Abstract: A sensor device, method of fabricating the same, and a method of sensing a physical quantity. The sensor device comprises a substrate; a flexure member, one end of the flexure member being attached to the substrate, and a free end of the flexure member having an edge surface; a counter surface formed on the substrate such that the counter surface faces the edge surface of the flexure member and such that a separation distance between the counter surface and the edge surface remains substantially constant for movement of the edge surface as a result of flexure of the flexure member, each of the edge surface and the counter surface including one or more conductor layers disposed in a plane substantially perpendicular to a flexure direction of the flexure member; and means for applying an electrical potential difference between the conductors of the edge surface and the conductors of the counter surface for detecting a quantum tunnelling current therebetween.

Abstract: A procedure for operating a particle sensor that is arranged downstream after a particle filter, at which an ash contamination can occur, and a device for implementing the procedure, are suggested. A remaining operating time determination determines the remaining operating time of the particle sensor related to an ash contamination. Alternatively or additionally the remaining operating time determination provides a correction signal, with which the sensitivity loss of the particle sensor caused by the ash contamination can be considered.

Abstract: Techniques for reducing an electrical stress in a acceleration/deceleration system are disclosed. In one particular exemplary embodiment, the techniques may be realized as an acceleration/deceleration system. The acceleration/deceleration system may comprise an acceleration column including a plurality of electrodes having apertures through which a charged particle beam may pass. The acceleration/deceleration system may also comprise a plurality of voltage grading components respectively electrically coupled to the plurality of electrodes. The acceleration/deceleration system may further comprise a plurality of insulated conductors disposed proximate the plurality of voltage grading components to modify an electrical field about the plurality of voltage grading components.

Abstract: A system including a user input device for controlling a position of medical equipment is described. In an example embodiment, the user input device is configured to be coupled to the medical equipment and is responsive to an operator input representation of a desired movement of the equipment. A processor determines a direction in which the operator desires the equipment to move based on a device output.

Abstract: An accelerometer includes a housing with a chamber, a member with a stored static charge, and a pair of electrodes connected to the housing. The member is connected to the housing and extends at least partially across the chamber. The pair of electrodes are each spaced from and on substantially opposing sides of the member from each other and are at least partially in alignment with each other. The member is movable with respect to the pair of electrodes or one of the pair of electrodes is movable with respect to the member.

Abstract: Methods are provided for identifying root causes of particle issues and for developing particle-robust process recipes in plasma deposition processes. The presence of in situ particles within the substrate processing system is detected over a period of time that spans multiple distinct processing steps in the recipe. The time dependence of in situ particle levels is determined from these results. Then, the processing steps are correlated with the time dependence to identify relative particle levels with the processing steps. This information provides a direct indication of which steps result in the production of particle contaminants so that those steps may be targeted for modification in the development of particle recipes.

Abstract: An ionization contact potential difference gyroscope including a housing enclosing a first and second electrode with a gas, further including an ionization source capable of providing ions from the gas, and a contact potential difference measurement circuit that is capable of measuring an electrical signal related to the amount of ions striking at least one of the two surfaces. The measurement circuit of the present invention is capable of sensing the small amount of electrical current flowing as the electrons and ions strike one or both of the surfaces.

Abstract: This invention is pertaining to multi purpose shock sensor comprising three conductive plates arranged in 3 layers in parallel which make 2 variable capacitors connected in series. Two outer plates are firmly attached to a supporting insulating material and the center plate is located between the 2 outer plates and arranged as movable by resilient element toward either side of the outer plate depending on the direction of the impact felt on the shock sensor causing changes of the capacitance values of the both capacitors. If the 2 capacitors are connected across a voltage source through a resistor, the voltage is charged across the 2 capacitors and their charged values are inversely proportional to their capacitance values. Moving the center plate due to a shock causes changes on both capacitance values, which change voltages across the capacitors, and the changed voltage can be used to activate an object.

Abstract: An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined.