Abstract: A robot system with robot specific effects. Reconstructable for other fields of activities with few manipulations by the users themselfs. This objective is achieved in accordance with the present invention by standard robot-block parts of nearly the similar design for the installation of multiblock-robots with self operating walk, drive and manipulation faculties, with horizontally and vertically fitting, rotation flange plug connections, with turntables and driving motors and with current and communication channels which are leading through the center of the rotation plug connections and which provide current and communication supply lines and current and communication control lines. These lines are leaded to inside and outside slip-ring and induction units and to equipment components, composed of accumulators, sensors and electronic boards inside the block chamber.

Abstract: The apparatus includes a static base, a platform, a first arm assembly, and a second arm assembly. The first arm assembly has a first terminal portion pivotally connected at a first pivot point to a first portion of the static base and a second terminal portion pivotally connected to the platform at a second pivot point. The first arm assembly is so constructed to permit changes in the distance between the first and second pivot points, but is concomitantly constrained to movement in a desired first plane. The second arm assembly has a respective first terminal portion pivotally connected at a third pivot point to a second portion of the static base and a respective second terminal portion pivotally connected to the platform at a fourth pivot point. The second arm assembly is so constructed to permit changes in the distance between the third and fourth pivot points but is constrained to movement in a desired second plane which is angularly disposed from the first plane.

Abstract: A magnetic drive device comprises a hollow cylindrical outer rotor, an inner rotor inserted in the outer rotor so as to proejct at least at one end thereof beyond an end of the outer rotor and supported rotatably relative to the outer rotor, two magnetic bearings arranged around the outer rotor and spaced apart axially thereof for holding the outer rotor radially thereof, a first magnetic coupling having a drive portion disposed around the outer rotor for transmitting a torque to the outer rotor, and a second magnetic coupling having a drive portion disposed around the inner rotor at a portion thereof projecting beyond the end of the outer rotor for transmitting a torque to the inner rotor.

Abstract: The casing of an arm of an articulated robot has a shell-like structure which serves a load-bearing function and houses a module containing the motor unit and related transmission.

Abstract: A coupler body 12 with a socket 44 therein is attached to nuclear stream generator tools to be mated with an arm 22 of a remotely controlled manipulator. A plug 16 for insertion in socket 44 is mounted with a ball detent lock actuating air cylinder 18 on L-shaped bracket 20 attached to the end of arm 22. Cam surfaces 62 on body 12 and 64 on bracket 20 align the plug 16 and socket 44 for insertion to mate and couple the tools and arm 22.

Abstract: An apparatus for maintaining the angular position of a platform during motion of the platform in any direction relative to a base. The apparatus includes a static base, a platform, a first arm assembly, a second arm assembly and a third arm assembly. Each arm assembly has one terminal portion connected to a portion of the static base, by a universal joint, and another terminal portion, connected to the platform, by another universal joint. Each arm assembly is so constructed to permit changes in the distance between its universal joints, but concomitantly removes a degree of angular freedom from the platform. The angular position of the platform is thereby maintained when the distance between the respective universal joints is changed.

Abstract: A digitally controlled industrial robot comprises a set of unitized and integrated joint drive modules which can be assembled in series to form an arm. The joints are of two basic types, pitch joints and roll joints, with the roll joints providing rotation about the longitudinal axis of the manipulator and the pitch joints providing rotation about axes which are substantially perpendicular to and offset from the roll joint axes. Any number of joints may be assembled to comprise the manipulator, permitting the configuration of a kinematically redundant manipulator. A servocontrol derives feedback from sensing the motive force on a driven member and compensates the drive signal accordingly. More particularly, the torque exerted on each roll and pitch joint is measured and used for feedback to provide stability and optimum bandwidth for the servomechanism.

