Abstract: There are disclosed pressure-sensitive acoustic resonators and remote pressure sensing systems and methods. A pressure-sensitive acoustic resonator includes a conductor pattern formed on a planar surface of a non-piezoelectric substrate, the conductor pattern including an interdigital conductor pattern (ICP); and a diaphragm, the diaphragm being a portion of a plate of single-crystal piezoelectric material, the diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP.

Abstract: Apparatuses, methods, and systems for accurate measurement of the bulk modulus of a fluid in a fluid distribution system. An apparatus comprises a pipe, a first endcap, and a second endcap defining a cylindrical cavity, a means for filling the cylindrical cavity with a fluid sample, and a vibrational sensor coupled to an end plate of the second endcap and communicatively connected to a water property measurement system. The vibrational sensor is operable to, subsequent to the filling of the cylindrical cavity with the fluid sample, send a signal representative of sensed vibrations in the end plate of the second endcap to the water property measurement system while an end plate of the first endcap is excited. The water property measurement system computes a frequency response function from the signal and determines a bulk modulus value for the fluid sample based on the frequency response function.

Abstract: A stretchable sensor is provided. The stretchable sensor includes a first stretchable electrode including a first elastomer and a first conductor dispersed in the first elastomer, a stretchable active layer formed on the first stretchable electrode and including a third elastomer and an ion conductor dispersed in the third elastomer, and a second stretchable electrode formed on the stretchable active layer and including a second elastomer and a second conductor dispersed in the second elastomer. The stretchable sensor is effectively capable of sensing a temperature without being affected by strain and recognizing strain without being affected by temperature.

Abstract: A digital pressure sensor includes a substrate, a pressure sensing structure configured for measuring a pressure of an object to be measured, a signal processing chip configured for receiving a sensing signal of the pressure sensing structure, and a rubber cover having an opening through which the pressure is sensed. The pressure sensing structure and the signal processing chip are mounted on the substrate. The signal processing chip has an analog-digital conversion module that converts the sensing signal output by the pressure sensing structure into a digital signal and outputs the digital signal. The signal processing chip is electrically connected to the substrate. The substrate and the rubber cover are connected to each other and form a mounting cavity for holding the pressure sensing structure and the signal processing chip.

Abstract: A stretchable sensor is provided. The stretchable sensor includes a first stretchable electrode including a first elastomer and a first conductor dispersed in the first elastomer, a stretchable active layer formed on the first stretchable electrode and including a third elastomer and an ion conductor dispersed in the third elastomer, and a second stretchable electrode formed on the stretchable active layer and including a second elastomer and a second conductor dispersed in the second elastomer. The stretchable sensor is effectively capable of sensing a temperature without being affected by strain and recognizing strain without being affected by temperature.

Abstract: A mechanical connection is provided for a microelectromechanical and/or nanoelectromechanical device for measuring a variation in pressure. The device includes a fixed component extending in a main plane, a mobile component to move or deform in an out-of-plane direction under effect of a variation in pressure, and a detector of movement or deformation having at least one mobile element.

Abstract: A system for measuring intraocular pressure in an eye of a patient includes a sensor configured to be positioned in the eye of the patient. The sensor includes a sealed cavity, and a flexible membrane sealing a distal end of the sealed cavity, the flexible membrane configured to deflect responsive to the intraocular pressure in the eye of the patient. The system includes a detection device configured to be positioned external to the eye of the patient and optically coupled to the sensor, the detection device configured to detect an indication of change in length of the sealed cavity resulting from deflection of the flexible membrane.

Abstract: In some examples, a device comprises a proof mass and a support base configured to support the proof mass, wherein the proof mass is configured to displace in response to an acceleration of the device. The device also comprises a flexure configured to flexibly connect the proof mass to the support base. The device also comprises a strain-monitoring device configured to measure an amount of strain on the support base.

