Abstract: A method for drilling a well. The method may include detecting stick-slip vibrations at a frequency via a downhole sensor. The method may further include determining a reflection coefficient of a drill bit for the frequency based on at least one of a rotational speed of the drill bit or a torque of the drill bit. The method may also include determining a reflection coefficient of a top drive for the frequency based on at least one of a rotational speed of the top drive or a torque produced by the top drive. The method may further include adjusting a control system in electronic communication with the top drive based on the reflection coefficient of the drill bit for the frequency and the reflection coefficient of the top drive for the frequency.

Abstract: A vibration control system calculates a Kurtosis Response Spectrum (KRS) of a response waveform which characterizes non-Gaussianity in a random vibration test and is utilized for vibration control. The system compares a target KRS and the response KRS, and controls a characteristic of a phase used to generate a waveform for control such that the response KRS becomes equal to the target KRS. The waveform for control is generated by applying a random phase to each frequency component of an amplitude corresponding to Power Spectral Density (PSD). The system controls a characteristic of this phase (e.g., standard deviation) per frequency, controls the KRS, deforms the waveform for control on the basis of an equalization characteristic, and calculates a drive waveform. The system sequentially updates the equalization characteristic on the basis of the response waveform and the drive waveform. The calculated drive waveform is provided to a vibration generator.

Abstract: A method for adaptive phase control of a distributed propulsion (DP) aircraft includes deriving an estimated source noise level of the aircraft's propulsors with respect to a designated low-noise area on the ground. Responsive to the estimated source noise level, a phase generator module estimates a ground noise level using the source noise level. The method includes determining an optimized set of relative azimuthal propulsor blade positions/phase angles, via the phase generator module, with such optimized phase angles being sufficient for reducing the estimated ground noise level. Phase control signals from a flight controller to the respective propulsors establishes the optimized set of relative phase angles, and thereby reduces community noise in the designated low-noise area. The DP aircraft includes an aircraft body, the flight controller, and the above-noted phase generator module.

Abstract: A robot system includes: a learning control unit configured to perform learning for calculating a learning correction amount for bringing a position of a control target portion toward a target position; a robot control unit configured to control the operation of the robot mechanism unit; a power spectrum calculating unit configured to calculate a power spectrum of a vibration data of the control target portion; a comparison unit configured to compare each power spectrum between at the time of the current learning and at the time of the immediately preceding learning; and a learning correction amount updating unit configured to adjust at least one of a phase and a gain of the learning correction amount used at the time of the current learning to set the adjusted learning correction amount as a new learning correction amount used at the time of next learning.

Abstract: A vibration signal for vibrating a vibration apparatus is generated, and data obtained by encoding amplitude modulation information indicating a change in an amplitude and/or frequency modulation information indicating a change in a frequency are acquired. Then, the acquired data is decoded, and the vibration signal is generated using the decoded amplitude modulation information and/or frequency modulation information.

Abstract: A vibration control apparatus that is connectable to plural types of vibrating device, that identifies the type of the vibrating device actually connected to the vibration control apparatus, of the plural types of vibrating device, that obtains property information relating to the vibration property of the identified type of vibrating device, that accepts a vibration instruction, and that causes the connected vibrating device to vibrate for the content produced by correcting the content of the accepted vibration instruction in accordance with the obtained property information.

Abstract: A control device of a dynamometer system includes a mechanical loss arithmetic unit that generates a loss compensation signal corresponding to loss torque generated in a dynamometer body in a state where a load is connected, on the basis of an angular velocity detection signal, a characteristic vibration suppression control circuit that generates a compensation signal in order to suppress a characteristic vibration of a swinging element, and a torque current command signal generating unit that generates a torque current command signal by subtracting the compensation signal from an upper level torque command signal. The characteristic vibration suppression control circuit is provided with a normative model arithmetic unit, deviation compensator, model input generating unit, and differential compensator that generates a correction signal by subjecting a torque signal obtained by the normative model arithmetic unit to a differential operation.

