Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

Abstract: The invention includes differential pressure transducer assembly systems and methods in which headers are configured with header pins that extend perpendicular with respect to an axis of the assembly and through header sidewalls, enabling a compact configuration, ease of assembly, enhanced reliability and/or redundancy. Channels and ports defined in a housing portion of the assembly are configured to enable the use of substantially straight tubing sections for routing main and/or reference pressures to one or more differential sensing elements mounted on the headers. Two or more headers with associated sensing elements can be stacked to provide redundant differential pressure sensing.

Abstract: A piezoelectric sensor includes a substrate, a meta-membrane adhered to the substrate, and a piezoelectric element adhered to the meta-membrane. The substrate includes a support frame which laterally surrounds and partly defines a recess and a cover film which overlies and partly defines the recess. The support frame supports the cover film along an entire periphery of the cover film. The meta-membrane is adhered to the cover film of the substrate. In accordance with one embodiment, the meta-membrane has an auxetic bi-axial kirigami honeycomb structure. In accordance with another embodiment, the meta-membrane has an auxetic hexagonal honeycomb structure. The meta-membrane is adhered to the substrate and to the piezoelectric element using elastic glue. In one proposed implementation, the substrate and meta-membrane are made of polycarbonate and the piezoelectric element comprises a piezoelectric substrate made of polyvinylidene fluoride.

Abstract: A temperature compensated differential pressure system is provided. The system includes a pair of flanges affixed together each having a flange diaphragm therein, wherein a plurality of capillary tubes extends between the pair of flanges and a pair of opposed remote diaphragm housings. The remote diaphragm housings include a remote diaphragm therein, wherein the remote diaphragm displaces a fill fluid in pressure capillaries to displace each flange diaphragm to detect a differential pressure between each location of the remote diaphragm housings. A compensating capillary extends from the remote diaphragm housings to an opposing flange diaphragm, wherein the compensating capillary is not in operable communication with the remote diaphragms. As such, any fluctuation in fill fluid volume of the compensating capillaries due to temperature fluctuations is applied to an opposing flange diaphragm to cancel temperature effects from the differential pressure determination.

Abstract: A metallic pressure measuring cell having a base body, a metallic membrane situated and a pressure sensor situated in a sensor chamber of the base body, wherein the pressure on the membrane is transmitted to the pressure sensor by a connecting channel formed between a membrane chamber and a sensor chamber, wherein the chambers and connecting channel are filled with a pressure transmitting medium.

Abstract: A pressure and temperature measuring device with improved compact design and installation having a base (1) with an elongated geometry, arranged according to the longitudinal axis (A) inside the casing (16) and having a partition (5), a back (18), a platform (19) and a plinth (10); the partition (5) has an inner plane (5?) oriented towards the back (18) and parallel to the longitudinal axis (A) and an outer plane (5?) that forms an acute angle with the inner plane (5?), the back (18), the platform (19) and the inner plane (5?) of the partition (5) define a slot (17) and receives the electronic circuit board (3), the outer plane (5?) of the partition (5) defines a support surface to support together with the plinth (10) for the pressure-sensitive element (2), the outer surface (5?) of the partition (5) having an opening (7) that gives way to the conduit (8).

Abstract: The invention includes differential pressure transducer assembly systems and methods in which headers are configured with header pins that extend perpendicular with respect to an axis of the assembly and through header sidewalls, enabling a compact configuration, ease of assembly, enhanced reliability and/or redundancy. Channels and ports defined in a housing portion of the assembly are configured to enable the use of substantially straight tubing sections for routing main and/or reference pressures to one or more differential sensing elements mounted on the headers. Two or more headers with associated sensing elements can be stacked to provide redundant differential pressure sensing.

Abstract: A layered body includes: a polymer film (A), the polymer film (A) including an organic piezoelectric material having a weight average molecular weight of from 50,000 to 1,000,000, having a standardized molecular orientation MORc at a reference thickness of 50 ?m of from 1.0 to 15.0 as measured by a microwave transmission molecular orientation analyzer, having a degree of crystallinity of from 20% to 80% as measured by a DSC method, and having an internal haze of 50% or less with respect to visible light; and a peelable protective film (B) that contacts one main face of the polymer film (A). The maximum indentation depth h max on a face of the protective film (B) that contacts the polymer film (A) is from 53 nm to 100 nm as measured by a nanoindentation method.

