Abstract: A substrate processing system, which repeats a carrying cycle in which a substrate is carried sequentially in carrying order indicated by module numbers assigned to the modules, respectively, from the module of a lower module number to that of a higher module number, is capable of processing substrates at a high throughput even if some module becomes unusable and, thereafter, becomes usable. A controller controls a carrying means such that the carrying means carries a substrate taken out from the module preceding a multimodule unit including a plurality of modules to the module nest in carrying order to the module of the multimodule unit from which a substrate is carried out at time nearest to time when the substrate was carried out from the module preceding the multimodule.

Abstract: A system and method for self-synchronization of modular production systems having components with various alternative capabilities for processing and transporting work units along transport highways, for various component/transport highway configurations. The method includes determining jobs of interest, with each job requiring the production of at least one work unit. The configuration of the components, including at least one machine module, and the transport highway is determined. Each component duration time is determined and a default self-synchronization time is identified. The default self-synchronization time is optimized by adjusting not less than one component duration time.

Abstract: An apparatus for preparing portions of products, in particular food products, conveyed by means of a product conveyor, includes a plurality of robots which each define a working region. A first robot serves to sort the conveyed products in accordance with a sorting criterion. At least one second robot serves to pick up sorted products from the product conveyor and to place them down at a placement location in order to prepare a product portion satisfying a target criterion at the placement location.

Abstract: A method of sequencing wafer processing order to minimize sequence correlation in a cyclical two pattern model by generating a set of sequences of wafer identifiers that each specify an order by which one or more fabrication equipments processes wafers of a wafer lot, where the wafer lot contains a number of slots and the fabrication equipments each includes a first subsystem for processing wafers in odd-numbered slots of the first wafer lot and a second subsystem for processing wafers in even-numbered slots of the first wafer lot, and where each of the generated wafer sequences contains exactly a number of wafer identifiers that match the wafer identifiers in every other wafer sequence indexed in the set.

Abstract: By providing an under-specified specification for designating a destination carrier in a respective control job or control message, a high degree of flexibility in determining the destination of processed substrates may be obtained, thereby also allowing the removal of a source carrier for enhancing load port availability in complex semiconductor facilities.

Abstract: An automated material handling system (AMHS) includes a plurality of first stockers for material storage and a plurality of second stockers for material storage, wherein the second stockers are smaller than the first stockers. A method of operating an AMHS, wherein the AMHS includes a plurality of first stockers for material storage and a plurality of second stockers for material storage and the second stockers are smaller than the first stockers, includes selecting one of the first stockers and the second stockers after a step of a process is performed with one or more pieces of material at a piece of processing equipment; unloading the one or more pieces of material from the piece of processing equipment; and transporting the one or more pieces of material to the selected one of the first stockers and the second stockers.

Abstract: In a processing system of a linear tool in which plural carrying robots are arranged in carrying mechanical units to which processing modules are coupled and a processing target is delivered and received between the plural carrying robots, in the case where there are plural carrying routes on which the processing target is carried, the present invention provides a technique for determining the carrying route on which the highest throughput can be obtained. In the processing system of a linear tool, in the case where there are plural carrying routes on which the processing target is carried, the throughputs of the respective carrying routes are compared to each other, and the carrying route is determined by a unit for selecting the carrying route with the highest throughput.

Abstract: A method and a device for carrying out a work operation, on a workpiece continually moving forward on a conveying device, by an industrial robot moving along with the workpiece during a common run though a work path are provided. The industrial robot is displaceable along a separate longitudinal guide next to the conveying device. During the common run a base part of the industrial robot is rigidly coupled to a workpiece carrier, and the base part floats relative to a bogie running in the longitudinal guide. The industrial robot includes an exchangeable tool which, at the beginning of the common run through the working path, is a scanner tool connected to a working arm of the industrial robot. A relative position between the workpiece and the workpiece carrier is determined from the reference coordinate system of the industrial robot.

Abstract: A method of controlling a transfer robot is provided, in which method the communication time of the transfer robot can be reduced and the transfer time of a substrate can be shortened. A series of actions of the transfer robot when a substrate that is present in a processing chamber is transferred to a predetermined position in a processing chamber, are performed by a single command. The series of actions may include a swap action in which, after having taken out by a robot hand the substrate that is present in the processing chamber, a substrate that is different from the substrate is handed over by a robot hand to a predetermined position on the processing chamber.

