Detector Detail Patents (Class 73/30.04)
  • Patent number: 8955368
    Abstract: An apparatus for aerosol collection and fluid analysis includes a rotary motor, an aerosol-collection disk configured for mounting on the rotary motor, and a fluid-analysis disk that is also configured for mounting on the rotary motor. The aerosol-collection disk includes at least one interior inlet, at least one peripheral outlet and a passage coupling the interior inlet with the peripheral outlet, and a particle collector opposite the peripheral outlet. The fluid-analysis disk includes at least one fluid in each of a first reservoir and in a second reservoir on or in the fluid-analysis disk and offset from a central axis of the disk, wherein each reservoir has an outlet and a stopper in the outlet of each reservoir to seal the reservoirs; and release of the fluids from the reservoirs is spin-induced.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: February 17, 2015
    Assignee: Massachusetts Institute of Technology
    Inventor: John P. D'Angelo
  • Patent number: 8806917
    Abstract: A density monitor is used for monitoring a gas density in a measured volume with a separating wall which separates a first reference chamber formed in a density monitor housing from the measured volume. The density monitor further includes a separating wall movement detection device for detecting movement of the separating wall. In order to reduce false alarms, a second reference chamber is formed outside of the density monitor housing. The second reference chamber is fluidically connected to the first reference chamber by a fluid line.
    Type: Grant
    Filed: December 9, 2011
    Date of Patent: August 19, 2014
    Assignee: Trafag AG
    Inventor: Remo Halbheer
  • Publication number: 20130283888
    Abstract: An apparatus for estimating gravitational acceleration includes: a chamber having a longitudinal axis and configured to contain a first gas; a first cavity ring-down spectrometer configured to measure a density of the first gas at a first location along the longitudinal axis using a first optical cavity having a first optical axis and configured to resonate light rays that are absorbed by the first gas in the first optical cavity, wherein the first optical axis has at least a vector component perpendicular to the longitudinal axis; and a processor configured to receive a first density measurement from the first cavity ring-down spectrometer and to estimate the gravitational acceleration using the first density measurement.
    Type: Application
    Filed: April 25, 2012
    Publication date: October 31, 2013
    Applicant: Baker Hughes Incorporated
    Inventor: Rocco DiFoggio
  • Patent number: 8554375
    Abstract: The invention is related to a method and an apparatus for controlling a ventilating system or an air conditioning system of buildings. This controlling is used predominantly in industrial real estates and serves for the establishment and maintenance of the desired room conditions. The method for controlling a ventilating system or an air conditioning system according to the invention uses the air density as the essential parameter for the controlling. The air density depends on the temperature, the air humidity and the air pressure. The air density difference between the introduced air and the room air is kept small.
    Type: Grant
    Filed: November 30, 2006
    Date of Patent: October 8, 2013
    Assignee: delta green box Patent GmbH & Co. KG
    Inventor: Helmut Nerling
  • Publication number: 20130174645
    Abstract: A method for photoacoustically sensing oxygen in a gaseous sample is disclosed, together with an apparatus for practicing the present method. Efficient and cost-effective oxygen sensing is provided by the use of a light source in the form of a light-emitting diode, which can be selected to correspond with the absorption spectra exhibited by oxygen in a gaseous sample. Filtering can be employed in order to control and narrow the wavelength of light emitted by the light source. An apparatus is disclosed which facilitates practice of the present method, including an arrangement by which ambient noise and vibration can be canceled.
    Type: Application
    Filed: January 6, 2012
    Publication date: July 11, 2013
    Inventors: Martin Willett, Michael Poulter, Viorel Avramescu
  • Publication number: 20130081448
    Abstract: The invention relates to a circuit assembly for operating a probe (10) for determining the oxygen concentration in a gas mixture, in particular a Lambda probe for determining the oxygen concentration in the exhaust gas of internal combustion engines, comprising two electrodes (11, 15) which act as an outer and an inner pump electrode and form a pump cell, two electrodes which act as a Nernst electrode (15) and a reference electrode (19) and form a Nernst cell, and a pump current controller (210), which controls a pump current that is applied to the pump cell such that a predeterminable Nernst voltage (UN) that can be tapped at the Nernst cell is controlled to a predeterminable value, characterized in that the predeterminable value of the Nernst voltage can be varied.
