Abstract: A semiconductor device includes a first transistor including a first channel layer of a first conductivity type, a second transistor provided in parallel with the first transistor and including a second channel layer of a second conductivity type, and a third transistor stacked on the first and second transistors. The third transistor may include a gate insulating film including a ferroelectric material. The third transistor may include third channel layer and a gate electrode that are spaced apart from each other in a thickness direction with the gate insulating film therebetween.

Abstract: A microphone structure includes a backplate, a diaphragm, a sidewall and at least one airflow retaining wall. The backplate has a plurality of through holes. The diaphragm has at least one slot. The sidewall is located between the backplate and the diaphragm such that the sidewall, the diaphragm and the backplate collectively define a chamber. The at least one airflow retaining wall protrudes from the backplate and is located within the chamber. The airflow retaining wall is positioned between the through holes and the slot, and has an uneven width.

Abstract: A device for sensing mechanical vibrations of measurement objects that can be attached to measurement objects for this purpose comprises a housing, at least one vibration sensing element and at least two current sources. Here, the vibration sensing element and current sources are arranged inside housing, and current sources are arranged along at least one circle around the vibration sensing element, wherein identical angular distances are provided each time between adjacent current sources of the same circle. Based on this symmetric construction, the vibration behavior of the device is improved, which favorably affects the linear measurement behavior of the device.

Abstract: A wiring-disconnection detecting circuit includes a low-power voltage supply, a monitoring wiring, and a wiring-disconnection determiner. The low-power voltage supply supplies a low-power voltage to a low-power voltage wiring that extends along a periphery of a display panel in a normal operating mode of the display panel and supplies a test voltage to the low-power voltage wiring in a wiring-disconnection detecting mode of the display panel. The monitoring wiring includes a first end connected to one point of the low-power voltage wiring and a second end at which a feedback voltage corresponding to the test voltage is output in the wiring-disconnection detecting mode. The wiring-disconnection determiner receives the feedback voltage from the second end, measures an RC delay of the feedback voltage, and determines that the low-power voltage wiring is disconnected when the RC delay is larger than a predetermined reference value.

Abstract: A micro-electro-mechanical system (MEMS) electrostatic speaker that comprises an array of cells, wherein each cell comprises an upper stator, a membrane, a lower stator and supporting elements configured to support the upper stator, the membrane and the lower stator; wherein a distance between the upper stator and the lower stator of each cell is of microscopic scale.

Abstract: The present application provides a piezoelectric sensor, comprising: a base member, having an inverted conical structure at one end; a piezoelectric sensing element, disposed at the other end of the base member; a mass block, disposed on the piezoelectric sensing element; a charge amplifier, disposed above the mass block and electrically connected to the piezoelectric sensing element. The process of installing the piezoelectric sensor provided in the technical solution of the present application on the ground is simple and fast, and its low-frequency response sensitivity is high.

Abstract: A method for automatic diagnosis of a mechanical system of a group of mechanical systems sharing mechanical characteristics includes obtaining data relating to a vibration. The vibration-related data is acquired by a portable communications device configured to communicate with a remote processor. The processor automatically diagnoses the mechanical system by applying a relationship to the obtained vibration-related data. The relationship is based on sets of vibration-related data previously obtained from the mechanical systems. Each set of vibration-related data relates to vibrations of a mechanical system. The relationship is further based on sets of operation data previously obtained for mechanical systems of the group. Each set of operation data indicates a previous state of operation of a mechanical system. Each of the previous states of operation is associated with at least one of the previously obtained sets of vibration-related data.

Abstract: A centrifugal rotating machine includes a rotor in which impellers are attached to the axial ends of a rotating shaft that extends in the axial direction, said impellers rotating in a rotating direction around the rotating shaft so as to draw in fluid from an intake side in the axial direction and discharge fluid from the outer side thereof in the radial direction. According to this device for measuring dynamic characteristics of said centrifugal rotating machine, a cover for covering an impeller is attached to a region of the impeller other than an intake opening on the intake side thereof, and a magnetic force generator for vibrating the impeller by magnetic force is disposed so as to face the cover.