Abstract: The invention provides a large-amplitude vertical-torsional coupled free vibration device, which belongs to the technical field of vertical-torsional coupled free vibration device for wind tunnel test. The gear blocks are consolidated at both ends of the beam. The screws, beam, and the gear blocks are fixed on the model, and they can fulfil the vertical-torsional coupled free vibration. The toothed plate is attached to the sliding block that iteratively moving along the vertical guide rail which is fixed to the ground. The vertical springs attached to the sliding blocks provide both vertical and torsional linear stiffness for the suspension vibration system. The springs only have vertical linear tensile deformations without any lateral tilt, which ensures the linear vertical and torsional stiffness of the model, and the lateral freedom is effectively restrained.

Abstract: A sensor system having a sensor element, a housing in which sensor element is situated and which seals the sensor element from the outside world, at least one first electrical contact element which is electrically coupled with the sensor element; a plug connector, which has at least one second electrical contact element, and at least one spring element which is coupled between the at least one second electrical contact element and the at least one first electrical contact element for electrical contacting, so that the sensor element is electrically connected to the second electrical contact element of the plug connector.

Abstract: A complex device includes: a substrate having a thick portion, a cavity and a membrane for bridging the cavity; and multiple piezoelectric elements having a lower electrode, a piezoelectric film and an upper electrode. A part of the piezoelectric elements has a projecting portion arranged on the upper electrode. The part of piezoelectric elements (30) provides a vertical pressure detection element. The piezoelectric elements further have an ultrasonic element other than the vertical pressure detection element. The ultrasonic element is arranged over at least the cavity of the substrate in a horizontal direction.

Abstract: A transducer baseplate includes a base, a protrusion extending from the base along a longitudinal axis, a pair of opposed transducer receptacles defined within the protrusion, and respective pressure plena. The pressure plena are separated by a plenum wall, each plenum being in fluid connection with an area external to the protrusion through a respective pressure line. The pressure lines provide a direct fluid path to their respective receptacles.

Abstract: A capacitor for use in sensors includes opposed first and second capacitor plates, wherein the second capacitor plate is mounted to the first capacitor plate by a flexible attachment. The flexible attachment is configured and adapted so that flexure of the attachment causes a change in the spacing between the first and second capacitor plates to cause a change in the capacitance thereacross.

Abstract: A fluidic chip device configured for processing a fluid, wherein the fluidic chip device comprises a plurality of layers laminated to one another, wherein at least a part of the layers comprises a patterned section of an alternating sequence of bars and fluidic channels for conducting the fluid under pressure, the patterned section being configured for being displaceable in response to the pressure, and a pressure detector responding to the displacement of the patterned section by generating a detector signal being indicative of a value of the pressure.

Abstract: A microelectromechanical pressure sensor structure comprises a planar base, side walls and a diaphragm plate, attached to each other to form a hermetically closed gap that provides a reference pressure. The diaphragm plate extends along a planar inner surface on top of the side walls, and has an outer surface on the opposite side of the diaphragm plate. At least part of the outer surface of the diaphragm plate forms a planar part that includes a recess, a depth of which extends parallel to the side walls and is less than the nominal thickness of the diaphragm. A large part of reasons causing the different bending of the diaphragm and the underlying structures can be eliminated with one or more recesses arranged to the pressure sensor structure.

Abstract: A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.

Abstract: The invention relates to a micromechanical structure for measuring or detecting a mechanical quantity or a dynamic quantity, including a deformable membrane (20) and a supporting substrate (10), the membrane (20) including a first portion (20a) and a second portion (20b) surrounded by the first portion (20a), the second portion (20b) having a thickness that is less than the thickness of the first portion (20a), the membrane (20) being suspended above the supporting substrate (10) and thus defining a free space (30), said micromechanical structure comprising in addition a lower abutment (21) for limiting the deformations of the membrane (20), said lower abutment (21) being arranged above the supporting substrate (10) and extending into the free space (30) from said supporting substrate (10) toward the membrane (20), characterized in that the lower abutment (21) comprises islets (101-108) that extend into the free space (30) toward the membrane (20) from a flat surface of the lower abutment (21), the islets (10

Abstract: A device for filtering untreated air in an air supply of a clean room of a beverage treatment system, having more than one filter element and a pressure differential measuring assembly, in which the filter elements are connected to the pressure differential measuring assembly for pressure measurement such that a respective first pressure pick-up is arranged upstream of the respective filter element and a second pressure pick-up.