    Type: Application
    Filed: June 10, 2011
    Publication date: April 4, 2013
    Applicant: ROBERT BOSCH GMBH
    Inventors: Claudius Bevot, Helge Schichlein
  • Publication number: 20120240662
    Abstract: A density measuring system, including a container into which a gas is injected, provided with a heating element to which a variety of different voltages is applied; an equation storage device storing a density calculating equation that has, as independent variables, electrical signals obtained from the heating element when each of the plurality of different voltages is applied and has the density as a dependent variable; and a density calculating portion calculating a measured value for the density of the gas that is injected into the container, through substituting measured values for the electrical signals from the heating element into the independent variables of the density calculating equation.
    Type: Application
    Filed: February 21, 2012
    Publication date: September 27, 2012
    Applicant: Yamatake Corporation
    Inventor: Yasuharu Ooishi
  • Patent number: 7864062
    Abstract: Provided is an apparatus for detecting a change in a specific gravity of a fluid surrounding the apparatus wherein the fluid moves upwardly and downwardly with respect to the apparatus. The apparatus includes a housing having a top and a plurality of openings for allowing the fluid to enter the housing. A first floatation device is provided having a first specific gravity and being located within the housing. The first floatation device includes a magnet. A second floatation device is provided having a second specific gravity and located within the housing adjacent said first floatation device. The said second floatation device includes a magnet aligned to have the same polarity as the magnet of the first floatation device. A switch fixedly attached to said top, the switch having an open state and a closed state where when one of said magnets is in proximity to the switch, the switch is in a closed state and wherein when both of said magnets are in proximity to said switch, the switch is in an open state.
    Type: Grant
    Filed: November 4, 2005
    Date of Patent: January 4, 2011
    Assignee: Kinetico Incorporated
    Inventors: Stephen W. Cook, Michael A. Hemann, Steven M. Hoopes, Jerome P. Kovach
  • Patent number: 7752884
    Abstract: A method of analyzing a gas specimen mixture includes measuring the concentrations of inert components in the gas specimen mixture and the pressure and temperature of the gas specimen mixture. A number of sample gas mixtures are generated with varying percentages of hydrocarbon gases, each including the measured inert component concentrations. For each generated sample gas mixture, the method includes calculating the speed of sound therein based on the measured pressure and temperature and the particular percentages of hydrocarbon gases therein, measuring the speed of sound in the gas specimen mixture, and iteratively comparing the measured speed of sound with the calculated speed of sound in different sample gas mixtures until convergence for a particular sample gas mixture. The molecular weight of the particular sample gas mixture is calculated, and set the molecular weight of the gas specimen mixture to the calculated molecular weight.
    Type: Grant
    Filed: December 7, 2006
    Date of Patent: July 13, 2010
    Assignee: General Electric Company
    Inventor: Yufeng Huang
  • Patent number: 7752885
    Abstract: A gas specimen mixture analysis system includes at least one sensor for measuring the concentrations of inert components in the gas specimen mixture, a pressure sensor for measuring the pressure of the gas specimen mixture, and a temperature sensor for measuring the temperature of the gas specimen mixture. A subsystem measures the speed of sound in the gas specimen mixture, and a processing subsystem, responsive to the at least one inert component sensor, the pressure sensor, the temperature sensor, and the subsystem for measuring the speed of sound, is configured to generate a number of sample gas mixtures with varying percentages of hydrocarbon gases, each including the measured inert component concentrations.
    Type: Grant
    Filed: December 7, 2006
    Date of Patent: July 13, 2010
    Assignee: General Electric Company
    Inventor: Yufeng Huang
  • Patent number: 7730766
    Abstract: A gas viscosity sensor comprises a signal processing circuit and a sensor element, including a gas pressure generating system and a differential pressure measuring system in fluid communication therewith, the differential pressure measuring system comprising a measuring chamber (14) bounded by a thin membrane (28), an inlet-outlet channel or orifice interconnecting the measuring chamber to a source of gas for which the viscosity is to be determined, the inlet-outlet channel or orifice having dimensions adapted to provide resistance to the outflow and inflow of gas in the measuring chamber, and a membrane displacement sensor (32) adapted to measure a time dependent displacement of the membrane due to pressure variations in the measuring cavity.
    Type: Grant
    Filed: March 30, 2006
    Date of Patent: June 8, 2010
    Assignee: Ecole Polytechnique Federale de Lausanne
    Inventors: Peter Ryser, Sigfrid Straessler
  • Publication number: 20090249862
    Abstract: A computer system and method for measuring air density in a computer chassis. The computer chassis includes a fan, an ambient air temperature sensor, and a heat-generating device with a heat sink, a heat sink temperature sensor, and a controller. The controller controls the fan speed and applies a known amount of thermal energy to the heat sink, then determines the air density from the difference in temperature between the ambient air and the heat sink. The controller may then use the air density determination to adjust the air flow rate through the computer chassis to provide a proper air flow rate for cooling.
