Abstract: A method and system are disclosed for radiosurgical treatment of moving tissues of the heart, including acquiring at least one volume of the tissue and acquiring at least one ultrasound data set, image or volume of the tissue using an ultrasound transducer disposed at a position. A similarity measure is computed between the ultrasound image or volume and the acquired volume or a simulated ultrasound data set, image or volume. A robot is configured in response to the similarity measure and the position of the transducer, and a radiation beam is fired from the configured robot.

Abstract: A device for supporting and controlling the translational movement of an elongated body, the body extending along the longitudinal axis thereof in the form of a rod, such as a needle intended for a percutaneous medical procedure. The device is designed to be mounted to a support that can be controlled in terms of position and orientation, and includes: (i) a first member for gripping the body, whose movement can be controlled in the translation direction with a pre-determined maximum stroke; and (ii) a second fixed member which can guide the elongated body when the body is moved by the first mobile gripping member and which can maintain the body in position when the body is not engaged with the first member.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system (e.g., a cluster tool) that has the capability of receiving and performing substrate processing steps in any substrate orientation. The various embodiments of the cluster tool may utilize one or more robots that are adapted to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates.

Abstract: A method and system for performing invasive procedures includes a surgical robot which is controlled by a guidance system that uses time of flight calculations from RF transmitters embedded in the robot, surgical instrument, and patient anatomy. Sensors around the room detect RF transmissions emitted by the RF transmitters and drive the robot according to a preprogrammed trajectory entered into the guidance system.

Abstract: Surgical robots and other telepresence systems have enhanced grip actuation for manipulating tissues and objects with small sizes. A master/slave system is used in which an error signal or gain is artificially altered when grip members are near a closed configuration.

Abstract: An end of arm tool changing system, the system comprising a male retaining member for use on an end-of-arm tool, and a female locating member for use on a robotic arm. The male retaining member includes a flange having at least a convex semi-circular portion. The includes a rim defining a channel having at least a concave semi-circular portion and capable of receiving the flange for coupling the end-of-arm tool to the robotic arm.

Abstract: A tool changer includes a tool attachment mechanism and a changer electronics module. The changer electronics module implements a tool changer node on a device network for the tool changer and a tool plate node on the device network for a tool plate of an automated tool that may be latched to the tool changer.

Abstract: A hybrid compact sensing apparatus for generating signals usable for guiding a process robot as a function of an object detected in a scene. The apparatus comprises a laser light generator, two optical sensors, one or more ultrasound sensors, and a control unit, all integrated in a same housing. The laser light generator and the optical sensors form a detection arrangement having a limited detection range compared to that of the ultrasound sensors. The control unit has a processing circuit monitoring the distance of the object measured by the ultrasound sensors, and triggering on the laser light generator and triggering use of the depth profile signals produced by the optical sensors among the signals usable for guiding the process robot when the distance measured by the ultrasound sensors falls within the limited detection range. Integration of an audio and video sensing unit to the apparatus enables remote monitoring.

Abstract: A system for performing the method of this invention includes a leader having a robot arm able to articulate about first axes and supporting an end effector. A follower includes a robot arm able to articulate about respective second axes. Servo motors articulate the leader arm about the first axes and the follower arm about the second axes. A user interface allows a user to jog the arm of the leader and to program movement of the arms for automatic execution such that the end effector reaches predetermined positions. A controller, operatively connected to the servo motors and the user interface, controls operation of the servo motors, moves the arm of the leader in accordance with the programmed movement, and moves the arm of the follower such that it tracks or mirrors movement of the leader.

Abstract: A roller folding head is disclosed. Roller folding heads are used, for instance, when fixing the frame of a sliding roof in an opening in the roof of a vehicle. In order to do this quickly and automatically, the roller folding head is provided with at least two pairs of rollers, each pair of rollers consisting of a pressure roller and a counter-roller which interact in order to bend a flange along a folding line at a specific angle. The folding process is carried out in several stages, one flange being crimped around another flange in a series of partial steps at an angle of 180°. One pair of rollers is provided for each step, at least two thereof being arranged on a roller folding head.

Abstract: A machine and a method for forming composite materials are provided. The machine includes a frame and at least one forming beam attached to the frame, the at least one beam being arranged to align with a mandrel. The forming beam is pivotally segmented into at least two segments to conform to the shape of the mandrel, or alternately is bendable to conform to the shape of the mandrel. The mandrel is receivable within the frame in alignment with the forming beam. An apparatus is also provided to position a composite charge over the mandrel, and to position the mandrel within the frame. A further apparatus is provided to transport the mandrel, and to urge the mandrel toward the forming beam, forming a composite charge.