Abstract: A capacitive pressure sensing semiconductor device is provided, which has pressure resistance against pressure applied by a pressing member and can detect the pressure surely and efficiently. The pressure sensing semiconductor device includes a pressure detecting part, which detects pressure as a change in capacitance, and a package that receives the pressure detecting part within. The pressure detecting part includes a first electrode and a second electrode disposed to oppose the first electrode, with a determined distance therebetween. Capacitance is formed between the first electrode and the second electrode, and changes according to a change in said distance caused by pressure transmitted to the first electrode by a pressing member. The package also includes a pressure transmitting member that transmits, to the first electrode of the pressure detecting part, the pressure applied by the pressing member.

Abstract: An example embodiment of the present invention provides a differential piezoresistive sensor assembly and method of manufacturing and using the same, such that a first and second pressure are applied from a single side there enabling easier installation in many pressure assemblies.

Abstract: A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.

Abstract: A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.

Abstract: Systems and methods of signal transmission and measuring for sensors employing a transmission medium are provided. In one embodiment, a method may comprise measuring a first monitored condition to generate a first monitored condition signal; converting the first monitored condition signal to a first frequency modulated signal having a first frequency; generating a second frequency modulated signal having a reference frequency; transmitting the first frequency modulated signal and the second frequency modulated signal using time division multiplexing; and wherein a first ratio of the first frequency and the reference frequency is associated with the first pressure.

Abstract: There is provided a pressure measuring instrument including: a detecting unit including the reference pressure chamber therein and formed in a cylindrical shape, the diaphragm being disposed inside the detecting unit; a communicating unit for providing communication between the diaphragm and the measurement pressure chamber, and formed in a circular tube shape having an inner diameter smaller than an inner diameter of the detecting unit; and an annular flow-path forming unit disposed between the detecting unit and the communicating unit, and configured to form a substantially annular path. The communicating unit introduces a gas of the measurement pressure chamber into the substantially annular path. The annular flow-path forming unit allows the gas introduced from the communicating unit to pass through the substantially annular path and to supply the passing gas to a side surface of the diaphragm.

Abstract: A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.

Abstract: An amplifier-embedded pressure sensor includes: a pressure-detecting element which detects the differential pressure between the fluid and the space where the pipe including a fluid passage of the fluid is installed, and outputs the pressure signal; an amplifier circuit board having an amplifier circuit for amplifying the pressure signal; a housing to which the pressure-detecting element is fixed; and a separation part which is fixed to the housing and separates a space inside the housing into a first space where the pressure-detecting element is disposed and a second space where the amplifier circuit board is disposed. The housing includes an inflow port for letting cooling gas for cooling the amplifier circuit board flow into the second space and a discharge port for discharging the cooling gas from the second space.

Abstract: A pressure difference measurement transmitter comprising: a pressure difference sensor; a first process connection flange; and a second process connection flange. The pressure difference sensor is clamped between the first process connection flange and the second process connection flange, and between a first and a second seal. The pressure difference sensor is contactable by a first media pressure via the first process connection flange and by a second media pressure via the second process connection flange; and a housing, which contains an electronic evaluating circuit. The housing has an input opening, through which the evaluating circuit is connected to the pressure difference sensor; and wherein the housing has at least one appendage, which extends between the first and the second process connection flanges; wherein the appendage is clamped in parallel with the pressure difference sensor between the flanges, so that the housing is held by the clamped appendage.

Abstract: A method, device and system for a gage pressure transducer including the making thereof are provided. In one embodiment, a method comprises receiving, at a first diaphragm, a first pressure, wherein the first diaphragm is composed of metal; transferring, from the first diaphragm, to a first sensor, the first pressure using a first oil region, wherein the first oil region is disposed between the first diaphragm and the first sensor; receiving, at the first sensor, the first pressure; measuring, by the first sensor, the first pressure to generate a first pressure signal; and outputting, from the first sensor, to a first header pin, the first pressure signal, wherein the first header pin is electrically coupled to the first sensor using a first conductive glass frit.

Abstract: The present disclosure relates to sensors including pressure sensors, humidity sensors, flow sensors, etc. In some cases, a sensor unit subassembly for installation in or use with a pressure sensor housing may include at least one pressure sensor signal output terminal supported by a printed circuit board, a pressure input port, and a pressure sense element secured relative to one or more printed circuit boards. The printed circuit board(s) may include circuitry configured to format pressure output signals provided by the pressure sense element into a particularly chosen output format, and may provide the formatted pressure output signal(s) to an attached electrical connector of the pressure sensor housing. In some cases, the sensor unit subassemblies can be mixed with a multitude of different electrical connectors and/or with a multitude of different port connections to from a wide array of pressure sensor assemblies.