Abstract: A microelectromechanical transducer includes: a semiconductor body, having a first surface and a second surface opposite to one another; a first structural body, coupled to the first surface of the semiconductor body; a first sealed cavity between the semiconductor body and the first structural body; and an active area housed in the first sealed cavity, including at least two trenches and a sensor element between the trenches. The trenches extend along a vertical direction from the first surface towards the second surface of the semiconductor body.

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to a first surface, and a second window attached to a second surface, opposite to the first window. The cell body laterally surrounds a cavity, so that the first window and the second window are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cell body has recesses on opposing exterior sides of the cell body; each recess extends from the first surface to the second surface. Exterior portions of the cell body wall in the recesses are recessed from singulation surfaces on the cell body exterior. The cell body is formed by etching the cavity and the recesses concurrently through a body substrate. After the windows are attached, the sensor cell is singulated from the body substrate through the recesses.

Abstract: A sensor includes a first substrate and a second substrate. The first substrate includes a first side and an opposing second side, with the first side having a recess. The recess is defined by one or more side walls and a bottom wall. One or more of the side walls are substantially perpendicular to the bottom wall. A sensing diaphragm is defined between the second side of the first substrate and the bottom wall of the recess. A boss extends from the bottom wall of the recess. The second substrate may include a first side and an opposing second side, where the first side has a recess. The first side of the first substrate may be secured to the first side of the second substrate such that the recess in the first substrate faces and is in fluid communication with the recess in the second substrate.

Abstract: A cylindrical quartz crystal transducer that exhibits a low probability of twinning, and uses a combination of resonator signal inputs at the B-mode and C-mode frequencies to calculate resonator temperature. Crystallographic orientations are disclosed where combinations of B-mode and C-mode resonant frequencies exist that are sufficiently independent of pressure to enable accurate calculation of temperature under transient conditions. Such a transducer is usable at higher pressures and temperatures than conventional quartz pressure transducers. Furthermore, because the structure allows a choice of crystallographic orientation, other characteristics of the transducer, such as increased pressure sensitivity and activity dip-free operation, may be optimized by varying crystallographic orientation.

Abstract: According to various embodiments, a dynamic pressure sensor includes a substrate, a reference volume formed in the substrate, a deflectable membrane sealing the reference volume, a deflection sensing element coupled to the membrane and configured to measure a deflection of the membrane, and a ventilation hole configured to equalize an absolute pressure inside the reference volume with an absolute ambient pressure outside the reference volume.

Abstract: A tunable pressure transducer assembly that comprises a sensing element disposed within a housing, wherein the sensing element is adapted to output a signal substantially indicative of an applied pressure, and a filter assembly also disposed within the housing. In one example embodiment, a method includes receiving, at a filter assembly having a tube, a cap and a cavity defined by a housing, a pressure, wherein the cap is positioned to set a predetermined volume of the cavity and the tube is associated with an application of the pressure to the cavity, wherein the pressure includes a static pressure component and a dynamic pressure component; filtering, by the tube and the cavity, at least a portion of the dynamic pressure component of the pressure to obtain a filtered pressure; outputting, from the filter assembly, the filtered pressure; and wherein the filtered pressure is used to determine the static pressure component of the pressure.

Abstract: A sensor includes a first substrate and a second substrate. The first substrate includes a first side and an opposing second side, with the first side having a recess. The recess is defined by one or more side walls and a bottom wall. One or more of the side walls are substantially perpendicular to the bottom wall. A sensing diaphragm is defined between the second side of the first substrate and the bottom wall of the recess. A boss extends from the bottom wall of the recess. The second substrate may include a first side and an opposing second side, where the first side has a recess. The first side of the first substrate may be secured to the first side of the second substrate such that the recess in the first substrate faces and is in fluid communication with the recess in the second substrate.

Abstract: A multiple channel control system, pressure detection system, a method and a program are provided. A pressure detection system may include first and second pressure transducers having a common pressure source as an input. The first pressure transducer is a different type than the second pressure transducer. The system also includes a storage device configured to store a look up table having a calibrated relationship between temperature and pressure for the second pressure transducer. The system also includes a processor configured to periodically update the look up table based on pressure detected by the first pressure transducer when a condition is met.