Abstract: The present invention relates to an arrangement for bringing the tool-carrying end (2) of a robot beam (4) to one desired position of a plurality of possible, predetermined positions, and a workpiece-supporting table-assembly for use with a robot beam steered by the arrangement. The beam-positioning arrangement comprises two beam-holding devices (5, 6) which are intended to support the beam (4) at given mutually-space locations along its length and which are journalled to the beam at the aforementioned locations. At least one of the beam-holding devices (6) is slideably mounted for movement along a first elongated beam-positioning arm (10) and one end of the first arm is pivotally connected to a stand (12) which is moveable along a fixed path. The arrangement is such that pivotal movement of the first arm (10) and movement of the at least one holding-device (6) along its arm will result in a commensurate change in the positional setting of the tool-carrying end of the beam.

Abstract: A spot welding robot including a base and an arm assembly mounted on the base. The arm assembly includes a lower arm mounted at a lower end on the base for a swingable movement about a substantially horizontal first axis, a swingable member mounted on the lower arm at an upper end portion of the lower arm for a swingable movement about a second axis which is parallel with the first axis, and an upper arm mounted at one end portion on the swingable member for a swingable movement about a third axis which is perpendicular to the second axis. The swingable member has a portion extending in a direction opposite to the direction in which the upper arm extends. A driving motor is provided on the swingable member for driving the upper arm to produce the swingable movement of the upper arm about the third axis.

Abstract: A plurality of identical modules are serially connected together with each module including a base plate and a top plate interconnected by a universal joint assembly so that the top plate is adapted to pivotally nutate around the base plate to describe a cone in space. An array of twenty-four electromagnets, sequentially energized in sets of three, are arranged in a ring around the periphery of the base plate. Selective energization of the eight sets of electromagnets causes the rim of the top plate to be magnetically attracted to the energized electromagnets. The tilt of the top pivot plate is detected and controlled over a range of 360.degree., thus permitting a series string of modules to assume any desired elongated configuration.

Abstract: An interactive system for guiding the use of a surgical tool uses at least one imaging technique, such as CT scanning. A mechanical arm has a fixed base at a first end and a tool holder that holds the surgical tool at a second end. A display displays one or more images from the image space of a patient's anatomy. A computer is coupled to the display and the mechanical arm. The computer tracks the location of the surgical tool through physical space, performs a transforming rotation of the physical space to the image space, and causes the display to display the location of the surgical tool within the image space.

Abstract: This invention is a flexible limb capable of changing length, bending in any direction, twisting, and changing cross-sectional size. Its skeletal structural design promotes optimal simplicity of control, ease of construction, lightness, and stiffness.

Abstract: An articulated industrial robot comprises a robot body (10), a robot upper arm (20) pivotally supported in a joint provided on the upper end (16) of the robot body (10) for a swing motion about a horizontal W-axis, and a robot forearm (30) pivotally supported in a joint provided on the extremity (24) of the robot upper arm (20) for an up-down turning motion about a horizontal U-axis. The robot upper arm (20) has an offset arm structure extending between the horizontal W-axis of the joint on the upper end (16) of the robot body (10) and the horizontal U-axis of the joint on the extremity (24) of the robot upper arm (20) with its back side (26) extending along the straight line connecting the respective centers of the horizontal W-axis and U-axis. Electric cables (40) and the like are extended along the back side (26) of the robot upper arm (20).

Abstract: Herein disclosed is a gravity compensating mechanism for an articulated type industrial robot having upper and lower arms whirling in the direction of gravity. The upper and lower arm gravity compensating mechanism includes a cam mechanism and an elastic member in the robot to solve problems: that the whirling range of the robot arms is narrowed by the spring means of the gravity compensating mechanism; that the gravity compensating mechanism is disposed outside of the robot arms to restrict the working space; and that it is difficult to disposed the gravity compensating mechanism for the upper arm.