Abstract: A differential pressure and pressure transmitting device includes a pressure detecting portion and a rupture state detecting portion. The pressure detecting portion includes a first diaphragm that receives indirectly a pressure of a process fluid and that transmits a pressure, a second diaphragm that receives directly a pressure of a process fluid, and an insulating fluid-filled portion positioned between the first and second diaphragms and filled with an insulating fluid, and provided with a pair of electrodes on a periphery thereof. The rupture state detecting portion applies an electropotential to the electrodes to measure the electrical conductivity of the insulating fluid and to monitor for a rupture of a diaphragm.

Abstract: A process variable transmitter for measuring a pressure of a process fluid includes a first inlet configured to couple to a first process pressure and a second inlet configured to couple to a second process pressure. A differential pressure sensor couples to the first and second inlets and provides an output related to a differential pressure between the first pressure and the second pressure. A first pressure sensor couples to the first inlet and provides an output related to the first pressure. Transmitter circuitry provides a transmitter output based upon the output from the differential pressure sensor and further provides enhanced functionality based upon the output from the first pressure sensor.

Abstract: A single wire interface for a transducer transmits the transducer output as a frequency modulated signal over one single wire during one interval. During a second interval a reference signal is transmitted as a frequency modulated signal. Both the transducer output and the reference signal output are processed by the same circuitry during the respective intervals to provide both frequency modulated signals. The frequencies of the two signals are measured and then the ratio of the two periods which is the reciprocal of the two frequencies is calculated. This ratio is the direct measure of the output of the transducer and when provided eliminates sources of errors.

Abstract: Apparatus and related fabrication methods are provided for a sensor device. An exemplary sensor device includes a first structure including a first sensing arrangement and a second sensing arrangement formed therein and a second structure affixed to the first structure. The second structure includes a cavity aligned with the first sensing arrangement to provide a first reference pressure on a first side of the first sensing arrangement and an opening aligned with the second sensing arrangement to expose the first side of the second sensing arrangement to an ambient pressure.

Abstract: A pressure sensor includes a detecting circuit configured to detect the difference between outputs from a first pressure variation sensor and a second pressure variation sensor. The first pressure variation sensor and the second pressure variation sensor have a lower limit frequency which provides sensitivity equal to or higher than a predetermined value as the effectively same frequency characteristics in accordance at least with a capacity of a cavity or a distance of a gap. The gap of the first pressure variation sensor communicates the exterior of the pressure sensor and the interior of the cavity of the first pressure variation sensor, and the gap of the second pressure variation sensor communicates the interior of the cavity of the first pressure variation sensor and the interior of the cavity of the second pressure variation sensor.

Abstract: A pressure sensor includes a detecting circuit configured to detect the difference between outputs from a first pressure variation sensor and a second pressure variation sensor. The first pressure variation sensor and the second pressure variation sensor have the same distance of a gap, and have frequency characteristics different from each other, that is, cutoff frequencies different from each other by setting the value of a capacity of the cavity of the first pressure variation sensor to be larger than the value of a capacity of the cavity of the second pressure variation sensor.

Abstract: A pressure sensor includes: a supporting body which has an opening; a pressure detecting portion which includes a supporting film provided on the supporting body and having a diaphragm portion closing the opening, and a piezoelectric body provided on the diaphragm portion and deflecting to output an electric signal; a frame body which has, on the pressure detecting portion, a cylindrical cavity along a film thickness direction of the supporting film, and is formed, in plan view when viewed from the film thickness direction of the supporting film, at a position where a cylindrical inner peripheral wall of the cavity overlaps with the opening, or outside of the opening; a sealing film which closes the frame body; and a silicone oil which is filled in an inner space formed of the cylindrical inner peripheral wall of the cavity, the sealing film, and the pressure detecting portion.

Abstract: An apparatus for determining and/or monitoring pressure. The apparatus comprises at least one pressure transducer, which transduces pressure into an electrical signal. The invention includes the features that at least one acoustic sensor is provided, that the acoustic sensor registers acoustic signals and transduces such into electrical signals, and that the acoustic sensor is mechanically and/or acoustically coupled with the pressure transducer.

Abstract: A method for determining a minimum tension compensation stress which will have a membrane of a thickness of less than or equal to one micrometer, secured to a frame, having, in the absence of any external stress, a desired deflection. The membrane can be made as planar as possible in absence of any external stress, and its thickness can be less than or equal to one micrometer.

Abstract: The invention relates to a fluid pressure sensing device comprising a pressure sensing transducer having a support structure and a diaphragm attached to said support structure, the diaphragm having a fluid facing side. A housing has a transducer receiving cavity defined by a bottom wall and a housing sidewall extending upwardly from the bottom wall. The bottom wall is formed with a fluid pressure receiving recess. A fluid pressure port is formed in the housing in communication with the recess. The diaphragm is positioned between the support structure and the fluid pressure receiving recess and a seal material around a support structure sidewall fixes the pressure sensing transducer in the housing and provides a hermetic seal.

