Abstract: The invention relates to a method, to a device for electronic characterization, and to a measurement cell and support for monitoring a chemical or physical process with results that can be assessed in terms of the weight variation of a coating deposited on a piezoelectric sensor, exposed to a fluid medium with stable physical properties. The invention uses the deduction of an analytic expression establishing a simple connection between the phase variation of a fixed-frequency signal, which queries the piezoelectric resonator, and the variation in the bulk density of the coating. The invention is suitable for implementations that use piezoelectric resonators for characterizing biochemical and electrochemical processes, such as, inter alia: piezoelectric biosensors and immunosensors, process and material characterization by AC electrogravimetry, detection of dissolved chemical or biological substances.

Abstract: A simple method and apparatus for accurately estimating the contact patch shape of a moving tire. The vibration waveforms of a tire (20) with sipe rows (25A, 25B) formed at the respective pitches (Pa, Pb) in the left and right shoulder lands (24a, 24b) are detected by an acceleration sensor attached to a knuckle of the vehicle. Rotational order spectrums are obtained by performing a rotational order analysis on the vibration waveforms. The peak height (Za) of the rotational order (na) corresponding to the pitch (Pa) and the peak height (Zb) of the rotational order (nb) corresponding to the pitch (Pb) are extracted from the rotational order spectrums.

Abstract: Various approaches for assessing a part for a defect are disclosed and that are based upon SAW modes. In one embodiment, a part-under-test (120) is excited. One or more SAW modes (206) are identified in the frequency response (240/260) of the part-under-test (120). A SAW mode area (248/266) in the frequency response of the part-under-test (120) is compared with a baseline SAW mode area (238/258) of a baseline frequency response (230/250) (and which may be associated with an acceptable part). This comparison may be used to determine if the part-under-test (120) may be characterized defective in at least some respect.

Abstract: The density of gold and tungsten are almost identical, allowing for substitution by unscrupulous entities. The detection of the replacement is difficult to detect by common nondestructive testing methods, and repositories have resorted to drilling, cutting and melting samples of gold bars to certify their integrity. Resonant ultrasound spectroscopy allows a digital fingerprint to be produced, which has been shown to be effective in the detection of tampering. These spectra are representative of the dimensions, density and elastic constants of any solid object. Since the dimensions and density are essentially identical for pure and adulterated gold samples, only the elastic constant variance changes the spectral fingerprint. The method described in this application provides a reliable and accurate process to certify the integrity of gold samples.

Abstract: The invention relates to a sensor (1) and a method for measuring pressure, variation in sound pressure, a magnetic field, acceleration, vibration, or the composition of a gas. The sensor (1) comprises an ultrasound transmitter (2), and a cavity (4) arranged in connection with it. According to the invention, the sensor (1) comprises a passive sensor element (3, 3?) located at the opposite end of the cavity (4) to the ultrasound transmitter (2), the distance of which from the ultrasound transmitter (2) is selected in such a way that the resonance condition is met at the ultrasound frequency used, the ultrasound transmitter (2) comprises a light-construction diaphragm oscillator (9), which is thus well connected to the surrounding medium, and the sensor includes means for measuring the interaction between the ultrasound transmitter (2) and the cavity (4).

Abstract: The invention is directed toward detection, analyzation and correction of unwanted frequencies. The elimination of the wolf tone may be done through either correction of surface instability or dynamic frequency correction by a signal generator.

Abstract: An apparatus for monitoring and detecting material deposited onto a substrate during a deposition process in a processing chamber includes a storage structure having a primary axis extending between respective first and second ends and an exterior lateral surface between the first and second ends extending about the primary axis. A plurality of monitor crystals are supported by the storage structure at spaced positions along said exterior lateral surface and in which a drive mechanism advances the storage structure rotatably and axially relative to the primary axis such that at least one monitor crystal is advanced or retracted relative to at least one measuring position. A retained crystal that is advanced to the measuring position can be electrically connected, using a brush contact or other mechanism, in order to excite the crystal using a resonance circuit.

