Abstract: An electrochemical suspended element-based sensor system includes a solution cell for holding an electrolyte comprising solution including at least one electrochemically reducible or oxidizable species. A working electrode (WE), reference electrode (RE) and a counter electrode (CE) are disposed in the solution. The CE includes an asymmetric suspended element, wherein one side of the suspended element includes a metal or a highly doped semiconductor surface. The suspended element bends when current associated with reduction or oxidation of the electrochemically reducible or oxidizable species at the WE passes through the suspended element. At least one measurement system measures the bending of the suspended element or a parameter which is a function of the bending.

Abstract: An object of the present invention is to provide a detection sensor and a vibrator which can offer improved sensitivity. The present invention uses a scheme in which no piezoelectric layer, drive electrode, or the like is provided on the surface of a vibrator 30 and in which the vibrator 30 is driven by an actuator 40 provided separately from the vibrator 30. The actuator 40 is of a cantilever type and is provided near a fixed end 30a of the vibrator 30. Vibration of the actuator 40 is transmitted to the vibrator 30 via a coupling beam 70. Thus, vibration of the vibrator 30 is prevented from being inhibited by a piezoelectric layer, a drive electrode, or the like. This improves the Q value of the vibrator 30 and thus the sensitivity of the detection sensor 10. Furthermore, if the detection sensor 10 is configured to offer a sensitivity equivalent to that of a conventional one, the size of the detection sensor 10 can be sharply reduced compared to that of the conventional one.

Abstract: By using a disc type resonator, a sensor detects a substance having a mass and the mass with high sensitivity. Moreover, it is preferable to detect a change in vibrations of a substance attached or adsorbed to an area having a vibration amplitude equal to or larger than a constant value. This disc type resonator can be fabricated by the MEMS technique by using single-crystal or polycrystalline Si as a structural material. To improve the attachment efficiency of molecules and the like to be detected, irregularity or a groove is preferably provided on the surface of the disc type resonator.

Abstract: An environment difference detector includes an elastic surface wave element equipped with a substrate including a surface having an annular surface acoustic wave circulating path, a surface acoustic wave exciting/receiving unit exciting a surface acoustic wave along the circular path and receiving the circulated surface acoustic wave, and a sensitive film disposed on the circular path to change an elastic nature in accordance with a change in an adjacent environment, a speed/intensity measuring unit measuring a circulating speed and intensity of the surface acoustic wave from an electric signal generated by the unit when the unit receives the circulating surface acoustic wave, and an environment evaluation unit evaluating an environment adjacent to the sensitive film from at least one of the circulating speed and the intensity measured by the unit.

Abstract: A method of identifying and determining the concentrations of multiple species in a gas sample, includes providing a spectrophone assembly having a detector chamber, supplying the gas sample to the detector chamber and simultaneously passing a plurality of radiations of different wavelengths into the detector chamber to produce multiple acoustic resonances of different frequencies. Acoustic resonances in the detector chamber are simultaneously sensed to produce corresponding electrical signals, and the electrical signals are analysed to identify the species present in the gas sample and determine the concentration of each specie.

Abstract: A hydrogen sensor (100) with instant response that uses one or more quartz tuning forks (101, 102) while no chemical reactions or other material modifications are involved. Sensor (100) can be used in any application to measure percent range of hydrogen concentrations.

Abstract: A user-friendly photoacoustic spectroscopy (PAS) system and process (technique) provides an open-field PAS instrument, unit and device to remotely sense explosives, chemicals and biological agents. The PAS system and process can include: a pulsed tunable laser, such as a CO2 laser, a reflector, such as a parabolic reflector, an acoustic reverberant resonator in which a microphone is installed, and a data acquisition and analysis system.

Abstract: Particle and multi-phase system monitoring methods, systems and apparatus are disclosed. Preferred embodiments comprise one or more mechanical resonator sensing elements. In preferred embodiments a sensor or a sensor subassembly is ported to a fluidized bed vessel such as a fluidized bed polymerization reactor.

Abstract: An electrochemical piezoelectric sensor is disclosed. The sensor includes a piezoelectric substrate, three (or more) electrodes over a first surface of the substrate, and another electrode over a second (opposing) surface of the substrate. An ionic liquid in the form of a film is adhered, bound, immobilized, or otherwise positioned over the substrate and electrodes of the first surface. The ionic liquid film permits the absorption and detection of analytes from a gaseous sample, for environmental gases, example explosive vapors and/or explosive vapor species in the gaseous sample. Detection (optionally including analyte quantitation and qualitative identification) can be performed by both electrochemical and piezoelectric techniques using a single sensor. Systems incorporating and methods of using the electrochemical piezoelectric sensor also are disclosed.