Abstract: A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being displaceable to have a displacement converted into a change in capacitance between the vibration electrode film and the back plate, an airflow channel defined by a gap between a protrusion integral with the back plate and a part of the vibration electrode film, the airflow channel being configured to increase an area of air flow when the vibration electrode film deforms under pressure to move relative to the protrusion integral with the back plate and relieve the pressure applied to the vibration electrode film to serve as a pressure relief channel, and an extension formed at a periphery of a hole in the vibration electrode film defining the pressure relief channel.

Abstract: A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being deformable to have a deformation converted into a change in capacitance between the vibration electrode film and the back plate, the vibration electrode film having a through-hole as a pressure relief hole, and a protrusion integral with and formed from the same member as the back plate, the protrusion being placeable in the pressure relief hole before the vibration electrode film deforms. The pressure relief hole and the protrusion have a gap therebetween defining an airflow channel as a pressure relief channel. The protrusion has a through-hole extending from a distal portion of the protrusion to a portion of the back plate opposite to the protrusion.

Abstract: The application describes improvements to (MEMS) transducers (100) having a flexible membrane (301) with a membrane electrode (302), especially where the membrane is crystalline or polycrystalline and the membrane electrode is metal or a metal alloy. Such transducers may typically include a back-plate having at least one back-plate layer (304) coupled to a back-plate electrode (303), with a plurality of holes (314) in the back-plate electrode corresponding to a plurality back-plate holes (312) through the back-plate. In embodiments of the invention the membrane electrode has at least one opening (313) in the membrane electrode wherein, at least part of the area of the opening corresponds to the area of at least one back-plate hole, in a direction normal to the membrane, and there is no hole in the flexible membrane at said opening in the membrane electrode. There may be a plurality of such openings. The openings effectively allow a reduction in the amount of membrane electrode material, e.g.

Abstract: Disclosed herein are a microelectromechanical systems (MEMS) microphone with a dual-back plate, and a method of manufacturing the same. The MEMS microphone according to an exemplary embodiment of the present invention includes: a substrate having a first back plate formed at a central portion thereof; a membrane plate disposed on first support parts formed at both sides on the substrate and vibrated depending on external sound pressure; and a second back plate disposed on second support parts formed at both sides of the membrane plate.

Abstract: A composite, analyte sensor includes a substrate; a micro- or nano-electro-mechanical (MEMS; NEMS) resonator that is coupled to the substrate at least two edge locations (i.e., it is at least doubly-clamped) of the resonator, wherein the resonator is in a statically-buckled state near a buckling transition point of the resonator; and a chemically-responsive substance covering at least a portion of the surface of the resonator that will undergo a conformational change upon exposure to a given analyte. The resonator may be a double-clamped, statically-buckled beam (or bridge), a multiply-clamped, statically-buckled dome (or crater), or other resonator geometry. The sensor may include two or more at least double-clamped, statically-buckled, composite MEMS or NEMS resonators each operating near a buckling transition point of the respective resonator, and each characterized by a different resonant frequency. A method for sensing an analyte in ambient air.

Abstract: An apparatus, method and system for contextually aware monitoring of a supply chain are disclosed. In some implementations, contextually aware monitoring can include monitoring of the supply chain tradelane with tracking devices including sensors for determining location, velocity, heading, vibration, acceleration (e.g., 3D acceleration), or any other sensor that can monitor the environment of the shipping container to provide contextual awareness. The contextual awareness can be enabled by geofencing and recursive algorithms, which allow dynamic modification of the tracking device behavior. Dynamic modification can reduce performance to save power (e.g., save battery usage) and lower costs. Dynamic modification can increase performance where it matters in the supply chain for improved reporting accuracy or frequency or recognition of supply chain events. Dynamic modification can adapt performance such as wireless communications to the region or location of the tracking device.

