Abstract: An accelerometer includes a membrane; a laser source, the laser source producing a laser beam, the laser beam directed at the membrane causing the membrane to vibrate; a transparent cap, the transparent cap disposed between the laser source and the membrane; an antireflecting film disposed on an outer surface of the transparent cap; and a detector sensing a reflected portion of the laser beam, the reflected portion including a modulated intensity. An acceleration signal is based in part on the frequency of the modulated intensity of the reflected portion of the laser beam.

Abstract: The present invention discloses an MEMS sensor and a method for making the MEMS sensor. The MEMS sensor according to the present invention includes: a substrate including an opening; a suspended structure located above the opening; and an upper structure, a portion of which is at least partially separated from a portion of the suspended structure; wherein the suspended structure and the upper structure are separated from each other by a step including metal etch.

Abstract: The present invention discloses an MEMS sensor and a method for making the MEMS sensor. The MEMS sensor according to the present invention includes: a substrate including an opening; a suspended structure located above the opening; and an upper structure, a portion of which is at least partially separated from a portion of the suspended structure; wherein the suspended structure and the upper structure are separated from each other by a step including metal etch.

Abstract: A method and apparatus for quickly and efficiently balancing an article, such as a tube for use in a vehicular drive shaft assembly, for rotation about an axis is provided. Initially, a balance ring is press fit or otherwise mounted onto the article to be balanced. The balance ring includes a ring of a material that can be selectively removed to balance the article for rotation, such as powdered metal. The article is mounted on an apparatus for rotating the article at a predetermined speed and for sensing vibrations that are caused by imbalances in the structure of the article. An electronic controller is responsive to such sensed vibrations for determining the size and location of one or more balance weights that, if secured to the article, will minimize or eliminate these imbalances.

Abstract: A workpiece to be balanced, which during a measuring run is driven or rotating in the coupling-free mode and is provided with a mark for contact-free pick-off to generate a reference signal, is to be positioned subsequently, that the unbalance is at a predetermined location below a marking or correcting device. To this end pulse sequences synchronous with the supporting rollers carrying the workpiece are generated. The pulses are counted in a counter between the reference signal and an unbalance position signal derived from the unbalance signal. For the positioning the counter is counted down to zero by these pulses starting from the reference pulse. When the counter passes through zero the unbalance is in the plane of the pick-off device for detecting the mark.

Abstract: An apparatus for balancing a body to correct for unbalance determined during a measurement run on a balancing machine. The body to be balanced is rotated at a measuring speed by compressed air and the unbalance is determined. A braking device then is applied to the body to brake the body and rotate the body at a low speed. When a predetermined portion of the body is located in a desired angular position, a stopping device, such as a pawl, is actuated to stop rotation of the body. Appropriate mass is then added to or removed from the body to correct the unbalance. If necessary, the pawl is released, and body is incrementally rotated so that unbalance can be corrected on several portions of the body. The apparatus, instead of balancing the body, is usable to mark the body as to the location of unbalance.

Abstract: A procedure for determining the magnitude and angular position of the unbalance of a rotor is described together with an apparatus for accomplishing same. A series of impulses are generated as the rotor rotates, and these impulses relate to the periphery of the rotor. When the unbalance is determined the particular impulse number at the time of that determination is noted, and such impulse is representative of a particular point on the periphery of the rotor.

Abstract: In this machine, an optical coding device furnishes a plurality of code numbers one of which is stored upon each rotation of the wheel to be balanced when the latter rotates at a stable measuring speed. This stored number corresponds to the passage of the imbalance through a predetermined position. Thereafter, the motor driving the wheel in rotation is switched off and the number is retained in the store and compared, in the course of a new rotation of the wheel, with the instantaneous number furnished by the coding device. The result of this comparison is displayed by three indicator lamps. When, in the course of the new rotation, the imbalance reaches the position it had at the moment of storage, one of the lamps lights up and the other two lamps are extinguished. The balancing weight must then be fixed to the wheel in a position diametrally opposed to the predetermined position.

Abstract: A wheel balancing apparatus for balancing an out-of-balance wheel that is mounted on a rotatable shaft includes force transducers positioned in a horizontal plane against resiliently supported bearings for the shaft to thereby detect horizontal components of the imbalance forces created by the out-of-balance wheel. Photosensitive switches associated with the shaft produce phase-displaced analog signals, which signals are supplied to a pulse producing circuit for generating a train of count pulses on one of two output lines depending upon the direction of rotation of the shaft. A counter, which has a capacity exactly equal to the number of pulses generated by the pulse producing circuit per revolution of the shaft, is set when the horizontal component of the imbalance force for a particular correction plane associated with the counter equals zero.