Abstract: A sensor is provided which is configured to detect the presence of multiple analytes, for example chemical or biological compounds, through the measurement of induced resonance shifts in a coupled array of microelectromechanical or micromechanical resonators.

Abstract: Highly sensitive sensor platforms for the detection of specific reagents, such as chromate, gasoline and biological species, using microcantilevers and other microelectromechanical systems (MEMS) whose surfaces have been modified with photochemically attached organic monolayers, such as self-assembled monolayers (SAM), or gold-thiol surface linkage are taught. The microcantilever sensors use photochemical hydrosilylation to modify silicon surfaces and gold-thiol chemistry to modify metallic surfaces thereby enabling individual microcantilevers in multicantilever array chips to be modified separately. Terminal vinyl substituted hydrocarbons with a variety of molecular recognition sites can be attached to the surface of silicon via the photochemical hydrosilylation process.

Abstract: A gas measuring method, apparatus and system for measuring a concentration of a gas of interest is disclosed. The gas concentration is based on a propagation delay of a sonic or ultrasonic wave as the wave travels through the gas. The propagation delay is measured such that delay contributions from sources other than the gas itself are canceled. A sensor in accordance with the invention includes an sonic or ultrasonic transmitter and receiver, and a control module for performing calculations. The sensor can be used in various applications, including on-board inert gas generating systems (OBIGGS).

Abstract: Detection of miniscule amounts of nucleic acid is accomplished via binding of target nucleic acid to probe material, composed of nucleic acid, which is bound to a sensor configured to sense mass. The sensor is prepared by immobilizing a probe material to a surface of the sensor, wherein the probe material is known to bind to the target nucleic acid. The prepared sensor is exposed to the target nucleic acid. The target nucleic acid binds to the probe material. The mass accumulated on the sensor reflects the amount of target nucleic acid bound to the probe material.

Abstract: A thickness shear mode (TSM) sensor having a visco-elastic polymer coating and a fundamental frequency greater than 20 MHz useful for organic vapor or gas detection. The TSM quartz resonators at a fundamental frequency of 96 MHz were evaluated for their performance in organic vapor sensing applications and results were compared with the performance of 10 and 20 MHz resonators. These devices were produced by chemical milling of AT-cut quartz. Seven test organic vapors were utilized at concentrations ranging from 0.2 volume percent to 13.7 volume percent in the vapor phase. In all cases, the rubbery polymer polyisobutylene was used as a sensing layer. Detailed results for various sensor parameters such as sensitivity, baseline noise and drift, limit of detection, response and recovery times, dynamic range, and repeatability for the 96 MHz device were compared with those for 10 and 20 MHz devices. The test case of benzene/polyisobutylene was chosen to make these detailed comparisons.

Abstract: A water-repellent filter member formed from a resin sheet of a porous, fibrous structure having air permeability and water repellency; a waterproof instrument and gas sensor having air permeability; and a method of manufacturing the same. A water-repellent filter member (19) is formed from a resin sheet (54) of a porous, fibrous structure having air permeability and water repellency by subjecting the resin sheet to forming work, and includes an axially extending tubular side wall portion (19s) and a bottom wall portion closing one end of the tubular side wall portion. At least a portion of the bottom wall portion (19t) retains the porous, fibrous structure of the resin sheet and thereby has air permeability.

Abstract: A flexural resonator includes a piezoelectric material. At least a portion of an electrode having a first surface and a second surface is embedded in the piezoelectric material such that the piezoelectric material is disposed over and in electronic association with the first and second surfaces of the electrode.

Abstract: Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.

Abstract: A thickness shear mode (TSM) sensor having a visco-elastic polymer coating and a fundamental frequency greater than 20 MHz useful for organic vapor or gas detection. The TSM quartz resonators at a fundamental frequency of 96 MHz were evaluated for their performance in organic vapor sensing applications and results were compared with the performance of 10 and 20 MHz resonators. These devices were produced by chemical milling of AT-cut quartz. Seven test organic vapors were utilized at concentrations ranging from 0.2 volume percent to 13.7 volume percent in the vapor phase. In all cases, the rubbery polymer polyisobutylene was used as a sensing layer. Detailed results for various sensor parameters such as sensitivity, baseline noise and drift, limit of detection, response and recovery times, dynamic range, and repeatability for the 96 MHz device were compared with those for 10 and 20 MHz devices. The test case of benzene/polyisobutylene was chosen to make these detailed comparisons.