Abstract: A substrate processing apparatus includes: a placement part whereon a substrate container is placed; a substrate retainer supporting the substrate; transfer mechanisms configured to transfer the substrate between the substrate container and the substrate retainer and to perform a transfer operation; a detector provided at one or more of the transfer mechanisms to detect vibration; a memory device that registers, in advance, natural frequencies of the substrate and one or more of the transfer mechanisms and threshold values of the substrate and the plurality of transfer mechanisms; and a monitoring part to monitor whether an intensity of the vibration, based on transformed data obtained by transforming detection data, exceeds at least one of the threshold values of the substrate and the plurality of transfer mechanisms and whether a vibration frequency is equal to at least one of the natural frequencies of the substrate and the plurality of transfer mechanisms.

Abstract: Methods and related apparatus for improving synchronization of two or more engines on an aircraft are disclosed. Such method may be used where each engine comprises a first spool and a second spool, and, where a rotational speed of a first spool of a first engine has been substantially synchronized with a rotational speed of a first spool of a second engine. An exemplary method comprises receiving a value of a sensed parameter useful in controlling the first engine; adding a bias to the value; and using the biased value for controlling the first engine to cause a change in rotational speed of the second spool of the first engine in relation to the rotational speed of the first spool of the first engine.

Abstract: An apparatus and method for controlling a drilling system in a manner that reduces stick-slip by receiving a desired rotation speed v0 of the drive system to rotate the drillstring, receiving property measurements of the drilling system, and deriving therefrom a rotation speed vup of upgoing rotational waves of the drillstring associated with upgoing rotational energy in the drillstring. An actual rotation speed v of the drive system to rotate the drillstring is determined by representing downgoing energy in the drillstring as a mathematical expression containing a sum of downgoing rotational energy produced by the drive system and downgoing rotational energy caused by the upgoing rotational waves that are reflected downwardly at an upper end of the drillstring, and then optimizing the mathematical expression, which is then used for controlling the drive system to rotate the drillstring at v.

Abstract: An apparatus for reducing vibrations of an electronic steering apparatus includes a vibration filter unit which extracts a steering vibration signal that is a radio frequency component of a torque signal transmitted from a torque sensor, a signal generation unit which generates a reference signal based on one of a wheel speed and a wheel vibration number transmitted from a sensor mounted in a vehicle, an adaptive filter which receives the reference signal generated by the signal generation unit and generates a current control signal, a motor which receives the current control signal, and an error unit which stores a steering vibration component value generated based on the steering vibration signal and the current control signal applied to the motor. Here, the steering vibration component value stored in the error unit is provided as feedback to the adaptive filter to update the adaptive filter with a coefficient.

Abstract: A plant module that has a base plate and/or a frame and one or more turbomachines mounted to the base plate and/or the frame; it comprises a plurality of sensors mechanically connected to the base plate and/or the frame and electrically connected to a data processing unit for receiving data detected by the sensors and processing them; at least one of the sensors is a vibration sensor for detecting vibrations at a point or zone of the base plate and/or the frame, and/or a distance or displacement sensor for detecting a distance or a displacement of a point or zone of the base plate and/or the frame, and/or an inclination or rotation sensor for detecting an inclination or a rotation of a point or zone of the base plate and/or the frame.

Abstract: A frequency modulated continuous wave (FMCW) radar system that includes a transceiver coupled to an analog to digital converter (ADC), and a digital signal processor (DSP) coupled to the ADC. The transceiver is configured to transmit a plurality of FMCW chirps, receive a plurality of reflected FMCW chirps, and mix the plurality of reflected FMCW chirps with at least one of the FMCW chirps to generate a plurality of beat signals. The reflected FMCW chirps are the FMCW chirps after being reflected off of a target object. The ADC is configured to convert the beat signals into a plurality of digital chirps. The DSP is configured to receive the digital chirps and quantify a plurality of vibration parameters for the target object based on a comparison of phase information in a frequency domain between one of the plurality of FMCW chirps and one of the plurality of digital chirps.