Abstract: A device for measuring fluid pressure, includes at least one flexible layer having a first surface adapted for fixing the layer to a structure, and having a second surface having at least one recess; at least one pressure sensor, provided in the at least one recess; and at least two wires connected to the at least one pressure sensor for connecting the at least one pressure sensor to a signal receiving unit. Further, a method for measuring fluid pressure is provided.

Abstract: A process transmitter for measuring a process variable comprises a sensor module and a static pressure coupling. The sensor module comprises a sensor for measuring a process variable of an industrial process and for generating a sensor signal. The sensor includes a hydraulic fluid inlet within the module. The static pressure coupling is connected to the sensor module and comprises a isolator fitting, a process fluid coupling and an isolation diaphragm. The isolator fitting is inserted into the sensor module and connected to the hydraulic fluid inlet. The process fluid coupling is joined to the isolator fitting. The isolation diaphragm is positioned between the isolator fitting and the process fluid coupling outside of the sensor module.

Abstract: A pressure measuring cell for detecting the pressure prevailing in an adjoining medium, comprising an elastic membrane on which a first electromechanical transducer is arranged, which supplies a first pressure-dependent output signal is provided. According to the invention, a second electromechanical transducer, which supplies a second pressure-dependent output signal, is arranged on the membrane wherein the two transducers are arranged such that with an elastically reversible deformation of the membrane the output signals have a first pressure characteristic, and after an irreversible deformation of the membrane due to an increased pressure load same have a significantly different second pressure characteristic.

Abstract: A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.

Abstract: A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.

Abstract: The present disclosure relates to sensors including pressure sensors, humidity sensors, flow sensors, etc. In some cases, a sensor unit subassembly for installation in or use with a pressure sensor housing may include at least one pressure sensor signal output terminal supported by a printed circuit board, a pressure input port, and a pressure sense element secured relative to one or more printed circuit boards. The printed circuit board(s) may include circuitry configured to format pressure output signals provided by the pressure sense element into a particularly chosen output format, and may provide the formatted pressure output signal(s) to an attached electrical connector of the pressure sensor housing. In some cases, the sensor unit subassemblies can be mixed with a multitude of different electrical connectors and/or with a multitude of different port connections to from a wide array of pressure sensor assemblies.

Abstract: A measurement system for measuring a pressure of a fluid is provided. The measurement system includes a sensing module and a liquid electrical circuit. The sensing module includes a flexible film and a liquid electronic device. The flexible film has a first side and a second side opposite to the first side. The fluid is disposed on the first side of the flexible film, and the liquid electronic device is disposed on the second side of the flexible film. The flexible film converts the pressure of the fluid into a parameter of the liquid electronic device. The liquid electrical circuit is electrically coupled to the liquid electronic device. The liquid electronic device and the liquid electrical circuit output a measurement signal corresponding to the parameter in response to an applied electrical energy. A manufacture method of a measurement system is also provided.

Abstract: An oil pressure includes a housing, a pressure sensing unit mounted in the housing and a first signal generator. Because the pressure sensing unit is provided with a pusher and an elastic piece that is able to uniformly receive a force exerted from the pusher such that the pusher can uniformly drive a swing member of the first signal generator, the oil pressure sensor can output an accurate oil pressure signal.

Abstract: A device for measuring environmental forces, and a method for fabricating the same, is disclosed that comprises a device wafer, the device wafer comprising a first device layer separated from a second device layer by a first insulation layer. The first device wafer is bonded to an etched substrate wafer to create a suspended diaphragm and boss, the flexure of which is determined by an embedded sensing element.

Abstract: A diaphragm for a pressure sensor includes: a central section serving as a diaphragm body, the central section including: an external surface deformed upon receipt of an external pressure; and an internal surface transmitting a force to a pressure sensitive element inside a housing of the pressure sensor; a peripheral section that is an exterior of the central section and welded to an outer circumference of a pressure input orifice that is provided to the housing; and a step wall provided between the central section and the peripheral section. The central section and the peripheral section are integrally and concentrically provided. The diaphragm seals the pressure input orifice.

Abstract: The pressure sensor of the invention includes at least one platform, at least one measuring membrane 30, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bed 21 has a glass layer 20, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membrane 30 in the case of overload, characterized in that the contour of the membrane bed 21 is obtainable by a sagging