Abstract: These joints are particularly useful for transmitting a flux (electrical, optical, liquid or gaseous) either entirely across the joint, or from one side of the joint to devices mounted on the joint itself that use such a flux. Such devices can, for example, be motors to drive the joint itself. The interlocking bodies are typically but not necessarily circular rings, mounted to a common internal structure that permits each body to rotate about its own axis. The resulting joints can rotate in all directions with a very high angular range--in most cases limited only by the angle subtended by connecting stems used to mount the joint to a base or to mount objects to the joint for motion. Some of these joints have hollow central enclosures for passing flexible wires or tubing to carry the flux, so that the flux can be transmitted across or into the joint with the same high degree of freedom, and yet without slip rings, brushes, or other expensive motionaccommodating components subject to wear.

Abstract: A mounting arrangement is disclosed to mount an arm. The arm has a pair of spaced enlarged sections and an intermediate recessed section. The mounting arrangement has a first mount portion with an upwardly facing opening that extends for a distance greater than the diameter of the recessed section, a second mount portion spaced rearwardly of the first, and an intermediate open portion. The recessed section of the arm is positioned over the opening in the first mount portion and moved downwardly. The arm is then moved rearwardly such that the first and second enlarged sections are received within the first and second mount portions, respectively. The improved mounting arrangement provides support over a sufficient axial distance of the arm, but does not require the arm to be slid within the mounting arrangement for the entire distance. Less space is required in front of the mounting arrangement, and less force must be applied to the arm in order to move it within the mounting arrangement.

Abstract: A robot hand changer has a first joint member mounted on a robot arm, a second joint member mounted on a robot hand, and an engaging member mounted on the first joint member and angularly movable with respect to the second joint member for coupling the first and second joint members against each other. The robot hand changer also has an optical signal transmission device including sets of optical fibers disposed in confronting relation out of contact with each other for transmitting control signals across mating surfaces when the robot arm and the robot hand are coupled to each other, and photoelectric transducer circuits for converting electric signals to optical signals and vice versa. The robot hand arm further includes a detecting device for detecting dirt on the mating surfaces.

Abstract: A fitting structure of a first arm fitted to a robot base of a horizontal articulated robot, wherein a linearly movable slide is longitudinally guided along the robot base. A base at a base end of the first arm is rotatably fitted to the slider, and rotation of the base relative to the slider is restricted by a removable fixing device. This invention is efficiently used when packaging the robot.

Abstract: An articulated device includes two plates (PI, PS) interconnected by six k members (OLij) disposed in a closed latticework structure, and a control assembly for controlling the relative positions of these two plates. Each link member is of substantially constant length and the control assembly also includes six slider members (OCij) respectively connected to the six link members (OLij) and to the bottom plate (PI), each slider member being suitable for sliding relative to the bottom plate (PI) along a predetermined sliding direction under drive from a motor (MOTij, TFij).

Abstract: A six-legged, insect-like, self-propelled walking robot (hexapodal arthrobot), includes twistor-pairs in the waist, hip and knee of each leg and walks by pr0gramming fluid pressure in these twistor-pairs at the joints of respective legs in a predetermined controlled sequence. As a result of a predetermined sequence of six controlled variable pressures, this six-legged robot firmly plants three of its legs on the ground for providing stable ground support for walking. The three legs on the ground are propelling the robot forward with walking motion, while the other three legs are lifted and swing forward to an advanced position and are then lowered onto the ground for taking over their support and walking role in their turn, while the first three legs are then being lifted and swung forward to an advanced position, and so forth, for providing a stable forward walking motion. By reversing the sequence of six controlled variable pressures, a stable reverse walking motion is produced.

Abstract: An assembly robot has rotational arm and a lifting axis and three rotational axes. A first rotary joint for defining the first rotational axis is mounted in a lateral projection of the lifting column. The assembly makes possible large pivoting angles.

Abstract: A robotic apparatus for positioning a tool or work hand that incorporates a compliant wrist effective to adjust to delicate but misaligned portions of the workpiece, comprising (a) structure for magnetically supporting a positioning member carrying a gripper tool; (b) pneumatic structure for selectively separating and floating the positioning member from said supporting structure to permit lateral adjustment of the positioning member in response to small forces received from the gripper tool as it carries out gripping; and (c) structure for locking the positioning member to the supporting structure upon completion of the desired lateral adjustment.