Abstract: A process for the formation of a graphene membrane component includes arranging a graphene membrane in a relaxed condition of the graphene membrane on a surface of a supportive substrate. The graphene membrane extends across a cut-out with an opening at the surface of the supportive substrate. The graphene membrane is moreover arranged so that a first portion of the graphene membrane is arranged on the surface of the supportive substrate and a second portion of the graphene membrane is arranged over the opening of the cut-out. The process further includes tensioning of the second portion of the graphene membrane, in order to convert the second portion of the graphene membrane to a tensioned condition, so that the second portion of the graphene membrane is permanently in the tensioned condition in an operating temperature range of the graphene membrane component.

Abstract: A method for correcting offset drift in a sensor used in cyclic sensing is provided. The method includes: identifying a target value for a parameter of a signal between sensing cycles of the sensor; ascertaining a difference between a measured value for the signal and the target value; ascertaining a duration between the sensing cycles; using the difference and the duration, calculating a number of steps to attain the target value from the measured value; and adjusting the measured value by the number of steps to substantially agree with the target value. A pressure sensor is disclosed.

Abstract: A liquid medicament dispenser includes a housing and a pump carried by the housing, a reservoir applied to the housing and containing a pre-filled sterile liquid medicament, a sterile tubing set routed through the pump, a sterile administration line carried outside of the housing and coupled aseptically to the sterile tubing set in fluid communication, and an aseptic connector coupled to the reservoir and the sterile tubing set and changeable from a storage state to a use state. In the storage state, the aseptic connector prevents the liquid medicament in the reservoir from moving to the sterile tubing set. In the use state of the aseptic connector, the aseptic connector defines a sterile passageway for the flow of the liquid medicament from the reservoir to the sterile tubing set.

Abstract: Provided is a sensor node package where the breakage of a package member and/or a lid member due to thermal stress is reduced. The Young's modulus (220 GPa or less) of the package member, the thermal expansion coefficient (2 to 12 ppm/° C.) of the package member, the difference (5 ppm/° C. or less) in thermal expansion coefficient between the package member and the lid member, and the thickness (3 mm or less) of the lid member are adapted respectively to fall within predetermined ranges, thereby making it possible for the breakage of the package member and/or lid member due to thermal stress to be reduced effectively.

Abstract: A pressure sensor is provided which produces a measurement of the displacement and a measurement of a natural frequency of the diaphragm which are then combined to produce a compensated measurement of the displacement of the diaphragm, thereby substantially eliminating the dependence of the compensated displacement measurement on strain.

Abstract: Various exemplary embodiments relate to a device to measure carbon dioxide (CO2) levels, including a first oscillator group comprising a first sensor to measure air pressure, where the first sensor comprises a first sealed membrane, and where the first sealed membrane overlays a sealed first cavity; a second oscillator group including a second sensor to measure the resonance frequency of a second unsealed oscillating membrane, and where the second unsealed membrane overlays a second cavity in contact with the air outside of the second sensor; and a mixer accepting as input a first frequency measurement output from the first oscillator group and a second frequency measurement output from the second oscillator group, outputting the difference of the first frequency measurement and the second frequency measurement, and computing a carbon dioxide measurement based on the difference.

Abstract: A MEMS sensor comprises a vibrating sensing structure formed from a semiconductor substrate layer (50). The semiconductor substrate layer (50) is mounted on a pedestal comprising an electrically insulating substrate layer (52) bonded to the semiconductor substrate (50) to form a rectangular sensor chip. The pedestal further comprises an electrically insulating spacer layer (54) for mounting the sensor chip to a housing. The electrically insulating spacer layer (54) is octagonal. When the vibrating sensing structure is excited into a cos 2? vibration mode pair, the quadrature bias arising from any mode frequency split is not affected by changes in temperature as a result of the octagonal spacer layer (54).