Abstract: A robot system and a machining method capable of accurately and simply cutting an end of a pipe into a saddle shape and forming a hole on an outer surface thereof, and further machining a workpiece of a three-dimensional shape which does not have platelike shape. A tool unit is attached to a final axis of a moveable arm of a robot. The tool unit is provided with a first additional variable axis expanding and retracting vertically and a second additional variable axis expanding and retracting in the horizontal direction. By rotating the final axis, a cutting tool (machining nozzle of laser) at a distal end of the tool unit is turned about the final axis to cut a workpiece W of a pipe shape. By driving the first and the second additional variable axes in synchronism with rotation of the final axis, the cutting into a saddle shape and the forming of a hole are carried out. The movable arm of the robot is only for rotating the final axis and the machining accuracy is promoted.

Abstract: Methods and apparatuses are disclosed for applying melt flowable materials to components of articles of manufacture. The methods and apparatuses disclosed herein are concerned with formation of appropriate flowable materials, control over the manner in which the flowable materials are applied, treatment of the components prior to application of the flowable materials and the like. Moreover, the apparatuses and methods may be particularly suited for applying flowable materials to surfaces and components found in automotive, aerospace, and marine vehicles.

Abstract: The invention concerns a device for the non-contact measurement of the position of the teeth (13) of a workpiece (14) with precut teeth on a gear finishing machine. The measuring probe, retractable from the measuring position into a position of rest protected against soiling, is arranged in a holder (5) for radial and axial adjustment relative to the workpiece, the said holder (5) being a kinematic member of a parallelogram linkage (A) and by means of a hydraulic, pneumatic or electromechanical swivel drive (11) is swivellable from stop to stop between measuring position and position of rest in a plane containing the workpiece axis, such that in the advancement action from the lower end position to the top end position motions of the measuring probe (1) tangential to the workpiece circumference are completely avoided. The parallelogram kinematics moreover afford adequate protection against swarf and grinding dust, and lends the device a high stiffness and reliability.

Abstract: A tool identification system has a tool holder allowing removable attachment thereto of any one of a plurality of tools; a sensor arrangement operable to sense features present on a tool attached to the tool holder; a processor operable to identify uniquely, from the sensed features, the type of the tool attached to the tool holder; and an insulation arrangement provided between the tool holder and the sensor arrangement, thereby electrically insulating the tool holder from the sensor arrangement.

Abstract: A mounting head unit for an electronic component for making a pick-up operation of the electronic component and loading operation thereof is removably attached to a head mounting bracket of an electronic component mounting device. Each mounting head unit is provided with a control board for controlling the a mounting mechanism including a plurality of unit mounting heads each equipped with an adsorption nozzle for holding the electronic component. In the mounting operation, on the basis of the operation command from a main unit control section for controlling the entire operation of the electronic component mounting device, the control board controls the operation of each of the unit mounting heads. In this way, the replacement of wirings in replacing the mounting head can be easily made and the time delay in signal processing can be removed to realize the high speed operation.

Abstract: A curved surface machining method that performs finishing of the surface of a workpiece into a curved surface. The method includes the steps of: setting a workpiece in a rotating or stationary state in a water tank filled with an abrasive-containing solution into which an abrasive with a grain size of less than 1 ?m has been admixed; and spraying a high-speed fluid in the abrasive-containing solution while a position, direction, and angle thereof is controlled relative to the workpiece, thus grinding and finishing the surface of the workpiece to an intended surface roughness and profile accuracy.

Abstract: A robotic device for moving at least one object between locations, including a servo motor system having a single servo axis for effecting motion in at least two directions of motion. The robotic device includes a link arm rotationally coupled to said servo motor system for lifting and placing said at least one object, a head assembly having gripper arms for gripping and releasing said at least one object at said locations. The head assembly includes a leveling mechanism for maintaining said at least one object in a desired orientation, and a split ring sensing mechanism, disposed between said gripper arms, for determining the presence of said at least one object.