Abstract: An apparatus for separating an analyte from a mixture or for detecting an analyte or for determining the affinity, or a property related to affinity, between binding partners includes: a) a surface having the analyte or one of the binding partners immobilized thereon, in use; b) a transducer for oscillating the surface; c) a controller connected to the transducer for varying the amplitude and/or frequency of the oscillation to cause a dissociation event; and, d) an analyzer connected to the transducer for detecting an oscillation of the transducer due to the dissociation event. The controller includes an oscillator connected in a resonant circuit with the transducer such that the transducer oscillates at two frequencies simultaneously, one of these causing the transducer to oscillate the surface and the other being supplied as an output to the analyzer.

Abstract: An assembly design for an oscillating resonator-based sensor where an oscillating crystal resonator such as a quartz crystal resonator is rigidly affixed or ‘mounted’ onto a solid substrate in such a fashion that the resonator can either rest flush against the substrate surface or upon a rigid mounting adhesive. Once cured, the mounting adhesive forms a liquid tight seal between the mounted resonator and the substrate such that only the sensing electrode surface will be exposed to fluids applied to the front side of the substrate. The mounted resonator assembly is designed in such a way that it can be interfaced with a fluid delivery system to form a liquid tight chamber or flow cell around the mounted resonator without incurring additional physical impact upon the mounted resonator.

Abstract: An apparatus for determining and/or monitoring at least one physical or chemical, process variable of a medium and includes at least one mechanically oscillatable unit and at least one driving/receiving unit. The mechanically oscillatable unit includes a tube and an internal oscillator. The tube is connected to a securement unit with an end turned away from the process and the end of the tube turned toward the process is embodied as a free end. The tube surrounds the internal oscillator and the internal oscillator is secured to the end of the tube turned toward the process with an end turned toward the process. The driving/receiving unit excites the mechanically oscillatable unit to oscillate, respectively it receives the oscillations of the mechanically oscillatable unit. The internal oscillator has at least one groove/neck, which determines at least the oscillation frequency of the mechanically oscillatable unit.

Abstract: This present invention relates to a system for measuring resonant frequency and delay time of the quartz crystal microbalance. The system includes a transistor oscillating circuit, a switch circuit, a comparator circuit, and a control circuit. The transistor oscillating circuit comprises a quartz oscillator for generating an original oscillating signal. The switch circuit is coupled to the transistor oscillating circuit for outputting a start signal to generate the original oscillating signal. The comparator circuit is coupled to the transistor oscillating circuit for transforming the original oscillating signal to a square wave oscillating signal. The control circuit is coupled to the comparator circuit for receiving the square oscillating signal to estimate the resonant frequency and the delay time of the quartz crystal microbalance.

Abstract: A NOx sensor, comprising a high-temperature piezoelectric element, a NOx scavenging element positioned on the piezoelectric element, a first electrode in contact with a first region of the piezoelectric element and a second electrode in contact with a second region of the piezoelectric element. Also, a method of detecting whether NOx is present in a space, comprising applying a voltage across a high-temperature piezoelectric element, thereby causing a first portion of the piezoelectric element to undergo vibration, an NOx scavenging element being in contact with the first portion of the piezoelectric element; and detecting a resonant frequency of vibration of the first portion of the piezoelectric element.

Abstract: An acoustic wave sensor array device is provided for the detection, identification, and quantification of chemicals and biological elements dispersed in fluids. The sensor array device is capable of the simultaneous characterization of a fluid for multiple analytes of interest. A substrate has a plurality of channels formed therein and a sensor material layer applied in a bottom of the channels. The sensor material layer has a shear acoustic wave speed lower than a shear acoustic wave speed in said substrate. The channels may have the same material in each channel or different materials in at least two of the channels. A surface acoustic wave transducer and at least one surface acoustic wave reflector, or at least two transducers is formed on a surface of the substrate opposite the channels at a portion of the substrate that is thinned by the channels, so that the acoustic tracks of the surface acoustic wave device extend along the channels.