    Type: Application
    Filed: February 19, 2008
    Publication date: October 8, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Troy Williams Glover, Michael Sean June, Whitcomb Randolph Scott, III, Robert Salguero Smith
  • Publication number: 20090133471
    Abstract: Device for determining the density of a plasma, with of a probe (1) which can be immersed into the plasma, with a probe head (2) in form of a three-axis ellipsoid, and a handle (3) connected to the probe head (2), wherein the probe head (2) has a sheath (4) and a probe core (5, 5a) surrounded by the sheath (4), wherein the surface (8) of the probe core (5, 5a) has electrode areas (9, 10) of opposite polarity which are insulated from each other. The probe core consists of electrodes (6, 7), to which a signal is applied. The absorption of that signal is measured and evaluated as a function of the frequency. Based on a multipole expansion, a mathematical model is constructed with which the absorption spectrum of the probe can be unambiguously evaluated. For a particular design of the probe, the response can be restricted to a single resonance, from which the electron density of the plasma (to be inferred from the resonance frequency) can be found by an unambiguous evaluation algorithm.
    Type: Application
    Filed: March 23, 2007
    Publication date: May 28, 2009
    Inventor: Ralf-Peter Brinkmann
  • Publication number: 20090107215
    Abstract: An alcohol density sensor for detecting an alcohol density in mixture fuel composed of petroleum-fuel and alcohol is installed in a fuel tank of an automotive vehicle. The alcohol density sensor includes a pair of electrodes immersed in the mixture fuel and a conductor portion for connecting the electrodes to a control unit having a circuit board. The conductor portion is composed of a first conductor portion integrally formed with the electrode and a second conductor portion connected to the first conductor portion. The first conductor portion is led out of a casing containing the electrodes and liquid-tightly sealed at a first through-hole formed in the casing. The second conductor portion is led out of the fuel tank through a second through-hole formed in the fuel tank. Since the first through-hole is sufficiently sealed to prevent pressurized mixture fuel in the casing from leaking into an inner space of the fuel tank, sealing of the second through-hole can be simplified.
    Type: Application
    Filed: June 23, 2008
    Publication date: April 30, 2009
    Applicant: DENSO CORPORATION
    Inventors: Shinji Wakabayashi, Hiroshi Nakamura, Akikazu Uchida, Yukinobu Kajita
  • Patent number: 7334452
    Abstract: Methods for monitoring a fluid composition include placing a mechanical resonator in the fluid composition and oscillating the resonator. The resonator can be a tuning fork resonator having tines oscillated in opposite directions and in opposite phases. A variable frequency input signal can be varied over a predetermined frequency range and oscillate the mechanical resonator at less than 1 MHz. A frequency-dependent resonator response curve can be stored in a computer memory and fitted to a model curve to monitor the fluid. The resonator can be coated with a protective coating. The resonator can be treated with a functionality designed to change a resonance frequency of the resonator after being exposed to a selected target chemical and the resonance frequency monitored to detect presence of the target chemical.
    Type: Grant
    Filed: July 23, 2002
    Date of Patent: February 26, 2008
    Assignee: Visyx Technologies, Inc.
    Inventors: Leonid Matsiev, James Bennett, Eric McFarland
  • Patent number: 7073370
    Abstract: A method and apparatus for measuring properties of a liquid composition includes a mechanical resonator, such as a cantilever, connected to a measurement circuit. The mechanical resonator can be covered with a coating to impart additional special detection propertied to the resonator, and multiple resonators can be attached together as a single sensor to obtain multiple frequency responses. The invention is particularly suitable for combinatorial chemistry applications, which require rapid analysis of chemical properties for screening. In one embodiment, the resonator is operated at a frequency of less than 1 MHz.
    Type: Grant
    Filed: October 15, 2003
    Date of Patent: July 11, 2006
    Assignee: Symyx Technologies
    Inventors: Leonid Matsiev, James Bennett, Eric McFarland
  • Patent number: 6957565
    Abstract: A method for measuring properties of a fluid that includes oscillating a tuning fork resonator in a fluid. The invention is particularly suitable for in-line monitoring of various physical and electrical properties of fluids flowing in a conduit.