Abstract: An improved assembly, test, packaging and/or processing system and a control system, each of which may be expanded or reduced in size, capability and/or capacity on a modular basis to suit or adapt to a number of different applications. The product assembly, test, packaging and/or processing system comprises a number of modules which are assembled and arranged as required. Pallets move between stations on the modules along track portions which cooperate with track portions on adjacent modules so other modules can be added without affecting the movement of the pallets. When those modules are added or removed, or when stations are added or removed, corresponding controllers in the control system are also added or removed.

Abstract: Disclosed herein are embodiments of a user interface associated with a tobacco product stamping machine. In one embodiment, the user interface includes a visual representation of a batch of tobacco product containers. The visual representation includes an indication of a plurality of tobacco product types included in the batch. The visual representation includes an indication of a number of containers of a first tobacco product type included in the batch.

Abstract: An apparatus for machining the ends of a component includes a plurality of work stations, and a transport mechanism for moving the component along a path to the plurality of work stations. The transport mechanism is positioned to be inboard of the ends of a component. At least one of a first work station or a second work station of the plurality of workstations includes a first fixturing portion for holding a first end, and a first machine for carrying out machine operations on the first end. The first fixturing portion and the first machine are movable in a direction transverse to the path.

Abstract: An automatic transfer apparatus for a liquid crystal display device comprising a mounting unit for placing a cassette in which a plurality of substrates are received, a moving unit disposed at a lower surface of the mounting unit and moving within a designated interval or section, and a sensing member mounted in the moving unit for sensing an obstacle, wherein the sensing member for sensing an obstacle at a bottom is disposed at the lower surface of the automatic transfer apparatus so as to enable a previous checking an existence of the obstacle, thereby preventing a structure of the automatic transfer apparatus from being damaged due to the obstacle.

Abstract: A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23.

Abstract: Methods and apparatuses enable generation of a managed space layout model defining permissible pathways for travel through the managed space. Each permissible pathway can be defined as a line segment or an edge bounded by coordinate pairs. Items and locations within the managed space are associated with permissible pathways, which association defines how the items/locations can be reached via travel through the managed space. The information can be saved as a network of nodes, which defines the intersection of the permissible pathways and includes information about the pathways. With the layout model, a path can be determined through the managed space to accomplish work in the managed space. The layout data allows a path distance to be calculated for a given work task that involves travel through the managed space.

Abstract: The method for temporarily supplying electric power includes steps of: providing a system which has a power supplying unit and a controlling unit for applying a temporary power to a broken semiconductor carrier of the semiconductor carrying facility; utilizing the power supplying unit to supply electric power to the broken semiconductor carrier; and utilizing the controlling unit to control movements of the broken semiconductor carrier. Thereby, the broken semiconductor carrier can be driven to a maintain area efficiently and safely.

Abstract: A method for controlling an amount of material transferred in a system having a plurality of material feeds and concurrent material transfer periods. The method comprising steps of: supplying each of a primary material having a target weight and a secondary material, to a receiving vessel; determining a decision threshold; feeding the primary material to the receiving vessel, feeding the secondary material into the receiving vessel as or after the primary material begins feeding and before the decision threshold, determining a feed status of the primary and secondary materials at the decision threshold; changing the feed status of one of the primary or secondary materials at the decision threshold; and feeding only the primary material within a feed alone time period until the target weight amount is fed.

Abstract: A substrate processing system of the present invention includes a transfer-in/out section for transferring-in/out a substrate and a processing section for performing a plurality of processing and treatments on the substrate, in which a throughput of substrate processing at a pre-stage performed from when the substrate is transferred in from the transfer-in/out section to when the substrate is transferred out to the external apparatus is set higher than a throughput of substrate processing at a post-stage performed from when the substrate is returned from the external apparatus into the processing section to when the substrate is returned into the transfer-in/out section.

Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

Abstract: A method of batching substrates in an automated processing tool, the automated process tool and a system for batching substrates in the automated process tool. The method includes selecting a first container containing a first group of substrates; simultaneously transferring each substrate of the first group of substrates into a batching station of the automated processing tool; selecting a second container containing a second group of substrates; selecting less than all substrates of the second group of substrates; and transferring each substrate of the less than all substrates of the second group of substrates to the batching station to form a third group of substrates.

Abstract: This invention relates specifically to a seating system or assembly which utilizes a modularized system of standard sized components. The system reduces manufacturing costs, simplifies storage and shipping and improves assembly efficiencies. The system of modularized components allows flexibility in seating use and design.