Abstract: A mounting system for mounting tools to a base includes a movable base, a tool mounting frame for selective attachment to the base, and a locking assembly movable between a locked position where the tool mounting frame is securely attached to the base and an unlocked position where the tool mounting frame is movable relative to the base. The tool mounting frame includes at least one tool mount for supporting a first tool to perform a tooling operation after the locking assembly is moved to the locked position. The locking assembly includes a first mount supported by the base and a second mount supported by the tool mounting. The locking assembly is automatically interlocks the first and second mounts. A first sensor component is mounted to the base and a second sensor component is mounted to the tool mounting frame. A controller controls mounting speed based on the proximity of the sensor components. Additionally, a code corresponding to the type of tool mounting frame may be used.

Abstract: An integrated robotic cell having robot and series of sensors is able to process a component as desired by an operator using an interactive interface display. The integrated robotic cell includes a robotic arm connected a central processor unit as well as a series of monitors and sensors that thoroughly supervise the operation of the robotic arm and component to verify that there are no errors. The central processing unit is connected to the interface display, which allows the operator to control the operation of the robotic cell. The interface display incorporates a series of threads, with each thread having of a series of sequential processes to be performed by the robotic cell. The operator is thereby able to view and easily control the simultaneous processes being performed in the robotic cell.

Abstract: Method for controlling installation of a head stack assembly in a disc drive. The head stack assembly is aligned in a head stack installation tool. A base deck assembly is advanced to the head stack installation tool, the base deck assembly having a post supporting a tolerance ring. A robotic assembly is dispatched to pick and press the head stack assembly onto the tolerance ring and post while mechanical resistance and distance traveled parameters by the head stack assembly are measured. The installation is aborted or completed in relation to the mechanical resistance encountered and the distance traveled, thus allowing use of minimum and maximum force thresholds with respect to insertion distance and assuring correct installation of the head stack assembly.

Abstract: Bendings &Dgr;&agr;, &Dgr;&bgr;, and &Dgr;&thgr; are determined by the torques about the axes of coordinate systems disposed to respective joints and by spring constants. Parameters &agr;, &bgr;, and &thgr;0 are determined by adding an amount of twist to corrected D-H parameters &agr;s, &bgr;s, and &thgr;0s when twist is “0”. A rotational angle &thgr;′ (&thgr;st) is determined from a target position x by executing inverse kinematics using the parameters &agr;s, &bgr;s, and &thgr;0s (step S6). Further, a position x′ is determined from the rotational angle &thgr;′ by executing forward kinematics using the parameters &agr;, &bgr;, and &thgr;0, and the difference &Dgr;x between the target position x and the position x′ is determined. The difference is corrected, and a new target position x is set.

Abstract: A robot control system is provided for facilitating coordination amongst various robotic machines. The robot control system includes a plurality of robot controllers, such that each robot controller having an associated motion system adapted to control at least one robotic machine and the associated motion system is adapted to receive motion control commands from more than one robot control program. The robot control system further includes a remote instruction source that supplies motion control commands to the robot controllers, and a mutual exclusion mechanism residing on either the remote program instruction source or one of the robot controllers, where the mutual exclusion mechanism prevents simultaneous access by more than one robot control program to a given robotic machine. In operation, motion control commands are propagated from the remote program instruction source over a computer network to a selected group of the robot controllers.

Abstract: A self-piercing type rivet setting system 30 comprises: a rivet swaging assembly 35; a robot 6 which moves the rivet swaging assembly 35 to put it in position relative to a predetermined site on a workpiece to be riveted; a single integrated controller 31 made up by an integration of a controller for controlling a riveting operation of the rivet swaging assembly and a controller for controlling the motion of the robot; and a rivet feeder 9 for automatically feeding a self-piercing type rivet to the rivet swaging assembly. From the integrated controller 31, a interface cable 33 extends to the robot 6 and another interface cable 34 extends to the rivet feeder 9, and the rivet swaging assembly 35 is integrally incorporated into the robot 6.

Abstract: A teleoperator system with telepresence is shown which includes right and left hand controllers (72R and 72L) for control of right and left manipulators (24R and 24L) through use of a servomechanism that includes computer (42). Cameras (46R and 46L) view workspace (30) from different angles for production of stereoscopic signal outputs at lines (48R and 48L). In response to the camera outputs a 3-dimensional top-to-bottom inverted image (30I) is produced which, is reflected by mirror (66) toward the eyes of operator (18). A virtual image (30V) is produced adjacent control arms (76R and 76L) which is viewed by operator (18) looking in the direction of the control arms. By locating the workspace image (30V) adjacent the control arms (76R and 76L) the operator is provided with a sense that end effectors (40R and 40L) carried by manipulator arms (34R and 34L) and control arms (76R and 76L) are substantially integral.