Abstract: A downhole sensor tool includes a sensor outsert coupled into an exterior pocket of the tool body. The sensor outsert is a pressure vessel with an exterior electrical connector coupled to the interior sensor. The sensor outsert contains a sensor, and is pressure-sealed about the sensor. The outsert includes an electrical connector coupled to the sensor. The electrical connector maintains the pressure seal of the outsert. The electrical connector may be a hermetic connector. The electrical connector can be coupled to an electrical connector or a hermetic connector of the tool body while maintaining the sealing of the pressure vessel.

Abstract: In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate; wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, and wherein a signal is generated by the movement of the mass element by means of the signal generator.

Abstract: A vibration sensor has a first substrate, a second substrate relatively movable by an external vibration while opposed to the first substrate, an electret group having a plurality of electrets that are arrayed in a relative movement direction on a side of one of surfaces of the first substrate, and an electrode group having a plurality of electrodes that are arrayed in the relative movement direction on a side of a surface of the second substrate. The surface of the second substrate is opposed to the electret group. A positional relationship between the electret group and the electrode group changes with a relative change in position of the first and second substrates by the external vibration to output an external vibration detection signal.

Abstract: A sensor arrangement (10) has a vibration sensor (11), which includes a cable (13) and is free of a metal housing, and a holding device (12), which is joined detachably to the vibration sensor (11) and is configured and arranged to protect mechanically and fix in place the vibration sensor (11).

Abstract: A method and device for leak detection and localization in at least a portion of a of fluid distribution system. At each of two or more locations, a position locator determines the location of the device and a vibration sensor generates a signal indicative of vibrations detected by the vibration sensor at the location. A processor calculates a parameter of the signal indicative of an average power of the signal at the location over a predetermined time period. For each location, the processor stores in a memory the location of the device and the value of calculated parameter, and then determines a location in the fluid distribution system where the calculated parameter has a maximum value satisfying a predetermined criterion.

Abstract: A method for providing functional checking of an inertial sensor, a first test signal having a first frequency being fed in at a test electrode of the inertial sensor for exciting a vibration of a vibration mass and a first response signal corresponding to the vibration mass is recorded, a second test signal having a second frequency different from the first frequency being fed in at the test electrode, a second response signal corresponding to the vibration mass being recorded, and the two response signals being evaluated. Also described is an inertial sensor.

Abstract: A movable plate is provided to a pendulum displaceable by external vibration. A fixed plate is provided to a position opposite to the movable plate. A displacement detector detects an electrostatic capacitance between the plates. A servo amplifier supplies to a force coil, a current in an amount associated with the detection result. A current circuit and a load resistor of the force coil convert the current into a detection signal and output the signal. When the movable plate and the fixed plates, which are conducted to each other, are contacted, the electrostatic capacitance between the plates is removed. A processor detects a change in the detection signal due to the removal of the electrostatic capacitance, and then determines that the plates are contacted.

Abstract: A vibration sensor comprises a reference mass, a resilient element supporting the reference mass, and a base supporting the resilient element, and further comprises a displacement sensor for determining the distance between the reference mass and the base. In accordance with the invention the vibration sensor comprises an actuator that is situated between the resilient element and the base, a second displacement sensor, and a controller for providing an output signal to the actuator.

Abstract: A circuit for a micromechanical structure-borne sound sensor and a method for operating this sensor, a voltage generator being used to apply voltages to at least one micromechanical element for recording the structure-borne sound, so that a change in the micromechanical element occurs. In addition, an evaluation circuit is provided, which records the at least one electrically recordable parameter of micromechanical element at a sampling rate and analyzes the same. This at least one parameter changes in response to the change. A clock-pulse generator is also provided for generating the sampling rate and for generating the clock pulse. A frequency generator is used for generating the clock pulse at least intermittently for the test operation, the frequency generator producing the clock pulse as a multiple or as a submultiple of the sampling rate.