    Type: Grant
    Filed: October 15, 2003
    Date of Patent: October 25, 2005
    Assignee: SYMYX Technologies, Inc.
    Inventors: Leonid Matsiev, James Bennett, Eric McFarland
  • Patent number: 6945089
    Abstract: In a mass-sensitive sensor consisting of an acoustic surface wave component on the basis of shear waves, the sensor includes a substrate with an active surface carrying two different layers, one which is a parylene layer of a thickness of between 0.2 and <1.6 ?m, which has been produced on the substrate by a vacuum-based deposition method and is capable of generating Love waves and the second layer forms a utilization layer, which interacts with an analyte disposed in a medium contacting the utilization layer.
    Type: Grant
    Filed: April 1, 2002
    Date of Patent: September 20, 2005
    Assignee: Forschungszentrum Karlsruhe GmbH
    Inventors: Nicole Barie, Ulrich Stahl, Michael Rapp
  • Patent number: 6904786
    Abstract: A method and apparatus for measuring properties of a liquid composition includes a mechanical resonator, such as a cantilever, connected to a measurement circuit. The mechanical resonator's response over the frequency range depends on various characteristics of the liquid being tested, such as the temperature, viscosity, and other physical properties. The invention is particularly suitable for combinatorial chemistry applications, which require rapid analysis of chemical properties for screening.
    Type: Grant
    Filed: October 7, 2002
    Date of Patent: June 14, 2005
    Assignee: Symyx Technologies, Inc.
    Inventors: Leonid Matsiev, James Bennett, Eric McFarland
  • Patent number: 6894474
    Abstract: A probe for measuring plasma properties in a processing chamber, comprises a conductive rod having a front portion and a rear portion. The front portion of the conductive rod comprises a probe surface adapted to be coplanar with an interior wall of the chamber. The probe also includes an insulating sheath circumscribing the conductive rod.
    Type: Grant
    Filed: June 7, 2002
    Date of Patent: May 17, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Michael S. Cox, Canfeng Lai, Qiwei Liang
  • Patent number: 6684683
    Abstract: A method and an apparatus for characterizing the barrier properties of an array of coatings. The method including providing a plurality of acoustic wave devices, wherein each of the plurality of acoustic wave devices comprises at least one surface, and providing a plurality of coating materials suitable for forming a plurality of coatings on the at least one surface of each of the plurality of acoustic wave devices. The method also including coating each of the plurality of acoustic wave devices with at least one of the plurality of coating materials to form a plurality of coated acoustic wave devices and measuring a predetermined output parameter of each of the plurality of coated acoustic wave devices.
    Type: Grant
    Filed: February 27, 2002
    Date of Patent: February 3, 2004
    Assignee: General Electric Company
    Inventors: Radislav Alexandrovich Potyrailo, Michael Jarlath Brennan
  • Patent number: 6494079
    Abstract: A method and apparatus for measuring properties of a fluid composition in a conduit includes a mechanical resonator connected to a measurement circuit. The measurement circuit provides a variable frequency input signal to the mechanical resonator, causing the mechanical resonator to oscillate. The input signal is then sent to the mechanical resonator and swept over a selected frequency range. The mechanical resonator's response over the frequency range depends on various characteristics of the fluid being tested, such as the temperature, viscosity, and other physical properties.
    Type: Grant
    Filed: March 7, 2001
    Date of Patent: December 17, 2002
    Assignee: Symyx Technologies, Inc.
    Inventors: Leonid Matsiev, James Bennett, Eric McFarland
  • Patent number: 6442996
    Abstract: A method and apparatus for measuring the calorific value of a gas. The apparatus includes a chamber to which a gas in question, for example natural gas, is supplied through an inlet and leaves through an outlet. The speed of sound SoS at ambient temperature is measured using any suitable method such as electronic control and a calculating device and an ultra-sound emitter and an ultra-sound receiver. The ambient temperatures Ta, is observed by a temperature sensor, and a thermal conductivity sensor measures the thermal conductivity of the gas at two different temperatures above the ambient temperature. One value ThCH, of the thermal conductivity is measured at 70° C. above ambient and the other value ThCL of the thermal conductivity is measured at 50° C. above ambient. The control calculates the calorific value CV of the gas according to the formula: CV=a·ThCH+b·ThCL+C·SoS+d·Ta+e·Ta2 +f, where a, b, c, d, e and f are constants.