Abstract: A tool identification system, comprising: a tool holder allowing removable attachment thereto of any one of a plurality of tools; a sensor arrangement operable to sense features present on a tool attached to the tool holder; a processor operable to identify uniquely, from the sensed features, the type of the tool attached to the tool holder; and an insulation arrangement provided between the tool holder and the sensor arrangement, thereby electrically insulating the tool holder from the sensor arrangement.

Abstract: In order to provide a space-saving inexpensive screw tightening apparatus by forming the same apparatus as a whole to a rational simple construction, a screw tightening apparatus M is provided with a robot 5 for retaining a nut runner 1, which is adapted to tighten a recess bolt 8, with respect to a work 10, and support members 2, 3, 4 for supporting the nut runner 1 so that the nut runner 1 can be displaced in three axes which orthogonally cross one another. An air cylinder bearing the weight of the nut runner 1 or support members 2, 3, 4 are connected to the support member 2.

Abstract: A cable laying structure for a robot, which does not interfere with external devices in a periphery of a forearm. Camera (or force sensor) and hand control cables and motor control cables CB are drawn into a robot mechanism through a connection panel of a base of a robot main body. While allowing the motor control cables to sequentially diverge, the control cables CB are arranged in a robot arm along an upper arm portion and guided to the forearm. The control cables CB are introduced into the forearm with a shield and a sheath removed, and clamped at an appropriate position. After reaching an end effector-mounting face, the control cables CB are connected to a camera (or force sensor) C/S and a hand. The forearm is formed of conductive material and grounded on the base of the robot main body so as to have the same electric potential as the base by using means such as an earth cable or the like, and therefore the forearm is utilized in replacement of the shield.

Abstract: A reticle protection and transport system and method for a lithography tool. The system includes an indexer that stores a plurality of reticles and a removable reticle cassette. The removable reticle cassette is comprised of an inner chamber and an outer chamber. The system further includes an end effector coupled to a robotic arm. The end effector engages one of the plurality of reticles to enable the reticle to be positioned within the removable reticle cassette and thereafter transported. The system further includes a seal, coupled to the end effector and the robotic arm. To transport the reticle, the reticle is first loaded onto the end effector. Next, the end effector is used to create an arrangement wherein the reticle is loaded into the removable reticle cassette. Importantly, the reticle and removable reticle cassette do not come into contact with one another.

Abstract: The present invention relates to a workpiece implementation device that fabricates individual workpieces, positions them at their point of use on a component, and connects the workpieces to the components. The device further comprises an accessory assembly capable of shaping the workpieces, coating the workpieces with a solderable material, burnishing the point of use on the component, and testing the connection between the workpieces and the component. The positioning, attaching, and accessory assemblies of the workpiece implementation device are adapted to selectively perform their individual functions without the necessity of first repositioning the component or the implementation device. Accordingly, the present invention increases overall production efficiency by integrating several separate implementation tools and workstations into a single, adaptable device.

Abstract: A system for changing a tool head (24) carried by a robot (20) includes a locking mechanism (23) having a keyhole-shaped slot (37) therein, and a lock key assembly (25) having a key (65). Depression of a button (52) rotates a cam arm (57) to extend the key (65) outwardly where it can be received in the larger opening (38) of the slot (37). Depression of the button (35) of the locking mechanism (23) moves the slot (37) such that the neck (68) of the key (65) is received in the smaller opening (39) of the slot (37). Release of the buttons (52, 35) then allows a spring (71) to retract the key (65) until its head (69) is received in a recess (40) of the locking mechanism (23) to attach the tool head (24) to the robot (20). The parts are detached by again depressing the button (52) which extends the key (65) to remove its head (69) from the recess (40) and then depressing a button (34) to move the slot (37) so that the key (65) is again in the larger opening (38) from where it may be removed.

Abstract: In a robot area monitoring device, in which at least one area of a rotary movement about at least one robot axis is monitored, initiators cooperating with part annular cams arranged coaxially to the axis to be monitored are provided, the initiators being connected to an evaluating device.

Abstract: An end effector having a platform and a motor coupled to the platform for driving a drilling member. A motor housing is coupled to the platform and includes a plurality of photogrammetry targets secured thereto. The photogrammetry targets are oriented so as to be readily detectable by a photogrammetry sensor for determining the orientation of the end effector and corresponding drilling member. A pressure foot member and pneumatic cylinders are operably coupled to the platform such that the pneumatic cylinders maintain a constant pressure upon the pressure foot member to provide material clamp up. A depth control device is also provided for accurately controlling the depth of the drilling member and preventing further drilling.