Abstract: A multi-articulation robot formed of a plurality of rotary articulation mechanisms, rocking articulation mechanisms, rotary shafts and vertical rods so that the above mentioned rotary articulation mechanisms, rocking articulation mechanisms and rotary shafts may be sequentially controlled to move to any predetermined position a working attachment provided at the tip.

Abstract: In semiconductor vacuum processing, it is desirable to minimize the material handling mechanisms that must be located in the evacuated process chamber. To accomplish this, a mechanism has been designed that locates the necessary power elements such as motors (12-16) outside the chamber (32). Power is transmitted to the mechanism via commercially available rotary vacuum feed-through devices (30) mounted in the chamber walls (28) and the separable, zero backlash couplings (44) located within the chamber. These couplings (44) allow easy removal and replacement of the handling mechanism without the need for physical access and tools.

Abstract: A disk gripper has a rotary actuator with a horizontally supported shaft, a swing arm which is attached to and can rotate with this shaft and a finger arm which is connected to the swing arm such that the connected arms together extend radially from the shaft. Gripper fingers on the finger arm have mutually coplanar flat outer surfaces which point downward when the arms are in the horizontally extended position. The gripper fingers are provided with grooves and are movable toward or away from one another while their flat outer surfaces slidingly move over a horizontal support surface such that a disk lying on this surface can be engaged in these grooves or disengaged therefrom. The swing arm and the finger arm are slidable within a limited distance with respect to each other in a direction perpendicular to their extension.

Abstract: A drive unit on the pedestal of an industrial robot includes a gear unit having a hollow output gear shaft driven by a drive motor, and the base of the industrial robot includes a bearing on which the pedestal is rotatably mounted and whose axis of rotation is essentially coincident with the axis of rotation of the output gear shaft, and a torsionally rigid but otherwise flexible shaft coupling connects the output gear shaft to the base.

Abstract: In a device for supporting arm driving shafts, articulating portions of adjacently provided first and second arms constituting a parallel link type robot are rotatably supported, via separately provided bearings, from supporting posts projecting from the robot structure, and the first arm and second arm are also coupled through another bearing. All of these bearings are of a type in which an axial force applied to either one of inner and outer races of the bearing beforehand presses rolling members of the bearing toward the other of the races, while a pressing plate is provided for applying the axial force to one of the bearings. The application of the axial force shifts the supporting frame of the first arm relative to the driving shaft of the second arm, so that all of the bearings are prepressurized for eliminating unnecessary play.

Abstract: A robot hand changer has a first joint member mounted on a robot arm, a second joint member mounted on a robot hand, and an engaging member mounted on the first joint member and angularly movable with respect to the second joint member for coupling the first and second joint members against each other. The robot hand changer also has an optical signal transmission device including sets of optical fibers disposed in confronting relation out of contact with each other for transmitting control signals across mating surfaces when the robot arm and the robot hand are coupled to each other, and photoelectric transducer circuits for converting electric signals to optical signals and vice versa. The robot hand arm further includes a detecting device for detecting dirt on the mating surface.

Abstract: A modular manipulation arm formed from successive elements, each of which can pivot relative to the preceding one about a pivot axis coinciding with the axis of the element in question, and can pivot relative to the following one about a pivot axis which meets the axis of the element in question obliquely. These pivotings are obtained by means of rotary jacks which cause a drive-shaft portion to rotate relative to the corresponding element and which immobilize it in the selected position. The jacks are each associated with a distributor, itself preferably controlled by a low-power electric motor. The connection between successive elements preferably comprises a cardan joint linking the elements and oblique bearing surfaces at the end of the drive-shaft portions.