Abstract: A method for determining the concentration of a large particle component in a multi-component system. The method requires first separating and concentrating the large particle component of the system by acoustic means and then measuring an acoustical parameter of the separated large particle component. The invention also provides for an apparatus for determining the concentration of large particles in a multi-component fluid system. The apparatus is comprised of an acoustic standing wave resonator, at least one acoustic standing wave generating source, electronic circuitry for actuating, controlling and processing the acoustic standing wave generating source and means for measuring at least one parameter of the multi-component system after the large particles have been concentrated and aggregated by the generated standing wave(s).

Abstract: An ionic liquid piezoelectric gas sensor for the detection of polar and nonpolar organic vapors. The gas sensor can operate at high temperatures with a fast linear response which is also reversible. At high temperatures, the frequency change (?f) versus concentration (C) curve mirrors the Henry's gas law, such that the concentration of a gas sample in liquid solvent is proportional to the concentration or partial pressure of the sample in gas phase. The gas sensor can be used for quantitative analysis of gas vapors and determination of Henry constants.

Abstract: The design and synthesis of a matrix nanocomposite containing amino carbon nanotubes used as a functionalized sensing layer for carbon dioxide detection by means acoustic wave sensing devices, e.g., SAW/BAW devices. These sensing materials contain a type of amino carbon nanotubes (single walled or multi-walled) and a polymer (or other compounds) which are sensitive to carbon dioxide in the acoustic wave sensing device based gas sensors. The sensitivity of the matrix consisting of the amino carbon nanotubes and a polymer (or other compounds) is ensured by the presence of amino groups which can react at room temperature with CO2 in a reversible process to form carbamates.

Abstract: In a sensor for detecting a substance in liquid, recesses are provided in the upper surface of a base substrate. The recesses respectively accommodate SAW elements. A resin layer having openings is arranged such that the sensing portions at the upper surfaces of the SAW elements are exposed in the openings. A reaction film made of a material capable of binding to a target substance is also arranged so as to cover the sensing portion of at least one of the SAW elements. A liquid containing a target substance is fed from the openings.

Abstract: This invention relates to methods and apparatus of quantifying the portion of a gas in a specific nuclear symmetric state. Specifically, the invention is directed to the measurement of the speed of sound in an unknown sample and comparing it to astandard.

Abstract: A surface acoustic wave based CO2 sensor using carbon nanotubes as the sensitive layer fabricated by combining surface acoustic wave (SAW) devices and nanotechnology. The device structure consists of the gas sensitive material between the input and output interdigital transducers (IDTs) of a SAW device. The CO2 gas gets adsorbed on nanotubes when the carbon nanotube based SAW sensor is exposed to CO2 at room temperature and/or at elevated temperature, which in turn changes conductivity of the carbon nanotube. This conductivity change will affect the velocity of the SAW traveling across the nanotubes and will give a frequency change which corresponds to the percentage of the CO2 molecules adsorbed by the nanotubes.

Abstract: A surface acoustic wave based CO2 gas sensor that utilizes zeolites or transition metals doped zeolites as a sensing layer. Such zeolites can be used “as is” or doped with metal oxide semiconductor materials such as, for example, TiO2, ZnO, SnO2, electrolytes etc. to vary the sensor sensitivity for various gases. Zeolites can be configured as thin or thick films by employing nanopowders in suitable dispersants. The addition of zeolites, catalytically modified with chromium, results in a controlled selectivity to various gases based on shape and size effects.

Abstract: Prefabricated catalyzing adsorption sites are incorporated into small oscillators. In one embodiment, the sites are formed of precisely positioned gold anchors on surface micromachined oscillators. The micromachined oscillators may be formed of silicon, such as polysilicon, or silicon nitride in various embodiments. The sites allow special control of chemical surface functionality for the detection of analytes of interest. Thiolate molecules may be adsorbed from solution onto the gold anchors, creating a dense thiol monolayer with a tail end group pointing outwards from the surface of the gold anchor. This results in a thiolate self-assembled monolayer (SAM), creating a strong interaction between the functional group and the gold anchor.

Abstract: This present invention relates to a system for measuring resonant frequency and delay time of the quartz crystal microbalance. The system includes a transistor oscillating circuit, a switch circuit, a comparator circuit, and a control circuit. The transistor oscillating circuit comprises a quartz oscillator for generating an original oscillating signal. The switch circuit is coupled to the transistor oscillating circuit for outputting a start signal to generate the original oscillating signal. The comparator circuit is coupled to the transistor oscillating circuit for transforming the original oscillating signal to a square wave oscillating signal. The control circuit is coupled to the comparator circuit for receiving the square oscillating signal to estimate the resonant frequency and the delay time of the quartz crystal microbalance.