Abstract: A workstation has a transfer device with a gripper which is suitable for gripping sample tubes by a gripper clamp and for moving them from a sample tube rack to a sample tube bucket, for example for centrifuging. The transfer device has a receiving device (23) which can be gripped on a cylindrical upper handling part (25) by the gripper and removed from a holder (24) in which it has been placed in a defined position. It has an intermediate part (33) with, on its lower end, four hooks (37) which are arranged at the apices of a rectangle and can engage eyes in the sample tube buckets. After use, the receiving device (23) is replaced in the holder (24).

Abstract: A hybrid control system is provided for controlling the movement of a robot. The hybrid control system includes a singularity detector; a task level controller that receives a motion plan and determines a first set of control commands which are defined in a task space; and a joint level controller that receives the motion plan and determines a second set of control commands which are defined in a joint space. The singularity detector monitors the movement of the robot and detects robot movement in a region about a singularity configuration. When robot movement occurs outside of this region, the task level controller is operable to issue the first set of control commands to the robot. When the robot movement occurs inside of this region, the joint level controller is operable to issue the second set of control commands to the robot. In this way, the hybrid control system ensures feasible robot motion in the neighborhood of and at kinematic singularity configuration.

Abstract: The invention relates to a stand having a pivotable support arm (2) and a balance weight (AG), in which the balance weight (AG) acts via a cable pull (24) for the weight compensation of the load (G), the balance weight (AG) being arranged in the area of the vertical upright column (21) of the stand.

Abstract: A refuelling robot having a robot tower, which can be moved along a plinth, can be swivelled and has extending from it a robot arm with, at its free end, a filling nozzle, has separate fuel lines for the various types of fuel as far as the robot arm, but combines at least some of these lines into a single line for transition into the arm itself and out through the nozzle. In this way all the usual fuel types can be dispensed while at the same time reducing the outlay on fuel lines.

Abstract: Motorized slides are inserted between the end of a robot arm and a robot tool/sensor arrangement to provide additional positioning ability. A control unit of the slides cooperates with the control unit of the sensor to maintain the tool correctly positioned over a feature while the robot arm moves following a programmed path. The control unit of the sensor has look-ahead and additional buffers from which corrected information is determined to compensate for robot teaching inaccuracies, calibration and robot arm response errors. A sensor with two distinct probing zones is used to get information about the position of the tool tip and of the feature to assist in calibrating the sensor/tool relation.

Abstract: A robots (210A, 210B), which is fixed onto a base (20, 20B) having a rectangular shape, has a mechanical hand (211A, 211B). A plurality of robot tools, each of which is freely attached to the tip of the mechanical hand (211A, 211B) for pinching a part, and a plurality of trays (6) each containing assembling jigs to be used for assembling parts, are brought in a movable range (RA, RB) of the robot, and the assembling tools are set at a predetermined position within the movable range (RA, RB). Then, an assembling job for the parts is carried out by using the assembling tools thus set. With this arrangement, the exchanging processes of the assembling tools can be carried out without depending on the human hands, even when the type of the assembly product is changed. Consequently, it becomes possible to efficiently carry out the manufacturing process of a small number of many types of products.

Abstract: A haptic pointing device includes a plurality of rigid, elongated proximal members, each connected to a separate rigid, elongated distal member through an articulating joint. The other end of each proximal member is coupled to an actuator such as a motor, causing that member to swing within a separate plane perpendicular to the shaft of the motor in response to a control signal. An end-effector is interconnected to the second end of each distal member through an articulating joint, such that as the actuators move the proximal members, the end-effector moves in space. In a preferred embodiment, the device includes at least three proximal members and three distal members, and the end-effector is coupled to a user-graspable element such as a stylus which retains a preferred orientation in space as the members are driven by the actuators.

Abstract: A motion deciding means is provided to decide a motion based on transmitted information which is transmitted from another robot apparatus, so that it is possible to realize a robot apparatus which operates in cooperation with other robot apparatuses regardless of operator's instructions. Thus, such robot apparatuses can constitute a group of robot apparatuses which autonomously move in cooperation.

Abstract: Roller member connectors facilitate quick change of tools used by robot hands. Each roller member includes a pair of projections on either side thereof. On the inner surface of each retainer opening, a pair of guide grooves are formed to guide the projections so that they are retained during operation.