Abstract: By adopting a workpiece transfer apparatus, which grips a workpiece by use of a predetermined grip device and transfers the workpiece between press apparatuses each of which drives a die, including a transfer control device for controlling a position of the grip device based on a resultant target value obtained by combining a die position of a press apparatus located on an upstream side of a workpiece transfer direction (an upstream side die position) and a die position of a press apparatus located on a downstream side of a workpiece transfer direction (a downstream side die position), in which the transfer control device sets a resultant target value so that the grip device moves smoothly, it becomes possible to suppress vibration in a workpiece transfer apparatus in a press line.

Abstract: The invention relates to a method of analyzing a material contained inside a process vessel. An electromagnetic signal is applied to an elongated processing structure inside the vessel. The propagated electromagnetic signal is detected and information about dielectric properties of the material is extracted based on the detected signal. The invention also relates to a device comprising an elongated processing structure and a use of a processing structure.

Abstract: The present invention provides a substrate processing system capable of extending and changing a substrate processing module easily according to changes of processing contents for a substrate. An embodiment of the present invention is the substrate processing system including a main device (100) and sub devices (200 and 300).

Abstract: A method and apparatus for atomic layer deposition (ALD) is described. The apparatus comprises a deposition chamber and a wafer support. The deposition chamber is divided into two or more deposition regions that are integrally connected one to another. The wafer support is movable between the two or more interconnected deposition regions within the deposition chamber.

Abstract: A thin-film solar-cell manufacturing system enabling a reduction in installation space in a factory. The thin-film solar-cell manufacturing system includes a first common substrate storage rack, a second common substrate storage rack, and a plurality of processing equipments. The first common substrate storage rack and the second common substrate storage rack accommodate the substrate being tilted. The plurality of processing equipments are used to process the substrate in manufacturing steps of the thin film solar-cell and are disposed in a region between the first common substrate storage rack and the second common substrate storage rack, the plurality of processing equipments being disposed such that one of substrate loaders and substrate unloaders face the first common substrate storage rack and the other face the second common substrate storage rack. The first common substrate storage rack and the second common substrate storage rack are shared by the plurality of processing equipments.

Abstract: A test system for data processing circuit design emulates multiple bus masters and provides an arbitration mechanism for coordinating arbitration between those bus masters in the design emulation. The shared bus being tested may be a multi-layer bus and one or more of the bus masters being emulated or bus slaves being emulated may be cut-down emulations modelling the bus interaction itself or full emulations of the intended bus master circuit or bus slave circuit including its operational data processing.

Abstract: Preparation of a wafer processing or measuring tool for a job can be initiated prior to assigning a wafer carrier to deliver wafers to the tool. The automated process may include transfer of wafers from a container, such as a bare wafer stocker, or between two tools.

Abstract: A system for preparation of high quality and healthy food by automatic means is provided. The system includes one or more sections for carrying out the one or more operations required for the preparation of food. The food is prepared using automated or semi-automated processes using one or more processing devices.

Abstract: The disclosure relates to a computer-implemented method for stacking wood products. In some embodiments, the disclosure the steps of designing at least two types of engineered wood products via a software application; producing the at least two types of engineered wood products based on the designs utilizing a saw in conjunction with the software application; designating, via the software application, at least two bins to hold the at least two different types of engineered wood products; selecting a first bin for depositing a first type of engineered wood product; selecting a second bin for depositing a second type of engineered wood product; automatically placing the first type of engineered wood product into the first bin; and automatically placing the second type of engineered wood product into the second bin. The at least two types of engineered wood products are at least two of: panels, I-joists, headers and dimensional lumber.

Abstract: An integrated additive manufacturing cell (IAMC) that combines conventional manufacturing technologies with additive manufacturing processes is disclosed. Individual IAMCs may be configured and optimized for specific part families of complex components, or other industrial applications. The IAMCs incorporate features that reduce hardware cost and time and allow for local alloy tailoring for material properties optimization in complex components.

Abstract: The invention relates to a method for materials handling via a number of materials handling cells by passing on materials handling containers, in which each materials handling cell includes a first electric motor and a first control unit, in which each materials handling container is assigned at least one data element including at least information about the way or the destination of the materials handling container, in which the data element is passed on to the next materials handling cell and stored there in the control unit, when the materials handling container is passed on there, and where the evaluation of the data element and the control of its passing on is performed in the first control unit contained in the first electric motor, as well as to a materials handling cell and to an electric motor therefor.