Abstract: Noise abatement within a signal stream containing unwanted signal referred to as noise is performed by acquiring a digitized noise signal and using a digital processor circuit to subdivide the acquired noise signal into different frequency band segments and thereby generate a plurality of segmented noise signals. Then individually for each segmented noise signal, the processor shifts in time the segmented noise signal by an amount dependent on a selected frequency of the segmented noise signal to produce a plurality of shifted segmented noise signals. The precise time shift applied to each noise segment considers the frequency content of the segment and the system processing time. Individually for each segmented noise signal, amplitude scaling is applied. The shifted and amplitude-scaled segmented noise signals are then combined to form a composite anti-noise signal which is output into the signal stream to abate the noise through destructive interference.

Abstract: Disclosed are a method of and an apparatus for controlling a vibration of a hybrid electric vehicle. An apparatus for controlling a vibration of a hybrid electric vehicle may include: an engine position detector detecting a position of an engine; an air amount detector detecting an air amount flowing into the engine; an accelerator pedal position detector detecting a position of an accelerator pedal; a vehicle speed detector detecting a speed of the hybrid electric vehicle; and a controller. The controller controls operation of a motor based on the position of the engine, the air amount, the position of the accelerator pedal, and the speed of the hybrid electric vehicle.

Abstract: An implement vibration system and method is disclosed that includes a vibration activation device; an electrohydraulic mechanism and a controller. The controller monitors the vibration activation device and sends movement signals to the electrohydraulic mechanism to control implement movement. When the vibration activation device is activated, the controller sends vibration signals to the electrohydraulic mechanism to cause the implement to vibrate. An operator control can send implement commands where the movement signals are based on the implement commands, and when vibration is activated the controller can superimpose the vibration signals on the movement signals. The vibration signals can cause a hydraulic cylinder to repeatedly extend and retract. An electrohydraulic control valve can receive the movement signals and control hydraulic flow to the hydraulic cylinder based on the movement signals. The vibration signals can be complementary signals.

Abstract: A method for the acoustic analysis of a machine (M) including the acquisition of at least one acoustic signal supplied by at least one microphone (7) positioned in the machine, characterized in that it comprises the following steps: separation of at least one acoustic signal into a plurality of sound sources, the signal being modelled as a mixture of components, each one corresponding to a sound source; for at least one separated sound source, determination of a characteristic acoustic signature; comparison of at least one characteristic acoustic signature with at least one reference acoustic signature recorded in a reference database (5).

Abstract: A method of controlling noise of an aircraft includes storing a plurality of predefined noise modes; receiving a selection of a selected noise mode from the plurality of predefined noise modes, the selected noise mode identifying at least one operational parameter; and controlling the aircraft in response to the at least one operational parameter.

Abstract: A system includes a computer processor located within a cloud system. The system receives data from a sensor associated with an industrial or home automation control application. The sensor is configured to monitor a first condition of a device. The computer processor analyzes the data, and transmits a software update or software download from the cloud system to the industrial or home automation control application based on the data analysis.

Abstract: Methods and systems are provided for diagnosing whether active engine mounts configured to isolate engine vibration from a cabin and chassis of a vehicle are functioning as desired. In one example, a method includes indicating degradation of an active engine mount by inducing degraded combustion events in a preselected engine cylinder, and operating the active engine mount in multiple modes, the indication responsive to an amount of vehicle chassis vibration during each of the modes. By monitoring chassis vibrations as a function of induced degraded combustion events, and further responsive to the active engine mounts being controlled to the multiple modes, it may be indicated as to whether the active engine mounts are functioning as desired.

Abstract: The present invention relates to a method for acoustically detecting at least one malfunction (DYS) of a motor, the motor generating a primary noise Po that is treated by an active noise control system emitting, at the noise reduction targets, an acoustic signal Pc produced by at least one actuator and connected by a transfer function H to a signal Y produced by said active noise control system, said malfunction (DYS) having an acoustic signature identifiable in the primary noise Po at the noise reduction targets, characterized in that it comprises the following steps: acquisition of said signal Y produced by the active control system; identification of the appearance, if any, of a malfunction by a monitoring means that uses the knowledge of Y and H and emits an alert message if warranted.