Abstract: A system for detecting chemical/biological substances and a detection method. The system comprises a plurality of sensing units or nodes and a radiofrequency link. Each unit has several sensors with different sensing curves. Each sensor is able to transmit information related to the sensed substance on a specific frequency. The sensors preferably comprise AlGaN/GaN high electron mobility transistors.

Abstract: A surface acoustic wave gas sensor, in particular a vacuum or hydrogen sensor, includes a piezoelectric substrate (1) on which at least one layer of a gas-sensitive material (6) is arranged between two inter-digital transducers (2, 3). The gas-sensitive material includes a getter material, such that the molecules sorbed by this getter material can vary the frequency of a signal transmitted between the two transducers (2, 3). A process for manufacturing this sensor is also provided using a mask to deposit the gas-sensitive material between the transducers, preferably by sputtering.

Abstract: A micromechanical sensor element for recording the bonding of molecules to the micromechanical sensor element. The sensor element having a substrate and at least one electrical terminal. There is also an oscillatable element that is coupled to the electrical terminal in such a manner that an electrical variable that characterizes the oscillation behavior of the oscillatable element may be provided at the electrical terminal. Further, there is a molecule coupling layer, arranged in such a manner that molecules may bond to the molecule coupling layer. The molecule coupling layer is coupled to the oscillatable element in such a manner that bonding of molecules to the molecule coupling layer causes a change in the oscillation behavior of the oscillation element.

Abstract: An object of the present invention is to provide a sensing instrument capable to detect a substance existing in a very small quantity, such as environmental pollutants, instantly with a high degree of precision. As a specific means for solving the problem, a frequency signal from a crystal oscillator is sampled using a frequency signal from a reference clock generating part, the sampling value is outputted in a digital signal, quadrature detection is conducted with the digital signal for a frequency signal corresponding to the output signal, the rotational vector rotating at a frequency corresponding to the difference between the frequency of the frequency signal and the frequency of a sinusoidal wave used for the quadrature detection is taken out, and the variation of the frequency is detected by detecting the velocity of the rotational vector based on the respective sampling values.

Abstract: A sensor for detecting an analyte in liquid includes a base substrate provided with openings and electrode lands on one surface thereof and SAW elements each provided with a sensing portion having at least one IDT electrode on one side. The SAW elements are mounted on the base substrate with bump electrodes by a flip-chip bonding method so that the sensing portions of the SAW elements face the openings of the base substrate. At least one of the sensing portions is coated with a reaction membrane which binds to an analyte.

Abstract: An elliptical photo-acoustic spectrometer chamber design will result in a larger intensity signal at the pick-up microphone and allow high frequency light modulation. This makes the spectrometer have a lower limit of detection threshold, and will increase the signal to noise ratio in general for the instrument, resulting in a more sensitive instrument allowing more precise measurements.

Abstract: Acoustic sensing utilizing a cantilever structure coupled about at least one side of said cantilever to a base substrate, wherein said cantilever includes a piezoelectric section and has at least one acoustic wave device on a portion of the cantilever, wherein a flexure of the cantilever produces force-frequency effects measurable by the acoustic wave device. According to one embodiment, the cantilever sensor uses the flexure-frequency effect as measured by an acoustic wave device to sense a target matter. According to one embodiment, a sensing material is disposed on at least a portion of at least one surface of the cantilever.

Abstract: An ambient condition detector has a housing that carries a sensor of an airborne constituent such as a gas, and a condenser for minimizing an inflow of moisture into the sensor. A filter can be used to reduce fluid flow velocity prior to passing through or by the condenser.

Abstract: A method for determining properties or a thin film includes the steps of: providing a piezoelectric substrate; providing a slanted finger interdigital transducer unit that includes a transmitter port and a receiver port on the piezoelectric substrate; forming the thin film on the piezoelectric substrate between the transmitter port and the receiver port; applying an input signal to the transmitter port; and measuring a phase difference, which corresponds to the input signal, from the receiver port. Accordingly, properties of the thin film are determined based on the measured phase difference. An apparatus for realizing the method is also disclosed.