    Type: Grant
    Filed: August 29, 2000
    Date of Patent: September 3, 2002
    Assignee: Lattice Intellectual Property Limited
    Inventors: Robert Richard Thurston, Paul Stephen Hammond, Barry Leonard Price
  • Patent number: 6401519
    Abstract: Methods and apparatus for screening diverse arrays of materials are provided. In one aspect, systems and methods are provided for imaging a library of materials using ultrasonic imaging techniques. In another aspect, systems and methods are provided for generating acoustic waves in a tank filled with a coupling liquid to form a disturbance that is representative of a library of materials. In another aspect of the invention, a mechanical resonator is used to evaluate various properties (e.g., molecular weight, viscosity, specific weight, elasticity, dielectric constant, conductivity, etc.) of the individual liquid elements of a library of materials.
    Type: Grant
    Filed: November 28, 2000
    Date of Patent: June 11, 2002
    Assignee: Symyx Technologies, Inc.
    Inventors: Eric W. McFarland, Leonid Matsiev
  • Patent number: 6397661
    Abstract: An analyte, viscosity, or temperature sensing apparatus for operative arrangement within a time-varying magnetic field, including a sensor with an outer surface that is chemically, frictionally, or thermally responsive and adhered to a base magnetostrictive element, and a receiver to measure a first and second value for magneto-elastic emission intensity of the sensor taken at, respectively, a first and second interrogation frequency. A change in mass or a change in material stiffness of the sensor due to the responsiveness, the viscosity and mass density of a fluid therearound, or the temperature, can be identified. The receiver, alternatively, measures a plurality of successive values for magneto-elastic emission intensity of the sensor taken over an operating range of successive interrogation frequencies to identify a value for the sensor's magneto-elastic resonant frequency (a fundamental frequency or harmonic thereof).
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: June 4, 2002
    Assignee: University of Kentucky Research Foundation
    Inventors: Craig A. Grimes, Plamen G. Stoyanov
  • Patent number: 6393895
    Abstract: A method and apparatus for measuring properties of a liquid composition includes a mechanical resonator, such as a thickness shear mode resonator or a tuning fork resonator, connected to a measurement circuit. The measurement circuit provides a variable frequency input signal to the tuning fork, causing the mechanical resonator to oscillate. To test the properties of a liquid composition, the mechanical resonator is placed inside a sample well containing a small amount of the liquid. The input signal is then sent to the mechanical resonator and swept over a selected frequency range, preferably less than 1 MHz to prevent the liquid being tested from exhibiting gel-like characteristics and causing false readings. The mechanical resonator's response over the frequency range depends on various characteristics of the liquid being tested, such as the temperature, viscosity, and other physical properties.
    Type: Grant
    Filed: August 12, 1998
    Date of Patent: May 28, 2002
    Assignee: Symyx Technologies, Inc.
    Inventors: Leonid Matsiev, James Bennett, Eric McFarland
  • Patent number: 6370939
    Abstract: Provided are a measurement apparatus and a measurement system comprising sample and reference microresonators, such as sample and reference quartz crystal microbalances; sample and reference heat flow sensors; and a heat sink coupled thermally to the heat flow sensors. These may be used to measure changes in one or more properties, such as mass, due to a liquid sample on a surface of a sample microresonator and also to measure heat flows from the sample on the surface of the sample microresonator by utilizing the heat flow sensors, which are coupled thermally to the corresponding sample or reference microresonators. Also provided is a method for measuring one or more properties, such as mass, of a liquid sample and the flow of heat from the sample to the heat sink by utilizing such apparatus.
    Type: Grant
    Filed: February 16, 2001
    Date of Patent: April 16, 2002
    Inventors: Allan L. Smith, Ingemar Wadso
  • Patent number: 6363772
    Abstract: A system and method that allows for early detection of biological conditions, such as a disease, through analysis of appropriate gaseous samples. The system and method are particularly amenable to the early screening for diseases, such as lung cancer, through the detection of specific biomarkers when present in exhaled breath from an individual. A preferred system implements a CO overtone laser that generates radiation and directs it through a photoacoustic cell. The absorption of the radiation is detected acoustically, and the absorption characteristics are utilized in determining the presence of a specific biological condition.
    Type: Grant
    Filed: December 10, 1999
    Date of Patent: April 2, 2002
    Assignee: Quadrivium, L.L.C.