Abstract: A method includes calculating a frequency and a phase of a vibration of a floating vessel, generating a control signal based on the vibration frequency and the vibration phase, operating a motion compensation system of the floating vessel during an ith control cycle using the control signal to mitigate the vibration of the floating vessel, calculating a first vibration amplitude based on the control signal, updating one or more parameters including a magnitude of the control signal, a decay rate of the vibration, the vibration phase, and the vibration frequency using the first vibration amplitude, updating the control signal based on the one or more updated parameters, and operating the motion compensation system based on the updated control signal during an (i+1)th control cycle.

Abstract: An apparatus comprises a memory, a processor coupled to the memory, one or more altitude sensors, one or more ambient temperature sensors, and one or more air movers. The processor implements an air mover control module configured to obtain at least one altitude reading from at least one of the one or more altitude sensors, to determine an altitude factor based on the at least one altitude reading, to obtain at least one ambient temperature reading from at least one of the one or more ambient temperature sensors, to determine target speeds for respective ones of the air movers utilizing the altitude factor and the at least one ambient temperature reading, and to control operation of the air movers based on the target speeds.

Abstract: A method for isolating vibrations from a source on a structure includes modeling the structure as a beam having a portion for isolation. A sensor is positioned proximate to the source, and at least one actuator is positioned on the structure between the source and the portion for isolation. A controller receives signals from the sensor and calculates vibrational inputs for each actuator that will isolate the structure portion. Driving signals are provided to each actuator by the controller in response to the calculated vibrational inputs, and each actuator is vibrated accordingly, isolating the structure portion from the source. This method can be implemented in multiple configurations to isolate the structure portion.

Abstract: A noise and vibration sensing system is provided. The sensing system includes an acceleration sensor arrangement and a summer module. The acceleration sensor arrangement includes at least one acceleration sensor and is configured to generate at least two sense signals representative of acceleration that acts on the acceleration sensor arrangement. The at least two sense signals includes dynamic ranges that are ratios between maximum amplitudes of the at least two sense signals and noise created by the acceleration sensor arrangement. The summer module is configured to sum up the at least two sense signals to provide a sum signal that includes noise and a dynamic range which is a ratio between a maximum amplitude of the sum signal and the noise included in the sum signal. The dynamic range of the sum signal is greater than the arithmetic mean of the dynamic ranges of the at least two sense signals.

Abstract: A noise source emits an acoustic noise wave with a noise frequency corresponding to an attribute of a control-status signal associated with the noise source. A method to reduce the noise comprises generating, based on the noise frequency corresponding to the attribute, an anti-noise signal having the noise frequency. The method further comprises phase-shifting the anti-noise signal to output a phase-shifted anti-noise signal that can be used to generate a noise-cancelling acoustic wave. The method can include aligning the first anti-noise signal to be in-phase with the acoustic noise wave. An anti-noise apparatus to implement the method includes an anti-noise generator, to generate the anti-noise signal, and a phase shifter to generate and output the phase-shifted anti-noise signal. The anti-noise apparatus can include a phase detector and phase alignment element to align the anti-noise signal to be in-phase with the acoustic noise wave.

Abstract: A secret parallel processing device reducing communication amount includes: a randomization unit that obtains a non-randomized input sequence and outputs a randomized sequence obtained by joining the non-randomized sequence and a dummy record sequence formed of a disclosed value and subjecting the joined sequences to random replacement processing and concealed random replacement data obtained by concealing used random replacement data; a calculation unit that obtains the non-randomized sequence, the randomized sequence, and the dummy record sequence, applies a predetermined function to the sequences, and generates an output checksum for each sequence by using calculation procedure data used in the processing of applying the function; and a correctness verification unit that obtains the output checksum for each sequence and the concealed random replacement data, assesses the output checksum for each sequence, and outputs a final test result determining whether the predetermined function has been correctly appl