Abstract: The basic physical principle of the Apparatus for Gauging Liquid or Solid Mass Contained in a Vessel and Method for Using Same (MAGA) is the detection of a resonant frequency vibration mode or modes associated with the spring/mass system comprising the vessel/fluid, vessel support structure, and physical supports, when an excitation source is present. The excitation produces a relative displacement between the fluid containment vessel and its support frame or other fixture to which it is fastened. The displacement produces a signal voltage in one or more of the sensors, such as strain gauge devices or accelerometers, which are attached to the fluid containment vessel, its physical supports, or the support structure, shell or frame. The frequency and amplitude of the sensor signal varies in accordance with known physical principles that relate the amplitude of vibration and the frequency of vibration to the masses and spring constants of the spring/mass system.

Abstract: A new analytical technique, instrument and method of testing a material utilizing same is provided. The method of analyzing a test material comprises the steps of (vii) inducing an acoustic emission from a vessel containing a solvent and measuring said emissions; (viii) dissolving a known amount of the test material in the solvent; measuring changes in resonance and absorbance frequencies before and after dissolution to produce a broadband acoustic resonant dissolution emission profile.

Abstract: A method for monitoring movement of an element such as a cable is carried out by providing a pair of conductive elements each extending along an extent of the cable or other element to be monitored. A DC potential difference is applied between the conductive elements. The conductive elements are provided with an intervening material therebetween, which can be a continuous dielectric or can be other insulating material which varies in spacing and capacitance value along its length, such that the movement causes a change in capacitive coupling between the conductive elements at points or areas where the movement occurs so as to generate a changing voltage therebetween. The changing voltage as an amplified and filtered variable electrical signal is analyzed for monitoring the changing voltage for perturbations caused by the movement of the element.

Abstract: A device comprising a solid-state actuator (100), means for inputting an acoustic signal to the actuator (104) and means for measuring the resultant signal (104). The measured acoustic signal can be used to determine the extension of the solid-state actuator.

Abstract: An analyzer that can provide information concerning a golf shaft assembly's oscillation properties, its natural frequency and its flat line oscillation planes. In the embodiments presented, a clamping assembly holds both the golf shaft assembly and an oscillator. Oscillation of the golf shaft assembly and that of the oscillator with known oscillation properties provides information about the golf shaft assembly's oscillation properties. Some of the test procedures presented are made possible by oscillation coupling between the golf shaft assembly and the oscillator. Oscillator assemblies are presented which have adjustable natural frequencies and one has a preferred oscillation deflection plane.

Abstract: A method includes measuring an occurrence frequency of elastic waves generated by cavitations in vascular tissues in vascular plant, before and after a change in water stress to the vascular plant, respectively by an elastic wave reception sensor fixed to an axis of the vascular plant, calculating a change rate of the occurrence frequency, from the occurrence frequency of the elastic wave measured before and after the change, respectively, and determining whether or not an embolism in the vascular tissue arrives at an unrecoverable level of the embolism, from the calculated change rate. And then, one can determine irrigation timing and quantity to the vascular plant, using an index based upon the above-determined result.

Abstract: A change in impedance of a electromechanical resonating sensor is utilized to detect and/or measure a change in mass accumulated on the sensor. The impedance is monitored at a fixed frequency. The fixed frequency may be at or near the resonance frequency of the sensor. In various configurations, the sensor comprises a quartz crystal microbalance sensor or a piezoelectric cantilever sensor.

Abstract: The present disclosure relates to piezoelectric sensors and piezoelectric sensor arrays, to methods of manufacturing therefor, and to a method of measuring characteristics of a mechanical wave using a piezoelectric sensor array. A piezoelectric sensor is formed of a silicon substrate on which an electrical barrier is added. A patterned bottom electrode layer is added on top of the electrical barrier. A patterned bottom electrode layer is added on top of the electrical barrier. A piezoelectric layer and then a patterned top electrode layer are added on top of the electrical barrier.