Abstract: In a coating and developing apparatus applied to liquid-immersion light exposure, substrates without an appropriately formed protective film can be recovered without adversely affecting normal-substrate processing efficiency, and in addition, removal of protective films can be simplified. In the coating and developing apparatus of the present invention, abnormal substrates not appropriately surface-coated with a protective film during liquid-immersion light exposure are queued in a queuing module, instead of being loaded into an exposure unit, and after the immediately preceding substrate has been unloaded from the exposure unit and loaded into a designated module, for example, a pre-developing second heating module, each abnormal substrate is loaded into the designated module in order to prevent so-called “scheduled transfer” from being affected, and a protective-film removing unit is also controlled to process the abnormal substrate.

Abstract: An assembly, and an associated methodology, for provisioning a computer server, or other device, with an operating system or other computer data. The computer server is positioned at a build area that includes wireless local area network apparatus that broadcasts provisioning software. A mobile start cart is positioned at the build area to receive the broadcast data and to provide the data to the computer server to be provisioned. Provisioning of the computer server is made without need of an Ethernet connection, or associated Ethernet infrastructure.

Abstract: When a trouble occurs in a substrate treatment apparatus, the substrate existing in the substrate treatment apparatus is quickly collected without exerting adverse effects on the subsequent substrate treatment to resume the substrate treatment early. At the time of occurrence of trouble in a coating and developing treatment apparatus, all of the substrates in the coating and developing treatment apparatus are collected to a transfer-in/out section using a transfer unit in the apparatus. In this event, each transfer unit transfers the substrate from each position at the time of occurrence of trouble in a direction toward the transfer-in/out section for collection. Further, the substrate under treatment in the treatment unit at the time of occurrence of trouble is collected after the treatment is finished.

Abstract: The subject invention pertains to an apparatus and method for collecting 2-D data slices of a specimen. Embodiments can incorporate a lapidary platen and an image recording system to image a specimen. The lapidary wheel platen can provide an imaging plane such that an image can be taken as the lapidary wheel platen abrades a surface of the specimen. A specimen mount can maintain the surface of the specimen properly aligned in the image plane. The imaging system can be a continuous recording system such as a video camera, a discrete recording system such as a flatbed scanner, or combinations of continuous and discrete recording systems to simultaneously collect two distinct data sets. The 2-D data set(s) can then be processed to create intricate 3-D color models.

Abstract: A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is, connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

Abstract: Arrangement (1) for processing electronic components, comprising: a plurality of processing stations (3) for processing electronic components, at least some processing stations comprising an electrical actuator (8); a conveyor (2), such as a turret, for transporting components from one processing station to the next; a central processing unit (5) for commanding said processing stations; wherein at least some processing stations (3) comprise a local processing unit (7) for generating command signals (74) for said electric actuators (8), in that said central processing unit (5) is connected to said local processing units (7) over an electronic bus (6), and in that digital command instructions (75) are transferred on said electronic bus (6) between said central processing unit (5) and said local processing units (7).

Abstract: A method of tracking transports in a production process including processing a first transport in a first system, developing changes for the first transport, and updating the first system with the changes developed for the first transport. The method also includes processing a second transport in a second system, developing changes for the second transport, and updating the second system with the changes developed for the second transport. The method further includes moving the changes developed for the second transport to the first system, sequencing the changes developed for the first transport and the changes developed for the second transport in the first system, and processing a third transport in the first system. The third transport includes all of the changes developed for the first transport and all of the changes developed for the second transport.

Abstract: A control device for controlling the movement of a machine determines a base position set value according to a given base track in space. By limitation of a base element of a machine therewith, the above is hence positionally moved along a base track. The control device further determines a corresponding current supplementary end position in space using the base position set value. The control device also determines a supplementary position set value from a given fixed supplementary start position in space and the current supplementary end position. By limitation of a supplementary element of the machine thereto, the above is thus displaced along an current supplementary track from the supplementary start position, to the current supplementary end position.

Abstract: A conveyance system. The conveyance system includes a movable device for conveying an article, and a robot selected from the group consisting of an articulated robot and an orthogonal robot. The movable device is configured to be both vertically and horizontally movable; and, the robot is mounted on the movable device. The robot includes a hand and a gripper disposed on the hand. The gripper is configured to hold the article. The movable device and the robot are configured to convey the article in conveyance operations that include an extraction, a conveyance, and an installation, of the article; the range of the conveyance operations lies within a working range of the robot from a present position that is selected with priority. The movable device is configured to remain in a stationary state when the article is conveyed by the robot using the conveyance operations within the working range.