Abstract: A gaming system is configured for dynamic and location-specific sound management in distributed gaming environments. A mobile gaming device executes a gaming application in undefined areas such as airports or restaurants. Various fixed gaming stations are disposed across gaming zones in defined gaming areas such as casino floors. A server communicates with the mobile device and gaming stations and samples ambient sounds with respect to each, and identifies desired sound signatures with respect to one or more of the gaming zones, such as ambient sounds for an associated gaming application, a jackpot or equivalent “hot spot” in the gaming environment, etc. The mobile device is directed to emit the ambient sounds associated with the identified desired sound signatures for the gaming zone in the defined area. The server may further direct sound emitters associated with the mobile device to locally suppress ambient sounds other than identified zone-specific exception sound signatures.

Abstract: A machinery health monitoring module processes machine vibration data based on vibration signals and provides the machine vibration data to a distributed control system. A distributed control system operator computer executes a software user interface that filters relevant configuration parameters based on a selected machine measurement type so that only those parameters that are applicable to the selected measurement type appear on the user interface screen. Further, configuration parameters for individual measurement values within the measurement type are made available only when a particular measurement value is selected for acquisition. This greatly simplifies the information that is displayed on the configuration user interface.

Abstract: According to the present invention, a method comprising: (a) calculating, by an admission control program, a parameter for scheduling a pipeline using a maximum allowable period and an execution time for each of N motion tasks, wherein the parameter includes an optimal periodic value, a task offset and an input/output offset for each of the N tasks; (b) generating, by a coordinator program, N motion tasks, wherein one of the N motion tasks is determined to be a reference task, and the other is determined to be a non-reference task; (c) allowing, by the reference task and the non-reference task, an operating system to generate a task wakeup timer and an input/output (I/O) initiating timer; and (d) setting, by the non-reference task, a task offset and an input/output offset for an own timer on the basis of the task wakeup timer of the reference task.

Abstract: An electric toothbrush with a thinner handle part to ensure the ease of manual tooth-brushing while improving the ease of a switch operation between the operating state and the stopped state, the electric toothbrush being configured to realize an effective oral cleaning by automatically giving a necessary mechanical assistance to a brush part according to the brushing state constantly varying during tooth-brushing depending on the cleaned part and the ways of holding and moving the toothbrush.

Abstract: A micro-electro-mechanical device with a closed feed-back damping loop is provided. Displacement in the mechanical resonator is opposed with a damping force determined by the closed feed-back loop that comprises a filter with a peaked frequency response, and associated phase adjustment. An oscillation-free configuration that allows high signal amplification is achieved.

Abstract: A method for operating an active noise reduction system that is designed to reduce sinusoidal noise, where there is an active noise reduction system input signal that is related to the frequency of the noise to be reduced, and where the active noise reduction system comprises one or more adaptive filters that output a generally sinusoidal noise reduction signal that is used to drive one or more transducers with their outputs directed to reduce the noise. Distortions of the noise reduction signal are detected. A distortion is based at least in part on differences between the frequency of the noise reduction signal and the frequency of the sinusoidal noise. The noise reduction signal is altered based on the detected distortion.

Abstract: A method for assuring that a signal, for damping drive train vibrations, is overlaid during the same time period as the drive train vibration, and not delayed by one time period. The method comprises the steps of continuously calculating a correction torque for the vibration damping, determining, through a parallel signal path, whether the vibration damping is to be activated or deactivated, and overlaying the correction torque to the drive train vibration, if the necessity arises for activation of the vibration damping.

Abstract: A method for health monitoring for an aircraft includes the steps of obtaining vibration data for the aircraft, obtaining navigation data for the aircraft, and determining a measure of health of the aircraft using the vibration data and the navigation data.

