Abstract: A micromechanical spring for a sensor element, including at least two spring sections formed along a sensing axis, the at least two spring sections each having a defined length, and the at least two spring sections having different defined widths.

Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g.

Abstract: A piezoresistive transducer is disclosed having a framework including a support element attached to a bending element that undergoes a deformation relative to the support element when a force acts on the bending element including a neutral fiber whose length does not change during the deformation. At least one piezoresistive expansion body is attached to the support element that exhibits a piezoresistive material and converts the deformation of the bending element into an electrically detectable change in resistance.

Abstract: A sensor includes a sensor element configured to measure a physical variable. At least one elastic damping element is configured to damp external interfering vibrations. The at least one elastic damping element is configured to electrically and/or mechanically contact the sensor element.

Abstract: An acceleration sensor has a substrate, a seismic mass and a detection unit. The seismic mass is configured to be deflected based on an external acceleration acting on the acceleration sensor, the deflection being in the form of a deflection motion with respect to the substrate along a deflection direction. The detection unit is configured to be deflected for the detection of a deflection of the seismic mass, the detection being in the form of a detection motion with respect to the substrate along a detection direction. The detection unit is connected to the seismic mass in such a way that the amplitude of the deflection motion along the deflection direction is greater than the amplitude of the detection motion along the detection direction.

Abstract: A method for checking a vibration damper of a motor vehicle in the installed state includes setting start values of the damping constant kA, the spring rate cA, and the body mass mA for a wheel of a motor vehicle; inducing a vertical vibration of the motor vehicle with the aid of a defined excitation sRreal; determining the theoretical body vibration excursion sAmodel; optically detecting the positions of the wheel and the body shell of the motor vehicle at a plurality of detection instants during the vibration; minimizing the error function formed from the deviations between the theoretical body vibration excursion sAmodel and the observed body vibration excursion sAreal at the detection instants, and determining the damping constant kA, the spring rate cA, and the body mass mA therefrom; and determining the damping measure ? of the vibration damper.

Abstract: A micromechanical acceleration sensor is described which includes a substrate and a seismic mass which is movably situated with respect to the substrate in a detection direction. The micromechanical sensor includes at least one damping device for damping motions of the seismic mass perpendicular to the detection direction.

Abstract: The invention relates to an inertial sensor arrangement (2), in particular for installation in a motor vehicle, having a sensor module (8) which is fitted to a carrier (6) and comprises a micromechanically produced inertial sensor and an evaluation circuit. The invention provides for the sensor module (8) to be connected to the carrier (6) by means of an elastic coupling element (14).

Abstract: One or more heating elements comprise a heating element. One or more elongated beams comprise an elongated beam. The heating element is coupled with the elongated beam and induces a time-varying thermal gradient in the elongated beam to cause one or more oscillations of one or more of the one or more elongated beams.

Abstract: For a sensor whose sensor structure is implemented in a micromechanical structural component and which has parts which are movable in relation to the stationary substrate of the structural component, and which also includes an unsupported a seismic mass, a spring system having at least one spring, the seismic mass being connected to the substrate through the spring system, and an overload protection to limit the deflection of the spring system and the seismic mass in at least one direction, and an arrangement for detecting the deflections of the spring system and the seismic mass, whereby the impact forces may be reduced to prevent conchoidal breaks and resulting incipient damage to the sensor structure, as well as formation of particles. To that end, at least one two-dimensional stop for at least one moving part of the sensor structure is provided as overload protection.

Abstract: For a sensor whose sensor structure is implemented in a micromechanical structural component and which has parts which are movable in relation to the stationary substrate of the structural component, and which also includes

Abstract: A high strength, high frequency acceleration transducer is used for measuring the acceleration of an impacted machine or structure. The acceleration transducer includes a diaphragm, the diaphragm including one or more strain gages for producing an output signal indicative of the transducer flexure. The diaphragm is securely clamped or held over part of its surface, and is free to deflect over other parts, for example, the remainder of its surface—the diaphragm can be clamped or held along its circumference with its middle free to flex, or alternatively the diaphragm can be clamped or held along its center with the outside portion of the diaphragm free to flex.

Abstract: A dampening apparatus for a pressure gauge in which a housing secured to the amplifier of the pressure gauge encircles the pointer shaft in a close but loose fit relation so as to define a controlled clearance packed with a high viscosity dampening agent such that it serves to decelerate and cushion any sudden shock or pulsation force that would otherwise be transmitted from the pointer shaft to a pointer registering values of pressure of fluid pressure being monitored.