Abstract: Sensors for determining the ambient amount (e.g., concentration) of a chemical (e.g., molecular hydrogen in a gas or vapor) are disclosed. Preferred embodiments of these sensors comprise a dense thin metal (e.g., palladium or a palladium alloy) film disposed on a microcantilever beam that is suspended above a stationary baseplate. The dense thin metal film is configured to absorb, for example, hydrogen, thereby causing the film to expand which in turn causes the microcantilever beam to deform. The deformation can be measured, for example, as a change in capacitance between the microcantilever beam and the stationary baseplate. The measured change in capacitance is indicative of the ambient hydrogen concentration.

Abstract: A micro mass measuring apparatus includes a cantilever on which a subject is attached, a piezoelectric element formed on the cantilever, an oscillation circuit for actively vibrating the cantilever and providing a varied resonance frequency by the subject, and a frequency measuring device for measuring a resonance frequency of the cantilever.

Abstract: The present invention provides a chemometric equation to estimate fluid density, viscosity, dielectric constant and resistivity for a formation fluid sample downhole. The chemometric estimates can be used directly as estimated values for fluid density, viscosity, dielectric constant and resistivity for a formation fluid sample downhole. The chemometric estimates can also be plugged into a Levenberg-Marquardt (LM) non-linear least squares fit, as an initial estimate of the parameter to be estimated by the LM fit. If the initial parameter estimate is too far from the actual parameter values, the LM algorithm may take a long time to converge or even fail to converge entirely. The present invention estimates an initial value of a parameter that provides a high probability that the LM algorithm will converge to a global minimum.

Abstract: The invention provides a contactless sensor device operable for sensing water vapor or a predetermined chemical vapor including a thin film, wherein the thin film includes a nanostructured sensing layer and a soft magnetic layer disposed directly adjacent to the nanostructured sensing layer. The thin film has a first mass, a first density, and a first magnetostrictive resonance frequency prior to the nanostructured sensing layer adsorbing a predetermined amount of a predetermined vapor and a second mass, a second density, and a second magnetostrictive resonance frequency subsequent to the nanostructured sensing layer adsorbing the predetermined amount of the predetermined vapor. The sensor device also includes a driving coil disposed indirectly adjacent to and at a predetermined distance from the thin film, the driving coil operable for generating an alternating-current magnetic field used to query a shift in the magnetostrictive resonance frequency of the thin film.

Abstract: A measurement head particularly for borehole use can measure multiple parameters with no electronics in the head and only a single conductor cable. Double-ended tuning forks (26, 28 and 38, 40) in the head are arranged to respond to different parameters such as temperature and pressure by adjusting their resonant frequencies. A drive signal on the conductor (50) is applied to transducers (30, 32, 42, 44) on all the tuning forks and those whose instantaneous resonant frequency is close will resonate. The signal is removed and the transducers return a decaying signal at the resonant frequency along the conductor. Other drive frequencies are tried, to locate the other sensors whose frequency ranges are separate.

Abstract: An acoustical cell for analysis of materials by measuring parameters of acoustical resonanace. The cell comprises a main frame and an electroacoustical transducer assembly. The main frame includes at least one interstice and has substatially parallel exterior surfaces that engage, in use, with walls to define a resonant cavity into which a specimen for analysis is placed in use. The electroacoustical transducer assembly is acoustically coupled to at least one of the walls and comprises at least one electroacoustical transducer.

Abstract: A system for determining polarization of a gas comprises a container that contains the polarized gas. An oscillator circuit comprises an Nuclear Magnetic Resonance (NMR) coil that is positioned adjacent to the container. A pulse generator circuit is configured to generate an electrical pulse that may be transmitted to an optical cell through the NMR coil to excite the polarized gas responsive to a control processor. A Q-reduction circuit that is independent of the pulse generator circuit is configured to reduce oscillations in the oscillator circuit from the transmitted electrical pulse responsive to the control processor. A receive circuit is responsive to an electrical signal that is induced in the oscillator circuit due to the electromagnetic excitation of the polarized gas. The control processor is configured to determine the polarization of the gas based on the output signal of the receive circuit.

Abstract: A device for measuring thickness and/or rate of thickness increase of a film comprises at least one piezoelectric element, and first and second electrodes in contact with the piezoelectric element. A method of measuring thickness and/or rate of thickness increase of a film comprises applying a voltage across a piezoelectric element from a first electrode to a second electrode, thereby causing the piezoelectric element to vibrate, and measuring the rate of vibration of the piezoelectric element. Heat may be applied to the piezoelectric element. The piezoelectric element may be formed of quartz crystal, e.g., IT-cut or near-IT-cut.