Abstract: A floating cylinder 12 and a rotating shaft fixing cylinder 11 are attached to a flange RB1 at the distal end of a robot arm via an attaching member 17. Attached to the floating cylinder 12 is a rotary tool 10. To mount or demount a bladed tool to or from a collet chuck 13, the rotating shaft fixing cylinder 11 is operated to advance a stopper 15 so that a rotating shaft 14 of the rotary tool is locked. The chuck nut of the collet chuck 13 is inserted and fixed into a collet fixing groove in which the bladed tool is stored. The robot is operated so as to rotate the flange RB1, by which the rotating shaft 14 and the chuck nut of the collet chuck 13 are rotated relatively to tighten or loosen the bladed tool in the collet chuck 13.

Abstract: A correct track calculating section calculates a correction amount in accordance with a reaction force acting on the working end of a robot. The correction amount is added to a given provisional target position so as to reduce the reaction force. When the reaction force increases excessively, an on-off switch is closed and a selector switch is switched to decelerate and stop the working end of the motor at a virtual position.

Abstract: A linear drive which is particularly suitable for drive axles of parallel structures such a hexapod arrays, comprises a carrier housing (5) and a carrier (4) that can be moved lengthwise in relation to said carrier housing, both the carrier housing and the carrier having provided thereon drive elements (11, 6) such as electrical coils or magnets. In order to achieve a highly dynamic drive performance, the carrier takes the form of a lightweight profiled body with an open cross-sectional profile. The drive elements (6, 11) on the carrier side and on the housing side, respectively, are preferably provided within the open areas of the cross-sectional profile.

Abstract: An assembly for connecting a measuring tool to a measuring head moved by a measuring robot and having an output member rotating at least about one axis; the assembly having three supports located peripherally with respect to the axis and defining an isostatic constraint between the output member and a connecting portion for connecting the tool to the head; the assembly having releasable locking means interposed between the connecting portion of the tool and the output member; and the releasable locking means having engaging means located substantially along the axis, and a pneumatic actuating member cooperating with and for controlling release of the engaging means.

Abstract: A hexapodal machining center comprising a fixed frame (1) and a support (2) which are interconnected via six struts (3) of an adjustable length. The connecting points (T1, T2, T3) of three struts on the support form a first working plane, whereas a further working plane is formed by the connecting points (T4, T5, T6) of the three further struts on the support. The frame connection points (G1, G2, G3, G4, G5, G6) of the struts are also arranged in two separate working planes. The connecting points of the two working planes of the support are superimposed such that the connecting lines of the superimposed pairs of connecting points (T1, T4; T2, T5; T3, T6) extend in parallel with each other. This allows a high degree of movability of the support in all of the six degrees of freedom. In particular, the movability in the three rotational degrees of freedom and the force receiving capacity of the support are optimized.

Abstract: A manipulator includes a first arm having a first reduction gear unit built therein, a second arm fitted through the first arm and having a second reduction gear unit built therein, and a third arm fitted through the second arm and having a third reduction gear unit built therein. To avoid any possible interference between, for example, a welding torch, and a portion of the manipulator during operation of the manipulator, the drive axis of the third reduction gear unit is spaced apart a distance from a drive axis of the second reduction gear unit.

Abstract: It is an object of the present invention to provide a technology capable of plating satisfactorily even when wafers with a seed metal is plated in sequence by utilizing a cup-type plating apparatus. Plating solution adhered on a support 2 is removed between an initial and a subsequent plating processes by a cleaning apparatus 5 for a support 2 on a cup-type plating tank. The cleaning apparatus 5 comprises a first arm 9 of which distal end is positionable at the center of an upper portion of an opening of a plating tank 1, and a second aim 12 which is mounted at one end thereof to the distal end of the first arm 9, is provided at the other end thereof with a cleaner 11 and is pivotal about the distal end of the first arm 9.

Abstract: The present invention is designed to realize structure having high rigidity in any direction and to realize a parallel mechanism machining device having good chip removal property. According to the present invention, forked adjustable joints 28 are provided at two positions near the tip end of a movable body 20 and near the rear end thereof, respectively, two first links 36 and two second links 37 are attached to the movable body 20 and the tip ends of these links are extended in X and Y axis directions and coupled to a machine-side fixed platform through adjustable joints, respectively. A link 5 extending in Z axis direction is attached to the rear end of the movable body 20 and a restriction link 6 is attached to the back of the forked adjustable joint 28 near the tip end.