Abstract: A movable plate is provided to a pendulum displaceable by external vibration. A fixed plate is provided to a position opposite to the movable plate. A displacement detector detects an electrostatic capacitance between the plates. A servo amplifier supplies to a force coil, a current in an amount associated with the detection result. A current circuit and a load resistor of the force coil convert the current into a detection signal and output the signal. When the movable plate and the fixed plates, which are conducted to each other, are contacted, the electrostatic capacitance between the plates is removed. A processor detects a change in the detection signal due to the removal of the electrostatic capacitance, and then determines that the plates are contacted.

Abstract: A vehicle sensor assembly includes a housing assembly and a printed circuit board having a plurality of electronic components provided thereon, mounted in the housing assembly. A connector interface is integrally formed with the housing assembly by a polymer overmold. The connector interface includes a shroud member. The shroud member is made of a polymer harder than the polymer overmold.

Abstract: An electrostatic capacitive vibration sensor has a substrate, a through-hole, a vibrating electrode plate, and a fixed electrode plate opposite the vibrating electrode plate. The fixed electrode plate is subjected to vibration to perform membrane oscillation. Pluralities of acoustic holes are made in the fixed electrode plate. The vibrating and fixed electrode plate are disposed on a surface side of the substrate such that an opening on the surface side of the through-hole is covered. A lower surface of an outer peripheral portion of the vibrating electrode plate is partially fixed to the substrate. A vent hole that communicates a surface side and a rear surface side of the vibrating electrode plate is made between the surface of the substrate and the lower surface of the vibrating electrode plate. In addition, the acoustic hole has a smaller opening area except at the outer peripheral portion.

Abstract: Reflective and slanted array channelized sensor arrays having a broadband source providing acoustic energy to a reflective or slanted array that reflects a portion of the incident signal to one or more sensing films wherein the response is measured.

Abstract: [Object] A vibration actuator having a simple small-sized structure capable of obtaining vibration enough to sense without use of suspension or the like is provided. [Solving Means] Amplitude of a moving part is restrained by a magnetic gap formed by cup-shaped yokes which are formed to interpose a magnet, and the moving part is vibrated without collision of the moving part with an inner wall of a fixed part. Therefore, magnetic force exerted between the moving part and the fixed part is allowed to function as a suspension. Therefore, it is possible to solve a problem, that is, reduction in the amplitude caused from the suspension. In addition, an air damper structure that air in upper and lower space of the moving part is used as a damper is provided, so that it is possible to obtain a wide frequency band.

Abstract: A vibration sensor includes casing, substrate, and elastic metal piece; two electrode areas separated by a separation zone being provided on the substrate; a vibration contact being provided on the separation zone; placement being executed by the metal piece on the substrate to contact or not to contact both electrode areas and produce connection or disconnection at the vibration contacts for selecting to turn on or off a power source and an electronic device connected to the vibration sensor and producing intermittent conduction by means of the sensor built in an object.

Abstract: A fastener integrated sensor includes a fastener, an overmold, an electronic sensor, a printed circuit board, a plurality of circuit components, a plurality of signal terminals, and a connector shroud. The fastener integrated sensor mounts rigidly to the vehicle body to capture and provide structural information during a crash event.

Abstract: It relates to a vibration sensor arrangement (1).

Abstract: A sensor for use in an interactive electronic device. The sensor is operative to generate a plurality of different output signals corresponding to respective positions of the sensor relative to a reference plane. The movement of the sensor relative to the reference plane facilitates the movement of one or more actuation balls of respective switches of the sensor, which in turn results in the generation of differing conditions or output signals corresponding to closed or open circuit conditions selectively created by the switches.

Abstract: A method of measuring vibration on an operational device. The method includes providing an operational device with a control unit and a vibration sensor comprised of a three axis accelerometer, a digital signal processor, and a communications transceiver. The digital signal processor takes the raw vibration data for each axis of the three axis accelerometer and applies a weighting function to the vibration data for each individual axis. Then stress level data associated with the vehicle operator is used to calculate the instantaneous contributions of the filtered data to the stress level data of the operator to determine instantaneous stress level data that has accumulated over a fixed time interval. After the fixed time interval, the digital signal processor calculates an increase of the stress level of the operator during the time interval to create stress data that is transmitted through a communications transceiver for display.