Abstract: Calibrating a frequency filter includes applying a series of input electrical signals at different frequencies to a shock sensor, using circuitry to identify a particular one of the frequencies as a resonance frequency of the shock sensor based on responses of the shock sensor to the series of input signals, and setting a center frequency of the notch filter equal to the particular frequency identified as the resonance frequency of the shock sensor.

Abstract: The present invention provides a method for determining arc discharge as well as failure of mechanical vibration and abnormal displacement in power equipment using acoustic energy feature. Here, acoustic energy feature is firstly introduced to realize real-time, online inspection of failure in power equipment, enabling qualitative determination of discharge as well as mechanical vibration and abnormal displacement, so as to improve early warning before damage. Two factors, in which one is early detection of discharge, and the other is early detection of mechanical vibration and abnormal displacement, are considered. When abnormality of any one of these factors is emerged, it is demonstrated that hidden trouble is presented. Here, acoustic energy feature is used to perform real-time, online monitoring.

Abstract: A method for accurately and speedy analyzing vibration property of head suspension including a piezoelectric element that moves a head according to voltage application. The method comprises a displacement obtaining step obtaining displacement of each node point of the piezoelectric element by voltage application to the piezoelectric element, a reaction force obtaining step eliminating the voltage application and applying the obtained displacement to each node point, a reaction force applying step eliminating the applied displacement and applying obtained reaction force to each node point, and an analyzing step performing the frequency response analysis by using mode superposition method.

Abstract: A laser source unit obtains Q switch pulse oscillation with a simple structure while continuously switching a plurality of wavelengths. A laser source unit emits pulsed laser beams with a plurality of different wavelengths. A flash lamp radiates excitation light to a laser rod. A pair of mirrors face each other with the laser rod interposed therebetween. The pair of mirrors form an optical resonator. Wavelength selection unit controls the wavelength of light which resonates in the optical resonator to any one of a plurality of wavelengths to be emitted by the laser source unit. Driving unit drives the wavelength selection unit such that the optical resonator performs the Q switch pulse oscillation.

Abstract: A method and apparatus for processing measurements of an acoustic wave, the acoustic wave being within a member (12) made of a composite material and caused by an impact to the member (12), the method comprising: analysing the measurements to detect an initial acoustic wave feature; analysing the measurements to detect the presence of further acoustic wave features, the further features occurring after the initial feature; if there are no further acoustic wave features, determining that the impact to the member (12) has not changed the structure of the member (12); if there are further features, determining a value of a function of the further acoustic wave features; if the determined value satisfies certain criteria, determining that the impact has changed the structure of the member (12); and if the determined value does not satisfy the criteria, determining that the impact has not changed the structure of the member (12).

Abstract: According to an example, a fan vibration testing apparatus includes a beam. The fan vibration testing apparatus further includes a fan mounting head disposed at a first location on the beam and including a cut-out, and a rod including first and second opposite rod ends. The rod may be attached at the first rod end to the fan mounting head, and the second rod end may be exposed to retain a fan within the cut-out.

Abstract: A method and apparatus for determining phase sensitivity of an accelerometer based on an analysis of the harmonic components of the interference signal, which can estimate phase lags of an accelerometer through an analysis of the interference signal obtained using a single photo-detector when the accelerometer moves in sinusoidal motion with an initial phase of vibration. The method comprises the steps of obtaining an interference signal in a time domain generated from a signal reflected by an accelerometer and a fixed mirror using a single photo-detector; transforming the interference signal in the time domain into a signal in a frequency domain including a plurality of harmonic signals by Fourier transform; and determining the phase sensitivity of the accelerometer using initial phase of vibration displacement of the accelerometer, which is included in the interference signal in the frequency domain.