Abstract: A tuned sensor system is disclosed. The tuned sensor system may receive an unsteady pressure from an external environment via a pressure inlet port. The pressure may have a first component that is substantially static and a second component that varies at a relatively high frequency. The pressure inlet port may conduct the unsteady pressure to a tuned path. The tuned path may filter the unsteady pressure, blocking the second component and communicating the first component, such as for use by a pressure sensor. The tuned sensor system may be compact and may include one or more turn in the tuned path so that the distance between the pressure inlet port and the sensor is less than the length of the tuned path. The tuned path may be entirely within the supporting structure of the tuned sensor system, easing installation, removal, and maintenance of the compact and modular system.

Abstract: A pressure sensor for sensing pressure of a fluid includes a diaphragm flexure and a crystal retaining flexure. The diaphragm flexure is designed to exert imparted force on the crystal retaining flexure. The imparted force is proportional to fluid pressure exerted on the diaphragm flexure. The pressure sensor further includes a resonator having opposing curved end portions connected to each other by a bridge section. A portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator. The crystal retaining flexure is designed to exert a load on the resonator. The load results from the imparted force exerted on the crystal retaining flexure by the diaphragm flexure.

Abstract: A pressure sensor for sensing pressure of a fluid includes a diaphragm flexure and a crystal retaining flexure. The diaphragm flexure is designed to exert imparted force on the crystal retaining flexure. The imparted force is proportional to fluid pressure exerted on the diaphragm flexure. The pressure sensor further includes a resonator having a round outer perimeter. A portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator. The crystal retaining flexure is designed to exert a load on the resonator. The load results from the imparted force exerted on the crystal retaining flexure by the diaphragm flexure.

Abstract: A pressure sensor for sensing pressure of a fluid includes a diaphragm separator and a flexure structure. The diaphragm separator exerts an imparted force on the flexure structure, where the imparted force is proportional to fluid pressure exerted on the flexure structure. The pressure sensor further includes a piezoelectric resonator. A first resonator interface section of the flexure structure is in contact with a first edge of the piezoelectric resonator. A second resonator interface section of the flexure structure is in contact with a second edge of the piezoelectric resonator. The first edge and the second edge are opposite narrow edges of the piezoelectric resonator. The flexure structure exerts a load proportional to the imparted force onto the first edge of the piezoelectric resonator.

Abstract: A capsule including two shells secured to each other so to be joined by a common closed surface and together defining, on both sides of the surface, a closed space delimited by the shells. At least one of the two shells is a flexible membrane configured to deform under effect of a physical magnitude. At least the membrane is made of at least partially amorphous metal alloy to optimize dimensions of the capsule.

Abstract: A process for manufacturing a wave energy emitter and a system for manufacturing the same.

Abstract: A capacitance based clearance probe has a partial sensor housing mounted on a surface and a sensor rod anchored in the partial sensor housing. The sensor rod extends into a sensor opening in the surface such that the partial sensor housing and the surface combine to operate as a complete sensor housing.

Abstract: A transparent piezoelectric sheet-with-a-frame includes a transparent piezoelectric sheet and a frame covering a peripheral edge portion of the transparent piezoelectric sheet. The transparent piezoelectric sheet includes one transparent piezoelectric film including an organic polymer, one first transparent plate electrode placed on a first main surface of the transparent piezoelectric film and having a first transparent plate electrode portion, and one second transparent plate electrode placed on a second main surface of the transparent piezoelectric film and having a second transparent plate electrode portion. An outline of the second transparent plate electrode portion is positioned inside an outline of the first transparent plate electrode portion as seen in a plan view. The outline of the first transparent plate electrode portion completely coincides with the frame, and the outline of the second transparent plate electrode portion does not at all coincide with the frame as seen in the plan view.