Abstract: An improved system for sensing ground motion is provided. The system generally comprises a shell and a case within the shell and connected by a suspension. The mass of the case is greater than the mass of the shell. An electrode within the shell detects relative motion between the shell and the case.

Abstract: A sensor for use in an interactive electronic device. The sensor is operative to generate a plurality of different output signals corresponding to respective positions of the sensor relative to a reference plane. The movement of the sensor relative to the reference plane facilitates the movement of one or more actuation balls of respective switches of the sensor, which in turn results in the generation of differing conditions or output signals corresponding to the particular pattern of electrical or conductive connection between a pad and terminals of the sensor facilitated by the switches thereof.

Abstract: A motion detector capable of sensing motion of an object includes a motion sensor secured to one of a plurality of surfaces of a fastener. The fastener is directly coupleable with the object.

Abstract: A sensor circuit, method, and system for conversion of a high-impedance, broad frequency range signal from a transducer into two low-impedance signals, one containing high-frequency components and another containing low-frequency components of the input signal. The transducer can be a piezoelectric (PE) transducer transforming motion or vibration into a high-impedance electrical signal with a broad frequency range. A low-frequency circuit output can contain the frequencies in the linear region of the transducer's frequency band. The high-frequency output can contain the natural resonance frequency of the transducer. The circuit includes a low-frequency filter amplifier module and a high-frequency filter amplifier module, both amplifier modules having negative feedback, high input impedance, and low output impedance; the outputs may include a DC bias. The circuit may also include a source follower isolating the filter amplifier modules from each other.

Abstract: A sensor for use in an interactive electronic device. The sensor comprises a housing having a side wall defining an inner surface, a top plate attached to the side wall and defining an inner surface, and a bottom plate attached to the side wall and also defining an inner surface. The inner surfaces of the side wall and the top and bottom plates collectively define an interior chamber. Disposed on the inner surface of the top plate is at least one top conductive pad, while disposed on the inner surface of the bottom plate is at least one bottom conductor pad. At least one switch partially extends into the interior chamber of the housing. Disposed within the interior chamber and rotatably connected to the housing is a trigger mechanism. The sensor is operative to generate a plurality of different conditions or states corresponding to respective positions of the housing relative to a reference plane.

Abstract: A microphone is enclosed in a semi-sound insulated housing with a jingle bell type device that generates sound in response to a very slight movement and/or vibration of the housing and/or a structure to which the housing is attached. The sensor's sound insulated housing in cooperation with the microphone's adjustable sound sensitivity circuitry is designed for making the microphone responsive exclusively to the internally generated sound of a jingle bell sound generating type device in response to a movement/vibration of the sensor.

Abstract: A vehicle maintenance device for acoustical and vibration sensing of an engine has a flexible wand member having a channeling running the length of the flexible wand member. A housing is coupled to a first end of the flexible wand member. A handle section is coupled to a second end of the flexible wand member. The handle section has an internal cavity section. Sensing circuitry is positioned in the maintenance device and is used for performing acoustical and vibration sensing of an engine of the vehicle.

Abstract: A device for the testing and monitoring of the function of a shock wave or pressure wave source is provided. The testing and monitoring device is characterized in that a passive non-linear transmission element transforms very short shock wave pulses received by it, the shock wave pulses typically having pulse durations lasting a few microseconds, into a considerably lower frequency range, whose oscillations are then sensed and evaluated.

Abstract: A vibration sensor for direct or indirect mounting on a vibrating component has a housing, a pressure sleeve having a central bore and a piezoelectric disk situated between two insulator disks and two contact disks, a seismic mass acting on the disks by way of a spring element. The spring element is designed with a ring shape and has a projection on its inside ring area. On the outside circumference of the pressure sleeve there is a recess which is designed to correspond to the projection and is formed to accommodate the projection on the spring element.