Abstract: Devices usable as sensors, as transducers, or as both sensors and transducers include one or more nanotubes or nanowires. In some embodiments, the devices may each include a plurality of sensor/transducer devices carried by a common substrate. The sensor/transducer devices may be individually operable, and may exhibit a plurality of resonant frequencies to enhance the operable frequency bandwidth of the devices. Sensor/transducer devices include one or more elements configured to alter a resonant frequency of a nanotube. Such elements may be selectively and individually actuable. Methods for sensing mechanical displacements and vibrations include monitoring an electrical characteristic of a nanotube. Methods for generating mechanical displacements and vibrations include using an electrical signal to induce mechanical displacements or vibrations in one or more nanotubes.

Abstract: A physical quantity sensor includes a beam-like vibrating body and a fixing part supporting both ends of the beam-like vibrating body. A driving element is formed on a central portion of the beam-like vibrating body, and feedback elements are formed on both ends. A physical quantity acting on the beam-like vibrating body is detected by causing natural vibration in the beam-like vibrating body and detecting a natural frequency of the vibrating body. This enables reliable detection of a physical quantity, such as a strain or load, acting on an object.

Abstract: A system for use in installation of blown fiber for detecting a signal indicative of presence of at least one of a gas flow or an optical fiber at a remote location, comprising a gas vibration detector configured to acoustically couple with an installation duct through which the signal can travel after its generation at the remote location, and a processor arranged to receive an input from the vibration detector and to process the input to identify the signal present within the input; and a sensor for generating the signal upon sensing the presence of at least one of the gas flow or the optical fiber at the remote location. The signal can be provided by a whistle mounted on the remote end of the installation duct. The vibration sensor is typically a microphone.

Abstract: The present invention relates to a methods and systems for monitoring and/or characterizing multi-component tablets and for monitoring punch and die surfaces and, more particularly, to methods and systems for in-die and out-of-die monitoring and/or characterizing multi-component tablets based on acoustic and vibrational spectroscopy and for detecting and monitoring stiction and tooling material modifications on punch and die surfaces during compaction based on acoustic/ultrasonic waves.

Abstract: A device for measuring, documenting, and issuing citations for noise violations comprises a mobile device for measuring the decibel sound level from a sound source, for measuring the distance from the device to the source, for capturing an image or video of the sound source, and determining whether the sound source exceeds a user-predetermined level. The device may be in the form of a hand-held gun-shaped device wherein the user actuates the trigger to record an image or video of the sound source, the decibel sound level, and the distance between the device and the source. After the data is collected, the sound-measuring device is attached to a download component. The download component accepts data from the sound-measuring component and allows the user to input additional data regarding the noise violation. The user may then use the download component to print a citation, which may include an image of the sound source.

Abstract: A method for monitoring vibrations of the winding overhang in a generator (2) comprises the following steps:—detection of vibrations of the winding overhang (15) during the operation of the generator;—transformation of signals of the vibrations into the frequency range;—transformation of multiple individual vibrations from the frequency signals into the modal range; and—determination of deviations of the modal forms and/or individual bar vibrations in relation to a reference response.

Abstract: The invention relates to a measurement device with at least one resonator, comprising a measurement chamber with a fluidic input and a fluidic output wherein the measurement chamber is delimited, at its bottom surface, by a resonator, and wherein the resonator surface is configured to be electrically conducting, and the resonator surface forms the working electrode for an electrochemical measurement, and wherein electrodes are provided at the fluidic input and/or output at the transition to the measurement chamber. The invention is characterized in that the electrodes are exchangeable and allow the reception of a fluidic connection.

Abstract: The invention relates to a bearing (10) including an inner ring (12), an outer ring (11), and rolling bodies positioned between the inner and outer rings, one of the rings being rotary and the other not, the bearing further including: a first module (20) including at least one set of sensor(s) suitable for performing successive measurements of at least one parameter representative of the vibrations within the bearing; and a second module (20) suitable for determining a frequency representation of the signal corresponding to the successive measurements, and for obtaining a set of elements(s) representative of the frequency representation based on that frequency representation, so as to compare at least one representative element of the set with a corresponding reference element and identify a malfunction based on that comparison (10).