Abstract: A control device configured with a torque/current computation section, an actual current computation section, a current feedback control section, and a voltage control section. A two-axis rotating coordinate system has a first axis defined in a direction of field magnetic flux of a magnet provided in the rotor, and a second axis defined in a direction that is shifted by an electrical angle of 90 degrees with respect to the first axis. In the case where a torque command includes periodic torque vibration, the torque/current computation section executes first-axis command fixation control in which a first-axis current command, which is a first-axis component of the two-phase current command, is fixed at a predetermined value and a second-axis current command, which is a second-axis component of the two-phase current command, is vibrated in accordance with the torque vibration.

Abstract: An active vibration noise control apparatus with which vibration noise can be reduced stably and effectively by preventing divergence of a filter coefficient or a delay in convergence due to an effect of a transfer characteristic on a secondary path. The active vibration noise control apparatus calculates an update step size in accordance with a magnitude of a gain in the transfer characteristic corresponding to a frequency of vibration noise, where the transfer characteristic is on the secondary path for propagation of a secondary vibration noise for reducing the vibration noise, and updates the filter coefficient on the basis of the calculated update step size.

Abstract: An active anti-vibration apparatus is provided that supports a wide range of vibration accelerations using only one type of anti-vibration mechanism. Upon occurrence of an excessive acceleration, the active anti-vibration apparatus performs switching such that an acceleration detection gain 14b of an acceleration amplifier 14 is multiplied by a prescribed magnification, the cutoff frequency of a high-pass filter 11a of a vibration control unit 11 is increased, and an acceleration control gain 11b of the vibration control unit 11 is multiplied by the reciprocal of the prescribed magnification.

Abstract: According to one embodiment, there is provided a power-fluctuation reducing apparatus in a power generation system to control a converter connected to the power generation system and connected to secondary batteries. The power-fluctuation reducing apparatus includes adjusting direct current voltages output from the secondary batteries, respectively, detecting the directing current voltages output from the secondary batteries, respectively, controlling to adjust the direct current voltages output from the secondary batteries to make the direct current voltages uniform, based on the detected direct current voltages, and controlling the converter to reduce power fluctuations in the power generation system.

Abstract: The adaptive reference model algorithm uses a gain scheduling feature combined with a customized Least-Squares routine as an adaptive method for adjusting feedback control so as to account for variations in Transfer Function (G), thereby optimizing the effectiveness of the Active Vibration Control (AVC) System. The Least-Squares routine identifies the transfer function in a background process without interruption of closed loop vibration control. This identification approach is accomplished without intentional interrogation of the AVC actuators and without intentional vibration level changes. For this adaptive control logic, the dynamic relationship between AVC actuators and AVC sensors is represented by a mathematical model of Transfer Function (G). The mathematical model of Transfer Function (G) is continuously updated by the Least-Squares routine.

Abstract: A control device for a rotating electrical machine, which is able to reduce a tracking delay of an actual output torque and actual currents with respect to a fluctuating torque command and fluctuating current commands and to reduce steady state deviations, is obtained. The control device includes a torque current computing unit; an actual current computing unit; a current feedback control unit; and a voltage control unit that controls voltages on the basis of the two-phase voltage commands. The torque command includes a fluctuation cancellation torque command for cancelling transmission torque fluctuations transmitted from the internal combustion engine, and the current feedback control unit includes a harmonic controller that calculates the two-phase voltage commands by using a characteristic of a transfer function corresponding to a periodic function of a frequency of the transmission torque fluctuations.

Abstract: A method for noise-reduced operation a wind is provided. The method includes determining a wind speed during normal operation of the wind turbine and determining a weighted rotor speed setpoint for a rotor of the wind turbine so that a noise emission of the wind turbine for the wind speed is reduced compared to nominal noise emission of the wind turbine at the wind speed. Using the weighted rotor speed setpoint, a torque setpoint for a power conversion assembly connected to the rotor is determined. The torque setpoint is applied to the power conversion assembly to control the wind turbine.