Abstract: The device comprises a base element (1) and a movable element (8). Three control arms (4) are rigidly mounted at their first extremity (15) on three shafts (2) which may be rotated. The three assemblies each formed by a shaft (2) and an arm (4) are the movable parts of three actuators (13) of which the fixed parts (3) are integral with the base element. The other extremity (16) of each control arm is made integral with the movable element through two linking bars (5a, 5b) hingedly mounted on the one hand to the second extremity (16) of the control arm and, on the other hand, to the movable element. The inclination and the orientation in space of the movable element remain unchanged, whatever the motions of the three control arms may be. The movable element supports a working element (9) of which the rotation is controlled by a fixed motor (11) situated on the base element. A telescopic arm (14) connects the motor to the working element.

Abstract: A digitally controlled industrial robot comprises a set of unitized and integrated joint drive modules which can be assembled in series to form an arm. The joints are of two basic types, pitch joints and roll joints, with the roll joints providing rotation about the longitudinal axis of the manipulator and the pitch joints providing rotation about axes which are substantially perpendicular to and offset from the roll joint axes. Any number of joints may be assembled to comprise the manipulator, permitting the configuration of a kinematically redundant manipulator. A servocontrol derives feedback from sensing the motive force on a driven member and compensates the drive signal accordingly. More particularly, the torque exerted on each roll and pitch joint is measured and used for feedback to provide stability and optimum bandwidth for the servomechanism.

Abstract: Multi-jointed robot for use in a clean room specifically applicable during the production of semiconductor devices where contaminant material must be eliminated to the extent possible. The robot includes a sectional body defined at least in part by a plurality of arm members wherein a plurality of pivotal joints are provided to pivotably connect adjacent arm members with respect to each other. The arm members and the pivotal joints are hollow such that an uninterrupted air passage is provided in the robot extending through each of the pivotal joints and the arm members of the sectional body thereof. The robot includes a terminal arm member located at one end of the sectional body which has an opening on the exterior surface thereof defining one end of the air passage through the robot. A rotary fan is mounted in the robot at the other end of the air passage and is operable upon rotation to exhaust air through the air passage within the interior of the sectional body of the robot.

Abstract: An arm structure for use in an articulated mechanism such as an industrial robot comprises a plurality of links operatively interconnected by articulations having respective actuators and actuatable by the actuators under a fluid pressure. Each of the links comprises a hollow cylindrical casing and an accumulator comprising a pipe extending axially through the casing and a rubber tube disposed around the pipe. The tube is radially inflatable by the pressure of the fluid supplied into the space between the pipe and the tube through small holes defined in the wall of the pipe and the cylindrical casing is pressurized.

Abstract: A hydraulic pressure system for supplying a fluid under pressure includes a fluid pressure source for supplying the fluid pressure, an accumulator for storing part of the fluid from the fluid pressure source, the accumulator having a gas chamber filled with a high-pressure gas for pressurizing the stored fluid, and a structural member having a hermetically sealed space held in fluid communication with the gas chamber. The structural member comprises a link of an articulated mechanism interconnecting articulations, the link comprising a high polymer composite material and a metal material and having smaller-diameter portions joined to the articulations, respectively. The composite material comprises a prepreg which is either woven of weft threads extending parallel to an axis of the link and warp threads extending perpendicularly to the axis of the link, or woven of weft threads and warp threads which are inclined at about 54.75.degree. with respect to the axis of the link.

Abstract: A dual forearmed robotic elbow configuration comprises a main arm having a double elbow from which two coplanar forearms depend, two actuators carried in the double elbow for moving the forearms, and separate, independent end effectors, operated by a cable carried from the main arm through the elbow, is attached to the distal end of each forearm. Coiling the cables around the actuators prevents bending or kinking when the forearms are rotated 360 degrees. The end effectors can have similar or different capabilities. Actuator cannisters within the dual elbow are modular for rapid replacement or maintenance. Coarse and fine resolver transducers within the actuators provide accurate position referencing information.