Abstract: Frequency-steerable acoustic transducers (FSATs) that allow directional generation or sensing of waves propagating in two-dimensional domains. Directionality is the result of the spatial filtering effect produced by the characteristic shape of the sensing surface. A wavenumber spiral FSAT (WS-FSAT) maps the direction of wave sensing in the [0°, 180°] range to a specific frequency component in the spectrum of the received signal. The use of a wavenumber spiral FSAT operating in sensing mode can be used for the localization of broadband acoustic events. One configuration includes a broadband source generating guided elastic waves in an isotropic plate. The WS-FSAT records the plate response and defines the source location through a time-frequency analysis of the received signal. The frequency selective response of the WS-FSAT directly maps the dominant component of the received signal to the direction of arrival of the incoming wave, thus greatly facilitating the source localization procedure.

Abstract: The present invention relates to a method for determining the oscillation amplitude of a sonotrode excited by a converter, wherein the converter is connected to a current generator and the current IE(t) provided by the current generator and flowing through the converter is measured. According to the invention, in order to provide a method for determining the oscillation amplitude of a sonotrode excited by a converter, the voltage UE(t) applied to the converter by the current generator is measured and the oscillation amplitude of the sonotorode or a field quantity of the electrical oscillation system comprising the current generator and the converter, said field quantity being related to the oscillation amplitude of the sonotrode, is calculated from the measured voltage UE(t) and from the measured current IE(t).

Abstract: A real-time monitoring system to monitor the wearing in the thickness of the ribs of a grate of a SAG mill. The grate can have a screening surface that includes a pulp lifter and an external surface that is not exposed to impacts, and can also include a central trough where the supporting elements fit and which allow securing the grate inside the mill through fitting bolts. The system can comprise: a sensor (accelerometer or strain gage) located on the external surface in which the sensor is connected to a sensor adaptor unit; a wireless transmitter connected to the sensor to transmit the signal from the sensor; a wireless receiver for receiving the signal from the wireless transmitter; and a signal reader connected to the wireless receiver which processes the signals received from the sensor.

Abstract: In a piezoelectric ejector assembly, a piezoelectric actuator is attached to an ejector mechanism, while a drive signal generator and a controller are coupled to the actuator. The drive signal generator is configured to generate a drive signal for driving the actuator to oscillate the ejector assembly. The controller is configured to control the drive signal generator to drive the actuator at a resonant frequency of the ejector assembly, and an auto-tuning circuit is provided to define the optimum drive signal frequency.

Abstract: An acoustic wave sensor includes a piezoelectric substrate, a transmitting electrode configured to excite a main acoustic wave propagating through a propagation region of an upper surface of the piezoelectric substrate, a receiving electrode configured to receive the propagated main acoustic wave, a first insulating film provided on the propagation region of the upper surface of the piezoelectric substrate, a second insulating film provided on the upper surface of the piezoelectric substrate to cover the first insulating film, and a reaction section provided on the upper surface of the second insulating film above the propagation region. The reaction section is configured to react with an object. A velocity of a transverse wave propagating through the first insulating film is higher than a velocity of a transverse wave propagating through the second insulating film. The acoustic wave sensor described above has high detection sensitivity.

Abstract: There is provided a method for determining a road surface state which can accurately estimate the road surface state on which a vehicle is running at one of finely classified road surface states based on a sound detection signal from a ground contact surface sound detection unit for detecting a sound in the vicinity of the ground contact surface of the tire of the running vehicle. The method calculates a wave profile of frequency dispersion by executing a 1/N octave analysis of a detected sound signal from a sound detection unit 20 for estimating a road surface state. The state of the road surface on which the vehicle is running is determined whether the calculated wave profile of frequency dispersion satisfies predetermined determination conditions of the respective road surface states. A microphone housed in a container is used to detect said sound, and the determining step is adapted to apply the determination conditions to the measured wave profile including a resonance caused by the container.