Abstract: The disclosure relates to a Synchronized Array of Vibration Actuators in a Network Topology providing synchronized arrays of low-cost, readily available vibration actuators to emulate superlative single actuators and bring together sets of these emulated high-performance actuators to create a broad range of desired control effects. Such actuator arrays may operate in both spatial and temporal modes, creating haptic effects that relate to the user via their position and orientation in space. The spatial mode may create h-pulses or the amplitude of a vibrational effect may change based on position of the device. The temporal mode may create vibrational effects that interact with the user to create an awareness of time. Additionally modes include performance, bandwidth, magnitude and reliability modes. The different control modalities may be combined together into a single vector control space, which spans the haptic capabilities of sets and/or subsets of actuators.

Abstract: A system and method are provided for a variable speed compressor with a control module that controls an operating frequency of the variable speed compressor. The control module stores a prohibited frequency range that includes a resonant frequency of the variable speed compressor and an allowed upper frequency above the prohibited frequency range and an allowed lower frequency below the prohibited frequency range. The control module determines a requested frequency and operates the variable speed compressor at the allowed upper frequency for an upper frequency operating time and at the allowed lower frequency for a lower frequency operating time when the requested frequency is within the prohibited frequency range. The control module determines the upper frequency operating time and the lower frequency operating time such that a time-averaged frequency output over the upper frequency operating time and the lower frequency operating time corresponds to the requested frequency.

Abstract: A rotating assembly includes a shaft having a driven end and a driving end. At least one rotating member coupled to the driven end. A support member is operatively connected to the at least one rotating member. A dynamic balancing system is operatively coupled to the support member. The dynamic balancing system includes a first balancing weight rotatably mounted to the support member. The first balancing weight is operatively connected to a first motor. A second balancing weight is rotatably mounted to the support member. The second balancing weight is operatively connected to a second motor. A controller is operatively connected to the first and second motors. The controller is configured and disposed to signal each of the first and second motors to rotate and to establish a desired position of the first balancing weight and the second balancing weight relative to at least one rotating member.

Abstract: A vibration suppressing apparatus and a vibration suppressing method thereof are provided. The vibration amplitude, vibration frequency, and vibration phase of a vibration suppressing unit are adjusted in real-time according to the vibration amplitude, vibration frequency and vibration phase of a vibration source.

Abstract: A vibration control system for a variable speed cooling system includes a programmable controller in communication with a variable frequency drive (VFD). The programmable controller is programmed to command the VFD to operate at frequencies only outside of one or more frequency lockout bands automatically calculated by the programmable controller based on a comparison of newly acquired variable speed cooling system vibration data with previously stored variable speed cooling system vibration specification data.

Abstract: A method of controlling a vehicle includes detecting vibration in a drivetrain of the vehicle with a fore/aft accelerometer during a launch event. An operating regime of the vehicle is identified concurrently with the detected vibration when the detected vibration is outside a predefined allowable range. A control strategy of the drivetrain is adjusted to define a revised control strategy to avoid the identified operating regime. The revised control strategy is applied to control the drivetrain to mitigate vibration in the drivetrain.

Abstract: An active tuned vibration absorber (100) is disclosed for reducing vibrations in a structure, the vibration absorber comprising: a mount (104) for attachment to the structure; a moveable mass (106); a spring arrangement (108) connected between the mass and the mount; an actuator arrangement (110) for applying a force between the mass and the mount; a first sensor (112) for providing a first measurement indicative of a force exerted between the structure and the mount; a second sensor (114) for providing a second measurement indicative of an acceleration of the structure at or proximate to the mount; and a control system (116) for generating an actuator driving signal for driving the actuator using the first and second measurement, wherein the control system is operable to generate the actuator driving signal to cause the first measurement and second measurement to conform to a target relationship.

Abstract: The invention relates to a vibration isolation module (101) for a lithographic apparatus or an inspection apparatus. The module comprises a support frame (102), an intermediate body (103) and a support body (104) for accommodating the lithographic apparatus. The intermediate body is connected to the support frame by means of at least one spring element such that the intermediate body is a hanging body. The support body is connected to the intermediate body by means of at least one pendulum rod (108) such that the support body is a hanging body. The invention further relates to a substrate processing system comprising such vibration isolation module.