Abstract: A gimbal module for installation in a gimbal assembly and for operation by a simple type of robot device for use in a space environment. The module has a stator, which is fixedly connected to a first gimbal, and has a coaxial rotor, which is fixedly connected to a second gimbal. The stator and first gimbal have respectively a stator spline and a gimbal spline for aligning and installing the stator in the first gimbal. The stator has a bearing which rotatably supports the rotor. The first gimbal has a bearing which rotatably supports the second gimbal. The stator and first gimbal have respective connector components. A first force is applied along the gimbal axis on the module for aligning and installing the stator and its connecotr component into the first gimbal and its connector component. The rotor and the second gimbal have respective rotor connector components.

Abstract: An actuator swing arm mechanism includes extension shafts which are rigidly and coaxially attached to the drive shaft of an actuator at one end and rigidly attached to a swing arm at the other end. These extension shafts, rather than the drive shaft of the actuator itself, are rotatably supported by supporting members such that the weight of a heavy load on the swing arm is communicated through these extension shafts to and carried by these supporting members and the drive shaft of the actuator is relatively unaffected by the load.

Abstract: A cable-compliant robotic joint includes two "U" configuration cross-section brackets with their "U" cross-sections lying in different planes, one of the brackets being connected to a robot arm and the other to a tool. Additional angle brackets are displaced from the other brackets at corners of the robotic joint. All the brackets are connected by cable segments which lie in one or more planes which are perpendicular to the direction of tool travel as it approaches a work object. The compliance of the joint is determined by the cable segment characteristics, such as their length, material, angle, stranding, pre-twisting and pre-stressing.

Abstract: The invention provides a motorized joint which has a pair of members that are movable relative to one another about a joint. Power to actuate the joint is provided by an inflatable hose inflating to transmit the force due to the expansion thereof via a strap or other elements interconnecting the members. The motorized joint can be covered with artificial flesh which, together with the expansion of the inflatable hose, creates the realistic appearance of a muscle flexing.

Abstract: Work-handling apparatus, such as may be used in automatically loading and unloading a press in the manufacture of metal pressings, is arranged to reciprocate a work-handling attachment substantially linearly. The attachment is pivotally mounted on a crank lever, which is pivotally mounted on a crank arm, which is pivotally mounted on mounting means, the pivot axes of the crank arm, which is pivotally mounted on mounting means, the pivot axes of the crank arm and the attachment being substantially equi-distant from that of the crank lever. By means of geared connections between the mounting means and the crank lever (in the ratio of substantially 2:1), and between the crank arm and the attachment (in the ratio of substantially 1:2) the attachment is caused to maintain a substantially constant orientation during linear movement resulting from the coordinated rotations of the crank lever and the crank arm.

Abstract: A mechanical manipulator having a joint with a base support and an output support each of which has an orthogonal pivot connection arrangement connecting them in one axis to a common joining arrangement connecting them in an orthogonal axis through which they are movably joined, there being a pair of guides with each rotatably connected to one of the supports and movably joined with each other. A plurality of such joints joined with one another can be provided between two rotary interfaces.

Abstract: Provided is a compact first arm (12) of an industrial robot having articulated horizontal arms, which first arm has a direct drive motor (19), an electromagnetic brake (25), and a rotary encoder (34, 36) disposed close to each other concentrically between the first arm (12) and a base post (10) supporting the first arm (12), and has another direct drive motor (39), another electromagnetic brake (45), and another rotary encoder (54, 56) disposed close to each other concentrically between the first arm (12) and a second arm (14) rotatably supported by the first arm (12).

Abstract: The end of a robot arm includes two links, a first or inner link supported rotatably about a central axis and an end link at which a tool is carried. Located between the links are a rod and a tube whose longitudinal axes are concentric. Each of four gimbal rings is used as a member of a universal joint that connects the links, the rod and the tube. The links are connected by two universal joints in series, and the rod connects these joints. The links are also connected by two other universal joints in series and the tube connects this second pair of joints. The first and second pairs of universal joints connected in series are connected to one another in parallel. Gimbal rings rotatably supported on the tube and on the links for angular movement about yaw axis provide rotational support for the links and the connecting rod about the pitch axis. Actuating rods connected to the inner set of gimbal rings produce articulation of the wrist about these axis when the rods are actuated.