Abstract: A mass is levitated with respect to a base, at least one of which is comprised of a diamagnetic material, with the levitated mass also having a permanent magnetic property. A second permanent magnet is optionally configured such that it attracts the levitation mass away from the base to overcome gravitational force on the mass, thereby suspending the mass over the surface of the base. The mass is contained in a nonmagnetic, non-shielding and optionally optically-transparent housing so as to limit its excursion within a range of levitation positions. A position measurement means such as a laser interferometer, capacitance detector, or pickup coil is configured to measure positional deviations of the mass in response to incident pressure wave, the output of which being an electronic signal representing the pressure wave.

Abstract: An acceleration sensor for detecting an acceleration caused by an object oscillated in an oscillation direction, comprises a sensor casing having a center axis that is positioned in coaxial alignment with the oscillation direction to receive the acceleration, an oscillation plate and a piezoelectric element. The sensor casing has first and second circular inner surfaces opposing to and spaced apart along the center axis from each other at a first space distance, and a third cylindrical inner surface connected at one end with the first inner surface and at the other end with the second inner surface to define a cylindrical closed space. The oscillation plate is accommodated in the closed space of the sensor casing and has a central portion securely supported by the sensor casing and a peripheral portion integrally formed with the central portion and extending radially outwardly of the central portion.

Abstract: A vibration sensor having a pressure sleeve in which the pressure sleeve may be mounted under pressure on a component causing vibration. To detect a vibration signal, e.g., in the case of a knock sensor, a sensory system is held by a seismic mass above it on the outside of the pressure sleeve via a screw connection on a contact face of the pressure sleeve under an axial prestress in the direction of the sensory system. The seismic mass has an inside thread and may be screwed onto the sensory system to produce the axial prestress in the direction of the sensory system. A seismic mass or the sensory system has at least two opposing grooves running radially opposite one another, so that the plastic may enter an interior space between the sensory system and the pressure sleeve during extrusion through these grooves.

Abstract: A vibration sensor for direct or indirect mounting on a vibrating component such as an engine block. The vibration sensor has a housing and a pressure sleeve, which includes a central bore, a cylindrical area and a flange-like edge. A piezoelectric disk is situated between two contact disks. A seismic mass acts on piezoelectric disk by way of a spring element and a threaded ring. Insulating disks are situated on the sides of the contact disks facing away from the piezoelectric disk. The insulating disks have an inside diameter that is less than an outside diameter of the cylindrical area of the pressure sleeve.

Abstract: A vibration measuring apparatus (10) inlcudes an accelerometer (12) which is contained within a surface micromachined integrated chip, and signal processing means including a high pass filter (14), a low pass filter (16) and an integrator (18).

Abstract: A vibration pickup has a pressure sleeve mountable directly or indirectly on a component which causes vibrations, a sensor element which is held radially outwardly on the pressure sleeve with an axial pre-tensioning and is electrically contactable, a spring element holding the sensor element on the pressure sleeve with the axial pre-tensioning, the spring element including at least one ring-shaped spring which is held on an outer wall of the pressure sleeve so that an inner periphery of the spring abuts directly or indirectly on the pressure sleeve over at least three regions with a mechanical tensioning.

Abstract: A sensor for use in an interactive electronic device. The sensor comprises a base member having at least one recess formed therein which is partially defined by a peripheral wall thereof. Disposed within the peripheral wall of the base member is at least one switch. Also disposed within the recess is a trigger ball which is freely movable about the peripheral wall of the base member. The sensor is operative to generate at least two different states corresponding to respective positions of the sensor relative to a reference plane. The movement of the sensor relative to the reference plane facilitates the movement of the trigger ball within the recess, with one state being generated when the trigger ball is in contact with the switch and another state being generated when the trigger ball is not in contact with the switch.

Abstract: A vibration sensing device has a spherical shell, an insulating cushion inserted in a top portion of the spherical shell, a conductive probe rod passing through the insulating cushion, a conductive thread connected to an end of the conductive probe rod, and a conductive plumb ball connected to the conductive thread. A conductive free ball is disposed in the spherical shell.