Abstract: An information processing apparatus used for an exposure system. The apparatus includes a generation unit which generates a parameter file described in a markup language based on a parameter used in the exposure system, the parameter file including information for displaying an image concerning at least one of a shot layout and a sample shot for an exposure process to be performed by the exposure system, and a program for editing the image, and a providing unit which provides the parameter file to another information processing apparatus out of the exposure system.

Abstract: An electronically controlled apparatus of the present invention includes: an input-output section, which electronically processes and outputs input data; a control section, which electronically controls the input-output section according to operating status data of each component of the input-output section; a managing section, which monitors the operating status data of each component of the input-output section, so as to store and manage the operating status data with corresponding time information of the operating status data; and a processing section, which creates graphic display of the operating status data in a given time scale according to the operating status data and the time information. With the electronically controlled apparatus, it becomes easier to manage regular inspections and replenishing expendables, without lowering an activity rate.