    Inventor: Michael J. Berry
  • Patent number: 6336353
    Abstract: A method and apparatus for measuring properties of a fluid composition includes a mechanical resonator connected to a measurement circuit. The measurement circuit provides a variable frequency input signal to the mechanical resonator, causing the mechanical resonator to oscillate. To test the properties of a liquid composition, the mechanical resonator is placed inside a sample well containing a small amount of the fluid. The input signal is then sent to the mechanical resonator and swept over a selected frequency range. The mechanical resonator's response over the frequency range depends on various characteristics of the fluid being tested, such as the temperature, viscosity, and other physical properties. The invention is particularly suitable for combinatorial chemistry applications, which require rapid analysis of chemical properties for screening.
    Type: Grant
    Filed: March 7, 2001
    Date of Patent: January 8, 2002
    Assignee: Symyx Technologies, Inc.
    Inventors: Leonid Matsiev, James Bennett, Eric McFarland
  • Patent number: 6286361
    Abstract: An apparatus for detecting pressure in a hollow fan blade of a turbofan gas turbine engine comprises a magnetostriction transducer arranged in a sub chamber of the fan blade which is interconnected to a main chamber. A magnetic coil is arranged in the fan casing of the turbofan remote from the fan blade, and an alternating current is supplied from a supply to the magnetic coil to produce an alternating magnetic field. The alternating magnetic field causes the magnetostriction transducer to generate vibrations in the fan blade and the magnetostriction transducer. A magnetic search coil detects changes in the magnetic field, which corresponds to the vibrations, and a processor analyses the vibrations to determine if there has been a change in the resonant frequency of the vibrations which is indicative of a change in the pressure in the fan blade. The processor supplies a signal to a display or to an alarm. The change in the pressure is indicative that the fan blade is cracked and needs replacing.
    Type: Grant
    Filed: January 5, 1998
    Date of Patent: September 11, 2001
    Assignee: Rolls-Royce plc
    Inventors: Alan R Jones, John R Webster, Ian D Brown, Duncan Pollard, Rodney D Greenough
  • Patent number: 6189367
    Abstract: Provided is a mass and heat flow measurement apparatus comprising sample and reference microresonators, such as sample and reference quartz crystal microbalances; sample and reference heat flow sensors, such as sample and reference isothermal heat conduction calorimeters; and sample and reference heat sinks coupled thermally to the heat flow sensors. The apparatus may be used to measure changes in mass due to a sample on a surface of the sample microresonator and also to measure heat flows from the sample on the surface of the sample microresonator by utilizing the heat flow sensors, which are coupled thermally to the corresponding sample or reference microresonators. Also provided is a method for measuring the mass of a sample and the flow of heat from the sample to the heat sink by utilizing such apparatus.
    Type: Grant
    Filed: December 2, 1998
    Date of Patent: February 20, 2001
    Inventors: Allan L. Smith, Ingemar Wadso
  • Patent number: 6184623
    Abstract: A plasma generating apparatus and a method for controlling plasma-generating high frequency power capable of appropriately and easily controlling plasma density over the long term are disclosed. Measuring high frequency power is supplied to plasma through a dielectric tube. Apart from a supply system of plasma-generating high frequency power, there is provided a plasma density information obtaining section having long lifetime no hot filament. The plasma density information obtaining section obtains the plasma density information by measuring a physical amount related to reflection or absorption of the high frequency power. An actually measured plasma density monitored by the plasma density information obtaining section from moment to moment and a target plasma density held in a plasma density setting section are compared.
    Type: Grant
    Filed: July 21, 1999
    Date of Patent: February 6, 2001
    Assignees: Nissin Inc., Nagoya University
    Inventors: Hideo Sugai, Seiichi Takasuga, Naoki Toyoda
  • Patent number: 6182499
    Abstract: Methods and apparatus for screening diverse arrays of materials are provided. In one aspect, systems and methods are provided for imaging a library of materials using ultrasonic imaging techniques. The system includes one or more devices for exciting an element of the library such that acoustic waves are propagated through, and from, the element. The acoustic waves propagated from the element are detected and processed to yield a visual image of the library element. The acoustic wave data can also be processed to obtain information about the elastic properties of the library element. In another aspect, systems and methods are provided for generating acoustic waves in a tank filled with a coupling liquid. The library of materials is then placed in the tank and the surface of the coupling liquid is scanned with a laser beam. The structure of the liquid surface disturbed by the acoustic wave is recorded, the recorded disturbance being representative of the physical structure of the library.
    Type: Grant
    Filed: October 8, 1997
    Date of Patent: February 6, 2001
    Assignee: Symyx Technologies
    Inventors: Eric W. McFarland, Leonid Matsiev