Abstract: This invention relates generally to a coupling system for releasably attaching any one of a number of robotically controlled tools (robotic "hands") to a robotically controlled extension arm. The coupling system tightly locks the hand to the robotic arm by combined air and spring pressure such that, even under heavy duty use, the hand will not unintentionally twist or move relative to the arm, yet the hand and arm may be quickly disengaged by release of locking air pressure and imposition of unlocking air pressure which enables ball means to be cammed out of locking engagement.

Abstract: A cable arranging device for an industrial robot has a cylindrical support casing (2), a swing casing (3) supported on the support casing (2) and swingable about the axis of a swing shaft, and cables (5) interconnecting the swing casing (3) and the support casing (2). One end of a substantially C-shaped cable guide (4) is pivotally supported in the swing casing on the axis of the swing shaft, the other end of the cable guide is pivotally supported in the support casing on the axis of the swing shaft. Spaces for allowing the cable guide (4) to swing therein through a prescribed angle are defined respectively in the swing casing (3) and the support casing (2).

Abstract: A quick disconnect boom mount having integral fluid conduits for use with master part transfer booms having changeable part handling spider booms. The coupling utilizes a rotary locking member, having an eccentric cam disposed thereon, which rigidly clamps the part handling spider to the master boom by engaging guide rods configured in a male/female arrangement and inserted from a first coupling block attached to the spider boom into the second coupling block attached to the master boom.

Abstract: A robotic connector or interface includes a roughly conical male member in which the conical side may be concave. The male member includes a radial indexing pin, and a central bore in which polarized electrical connectors are located. A mating female member includes a cavity with a fundus and movable peripheral lips adapted for grasping the base of the male member when engaged for drawing the male member into full mating relation with the cavity. A tapered slot in the side of the female member guides the index pin to impart rotational forces so that mating can take place even if the approach is skewed. The electrical connectors are mounted on a separately indexed, spring loaded connector plate at the fundus of the cavity. A motor-driven linkage operates the peripheral lip members.

Abstract: A robot arm usable for an industrial robot adapted to freely bend to realize a pattern of movement having a high ability of movement, excellent reachability and high accuracy by virtue of a comparatively small amount of rotational movement and a comparatively large amount of translational movement. The robot arm has cylindrical arm portions (14, 15, 16) flexibly connected to one after another via joints, and the arm portions comprise one upper arm (14), at least one intermediate arm (15) and one lower arm (16). An arm portion which belongs to a certain joint is formed with joint faces (21) which are inclined with respect to a longitudinally extending axis (29). A joint axis (22) of this joint extends at a right angle with respect to each of the joint faces (21). Each of the arm portions is freely turnable about the joint axis (22) independently of adjacent one or plural arm portions.

Abstract: A device for interchanging tools on a mechanical manipulator arm includes a male locking cone unit, a female receptacle cone unit and a motor unit. The male locking cone unit has 3, 6 or 12 equal size balls captured in a male conical cage to extend through its external surface. The female receptacle cone unit that carries a tool includes a dished member having an internal conical surface mating with the external surface of the locking cone, a groove in the conical surface contoured to embrace portions of the balls positioned therein and lands in the groove dividing it into 8 sections of substantially equal length. The lands prevent the balls when in the groove from moving from one of the sections to another. The motor unit, which axially connects via a power take off system with the tool to operate it, is mounted on the female receptacle cone unit.

Abstract: In semiconductor vacuum processing, it is desirable to minimize the material handling mechanisms that must be located in the evacuated process chamber. To accomplish this, a mechanism has been designed that locates the necessary power elements such as motors (12-16) outside the chamber (32). Power is transmitted to the mechanism via commercially available rotary vacuum feed-through devices (30) mounted in the chamber walls (28) and the separable, zero backlash couplings (44) located within the chamber. These couplings (44) allow easy removal and replacement of the handling mechanism without the need for physical access and tools.