abstract: A yield prediction is received by a scheduling and dispatch controller, wherein the yield prediction is associated with a manufacturing tool and a product. A weighting of the manufacturing tool is adjusted in a routing algorithm based on the yield prediction. A cost-benefit analysis is computed that identifies a cost and a benefit of manufacturing future products on the manufacturing tool. A determination is made regarding whether to process a future product on the manufacturing tool based on the cost-benefit analysis.

Abstract: A method, apparatus, and a system for prioritizing processing of a workpiece is provided. At least one workpiece is processed. A tag associated with the workpiece is provided. The tag includes process priority data for determining an order relating to processing the workpiece.

Abstract: A quality control system and method for monitoring an assembly operation is provided. The method can include: (1) providing an assembly line having a plurality of machines being assembled thereon; (2) providing a tool for performing an assembly operation; (3) performing a plurality of the assembly operations with the tool; (4) measuring a measurable parameter indicative of the performance of the tool for at least a subset of the plurality of assembly operations; (5) storing the measured values in an electronic format with a data collection device; (6) analyzing the measured values; and (7) providing a signal based on the analysis with the signal indicative of at least satisfactory or unsatisfactory performance of the tool. In some instances, the data collection device can provide for storing additional information and/or data with any particular stored measured value.

Abstract: A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

Abstract: A method identifies time sensitive processing sequences within a production environment using a computerized device. The processing sequences perform operations utilizing one or more tools. The method also identifies non-committed work in process items that are grouped in non-committed lots for release into one or more of the time sensitive processing sequences, and identifies committed work in process items that are being processed in committed lots within the time sensitive processing sequences, using the computerized device. The method sorts the non-committed lots by a predetermined priority, again using the computerized device. Starting with the highest priority non-committed lot (and continuing with others of the non-committed lots in priority order) the method determines whether there is available tool capacity to process a non-committed lot through each corresponding time sensitive processing sequence using the computerized device.

Abstract: An apparatus for controlling work process includes a lot allocation unit that gives a highest priority for lot-allocation to a device available for process. The device, which is given the highest priority, has at least one of a minimum number of lots-in-process and a maximum number of unworkable processes among devices available for process.