Abstract: An angular velocity sensor has an adjustment circuit for adjusting the amplitude of a detection signal generated corresponding to a displacement of each of arm portions vibrating in the X-axis direction. The adjusted signal is input as a comparison reference signal to operational amplifiers of amplifying circuits at the first stage. At this time, the comparison reference signal input to the non-inverting input terminals are applied by the operation(imaginary short-circuit) of the operational amplifiers, and act to offset the signal of an extraneous vibration component, so that an extraneous signal of the vibrator can be adjusted.

Abstract: A system includes a thin-film battery and an activity-activated switch. The system is placed on a substrate with an adhesive backing. In some embodiments, the substrate is flexible. Also formed on the substrate is an electrical circuit that includes electronics. The activity-activated switch places the thin-film battery in electrical communication with the circuit and electronics. The battery and the circuit are formed on the substrate and may be comprised of one or a plurality of deposited layers.

Abstract: A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes. In order to reduce or eliminate angular acceleration sensitivity, a two substrate configuration may be used. Each substrate includes three accelerometers that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. The sensing axes of the accelerometers of the first substrate are canted at an angle with respect to the plane of the first substrate toward the central portion thereof so that they lie along three skewed axes.

Abstract: An oscillation type of micro gyro sensor equipped with two vibrators is provided. The gyro sensor has a monitoring electrode, a signal processor, and a driving electrode attached to both the vibrators. The monitoring electrode monitors a vibration of only one of the two vibrators to output signal indicative of the monitored vibration. The signal processor drives the two vibrators in mutually opposite phases, by using the signal from said monitoring electrode. The driving electrode drives both the vibrators on the basis of the two driving signals.

Abstract: An angular velocity sensor has an adjustment circuit for adjusting the amplitude of a detection signal generated corresponding to a displacement of each of arm portions vibrating in the X-axis direction. The adjusted signal is input as a comparison reference signal to operational amplifiers of amplifying circuits at the first stage. At this time, the comparison reference signal input to the non-inverting input terminals are applied by the operation(imaginary short-circuit) of the operational amplifiers, and act to offset the signal of an extraneous vibration component, so that an extraneous signal of the vibrator can be adjusted.

Abstract: A method for reducing undesired movements of proof masses in micro-electromechanical systems (MEMS) devices is described where the proof masses are suspended above a substrate by one or more suspensions. The method includes providing an anchor on the substrate substantially between a first proof and suspensions for the first proof mass and a second proof mass and suspensions for the second proof mass, coupling a first portion of a beam to the first proof mass, coupling a second portion of the beam to the second proof mass, and attaching a third portion of the beam to the anchor, the third portion extending between the first portion and second portion of the beam, the anchor and the third portion configured to allow for rotation about an axis perpendicular to the substrate.

Abstract: An acceleration sensor includes: a vibrator that is polarized in one direction; a weight that is connected to the vibrator; and a pair of electrodes that are adjacent to each other in the polarization direction and are placed on a first face of the vibrator. The pair of electrodes are located on a diagonal line on the first face of the vibrator. With this electrode structure, voltage is constantly produced in the pair of electrodes, no matter which one of the three axes of the vibrator receives acceleration. Thus, a non-directional acceleration sensor can be realized. Also, the sensitivity to tri-axial acceleration can be easily adjusted by changing the sizes of the electrodes in relation to the size of the vibrator.

Abstract: The acceleration detection sensor comprises a plate in which there are defined a support portion, at least one vibrating element carried by the support portion and sensitive to the movements to which the sensor is subjected, and at least one additional portion connected to the vibrating element and active in detecting acceleration, the sensor including a temperature probe comprising a conductive track which is fixed on at least the additional active portion and which is of resistance that varies as a function of ambient temperature.

Abstract: A tuning fork vibrator includes a long plate-shaped vibration unit having a first principal surface and a second principal surface, a base disposed at one end of the second principal surface of the vibration unit in the longitudinal direction, and a slit for dividing the vibration unit into two legs defining a tuning fork along the longitudinal direction symmetrically in the width direction of the vibration unit. The slit is formed so as to include a portion of the base in the vicinity to the vibration unit.

Abstract: An acceleration sensor comprises a fixed case member and a cover assembly collectively defining a closed space in which the oscillation plate and the piezoelectric element received therein. The oscillation plate and the piezoelectric element are oscillatably supported by a supporting portion formed on the central bottom portion of the fixed case member.

Abstract: A method for delicately adjusting an orientation of features in completed micro-machined electromechanical sensor (MEMS) devices after initial formation and installation within the device packaging to trim one or more performance parameters of interest, including modulation, bias and other dynamic behaviors of the MEMS devices.

Abstract: The present invention relates to an acceleration sensor including an oscillating structure which is movably suspended on a substrate and deflectable in response to the action of an acceleration, a plane of oscillation of the oscillating structure being essentially parallel to a substrate plane, and further including evaluation arrangements for measuring a deflection of the oscillating structure due to acceleration. In this context, provision is made for stop arrangements which limit a deflection movement of the oscillating structure in a direction essentially perpendicular to the plane of oscillation (x-, y-plane) of the oscillating structure.

Abstract: A micromechanical component comprises a frame layer and an oscillating body which, with the aid of a suspension means, is supported in an opening penetrating the frame layer, in such a way that the oscillating body is adapted to be pivoted about an axis of oscillation vertically to the frame layer plane. At least one oscillating-body lateral surface, which extends substantially at right angles to the frame layer plane, is arranged in relation to at least one inner lateral surface of the opening in such a way that a capacitance formed therebetween is varied by an oscillation of the oscillating body in such a way that an oscillation of the oscillating body about the axis of oscillation can be generated by periodically varying a voltage applied between the frame layer and the oscillating body.

Abstract: The inertial sensor of the present invention utilizes a proof mass suspended from spring structures forming a nearly degenerate resonant structure into which a perturbation is introduced, causing a split in frequency of the two modes so that the mode shape become uniquely defined, and to the first order, remains orthogonal. The resonator is provided with a mass or inertia tensor with off-diagonal elements. These off-diagonal elements are large enough to change the mode shape of the two nearly degenerate modes from the original coordinate frame. The spring tensor is then provided with a compensating off-diagonal element, such that the mode shape is again defined in the original coordinate frame. The compensating off-diagonal element in the spring tensor is provided by a biasing voltage that softens certain elements in the spring tensor. Acceleration disturbs the compensation and the mode shape again changes from the original coordinate frame.

Abstract: A method of estimating an eccentric position of an acceleration sensor for a double turntable-type acceleration generating apparatus includes the steps of mounting the acceleration sensor on an auxiliary rotating body; rotating the auxiliary rotating body at a constant frequency with a main rotating body held at a standstill; measuring an output signal from the acceleration sensor; determining an amount of eccentricity in an X-axis direction of the acceleration sensor from the frequency of the auxiliary rotating body and the output signal; and determining an amount of eccentricity in a Y-axis direction by using tangential acceleration generated by the rotation of the auxiliary rotating body in a state in which the amount of eccentricity in the X-direction is set to substantially zero.

Abstract: A tuned flexure accelerometer, comprising, a housing; a gimbal coupled to the housing for oscillation about a gimbal oscillation axis; and a reference mass coupled by one or more pivots to the gimbal to allow pivoting motion of the reference mass relative to the gimbal about a pivot axis which is transverse to the gimbal oscillation axis, the one or more pivots having an effective elastic restraint. The gimbal is oscillated about its oscillation axis, to thereby induce on the one or more pivots an oscillating negative elastic restraint, to reduce the effective elastic restraint of the pivots.