Abstract: A substrate receiving method in a substrate processing system includes: a processing process of transferring a plurality of unprocessed substrates accommodated in a first substrate storage container to a substrate processing chamber in sequence and performing a plasma process on the unprocessed substrates in the substrate processing chamber; a retreating process of retreating the plasma-processed substrates temporarily to a second substrate storage container by transferring the plasma-processed substrates to the second substrate storage container in sequence; a determining process of determining whether or not the last unprocessed substrate is unloaded from the first substrate storage container; and a re-accommodating process of transferring and re-accommodating the plurality of the processed substrates accommodated in the second substrate storage container into the first substrate storage container in sequence when a substrate decided as the last unprocessed substrate is unloaded in the determining process.

Abstract: In the case of transporting an article to a load port which is occupied by another article, at the time of generating a transportation command, estimated arrival time T1 when the article arrives at the load port and estimated removal time T2 when the article which occupies the load port is removed are compared with each other. If the time T2 is earlier than the time T1, a transportation command for transporting the article to the load port is assigned. If the time t2 is later than the time T1, a transportation command for transporting the article to a buffer on the upstream side of the load port is assigned.

Abstract: Methods and systems to dynamically configure computing apparatuses, such as desktop computers and portable computing devices, are disclosed. Embodiments generally comprise configuration systems that communicate with the computing apparatuses, retrieve hardware and/or software information from the apparatuses, and use the information to configure and/or load software onto the apparatuses. The computing apparatuses being configured may comprise desktop computers, computer workstations, or servers, as well as handheld and/or portable computing devices such as notebook or palm-held computers, cellular telephones, and portable media players. In many embodiments, the configuring systems compare information pertaining to installed hardware and software of the computing device, compare the information to software compatibility databases, select software and other configuration information based upon the comparison, and configure the computing apparatuses with the selected software and other configuration information.

Abstract: A route setting method according to the present invention sets, in a work transfer system including a plurality of work transfer units which connect a plurality of loading places to a plurality of unloading places, a route of the work transfer units to pass a work between a planned loading place and a planned unloading place which are required to transfer the work in the plurality of loading places and the plurality of unloading places. The route setting method includes the steps of setting, based on layout information representing a layout of the plurality of work transfer units, a plurality of candidates of the route between the planned loading place and the planned unloading place, and selecting, based on a predetermined condition, one route from the plurality of candidates of the route set in the candidate setting step.

Abstract: A stocker apparatus includes openers for receiving FOUPs acting as containers each for storing a plurality of substrates, to feed and collect the substrates to/from a substrate treating apparatus main body, a transport mechanism for holding and transporting the FOUPs, and racks arranged above the openers for receiving the FOUPs. The racks include an incoming rack for receiving the FOUPs from an external transport device, an outgoing rack for delivering the FOUPs to the external transport device, and a mid-treatment storage rack for keeping an empty FOUP after the substrates are fed therefrom. The openers include a feed-only opener for feeding the substrates, and a collect-only opener for collecting the substrates.

Abstract: The present invention includes a method of performing a dual damascene procedure using Site-Dependent (S-D) procedures, the method including receiving a plurality of wafers and associated data by a S-D transfer subsystem coupled to a lithography-related subsystem, determining S-D wafer data for each wafer, establishing a first Dual Damascene processing sequence, determining a first set of S-D processing wafers to be processed, establishing real-time operational states for a plurality of first S-D processing elements in the lithography-related subsystem, transferring a first number of the first set of S-D processing wafers to a first number of the first S-D processing elements in the lithography-related subsystem and delaying other S-D wafers in the first set of S-D processing wafers for a first amount of time.

Abstract: In a first aspect, a small lot size lithography bay is provided. The small lot size lithography bay includes (1) a plurality of lithography tools; and (2) a small lot size transport system adapted to transport small lot size substrate carriers to the lithography tools. Each small lot size substrate carrier is adapted to hold fewer than 13 substrates. Numerous other aspects are provided.

Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

Abstract: In accordance with at least one embodiment of the present invention, a manufacturing system includes a factory system and a field system. The factory system includes a first mount configured to receive, support, and precisely locate a removable line replaceable unit (LRU) having one or more components at a first factory LRU station within the factory system. The received LRU components are capable of adjustment to configure proper operation of the received LRU within the factory system. The field system corresponds to the factory system and includes a second mount configured to receive, support, and precisely locate an LRU removed from the factory system at a first field LRU station corresponding to the first factory LRU station. The removed and received LRU is configured for proper operation within the field system without adjustment of the one or more LRU components.