Abstract: The invention relates to a flow state sensor (10) for detecting a flow state at a body (16) that may be impinged on by a flow (12). A flow state sensor (10) that is of a simple construction and that is simple to evaluate is characterized in accordance with the invention by at least one frequency detecting device (20) for detecting at least one predefined frequency characteristic of the flow state. The frequency detecting device (20) has at least one oscillation element (22; 22a, 22b, 22c) excitable to resonant oscillatory movement (30) by a flow (12) and having a resonant frequency or natural frequency adapted to the predefined frequency characteristic, especially corresponding to the predefined frequency characteristic. Uses of the flow state sensor (10) in a flow measuring device (62) and in a flow measuring method, and an advantageous production method for the flow state sensor (10) are also proposed.

Abstract: A sensing system comprises a material having a matrix structure in which a plurality of sensing elements are embedded, the sensing elements having electron distribution and/or transport properties that change in response to a change in a physical or chemical property of the material. The sensing system further comprises a receiver, including an antenna, the receiver arranged to receive a source RF signal and a returned RF signal, the returned RF signal being received from the material. A change in the electron distribution and/or transport properties of the sensing elements cause the source RF signal to change, such that a change in a property of the material can be determined from the returned RF signal. A corresponding method of sensing a change in a property of a material is also provided.

Abstract: The invention relates to a method and to a device for sound emission analysis, wherein vibrations occurring during the use of a component, during the testing of a component or during the processing of a work piece by means of chipping, welding, forming, joining and/or separating or the like are registered and evaluated, wherein a vibration spectrum is recorded at different times or continuously and subjected to a multi-dimensional evaluation.

Abstract: A method of measuring mechanical resonance frequency using a servo driver including the steps of: having the servo driver work under a torque control mode, by applying in the servo driver a preset torque drive signal, the motor drives the mechanical components in a microvibration state; collecting actual speed signals of the motor to obtain the actual speed signal sequence of the motor; the actual speed signal sequence of the motor being passed in sequence through a certain number of band-pass filters having a fixed pass-band frequency and different center frequencies to obtain filtered speed signals; the filtered speed signal sequences output from each of the band-pass filters being changed into absolute values and then accumulated to obtain accumulation values; comparing the accumulation values obtained from the signal sequences output from the certain number of band-pass filters, and the center frequency of the band-pass filter corresponding to the largest accumulation value being the mechanical resonance

Abstract: A sensor device and method for monitoring interaction between a fluid and a wall includes includes a mechanical oscillator, a housing, and mechanical response sensing system. The mechanical oscillator includes a floating member formed from a first material configured to be susceptible to the fluid and a support member formed from a second material resistant to the fluid. The mechanical oscillator is affixed within the housing that is adaptably fastened to the structural component such that the floating member contacts the fluid. The mechanical response sensing system is configured to measure a mechanical characteristic of the combined floating member and the support member. The mechanical characteristic is configured to be indicative of the interaction between the fluid and the wall.

Abstract: A system for characterizing vibration of a rack structure having at least one hard disk drive disposed therein and a vibration exciter operatively associated with the rack structure includes one or more computers. The one or more computers are configured to command the vibration exciter to provide vibration input to the rack structure and to command a plurality of reads from the at least one hard disk drive such that, for each of the plurality of reads, data stored on the at least one hard disk drive is retrieved from the at least one hard disk drive. The one or more computers are also configured to obtain read rate information related to the plurality of reads and to identify at least one resonant frequency of the rack structure based on the read rate information.