Abstract: A method of detecting a fault condition within an implantable medical pump comprises delivering therapeutic fluid using a medical pump comprising an actuation mechanism configured to be energized to provide a pump stroke, detecting a property associated with energizing the actuation mechanism, and determining whether the property associated with energizing the actuation mechanism indicates that a fault condition exists with the medical pump.

Abstract: A MEMS and/or NEMS pressure measurement device includes a deformable membrane suspended on a substrate, one of the faces of the membrane configured to be subjected to a pressure to be measured, a detector configured to detect deformation of the membrane and being provided at least partly on the substrate; and a non-deformable transmission device configured to transmit the deformation of the membrane to the detector, said transmission device rotatably hinged to the substrate about an axis substantially parallel to the plane of the membrane and being provided facing another face of the membrane opposite to said one of the faces, such that at least beyond a given pressure said transmission device and the membrane are movably integral with each other, and such that the transmission device transmits to the detector, in an amplified manner, the deformation or the stress from the deformation of the membrane.

Abstract: A portable, for example, a hand-held-type, X-ray measurement apparatus, wherein the vibration or hand-shaking of the X-ray measurement apparatus is detected by a vibration-detection sensor such as a distance sensor, a gyro sensor, or the like, and a measurement value for the X-ray intensity obtained using a two-dimensional X-ray detector is corrected on the basis of a variation quantity obtained using the vibration-detection sensor. The correction may be a correction related to an X-ray source, a correction related to an X-ray detector, a correction calculated using the CPU of a computer and a software program, or the like.

Abstract: A system and method of measuring a residence time in a gas-turbine engine is provided, whereby the method includes placing pressure sensors at a combustor entrance and at a turbine exit of the gas-turbine engine and measuring a combustor pressure at the combustor entrance and a turbine exit pressure at the turbine exit. The method further includes computing cross-spectrum functions between a combustor pressure sensor signal from the measured combustor pressure and a turbine exit pressure sensor signal from the measured turbine exit pressure, applying a linear curve fit to the cross-spectrum functions, and computing a post-combustion residence time from the linear curve fit.

Abstract: The invention relates to a pressure sensor including an electromagnetic resonator with waveguide having a dielectric material with a dielectric permittivity that varies with temperature. There is an excitation circuit configured to propagate an electromagnetic field through the resonator and a device for heating the resonator. There is also a device for detecting the electromagnetic resonant frequency of the resonator and a device for determining the pressure of the gas surrounding the sensor as a function of the detected resonant frequency of the resonator.

Abstract: A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided.

Abstract: A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm may include a sensor substrate made of silicon and including one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm, a base substrate made of silicon and including one surface directly bonded with the other surface of the sensor substrate, a concave portion formed in a portion of the base substrate bonding with the sensor substrate, substantially forming the diaphragm in the sensor substrate, and including a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements, one or more conducting holes, and a fluid.

Abstract: Thickness shear mode resonator pressure sensors include a housing having an outer dimension that is less than 0.575 inch (14.605 millimeters). Pressure transducers may include a quartz pressure sensor and a quartz reference sensor, wherein an electronics assembly of the pressure transducer is configured to drive at least one of the quartz pressure sensor and the quartz reference sensor at a frequency greater than 10 MHz. Transducer assemblies include an electronics assembly configured to drive at least one quartz sensor of the transducer assembly at a frequency greater than 10 MHz.

Abstract: A pressure measurement device for enabling non-intrusive pressure measurement of a first fluid present in a volume having at least one wall is provided. The device includes an enclosed space filled with a second fluid, a transmitter provided in the enclosed space and adapted to transmit a standing wave in a direction of the wall, means for varying a pressure of the second fluid in the enclosed space, a detector for measuring data related to a resonance of the wall and a processor for determining a characteristic change in the data.