Abstract: The present invention provides a vibration monitoring apparatus that monitors vibration of a jet pump disposed in a reactor pressure vessel using ultrasonic wave, including: an ultrasonic sensor that is attached to an outside the reactor pressure vessel, and transmits and receives ultrasonic wave; a reflector that is mounted on a surface of a riser pipe of the jet pump, and includes a planar reflecting surface that can reflect ultrasonic wave; and a signal processing unit that performs signal processing of the ultrasonic wave transmitted by the ultrasonic sensor, reflected by the reflecting surface of the reflector, and received by the ultrasonic sensor, and measures a vibration amplitude of the riser pipe and calculates a vibration waveform.

Abstract: The invention relates to a device for detecting the abrasive wear on components of water turbines, having a wearing body, and a measuring unit for detecting the wear on the wearing body. The invention is characterized in that the wearing body is arranged in the flow flowing through the water turbine, the wearing body is implemented as a sonotrode and is connected to an ultrasound generator, and the measuring unit is implemented to measure the resonant frequency of the sonotrode.

Abstract: This application generally relates to systems and methods of using Radio Frequency Identification (RFID) devices to remotely analyze objects and structures, and more particularly, this application relates to systems and methods of using RFID devices to remotely analyze properties and conditions of a surface of objects and structures.

Abstract: A single-input multi-output surface acoustic wave (“SAW”) device contains two or more output inter-digital transducers (“IDTs”) arranged in a longitudinal direction of a single input IDT. The detection sensitivity and reliability of the SAW device may be improved by eliminating the deviation and signal interference between multiple input IDTs.

Abstract: Acoustic volume indicators for determining liquid or gas volume within a container comprise a contactor to vibrate a container wall, a detector to receive vibration data from the container wall, a processor to convert vibration data to frequency information and compare the frequency information to characteristic container frequency vs. volume data to obtain the measured volume, and an indicator for displaying the measured volume. The processor may comprise a microprocessor disposed within a housing having lights that each represent a particular volume. The microprocessor is calibrated to provide an output signal to a light that indicates the container volume. The processor may comprise a computer and computer program that converts the data to frequency information, analyzes the frequency information to identify a peak frequency, compares the peak frequency to the characteristic frequency vs. volume data to determine the measured volume, and displays the measured volume on a video monitor.

Abstract: A measuring system including a sensor positioned to a belt to measure an oscillation or vibration of the belt based at least in part on a trigger threshold. Also, the measuring system may include a diagnostic tool coupled the sensor to receive a plurality of measurements of the oscillation or vibration of the belt, wherein the diagnostic tool may determine a tension of the belt based at least in part on an average of the plurality of measurements of the oscillation or vibration of the belt.

Abstract: In a processing apparatus having: moveable parts disposed to form a predetermined processing environment within a processing chamber in which a predetermined processing is performed on an object to be processed; and a control means for controlling the operation of each of the moveable parts, abnormality inclusive of deterioration with time of the moveable parts constituting the processing apparatus is made to be easily judged. There is provided a vibration detection means for detecting the waveforms of vibrations that occur accompanied by the operation of the moveable parts. When control is made from the control means in order to operate any one of the moveable parts, there are obtained event data corresponding to the control and the waveforms of vibrations of all the moveable parts that are operating simultaneously at the time in question.

Abstract: An acoustic apparatus adapted to operate in a gas filled space from a first side of an object to be measured for making a non-contact thickness measurement thereof includes an electro acoustic transducer, a transceiver coupled with the electro acoustic transducer and adapted to excite electro acoustic transducer to output an acoustic signal towards the object to be measured and receive an acoustic response signal therefrom, and a signal processor adapted to process the response signal and determine a thickness of the object. The electroacoustic transducer has a transducer-to-gas acoustic interface, and the transceiver is adapted to operate the electroacoustic transducer so as to emit into a gas filled gap an acoustic broad band pulse towards the object and to receive an acoustic resonance response signal in the acoustic response signal at a level that allows acquisition of the resonance response signal above a predetermined signal to noise level.