Abstract: A vacuum sensor for sensing vacuum in a sealed enclosure is provided. The sealed enclosure includes active MEMS devices desired to be maintained in vacuum conditions. The vacuum sensor includes a motion beam anchored to an internal surface in the sealed enclosure. A driving electrode is disposed beneath the motion beam and a bias is supplied to cause the motion beam to deflect through electromotive force. A sensing electrode is also provided and detects capacitance between the sensing electrode disposed on the internal surface, and the motion beam. Capacitance changes as the gap between the motion beam and the sensing electrode changes. The amount of deflection is determined by the vacuum level in the sealed enclosure. The vacuum level in the sealed enclosure is thereby sensed by the sensing electrode.

Abstract: Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity.

Abstract: A MEMS pressure sensor includes a diaphragm portion that becomes displaced according to a pressure, and a resonator arranged on a main surface of the diaphragm portion. The resonator includes: a first fixed electrode provided on the main surface; and a drive electrode having a second fixed electrode provided on the main surface, a movable electrode spaced apart from the first fixed electrode, overlapping with the first fixed electrode, as viewed in a plan view seen from a normal direction to the main surface, and driven in a direction that intersects the main surface, and a supporting electrode supporting the movable electrode and connected to the second fixed electrode.

Abstract: A resonant sensor is disclosed which may be arranged to measure the pressure of a fluid. The resonant sensor comprises a diaphragm which may be exposed to a fluid; two supports provided on the diaphragm and a resonator having at least two beams with each beam being suspended between the two supports. The ends of each beam are attached to a corresponding support at more than one point. By attaching each end of the beams to a support at more than one point, the moments and reaction forces to which the support is subjected may be balanced so that distortion of the support and diaphragm due to vibration of the resonator beams is reduced. Consequently, the resonant sensor is able to provide more precise measurements.

Abstract: A physical quantity detector includes a diaphragm including a displacement part that is displaced under external pressure, a ring-shaped fixing part that holds an outer circumferential part of the diaphragm, a holding member having a projection part that projects from an inner circumference of the fixing part toward a center at one surface side of the diaphragm, a support fixed to the projection part, and a pressure-sensitive device having a first base part fixed to the displacement part, a second base part fixed to the support, and a pressure-sensitive part provided between the base parts.

Abstract: A cylindrical quartz crystal transducer that exhibits a low probability of twinning, and uses a combination of resonator signal inputs at the B-mode and C-mode frequencies to calculate resonator temperature. Crystallographic orientations are disclosed where combinations of B-mode and C-mode resonant frequencies exist that are sufficiently independent of pressure to enable accurate calculation of temperature under transient conditions. Such a transducer is usable at higher pressures and temperatures than conventional quartz pressure transducers. Furthermore, because the structure allows a choice of crystallographic orientation, other characteristics of the transducer, such as increased pressure sensitivity and activity dip-free operation, may be optimized by varying crystallographic orientation.

Abstract: As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.

Abstract: A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.

Abstract: A condition monitoring system for a pressure vessel includes at least one vibration monitoring probe coupled to at least one pressure vessel component. The system also includes at least one computing device that includes a memory device configured to store data associated with the at least one vibration monitoring probe. The computing device also includes at least one input channel configured to receive the data associated with the at least one vibration monitoring probe. The computing device further includes a processor coupled to the memory device and the at least one input channel. The processor is programmed to determine a deterioration of the material condition of the at least one pressure vessel component by comparing at least a portion of the data associated with the at least one vibration monitoring probe with predetermined vibration parameters.

Abstract: The present invention concerns a dynamic pressure sensor unit (5A) for a logging tool for hydrocarbon wells with a piezoelectric element (5) in a sensor sleeve (3). The piezoelectric element (5) is a tubular element with an inner and an outer diameter. The sensor sleeve (3) has an inner cylindrical area with an inner diameter greater than the outer diameter of the tubular piezoelectric element (5). The piezoelectric element is situated in the inner cylindrical area of the sensor sleeve (3). A gap (12) with a gap thickness is formed between the inner cylindrical area of the sensor sleeve (3), defining an annular volume. The gap is filled with a noise transmitting liquid.